• KIPS Transactions on Software and Data Engineering
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• v.12 no.3
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• pp.141-148
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• 2023

Accurate overlay metrology is essential to achieve high yields of semiconductor products. Overlay metrology performance is greatly affected by overlay target design and measurement method. Therefore, in order to improve the performance of the overlay target, measurement methods applicable to various targets are required. In this study, we propose a new algorithm that can measure image-based overlay. The proposed measurement algorithm can estimate the sub-pixel position by using a motion vector. The motion vector may estimate the position of the sub-pixel unit by applying a quadratic equation model through polynomial expansion using pixels in the selected region. The measurement method using the motion vector can calculate the stacking error in all directions at once, unlike the existing correlation coefficient-based measurement method that calculates the stacking error on the X-axis and the Y-axis, respectively. Therefore, more accurate overlay measurement is possible by reflecting the relationship between the X-axis and the Y-axis. However, since the amount of computation is increased compared to the existing correlation coefficient-based algorithm, more computation time may be required. The purpose of this study is not to present an algorithm improved over the existing method, but to suggest a direction for a new measurement method. Through the experimental results, it was confirmed that measurement results similar to those of the existing method could be obtained.

• Journal of Broadcast Engineering
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• v.14 no.1
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• pp.85-88
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• 2009

Recently "DMB Video-Associated Stereoscopic Data Services" standard has been published by TTA. The standard enables DMB broadcasters to provide 3D or stereoscopic interactive data services based on MPEG-4 BIFS (Binary Format for Scenes). The purpose is to entice viewers to utilize DMB interactive data services more often by providing realistic and protrusive image objects overlaid on top of the main video in the background. This paper provides the background, technical analysis, and in-depth considerations for the standard. Also the results of standard verification are provided including the results of interoperability test with the existing terrestrial DMB receivers.