• 한국진공학회지
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• 제18권4호
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• pp.272-280
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• 2009

원판형 분자 드래그펌프 내부의 회전자 위치에 따른 압축 성능과 배기특성에 대하여 실험과 수치 해석적으로 고찰하였다. 실험은 각각의 회전자 위치에 진공압력 게이지들을 부착하여, 펌프의 출구 압력이 0.2 Pa에서 533 Pa 사이일 때, 각 회전자에서의 압력을 측정하였다. 압력측정범위는 출구 압력이 0.2 Pa에서 533 Pa 범위사이에서 측정하였다. 진공펌프 로터의 회전 속도는 24,000 rpm이며, 질소 가스를 사용하여 성능실험을 수행하였다. 본 연구에서는 원판의 단의 수에 따른 원판형 분자 드래그펌프의 성능특성을 파악하고자 하였다. 수치해석을 통해 내부 유동채널에 대한 구체적인 압력 분포를 파악하였으며, 수치해석의 신뢰도 파악을 위하여 실험 측정값과 수치해석 값을 비교하여 검증하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2006년도 제30회 학술논문발표회 초록집
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• pp.61-61
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• 2006

• 한국진공학회:학술대회논문집
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• 한국진공학회 2007년도 제32회 학술대회 초록집
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• pp.56-56
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• 2007

• 한국진공학회:학술대회논문집
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• 한국진공학회 2007년도 제33회 하계학술대회 초록집
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• pp.121-121
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• 2007

• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제26회 학술발표회 초록집
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• pp.34-34
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• 2004

• 대한기계학회논문집B
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• 제28권12호
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• pp.1501-1510
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• 2004

The pumping characteristics of a single-stage disk-type drag pump (DTDP) are calculated for the variation of the vertical clearance between a rotor and stator by the three-dimensional direct simulation Monte Carlo (DSMC) method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a DTDP are cut on the both the upper and lower sides of a rotating disk, but a stationary disk is planar. The interaction between molecules is described by the variable hard-sphere model. The no time counter method is used as a collision sampling technique. The vertical clearance has a significant effect on the pumping performance. Experiments are performed under the outlet pressure range of 0.4∼533 Pa. When the numerical results are compared with the experimental data, the numerical results agree well quantitatively

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2012년도 임시총회 및 하계학술연구발표회
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• pp.129-130
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• 2012

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.1703-1708
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• 2004

In this study, we are investigated experimentally the pumping characteristics about the pumping channel shapes of disk-type drag pump (DTDP). We are experimented the pumping performance about the rotors which have channel or do not exist. The channel disk-type rotor has spiral channels both upper and lower part, and stator is planar. The planar disk-type rotor hasn't channel and stator has spiral channels both upper and lower part. The flow-meter method is adopted to calculate the pumping speed. Compression ratio and pumping speeds for the nitrogen gas are measured under the inlet pressure range of 0.001 ${\sim}$ 4 Torr. The maximum of compression ratio was about 3300 for three-stage DTDP (channel disk-type rotor), 1000 for four-stage (planar disk-type rotor) and two-stage DTDP (channel disk-type rotor) at zero throughput. The ultimate pressure was $1.6{\times}10^{-6}$ Torr for three-stage DTDP (channel disk-type rotor), $2.5{\times}10^{-6}$ Torr for four-stage DTDP (planar disk-type rotor).

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 춘계학술대회논문집
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• pp.935-940
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• 2005

In this paper, dual rotor disk configuration with a coreless stator is proposed for the Lorentz force type integrated motor bearing system. An experimental compensation for the effects of high order harmonics is performed using the digital controller of the experimental setup. The runout profile and rotor unbalance are also identified by the extended influence coefficient method. The experimental results confirm that this compensation method effectively attenuates the rotor vibration all over the operating range of rotational speed.

• 한국소음진동공학회논문집
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• 제15권9호
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• pp.1045-1052
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• 2005

Tn this paper. dual rotor disk configuration with a coreless stator is proposed for the Lorentz force type integrated motor hearing system. An experimental compensation for the effects of high order harmonics is performed using the digital controller of the experimental setup. The runout profile and rotor unbalance are also identified by the extended influence coefficient method. The experimental results confirm that this compensation scheme effectively attenuates the rotor vibration all over the operating range of rotational speed.