• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.08a
• /
• pp.58-58
• /
• 2011

고밀도 플라즈마는 재료의 표면 처리, 박막의 증착, 식각 등에 집중적으로 응용되어 왔다. 주요이슈들은 전자기적 관점에서 바라본 전력 전달 메커니즘, 전자 충돌 과정을 포함하는 원자물리학적 과정들, 흡착, 탈착, 스퍼터링 등의 표면 화학 공정들이다. 각각을 이해하는 도구들은 주로 플라즈마 진단 장치(전기탐침, 분광기, 질량분석기, 전압-전류측정기)와 초고진공 표면 분석 장치(XPS, AES)및 실시간 표면 분광 해석기등이 이용되어 왔다. 여기에 유체 모델을 이용한 3차원 수치 해석이 가능해지면서 균일한 공정 결과를 얻기 위한 플라즈마 증착/식각 시스템 디자인 원리의 많은 부분의 이해가 진전을 이루고 있다. 본 발표에서는 고밀도 유도 결합 플라즈마 발생 시스템, 마그네트론 스퍼터링, 펄스 전원 등의 영향이 어떻게 박막 가공 시스템의 성능에 영향을 주고 있으며 이에 대한 해결 노력들이 갖는 학문적, 실제적인 의미에 대해서 고찰한다.

• Analytical Science and Technology
• /
• v.9 no.1
• /
• pp.26-34
• /
• 1996

A method to determine the trace amount of Se and Bi in the scalp hair using the hydride generation inductively coupled plasma atomic emmission spectrometry was studied. The optimum operation conditions of ICP for hydride generation are 0.6~0.8L/min for the carrier gas flow rate, and 6mm above the induction coil for the observation height. Hydrochloric acid concentrations for the optimum hydride generation conditions were greater than 1.5M when 2.5% $NaBH_4$ and NaOH were used, and greater than 0.5M when 2.5% $NaBH_4$ and 0.1% NaOH were used. Severe interference effects are observed from transition metals such as Cu and Ni, and they could be circumvented by the coprecipitation with lanthanum hydroxide.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.407-407
• /
• 2010

본 논문에서는 확장된 히든마코브모델을 이용하여 플라즈마 식각공정에서 식각종료검출을 위한 방법을 연구하였다. 플라즈마 식각장비는 유도성 결합플라즈마 시스템을 사용하였으며, 종료점 검출을 위해 식각공정이 진행됨에 따른 플라즈마의 상태를 확인할 수 있는 광학 방사 분광기(Optical Emission Spectroscopy: OES)를 사용하였다. 식각이 진행되는 동안 여기되는 입자들은 특정한 재료에 해당하는 파장에서 빛을 방출한다. 플라즈마상태에서 여기되는 원자와 분자들에 의해서 방출되는 빛은 OES를 통해 식각되는 물질을 확인하기 위해서 특별한 파장의 빛을 선택하여 분석한다. 본 논문에서는 확장된 히든마코브모델을 이용해 산화물이 식각될 때 방출하는 고유한 파장의 빛을 분석하여 식각이 종료되는 시점을 찾는 연구를 하였다. 제안된 확장형 히든마코브 모델은 세미-마코브모델과 분절특징 히든마코브모델을 결합한 것으로, 확률적 통계기법을 통해 종료시점을 찾아내는 방법이다. OES를 통해 얻은 데이터는 식각 종료가 일어나기 전의 파장의 상태와 식각이 종료된 후의 파장의 상태로 구분되어지는데, 식각종료시점에서 파장의 상태가 변화하며 이를 감지하여 식각종료점을 검출한다. 분절특징 히든마코브모델을 이용하여 식각종료시점 전후의 파장의 상태를 모델링 하였으며, 일반적인 마코브 모델의 특정상태가 유지될 시간의 확률을 변형된 세미-마코브 모델을 이용하여 OES를 통해 얻은 데이터 내에서 식각 종료가 일어나기 전의 상태가 유지될 수 있는 확률을 모델링 하였다. 실험을 통해 얻어진 6개의 데이터중 4개를 학습을 위해 사용하여 모델링을 하였고 나머지 2개의 데이터를 검증을 위해 사용한 결과, 확장형 히든마코브모델의 식각종료시점검출에 있어 뛰어난 정확성과 우수성을 증명하였다.

• Electrical & Electronic Materials
• /
• v.7 no.2
• /
• pp.130-137
• /
• 1994

Indium, element of group III, was refined by using zone refining for high purity refinement. We have found the impurities of T1, Zn, Fe, Cd, Pb, Ni, Cu, Sn in the refined indium with ICP-AES, so that 3.9 weight ppm of T1 was reduced to less than 1 ppm, 1.0 weight ppm of Zn was reduced to 0.7 ppm, 2.8 weight ppm of Cd was reduced to 2.5 ppm and 14.0 weight ppm of Sn was reduced to 6.7 ppm with 5 melten zone passes only. 3.9 weight ppm of T1 was reduced to less than 1 ppm, 1.0 weight ppm of Zn was reduced to 0.3 ppm, 2.8 weight ppm of Cd was reduced to less than 1.0 ppm and 14.0 weight ppm of Sn was reduced to 0.4 ppm after vacuum baking with 5 melten zone passes. The surface morpholgy of metal Indium thin film in each conditions showed that porosities were reduced in the front of sampled ingot after vacuum baking with 5 zone melten zone passes. The average electrical resistivity of Indium thin film was reduced from 1.4*10$^{-3}$ .ohm.-cm in Indium origin ingot to 7.9*10$^{-6}$ .ohm.-cm after zone refined with 5 melten zone passes.

• Applied Chemistry for Engineering
• /
• v.28 no.5
• /
• pp.593-596
• /
• 2017

Sodium titanate nanosheets were prepared by a hydrothermal synthesis method under basic conditions. Ruthenium was introduced on the surface of sodium titanate nanosheets through an UV irradiation in the aqueous $RuCl_3$ solution. The crystal phase and morphology of synthesized samples were analyzed by X-ray diffraction, transmission electron microscopy and energy dispersive spectroscopy. In addition, the content of Ru was evaluated by inductively coupled plasma. It was proposed that a monomeric form of ruthenium was incorporated on the surface of sodium titanate. Ruthenium incorporated sodium titanates were applied to alcohol oxidation using molecular oxygen as an oxidant. The sample with 7% ruthenium showed a catalytic activity with a turnover frequency value of $2.1h^{-1}$ in oxidizing benzyl alcohol to benzaldehyde without any other byproducts at $105^{\circ}C$ and 1 atmosphere.

• Economic and Environmental Geology
• /
• v.55 no.4
• /
• pp.353-366
• /
• 2022

Spatial estimation of geoscience data (geo-data) is challenging due to spatial heterogeneity, data scarcity, and high dimensionality. A novel spatial estimation method is needed to consider the characteristics of geo-data. In this study, we proposed the application of Gaussian Mixture Model (GMM) among machine learning algorithms with multivariate data for robust spatial predictions. The performance of the proposed approach was tested through soil chemical concentration data from a former smelting area. The concentrations of As and Pb determined by ex-situ ICP-AES were the primary variables to be interpolated, while the other metal concentrations by ICP-AES and all data determined by in-situ portable X-ray fluorescence (PXRF) were used as auxiliary variables in GMM and ordinary cokriging (OCK). Among the multidimensional auxiliary variables, important variables were selected using a variable selection method based on the random forest. The results of GMM with important multivariate auxiliary data decreased the root mean-squared error (RMSE) down to 0.11 for As and 0.33 for Pb and increased the correlations (r) up to 0.31 for As and 0.46 for Pb compared to those from ordinary kriging and OCK using univariate or bivariate data. The use of GMM improved the performance of spatial interpretation of anthropogenic metals in soil. The multivariate spatial approach can be applied to understand complex and heterogeneous geological and geochemical features.

• Restorative Dentistry and Endodontics
• /
• v.33 no.4
• /
• pp.369-376
• /
• 2008

The aim of this study was to compare the compositions and cytotoxicity of white ProRoot MTA (white mineral trioxide aggregate) and 3 kinds of Portland cements. The elements, simple oxides and phase compositions of white MTA (WMTA), gray Portland cement (GPC), white Portland cement (WPC) and fast setting cement (FSC) were measured by inductively coupled plasma atomic emission spectrometry (ICP-AES), X-ray fluorescence spectrometry (XRF) and X-ray diffractometry (XRD). Agar diffusion test was carried out to evaluate the cytotoxicity of WMTA and 3 kinds of Portland cements. The results showed that WMTA and WPC contained far less magnesium (Mg), iron (Fe), manganese (Mn), and zinc (Zn) than GPC and FSC. FSC contained far more aluminum oxide ($Al_2O_3$) than WMTA, GPC, and WPC. WMTA, GPC, WPC and FSC were composed of main phases. such as tricalcicium silicate ($3CaO{\cdot}SiO_2$), dicalcium silicate ($2CaO{\cdot}SiO_2$), tricalcium aluminate ($3CaO{\cdot}Al_2O_3$), and tetracalcium aluminoferrite ($4CaO{\cdot}Al_2O_3{\cdot}Fe_2O_3$). The significance of the differences in cellular response between WMTA, GPC, WPC and FSC was statistically analyzed by Kruskal-Wallis Exact test with Bonferroni' s correction. The result showed no statistically significant difference (p > 0.05). WMTA, GPC, WPC and FSC showed similar compositions. However there were notable differences in the content of minor elements. such as aluminum (Al), magnesium, iron, manganese, and zinc. These differences might influence the physical properties of cements.