Gettering of Metal Impurity in UMG Silicon Wafer using Phosphorus Diffusion (UMG 실리콘 기판의 Phosphorus 확산을 이용한 금속불순물 게터링)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2010.06a
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- pp.236-236
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- 2010