• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.79-85
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• 2003

Experimental investigations are performed for the rarefied gas flows in a multi-stage disk-type drag pump. The pump considered in the present study consists of grooved rotors and stators. The flow-meter method is adopted to calculate the pumping speed. Compression ratios and pumping speeds for the nitrogen gas are measured under the outlet pressure range of 0.13∼533 Pa. The present experimental data show the leak-limited value of the compression ratio in the molecular transition region. The rotational speed of the pump is 24,000rpm, and nitrogen is used as a test gas. The pumping characteristics of various drag pumps are performed. The inlet pressures are measured for various outlet pressures of the test pump. The ultimate pressures for zero throughput are measured for three-stage, two-stage and single-stage disk-type, respectively.

• Journal of the Korean Vacuum Society
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• v.18 no.4
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• pp.272-280
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• 2009

In this study is performed to investigate the pumping characteristics of three-stage disk-type molecular drag pump (DTDP). The experiments are measured using five vacuum pressure gauges in the positions for rotors of DTDP. The experimented DTDP is consisted of three rotors and four stator. In the DTDP, spiral channels of three rotors are cut on the both upper surface and lower surface of a rotating disk, and corresponding stator is a planar disk. The experiments are performed in the outlet pressure range of $0.2{\sim}533\;Pa$. The pressure of each rotors are measured under the various condition of outlet pressure and throughputs, and nitrogen gas is used for test gas. In the numerical study, the pumping characteristics of each rotor are studied for the variation of throughputs in the all rotating channel. Pressure contour and velocity are obtained by the numerical simulation.

• Proceedings of the Korean Vacuum Society Conference
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• 2007.02a
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• pp.56-56
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• 2007

• Proceedings of the Korean Vacuum Society Conference
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• 2006.02a
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• pp.61-61
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• 2006

• Proceedings of the KSME Conference
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• 2001.06e
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• pp.643-648
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• 2001

The direct simulation Monte Carlo(DSMC) method is applied to investigate steady and unsteady flow fields of a single-stage disk-type drag pump. Two different kinds of pumps are considered: the first one is a rotor-rotor combination, and the second one is a rotor-stator combination. The pumping channels are cut on a rotor and stator. The rotor and stator have 10 Archimedes' spiral blades, respectively. In the present DSMC method, the variable hard sphere model is used as a molecular model, and the no time counter method is employed as a collision sampling technique. For simulation of diatomic gas flows, the Borgnakke-Larsen phenomenological model is adopted to redistribute the translational and internal energies. The DSMC results are in good agreement with the experimental data.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1640-1645
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• 2004

The pumping characteristics of a single-stage disk-type drag pump ( DTDP ) are calculated,for the variation of the vertical clearance between a rotor and stator and of the radial clearance between a rotor and casing wall, by the three-dimensional direct simulation Monte Carlo (DSMC)method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a DTDP are cut on the both the upper and lower sides of a rotating disk, but the stationary disks are planar. As a consequence of results, the vertical and radial clearances have a significant effect on the pumping performance. Experiments are performed under the outlet pressure range of 0.4 $^{\sim}$ 533 Pa. When the numerical results are compared to the experimental data, the numerical results agree well qualitatively.

• 유체기계공업학회:학술대회논문집
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• 2001.11a
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• pp.203-208
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• 2001

In this paper, the pumping performance of the three-stage disk-type drag pump which works in the outlet pressure range from 4 to 0.01 Torr is studied experimentally. The rotational speed of the pump is 24,000rpm, and nitrogen is used as a test gas, The pumping characteristics of various drag pumps are investigated. The inlet pressures are measured for various outlet pressures of the test pump. The maximum compression ratios for zero throughput are measured for three-stage, two-stage BSC type, helical-type, one-stage BSC type and one-stage OSC type, respectively.

• Proceedings of the KSME Conference
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• 2001.11b
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• pp.347-352
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• 2001

In this paper, the pumping performance of the two-stage disk-type drag pump which works in the outlet pressure range from 3 to 0.001 Torr is studied experimentally. The rotational speed of the pump is 24,000rpm, and nitrogen is used as a test gas. The pumping characteristics of various drag pumps are performed. The inlet pressures are measured for various outlet pressures of the test pump. The maximum compression ratios for zero throughput are 1000(two-stage BSC type), 740(helical-type), 90(BSC type) and 85(OSC type), respectively. The ultimate pressure of the two-stage disk-type drag pump is $8.1\times10^6$ Torr.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.12
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• pp.1501-1510
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• 2004

The pumping characteristics of a single-stage disk-type drag pump (DTDP) are calculated for the variation of the vertical clearance between a rotor and stator by the three-dimensional direct simulation Monte Carlo (DSMC) method. The gas flow mainly belongs to the molecular transition flow region. Spiral channels of a DTDP are cut on the both the upper and lower sides of a rotating disk, but a stationary disk is planar. The interaction between molecules is described by the variable hard-sphere model. The no time counter method is used as a collision sampling technique. The vertical clearance has a significant effect on the pumping performance. Experiments are performed under the outlet pressure range of 0.4∼533 Pa. When the numerical results are compared with the experimental data, the numerical results agree well quantitatively

• Proceedings of the Korean Vacuum Society Conference
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• 2002.02a
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• pp.194-194
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• 2002