• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.8
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• pp.863-867
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• 2014

In this study, an acoustic emission (AE) sensor was used for measuring the abrasive and molecular-scale phenomena in chemical mechanical polishing (CMP). An AE sensor is a transducer that converts a mechanical wave into an electrical signal, and is capable of acquiring high-level frequencies from materials. Therefore, an AE sensor was installed in the CMP equipment and the signals were measured simultaneously during the polishing process. In this study, an AE monitoring system was developed for investigating the sensitivity of the AE signal to (a) the variations in the material properties of the pad, slurry, and wafer and (b) the change in conditions during the CMP process. This system was adapted to Oxide and Cu CMP processes. AE signal parameters including AE raw frequency, FFT, and amplitude were analyzed for understanding the abrasive and molecular-level phenomena in the CMP process. Finally, we verified that AE sensors with different bandwidths could function in complementary ways during CMP process monitoring.

• Composites Research
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• v.18 no.5
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• pp.15-20
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• 2005

In this paper, damage induced acoustic emission in the composite plate in numerically simulated by using the three dimensional finite element method and explicit time integration. Acoustic source is modeled by equivalent volume source. To verify the proposed method, dynamic displacements due to the elastic wave are compared with the experiment when the fiber is broken in the single fiber embedded isotropic plate. For the laminated composite plates, the results are compared between homogenized model and DNS approach which models fibers and matrix separately. To capture high frequencies in the elastic wave, small time step size and a large number of meshes are required. The parallel computing technology is introduced to solve a large scale problem efficiently.

• Journal of the Korean Society for Nondestructive Testing
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• v.23 no.3
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• pp.246-253
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• 2003

The initiation and growth of short fatigue cracks in the simulated aircraft structure with a series of rivet holes was detected by acoustic emission (AE). The location and the size of short tracks were determined by AE source location techniques and the measurement with traveling microscope. AE events increased intermittently with the initiation and growth of short cracks to form a stepwise increment curve of cumulative AE events. For the precise determination of AE source locations, a region-of-interest (ROI) was set around the rivet holes based on the plastic zone size in fracture mechanics. Since the signal-to-noise ratio (SNR) was very low at this early stage of fatigue cracks, the accuracy of source location was also enhanced by the wavelet transform do-noising. In practice, the majority of AE signals detected within the ROI appeared to be noise from various origins. The results showed that the effort of structural geometry and SNR should be closely taken into consideration for the accurate evaluation of fatigue damage in the structure.

• Journal of the Korean Society for Nondestructive Testing
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• v.15 no.4
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• pp.511-519
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• 1996

The purposes of this study are 1) to develop optimum FRW technique of SNCM220, SCM435, SACM645 and SCM415 bar-to-bar similar friction welding, 2) to develop in-process real-time weld quality nondestructive evaluation technique by acoustic emission method, and 3) to certify of weld quality by inspection of tensile fracture surface on friction welded joints.

• Journal of the Korean Society of Safety
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• v.12 no.4
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• pp.214-219
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• 1997

The mechanical seals, which are installed in rotating machines like pump and compressor, are generally used as sealing devices in the many fields of industries. The failure of mechanical seals such as leakage, crack, breakage, fast and severe wear, excessive torque, and squeaking results in big problems. To identify abnormal phenomena on mechanical seals and to propose the proper monitoring parameter for the failure of mechanical seals, sliding wear experiments were conducted. Acoustic emission, torque, and temperature were measured during experiments. Optical microstructure was observed for the wear processing after every 10 minute sliding at rotation speed of 1750 rpm and scanning electron microscopy was also observed. Except for the initial part of every experiment, the variation of acoustic emission was well coincided with torque variation during the experiments. This study concludes that acoustic emission and torque are proper monitoring parameters for the failure of mechanical seals. The intensity of acoustic emission signals is measured in root mean square voltage. Temperature of sealing face will be used as a parallel parameter for increasing the reliability of monitoring system.

• Composites Research
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• v.17 no.1
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• pp.47-54
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• 2004

Vacuum hot pressing has been used for the development of titanium metal matrix composites using foil-fiber-foil technique. Subsequent micro-mechanical characteristics of the composites are then investigated by means of several experimental methods. The levels of consolidation, together with mechanism based failure processes of the materials have been analyzed by employing a thermo-acoustic emission technique. As shown by the results, fiber strength degradation occurs during the consolidation, and particularly residual stresses results from the thermal expansion mismatch between fiber and matrix materials during cooling process are incorporated in the changes of mechanical properties of the finished products. In industrial applications, both qualitative and quantitative evaluations of the material-mechanical characteristics are particularly important, and therefore must be included in process development. The present paper represents a methodology by which this can be achieved.

• Journal of Ocean Engineering and Technology
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• v.10 no.2
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• pp.69-76
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• 1996

In-process quality control and high reliability of the weld are the major concerns in applying friction welding to the economical and qualified mass-production. Experimental examinations and quantitative analysis were performed for the optimiaztion of similar friction welding of hydraulic valve spool steels(SNCM220, SCM435, SACM645, SCM415, ${\varphi}24). The quantitative correlations were found between the initial cumulative counts of acoustic emission(AE) occurring during plastic deformation periods of the welding and the fatigue life as well as weld strength and welding conditions. A real-time evaluation system was developed for the friction weld quality by AE.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2002.05a
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• pp.130-133
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• 2002

Polyethylene pressure pipe has been used with a gas pipe material because of workability and stability etc.. Researches on characteristics of polyethylene pressure pipe are carried out, but there are rare. In this study, the tensile test was performed on polyethylene pipe. From the tensile test, AE signals were detected and estimated in real time. Also, the time-frequency analysis of AE signals was analyzed. From test results, PE pipes were displayed typical stress-strain curves oj semi-crystalline polymer. As result analyzed AE signals, could divide stress-strain curves could be divided into four stages. In the elastic region, signals were not detected. Low amplitude distributions of 30-35dB appeared after yielding, and high amplitude distributions of 30-60dB appeared with increased extension. From the time-frequency analysis of AE signals, the frequency band of 100kHz appeared mainly. Also, the frequency band of 300kHz appeared before the necking phenomenon spreads into the whole region, and the frequency band of 500kHz appeared on extension earlier.

• Journal of the Korean Society for Nondestructive Testing
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• v.18 no.1
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• pp.33-41
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• 1998

The response characteristics of the PZT transducers during glass capillary breakage were studied at the epicenter of the glass plate. The PZT transducers had been made by using EC-65 PZT ceramics(supplied by Edo co.) with a constant area and a various thickness. The theoretical displacement and velocity at the epicenter of glass plate with an air boundary condition were calculated by assuming the point load of 1N force strength and a rise time of 280 ns with a ramped functional dependence, and the 1st pulses of the PZT transducer may be considered as the vertical velocity incident on the electrode of the PZT ceramic. The responses of the PZT transducer may be depended on the thickness mode of the PZT ceramic below 0.33 in the ratio of the thickness to the diameter of PZT ceramic, but the reponse of the PZT transducer may be depended on the other modes of PZT transducer in the addition of the thickness mode of the PZT ceramic above 0.33. The full time of half maximum at the 1st pulse was nearly 280 ns without a variation of applied breakage load and the resonant frequency of the PZT transducer, and then may be considered as the rise time of a AE source. The maximum amplitude of the 1st pulse depended on the incident vertical velocity and capacitance of the PZT transducer. Therefore, the full time of half maximum and maximum amplitude of the 1st pulse may be considered as the rise time and strength of acoustic emission source respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04b
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• pp.124-130
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• 1995

연삭작업에 있어서 요구되는 가공능률과 가공정밀도를 얻기 위해서는 적절한 결합도를 갖는 연삭숫돌을 선택하 는 것이 중요한 요건이 된다. 본 연구에서는 결합도를 평가하기 위한 일정한 기준을 설정할 목적으로 AE계측 시스템을 이용하여 대월식결합도시험방법에 따라 연삭숫돌표면의 일부를 파괴시켰을 때 발생되는 AE신호를 검출 하고 연삭숫돌의 파괴량과 AE 신호특성과의 관계 및 AE를 이용한 결합도평가의 가능성을 검토하였다.