• 제목/요약/키워드: 유리피막

검색결과 48건 처리시간 0.027초

플라즈마 공정용 산화막 코팅부품의 신뢰성평가에 관한 연구

  • Song, Je-Beom;Lee, Ga-Rim;Sin, Jae-Su;Lee, Chang-Hui;Sin, Yong-Hyeon;Kim, Jin-Tae;Gang, Sang-U;Yun, Ju-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.151-151
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    • 2013
  • 최근 반도체 및 디스플레이 산업에서의 플라즈마 공정의 중요성은 점점 증대되고 있다. 특히, 반도체/LCD 제조공정에서의 Dry Etch공정은 디스플레이용 유리 위에 형성된 산화막, 금속입자, 박막, 및 Polymer와 같은 불순물들을 플라즈마를 이용하여 제거하는 공정이다. 플라즈마 공정을 진행하는 동안 몇 가지 문제점들이 이슈가 되고 있다. Etch공정에서는 활성 부식가스를 많이 사용하고 장시간 플라즈마에 노출되기 때문에, 진공부품들은 플라즈마에 의해서 물리적인 이온충격(Ion Bombardment)과 화학적인 Radical 반응에 의한 부식이 진행된다. 부식영향에 의해 챔버를 구성하고 있는 부품에서 균열이 발생하거나 오염입자들이 떨어져 나오게 된다. 발생한 오염입자들은 산업용 플라즈마 공정에서 매우 심각한 문제가 되고 있다. 본 연구에서는 산화막의 부식 저항특성을 측정할 수 있는 평가방법에 대하여 고찰하였고, 표준화된 데이터로 비교분석할 수 있도록 평가기준과 규정화된 피막평가방법을 연구하였다. 또한, 산화막의 특성에 따른 플라즈마 상태, 오염입자 발생 등 플라즈마 공정을 진단하여 부품재료의 수명을 예측하고, 신뢰성 있는 평가방법에 관한 연구를 하였다.

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A Retrospective Study of Invasive Bacterial Infections in Children with Asplenia (18세 이하 무비증 환자에서 발생한 침습성 세균 감염증에 대한 후향적 연구)

  • Choe, Yong-Joon;Seo, Euri;Lee, Jina
    • Pediatric Infection and Vaccine
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    • 제24권3호
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    • pp.160-167
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    • 2017
  • Purpose: Because children with asplenia have an increased risk of fulminant infection associated with a high fatality, chemoprophylaxis, and vaccinations against encapsulated bacteria are recommended. However, there have been few reports of the burden of severe bacterial infection and the current status of chemoprophylaxis and immunization among children with asplenia in Korea. Methods: We conducted a retrospective study including children with asplenia who were treated at our institute between January 1997 and December 2016. Results: From a total of 213 children with asplenia, 114 (53.5%) had congenital asplenia and 58 (27.2%) had functional asplenia. The remaining 41 (19.3%) had acquired asplenia with the median age at splenectomy being 12.2 years (range, 5.0 to 16.9 years); the most common cause of splenectomy was hereditary spherocytosis (39.0%). The chemoprophylaxis rate was 16.4%. The immunization rates were 44.1% for pneumococcus, 53.0% for Haemophilus influenzae type B, and 10.7% for meningococcus. The incidence of invasive bacterial infection among children with asplenia was 0.28/100 person-year; a total of six episodes (2.8%) were observed in five patients with congenital asplenia and one patient with functional asplenia. The median age for these infections was 15 months (range, 4 to 68 months). Five of the six episodes were bacteremia, and the other was meningitis. The most common pathogen was Streptococcus pneumoniae (n=3), followed by H. influenzae (n=1). Three of the six patients (50.0%) died, all of whom had pneumococcal bacteremia. None of the six had chemoprophylaxis or proper vaccinations. Conclusions: Although there is an increased risk of a severe infection proper vaccinations and chemoprophylaxis are still lacking. Physicians should be encouraged to implement appropriate chemoprophylaxis and immunizations for patients with asplenia.

Amperometric Determination of Anthracycline Antibiotics with the Mercury Film Thin Layer Flow Cell (수은피막 박막흐름전지를 이용한 Anthracycline계 항생제의 전류법 정량)

  • Kim, Kyung Eun;Hahn, Younghee
    • Analytical Science and Technology
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    • 제17권6호
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    • pp.470-475
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    • 2004
  • The mercury film thin layer flow cell (MFTLFC) which yielded the highest sensitivity for the electrochemical reduction of doxorubicin was constructed by coating the glassy carbon working electrode (GCE; $A=0.208cm^2$) with $5{\mu}L$ of HgO coating solution (0.5% HgO + 0.25% polystyrene/cyclohexanone) and subsequently followed by applying a potential of -0.40 V for 300 sec in the flow stream of an acetate buffer of pH 4.5. The voltammogram of doxorubicin reached the diffusion current plateau at -0.53 V vs. a Ag/AgCl (3 M NaCl) in the MFTLFC. The diffusion current (Id) of doxorubicin at the MFTLFC was 1.7 times greater than the Id obtained at the TLFC employing a bare glassy carbon working electrode. When the peak areas (electric charge) were plotted vs. concentrations of standard anthracyclines, the calibration factors of doxorubicin and daunorubicin were $1.12{\times}10^8{\mu}C/M$ (coefficient of determination; $R^2$: 0.969) and $0.98{\times}10^8{\mu}C/M$> ($R^2$: 0.999), respectively in the concentration range between $1.0{\times}10^{-8}M$ and $1.0{\times}10^{-6}M$.

Hydration Properties of Cement Matrix using Electrolysis Alkaline Aqueous and Ground Granulated Blast Furnace Slag (전기분해 알칼리 수 및 고로슬래그 미분말 혼입 시멘트 경화체의 수화 특성)

  • Jung, Yoong-Hoon;Kim, Ho-Jin;Park, Sun-Gyu
    • Journal of the Korean Recycled Construction Resources Institute
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    • 제9권2호
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    • pp.185-190
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    • 2021
  • Cement has been used as a main material in the modern construction industry. However, it has been pointed out as a main cause of global warming due to carbon dioxide generated during manufactured. Recently, research that replacing cement substitute to industrial by-products such as Blast Furnace Slag which is by-producted in steelworks. When Blast Furnace Slag is used as a cement substitute, it shows a problem of lower initial strength, which is caused by glassy membrane on the particle surface. In this study, we used Electrolysis Alkaline Aqueous to improve the usability and problem of lower initial strength. As a result of the experiment, cement matrix using Blast Furnace Slag and Alkaline Aqueous showed initial strength and hydrate product were developed than that using general mixing water. Also, as a result of porosity analysis, It was confirmed that cement matrix using Alkaline Aqueous and Blast Furnace Slag has a tighter structure in internal porosity and porosity distribution than using general mixing water.

A Study on the Process Conditions of ACA( Anisotropic Conductance Adhesives) for COG ( Chip On Glass) (COG(Chip On Glass)를 위한 ACA (Anisotropic Conductive Adhesives) 공정 조건에 관한 연구)

  • Han, Jeong-In
    • Korean Journal of Materials Research
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    • 제5권8호
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    • pp.929-935
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    • 1995
  • In order to develop COG (Chip On Glass) technology for LCD module interconnecting the driver IC to Al pad electrode on the glass substrate, Anisotropic Conductive Adhesive(ACA) process, the most promising one among COG technologies, was investigated. ACA process was carried out by two steps, dispensing of ACA resin in the bonding area and curing by W radiation. Load on the chip was ranged from 2.0 to 15kg and the chip was heated at about 12$0^{\circ}C$. In resin, the density of conductive particles coated with Au or Ni at the surface were 500, 1000, 2000 and 4000 particles/$\textrm{mm}^2$, and the diameter of particles were 5, 7 and 12${\mu}{\textrm}{m}$. As a result of the experiments, ACA process using ACA particle of diameter and density of 5${\mu}{\textrm}{m}$ and 4000 particles/$\textrm{mm}^2$ respectively shows optimum characteristic with the stabilzed bonding properties and contact resistance.

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Effect of Steam Curing on Compressive Strength of Slag Binder Concrete (증기양생이 고로슬래그 콘크리트의 압축강도에 미치는 영향)

  • Lim, Byung-Hoon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • 제18권8호
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    • pp.338-343
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    • 2017
  • In this study, blast furnace slag powder was used in concrete to help reduce carbon dioxide emissions and to recycle industrial waste. Blast furnace slag powder is a byproduct of smelting pig iron and is obtained by rapidly cooling molten high-temperature blast furnace slag. The powder has been used as an admixture for cement and concrete because of its high reactivity. Using fine blast furnace slag powders in concrete can reduce hydration heat, suppress temperature increases, improve long-term strength, improve durability by increasing watertightness, and inhibit corrosion of reinforcing bars by limiting chloride ion penetration. However, it has not been used much due to its low compressive strength at an early age. Therefore, this study evaluates the effects of steam curing for increasing the initial strength development of concrete made using slag powder. The relationship between compressive strength, SEM observations, and XRD measurements was also investigated. The concrete made with 30% powder showed the best performance. The steam curing seems to affect the compressive strength by destroying the coating on the powder and by producing hydrates such as ettringite and Calcium-Silicate-Hydrate gel.

Applicability of Ferro-nickel Slag Sand for Dry Mortar in Floor (페로니켈슬래그 잔골재의 바닥용 건조모르타르 적용성 평가)

  • Cho, Bong-Suk;Kim, Won-Ki;Hwang, Yin-Seong;Koo, Kyung-Mo
    • Journal of the Korea Institute of Building Construction
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    • 제19권2호
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    • pp.105-112
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    • 2019
  • Fine aggregate made of ferronickel slag(FNS) is similar to natural fine aggregates and is used in concrete structures both domestically and abroad, but its applications and research areas are limited. In this research, in order to expand the availability of FNS and improve the performance of cement mortar products, the applicability of FNS on dry mortar for floor was examined. Experimental results show that FNS improves flow of cement mortar because it has low absorption rate, spherical shape, and glassy surface. Also, the high stiffness of the FNS aggregate itself is considered to contribute to the improvement of cement mortar quality such as crack reduction by improving the compressive strength and shrinkage reducing. In addition, when FNS fine aggregate is applied, it was possible to secure the impact sound insulation performance equal to or higher than that of mortar using natural fine aggregate.

PROPERTIES OF CALCIUM HYDROXIDE-EUGENOL COMPOUND (수산화칼슘-유지놀 화합물의 물성)

  • Park, Joon-Chol;Kwon, Tae-Kyung;Kim, Sung-Kyo
    • Restorative Dentistry and Endodontics
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    • 제24권2호
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    • pp.408-415
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    • 1999
  • When a zinc-oxide eugenol type sealer was placed in root canals treated previously with calcium hydroxide, acceleration of its setting and the yellowish discoloration were observed clinically. The purpose of this study was to evaluate the properties of calcium hydroxide-eugenol compound. Some physical properties of calcium hydroxide-eugenol compound were compared with a manufactured zinc-oxide eugenol based root canal sealer, Tubli-seal$^{(R)}$ in terms of water solubility, water sorption, film thickness and microleakage. Solubility and water sorption were determined by the use of the method described in American Dental Association Specification(ADAS) no. 57. Ten samples of each material were prepared into disks 20mm in diameter and 1.5mm in thickness. The samples were immersed in 50ml of distilled water at $37{\pm}1^{\circ}C$ for 7 days. The samples were then removed and placed in a desiccator. The values for solubility and water sorption were calculated using differences between the weights of same sample. Film thickness was determined by the use of the method described in ADAS no. 57 too. A small quantity of mixed cement was placed between two glass plates of which thickness was measured previously. 15Kg loading was applied and total thickness of the glass plates and the cement film was measured. The thickness difference was recorded as the material's film thickness. Microleakage was determined with a dye penetration method. Experimental materials were placed between the dentin surface of bovine tooth and the acrylic rod. These units were immersed in Pelican ink (W-Germany) for three days. Dye-penetrated dentin surfaces of bovine tooth were measured using the NIB Image 1.60 Macintosh program. The results are as follows: 1. Water solubility value of calcium hydroxide-eugenol compound (20.98${\pm}$2.94%) was statistically higher than those of Tubli-seal$^{(R)}$(2.52${\pm}$0.49%)(p<0.05). 2. Water sorption value of calcium hydroxide-eugenol compound (59.72${\pm}$17.75%) was statistically higher than those of Tubli-seal$^{(R)}$(3.15${\pm}$0.76%)(p<0.05). 3. Film thickness value of calcium hydroxide-eugenol compound (0.36${\pm}$0.03mm) was statistically higher than those of Tubli-seal$^{(R)}$(0.12${\pm}$0.1mm)(p<0.05). 4. Dye penetration value after 3 days-immersion of calcium hydroxide-eugenol compound(57.63${\pm}$25.85%) was statistically higher than those of Tubli-seal$^{(R)}$(28.05${\pm}$23.46%)(p<0.05).

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Morphological Study on the Post-hatching Development of the Pineal Gland in Korean Pheasant (Phasianus colchicus Karpowi) (한국산 꿩 송과샘의 부화후 발달에 관한 형태학적 연구)

  • 이영훈;김인식;양홍현
    • Korean Journal of Poultry Science
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    • 제28권3호
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    • pp.267-274
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    • 2001
  • The pineal gland of the bird occupies a key position in the phylogenetic evolution of this organ. Therefore, the purpose of this study was to investigate the developmental changes of the pineal gland during post-hatching period in Korean pheasant. The pheasants were sacrificed at 1-day-, 1-month-, 2-month-, and 6-month-old after hatching. The morphological characteristics of a pineal glands were determined in all pheasants using light microscope, and transmission electron microscope. Connective tissue originated from the capsule divided the pineal parenchyma into incomplete lobules. The parenchyma was consisted of pinealocytes and supportive cells. These parenchymal cells were arranged in the forms of solid lobules as well as incomplete follicles. At the follicular lumen, membraneous lamellar complexes and blob -like structures were present. Pinealocyte, a predominent cell type, had euchromatic nucleus, and showed the segmental organization. The bulbous apical portion had scanty free ribosomes and occasional cilia associated with basal bodies. The constricted neck, transitional portion from apical to pericarya had junctional complexes with adjacent supportive cells, and had microtubules. Cell body contained abundant mitochondria, well-developed Golgi complex, rough endoplasmic reticulum (RER) and free ribosomes. Basal processes extended from the base of the cell soma toward the basal lamina and contained 60∼90 nm dense cored vesicles. Supportive cells, another major type of the parenchyma, were characterized by the dense and elongated nucleus, and contained moderate number of mitochondria, RER, developed Golgi complex, free ribosomes and a few dense bodies in the perinuclear cytoplasm. Slender processes of supportive cells interposed between the pinealocytes and often bordered the basal region of the parenchyma. These results indicate that the pinealocytes of the pheasant are not rudimentary photoreceptor cells, and appear to have secretory function. Further studies will be required to confirm the morphological characteristics of pineal gland in adult pheasant during breeding and nonbreeding season.

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[ $SiO_2$ ] Effect on the Electrochemical Properties of Polymeric Gel Electrolytes Reinforced with Glass Fiber Cloth ($SiO_2$가 유리섬유로 보강된 고분자 겔 전해질의 전기 화학적 특성에 미치는 영향)

  • Park Ho Cheol;Kim Sang Heon;Chun Jong Han;Kim Dong Won;Ko Jang Myoun
    • Journal of the Korean Electrochemical Society
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    • 제4권1호
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    • pp.6-9
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    • 2001
  • [ $SiO_2$ ] effect on the electrochemical properties of polymeric gel electrolytes(PGEs) reinforced with glass fiber cloth(GFC) was investigated . PGEs were composed of polyacrylronitrile(PAN), poly(vinylidenefluoride-co-hexafluoropropylene) (P(VdF-co-HFP)), $LiClO_4$ and three kind of plasticizer(ethylene carbonate, dietyl carbonate, propylene carbonate). $SiO_2$ was added to PGEs in the weight fraction of 10, 20, $30\%$ respectively. PGEs containing $SiO_2$ showed conductivity of over $10^{-3}S/cm\;at\;23^{\circ}C$ and electrochemical stability window to 4.8V. In the impedance spectra of the cells, which were constructed by lithium metals as electrodes, interfacial resistance increased due to growth of passivation layer during storage time and remarkable difference was not observed with content of $SiO_2$. In the impedance spectra of the lithium ion polymer batteries consisted of $LiClO_2$ and mesophase pitch-based carbon fiber(MCF), ohmic cell resistance of $SiO_2-free$ PGE was changed continuously with number of cycle, but those of $SiO_2-dispersed$ PGEs were not. Discharge capacity of the PGE containing $20wt\%\;SiO_2$ showed 132 mAh/g at 0.2C rate and $85\%$ of discharge capacity was retained at 2C rate.