• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.4
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• pp.1453-1459
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• 2012

The dual stage manipulator is composed of the voice coil motor (VCM) and piezoelectric ceramics transducer (PZT), which can produce the high precise displacement and express a well dynamic performance. However, inaccurate modeling of the dual stage will exacerbate the positioning accuracy. This paper presents an approach to model the dual stage system by using bond graph theory. And the state space equations can be derived through the bond graph straightforwardly, which can be used in computing simulations. Through designing the compensators for the dual stage system and simulating, the dual stage performs better dynamics characteristic than the single actuator system.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.11
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• pp.554-560
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• 2020

In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.348-352
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• 2002

a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.221-225
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• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.292-300
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• 2011

Control systems in machinery equipment provide correction signals to motion units in order to reduce or cancel out the mismatches between sensor feedback signals and command or desired values. In this paper, we introduce a simulator for control characteristics of machinery equipment. The purpose of the simulator development is to provide mechanical system designers with the ability to estimate how much dynamic performance can be achieved from their design parameters and selected devices at the designing phase. The simulator has a database for commercial parts, so that the designers can choose appropriate components for servo controllers, motors, motor drives, and guide ways, etc. and then tune governing parameters such as controller gains and friction coefficients. The simulator simulates the closed-loop control system which is built and parameter-tuned by the designer and shows dynamic responses of the control system. The simulator treats the moving table as a 6 degrees-of-freedom rigid body and considers the motion guide blocks stiffness, damping and their locations as well as sensor locations. The simulator has been under development for one and a half years and has a few years to go before the public release. The primary achievements and features will be presented in this paper.