• 한국진공학회지
• /
• 제12권2호
• /
• pp.79-85
• /
• 2003

다단 원판형 드래그펌프의 배기특성을 출구측 압력변화에 따른 입구측의 압력을 측정함으로써 파악하였다. 압력측정범위는 유량이 없을 때 출구측에서 0.13∼533 Pa로 하였다. 펌프 로터의 회전 속도는 24,000rpm이며, 질소가스를 사용하여 유량에 대한 성능실험을 수행하였다. 본 연구에서는 원판의 단의 수에 따른 원판형 드래그 펌프의 성능을 측정하였다. 3단, 2단, 단단형으로 원판형 드래그펌프를 구성하여 성능 실험하였으며, 최대도달진공도, 최대압축비, 배기속도등을 각각 측정하여 상호 성능을 비교·고찰하였다.

• 한국진공학회지
• /
• 제18권4호
• /
• pp.272-280
• /
• 2009

원판형 분자 드래그펌프 내부의 회전자 위치에 따른 압축 성능과 배기특성에 대하여 실험과 수치 해석적으로 고찰하였다. 실험은 각각의 회전자 위치에 진공압력 게이지들을 부착하여, 펌프의 출구 압력이 0.2 Pa에서 533 Pa 사이일 때, 각 회전자에서의 압력을 측정하였다. 압력측정범위는 출구 압력이 0.2 Pa에서 533 Pa 범위사이에서 측정하였다. 진공펌프 로터의 회전 속도는 24,000 rpm이며, 질소 가스를 사용하여 성능실험을 수행하였다. 본 연구에서는 원판의 단의 수에 따른 원판형 분자 드래그펌프의 성능특성을 파악하고자 하였다. 수치해석을 통해 내부 유동채널에 대한 구체적인 압력 분포를 파악하였으며, 수치해석의 신뢰도 파악을 위하여 실험 측정값과 수치해석 값을 비교하여 검증하였다.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2007년도 제32회 학술대회 초록집
• /
• pp.56-56
• /
• 2007

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2006년도 제30회 학술논문발표회 초록집
• /
• pp.61-61
• /
• 2006

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2001년도 춘계학술대회논문집E
• /
• pp.643-648
• /
• 2001

The direct simulation Monte Carlo(DSMC) method is applied to investigate steady and unsteady flow fields of a single-stage disk-type drag pump. Two different kinds of pumps are considered: the first one is a rotor-rotor combination, and the second one is a rotor-stator combination. The pumping channels are cut on a rotor and stator. The rotor and stator have 10 Archimedes' spiral blades, respectively. In the present DSMC method, the variable hard sphere model is used as a molecular model, and the no time counter method is employed as a collision sampling technique. For simulation of diatomic gas flows, the Borgnakke-Larsen phenomenological model is adopted to redistribute the translational and internal energies. The DSMC results are in good agreement with the experimental data.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2004년도 추계학술대회
• /
• pp.1640-1645
• /
• 2004

The pumping characteristics of a single-stage disk-type drag pump ( DTDP ) are calculated,for the variation of the vertical clearance between a rotor and stator and of the radial clearance between a rotor and casing wall, by the three-dimensional direct simulation Monte Carlo (DSMC)method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a DTDP are cut on the both the upper and lower sides of a rotating disk, but the stationary disks are planar. As a consequence of results, the vertical and radial clearances have a significant effect on the pumping performance. Experiments are performed under the outlet pressure range of 0.4 $^{\sim}$ 533 Pa. When the numerical results are compared to the experimental data, the numerical results agree well qualitatively.

• 유체기계공업학회:학술대회논문집
• /
• 유체기계공업학회 2001년도 유체기계 연구개발 발표회 논문집
• /
• pp.203-208
• /
• 2001

In this paper, the pumping performance of the three-stage disk-type drag pump which works in the outlet pressure range from 4 to 0.01 Torr is studied experimentally. The rotational speed of the pump is 24,000rpm, and nitrogen is used as a test gas, The pumping characteristics of various drag pumps are investigated. The inlet pressures are measured for various outlet pressures of the test pump. The maximum compression ratios for zero throughput are measured for three-stage, two-stage BSC type, helical-type, one-stage BSC type and one-stage OSC type, respectively.

• 유체기계공업학회:학술대회논문집
• /
• 유체기계공업학회 2000년도 유체기계 연구개발 발표회 논문집
• /
• pp.82-87
• /
• 2000

The direct simulation Monte Carlo (DSMC) method is applied to investigate the flow field of a disk-type drag pump. The pumping channels are cut on both sides of a rotating disk. The rotor has 10 Archimedes' spiral blades. In the present DSMC method, the variable hard sphere model is used as a molecular model, and the no time counter method is employed as a collision sampling technique. For simulation of diatomic gas flows, the Larsen-Borgnakke phenomenological model is adopted to redistribute the translational and internal energies.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2001년도 추계학술대회논문집B
• /
• pp.347-352
• /
• 2001

In this paper, the pumping performance of the two-stage disk-type drag pump which works in the outlet pressure range from 3 to 0.001 Torr is studied experimentally. The rotational speed of the pump is 24,000rpm, and nitrogen is used as a test gas. The pumping characteristics of various drag pumps are performed. The inlet pressures are measured for various outlet pressures of the test pump. The maximum compression ratios for zero throughput are 1000(two-stage BSC type), 740(helical-type), 90(BSC type) and 85(OSC type), respectively. The ultimate pressure of the two-stage disk-type drag pump is $8.1\times10^6$ Torr.

• 대한기계학회논문집B
• /
• 제28권12호
• /
• pp.1501-1510
• /
• 2004

The pumping characteristics of a single-stage disk-type drag pump (DTDP) are calculated for the variation of the vertical clearance between a rotor and stator by the three-dimensional direct simulation Monte Carlo (DSMC) method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a DTDP are cut on the both the upper and lower sides of a rotating disk, but a stationary disk is planar. The interaction between molecules is described by the variable hard-sphere model. The no time counter method is used as a collision sampling technique. The vertical clearance has a significant effect on the pumping performance. Experiments are performed under the outlet pressure range of 0.4∼533 Pa. When the numerical results are compared with the experimental data, the numerical results agree well quantitatively