• 한국정밀공학회지
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• 제20권7호
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• pp.99-104
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• 2003

A precision displacement measurement system of 3-DOF micro motions is proposed in this paper. The measurement system is composed of two diode lasers, two quadratic PSDs, two beam splitters and a sphere whose surface is highly reflective. In this measurement system, the sphere reflector is mounted on the platform of positioning devices whose 3-DOF translational motions are to be measured, and the sensitive areas of two PSDs are oriented toward the center point of the sphere reflector. Each laser beam emitted from two diode laser sources is reflected at the surface of sphere and arrives at two PSDs. Each PSD serves as a 2-dimensional sensor, providing the information on the 3-dimensional position of the sphere. In this paper, we model the relationship between the outputs of two PSDs and 3-DOF translational motions of the sphere mounted on the object. Based on a deduced measurement model, we perform measurement simulation and evaluate the performance of the proposed measurement system: linearity, sensitivity, and measurement error. The simulation results show that the proposed measurement system can be valid means of precision displacement measurement of 3-dimensional micro motions.

• 대한기계학회논문집A
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• 제26권12호
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• pp.2687-2694
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• 2002

A precision displacement measuring system is proposed, which can detect the 3-DOF translational motions of precision positioning devices. The optical system, which is composed of two diode-laser sources and two quadratic PSDs, is adapted to detect the position of the spherical reflector usually mounted on the platform of positioning devices. Each of the laser beams from diode-laser sources is reflected at the highly reflective surface of the sphere; hence, the 3-dimensional position of the sphere causes the directional change of the reflected beams, which is detected by the PSDs. In this paper, we define the relationships between the output values of the two PSDs and the 3-DOF translational motions of the sphere. Based on a deduced measurement model, we perform measurement simulation and evaluate the performance of the proposed measurement system: linearity, sensitivity, measuring range, and measurement error. The results show that the proposed measuring method is very useful for the measurement of the precision displacement of 3-DOF micro motions.