• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.07a
• /
• pp.214-214
• /
• 1999

다이아몬드를 반도체용 열방산용기판 등으로 사용하기 위해서는 수백 $\mu\textrm{m}$ 두께의 대면적 웨이퍼가 요구된다. 이를 위해서 DC are jet CVD, MW PACVD, DC PACVD 등이 개발되어, 현재 4"에서 8"까지의 많은 문제를 일으키고 있다. 본 연구에서는 multi-cathode DC PACVD법에 의한 4" 다이아몬드 웨이퍼의 합성과 합성된 막의 특성변화에 대한 연구를 수행하였다. 또한, 웨이퍼의 휨과 crack 발생거동과 대한 고찰을 통래 휨과 crack이 없는 웨이퍼의 제작방법을 고안하였다. 사용된 음극의 수는 일곱 개이며, 투입된 power는 각 음극 당 약 2.5kW(4.1 A-600V)이었다. 사용된 기판의 크기는 직경 4"이었다. 합성압력은 100Torr, 가스유량은 150sccm, 증착온도는 125$0^{\circ}C$~131$0^{\circ}C$, 수소가스네 메탄조성은 5%~8%이었다. 합성 중 막에 인가되는 응력은 합성 중 증착온도의 변화에 의해 제어하였다. 막의 결정도는 Raman spectroscopy 및 열전도도를 측정을 통해 분석하였다. 성장속도 및 다이아몬드 peak의 반가폭은 메탄조성 증가(5%~8%)에 따라 증가하여 각각 6.6~10.5$\mu\textrm{m}$/h 및 3.8~5.2 cm-1의 분포를 보였다. 6%CH4 및 7%CH4에서 합성된 웨이퍼에서 측정된 막의 열전도도는 11W/cmK~13W/cmK 정도로 높게 나타났다. 막두께의 uniformity는 최대 3.5%로 매우 균일하였다. 막에 인가되는 응력의 제어로 직경 4"k 합성면적에서 두께 1mm 이상의 균열 및 휨이 없는 다이아몬드 자유막 웨이퍼를 합성할 수 있었다.다이아몬드 자유막 웨이퍼를 합성할 수 있었다.active ion에 의해 sputtering 이 된다. 이때 plasma 처리기의 polymer 기판 후면에 magnet를 설치하여 높은 ionization을 발생시켜 처리 효과를 한층 높여 주었다. 이 plasma 처리는 표면 청정화, 표면 etching 이 동시에 행하는 것과 함께 장시간 처리에 의해 표면에서는 미세한 과, C=C기, -C-O-의 극성기의 도입에 의한 표면 개량이 된다는 것을 관찰할 수 있다. OPP polymer 표면을 Ar 100%로 plasma 처리한 경우 C-O, C=O 등의 carbonyl가 발생됨을 알 수 있었다. C-O, C=O 등의 carbynyl polor group이 도입됨에 따라 sputter된 Al의 접착력이 향상됨을 알 수 있으며, TEM 관찰 결과 grain size도 상당히 작아짐을 알 수 있었다.onte-Carlo 방법으로 처리하였다. 정지기장해석의 경우 상용 S/W인 Vector Fields를 사용하였다. 이를 통해 sputter 내 플라즈마 특성, target으로 입사하는 이온에너지 및 각 분포, 이들이 target erosion 형상에 미치는 영향을 살펴보았다. 또한 이들 결과로부터 간단한 sputtering 모델을 사용하여 target으로부터 sputter된 입자들이 substrate에 부착되는 현상을 Monte-Carlo 방법으로 추적하여 성막특성도 살펴보았다.다.다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인 측면에서도 고부가 가치의 제품 개발에 따른 새로운 수요 창출과 수익률 향상, 기존의 기능성 안료를 나노(nano)화하여 나노 입자를 제조, 기존의 기능성 안료에 대한 비용 절감 효과등을 유도 할 수 있다. 역시 기술적인 측면에서도 특수소재 개발에 있어 최적의 나노 입자 제어기술 개발 및 나노입자를 기능성 소재로 사용하여 새로운 제품의 제조와 고압 기상

• Journal of Korean Society of Environmental Engineers
• /
• v.32 no.2
• /
• pp.165-174
• /
• 2010

The numerical modeling of a coal gasification reaction occurring in an entrained flow coal gasifier is presented in this study. The purposes of this study are to develop a reliable evaluation method of coal gasifier not only for the basic design but also further system operation optimization using a CFD(Computational Fluid Dynamics) method. The coal gasification reaction consists of a series of reaction processes such as water evaporation, coal devolatilization, heterogeneous char reactions, and coal-off gaseous reaction in two-phase, turbulent and radiation participating media. Both numerical and experimental studies are made for the 1.0 ton/day entrained flow coal gasifier installed in the Korea Institute of Energy Research (KIER). The comprehensive computer program in this study is made basically using commercial CFD program by implementing several subroutines necessary for gasification process, which include Eddy-Breakup model together with the harmonic mean approach for turbulent reaction. Further Lagrangian approach in particle trajectory is adopted with the consideration of turbulent effect caused by the non-linearity of drag force, etc. The program developed is successfully evaluated against experimental data such as profiles of temperature and gaseous species concentration together with the cold gas efficiency. Further intensive investigation has been made in terms of the size distribution of pulverized coal particle, the slurry concentration, and the design parameters of gasifier. These parameters considered in this study are compared and evaluated each other through the calculated syngas production rate and cold gas efficiency, appearing to directly affect gasification performance. Considering the complexity of entrained coal gasification, even if the results of this study looks physically reasonable and consistent in parametric study, more efforts of elaborating modeling together with the systematic evaluation against experimental data are necessary for the development of an reliable design tool using CFD method.

• Nuclear Engineering and Technology
• /
• v.22 no.2
• /
• pp.116-127
• /
• 1990

The fission gas release model used In the SPEAR-BETA fuel performance code was modified by use of effective thermal conductivity for cracked fuel and by laking Into account axial fission-gas mixing between the fuel-clad gap and the plenum. With use of this modified model the fission gas release was analyzed under various power ramping conditions of P$_{max}$ and $\Delta$.fP. Effective fuel thermal conductivity that accounts for the effect of fuel tracking was used in calculation of the fuel temperature distribution and the Internal gas pressure under power ramping conditions. Mixing and dilution effects due to axial gas flow were also considered in computing the width and the thermal conductivity of the gap. The effect of axial gas flow w3s solved by the Crank-Nicholson method. The finite difference method was used to save running time in the calculation. The present modified fission-gas release model was validated by comparing its predicted results with experimental data from various lamping tests In the literature and calculated results with use of the models used In the SPEAR-BETA and FEMAXI-IV codes. Results obtained with use of the present modified model showed better agreement with experimental data reported in the literature than those results with use of the latter codes. The fuel centerline temperature calculated with introduction of effective thermal conductivity for centerline temperature calculated with Introduction of effective thermal conductivity for cracked fuel was 200 higher fission gas release predicted with use of the modified model was nearly 6% larger on the average than that calculated by use of the unmodified model used in the SPEAR-BETA code.e SPEAR-BETA code.e.

• Journal of Bio-Environment Control
• /
• v.29 no.1
• /
• pp.36-42
• /
• 2020

The objectives of this study were to investigate the standard and roof vent type of multi-span greenhouse and to analyze the characteristics of natural ventilation of multi-span greenhouse with different roof vent using computational fluid dynamics (CFD) code. The vent area proportion of surveyed farms averaged 10%, it was analyzed that the vent design for natural ventilation is insufficient. The results of natural ventilation efficiency of multi-span greenhouse according to roof vent type showed that the temperature of the position in which the crops grew was the lowest in the conical roof vent type and the highest in the half conical roof vent type. For the natural ventilation effect, the conical roof vent type was the best one, but the structural stability should be evaluated in light of wind load.

• Fire Science and Engineering
• /
• v.18 no.1
• /
• pp.24-30
• /
• 2004

In this work the dynamic heat transfer occurring in a cable penetration fire stop system built in the firewall of nuclear power plants is three-dimensionally investigated to develop a test-simulator that can be used to verify effectiveness of the sealants. Here was carried out an experiment to observe the heat transfer in the cable penetration fire stop system made of DOW CORNING products. The dynamic heat transfer occurring in the fire stop system is formulated in a parabolic partial differential equation subjected to a set of initial and boundary conditions. And it was modeled, simulated, and analyzed. The simulation results were illustrated in three-dimensional graphics and were compared with experimental data. Through the simulations, it was shown clearly that the temperature distribution was influenced very much by the number, position, and temperature of the cable streams. It also was found that the dynamic heat transfer through the cable streams was one of the most dominant factors, and the feature of heat conduction could be understood as an unsteady-state process. It is certain that these numerical results are useful for making a performance-based design for the cable penetration fire stop system.

• Journal of Korean Tunnelling and Underground Space Association
• /
• v.23 no.1
• /
• pp.25-36
• /
• 2021

Hydrogen in hydrogen-electric vehicles has a wide range of combustion and explosion ranges, and is a combustible gas with a very fast flame propagation speed, so it has the risk of leakage, diffusion, ignition, and explosion. The fuel tank has a Thermally active Pressure Relief Device (TPRD) to reduce the risk of explosion and other explosions, and in the event of an accident, hydrogen inside the tank is released outside before an explosion or fire occurs. However, if an accident occurs in a semi-closed space such as an underground parking lot, the flow of air flow is smaller than the open space, which can cause the concentration of hydrogen gas emitted from the TPRD to accumulate above the explosion limit. Therefore, in this study, the leakage rate and concentration of hydrogen over time were analyzed according to the diameter of the nozzle of the TPRD. The diameter of the nozzle was considered to be 1 mm, 2.5 mm and 5 mm, and ccording to the diameter of the nozzle, the concentration of hydrogen in the underground parking lot increases in a faster time with the diameter of the nozzle, and the maximum value is also analyzed to be larger with the diameter of the nozzle. In underground parking lots where air currents are stagnant, hydrogen concentrations above LFL (Lowe Flammability Limit) were analyzed to be distributed around the nozzle, and it was analyzed that they did not exceed UFL (Upper Flammability Limit).

• Proceedings of the KWS Conference
• /
• 2009.11a
• /
• pp.62-62
• /
• 2009

석탄화력발전소의 CO2배출량 감소와 고효율, 대용량화로 인해 초초임계압(USC:Ultra Super Critical) 화력발전소의 건설이 증가하고 있다. USC 발전소는 효율향상을 위한 증기온도와 압력의 상승 때문에 보일러 고온고압부에 기존의 소재에 비해 고온강도와 내산화성의 재료물성이 향상된 신소재 적용이 불가피하다. 특히 사용된 신소재 중에서 보일러 본체를 구성하는 수냉벽관(Water wall), 과열기와, 재열기용 튜브 및 후육부인 헤더와 배관재로 기존의 2.25Cr-1Mo강을 개량한 2.25Cr-1.6W계 내열강이 적용되고 있다. 2.25Cr-1.6W강은 SMI와 MHI가 공동개발한 소재로 1995년 튜브제품이, 1999년에 단조, 파이프재, 플레이트제품이 ASME code case로 등재되었고, 2009년 ASME code case 2199-4로 개정되어 사용 중이다. 이 소재는 2.25Cr-1Mo강에 고온강도 개선을 위해 석출강화효과가 있는 V과 Nb을 첨가하였고, 탄화물의 열적안정성과 고용강화효과 증대를 위해 W을 첨가하였다. 그리고 제작성과 용접성 및 재료의 인성 향상을 위해 B첨가와 C함량을 낮추었다. 합금성분의 첨가와 조정에 의해 고온강도는 개선되었지만, 보일러 설치 및 보수를 위한 용접과정에서 용접금속과 CGHAZ(Coarse Grain HAZ)에서 용접균열이 발생하였다. 대부분의 용접균열은 용접결함이나 고온 혹은 저온균열이 아닌 2.25Cr-1.6W계강의 강도 개선을 위해 첨가한 V과 Nb이 용접후열처리 도중 입내에 MX형태의 미세석출로 입내를 강화시킴으로서 발생한 재열균열 민감성 증대에 기인된 것으로 판단된다. 이에 본 연구에서 용접 및 후열처리 과정에서 용접금속과 HAZ에서 발생하는 용접금속의 응력분포를 전산해석을 통해 확인하고 실제 후육파이프 용접부에서 잔류응력을 측정해 비교하였다. 용접부 응력분포는 SYSWELD 프로그램을 사용해 해석을 수행하였고, 발전소 실배관재의 용접부 응력측정은 수평부 측정이 용이하도록 지그를 부착한 Potable 잔류응력측정기를 사용해 Hole Drilling Method(HDM)를 적용하여 잔류응력을 측정하였다. 해석 결과 CGHAZ부위의 잔류응력이 용접금속과 기타 부위에 비해 높은 응력분포를 나타냈으며, 이는 CGHAZ와 용접용융선 부근에서 균열이 발생하는 실제값과 일치하는 결과를 보였다. 실제 배관재 용접부에서 측정한 잔류응력값은 항복응력의 약 50% 이하 응력값을 나타냈다. 배관 구조에 기인한 시스템응력의 영향을 제거하기 위해 배관재 용접부를 중심으로 양끝단을 절단 후 용접부에서 측정한 응력은 항복응력 대비 25%수준의 낮은값을 보였다. 그러나 배관재가 장기간 고온환경에 노출되었고 용접금속 내부의 균열이 발생한 상태에서 측정하였기 때문에 용접잔류응력은 상당부분 해소되어 상대적으로 낮은 응력값이 얻어진 것으로 판단된다.

• Fire Science and Engineering
• /
• v.19 no.1 s.57
• /
• pp.80-86
• /
• 2005

In this study effects of the natural wind and the forced smoke ejection by operating the exhaust fan are studied numerically to examine the flow characteristics of the smoke and heat generated from a fire on the platform of an underground subway station. Three different situations, including 1) the case with no natural wind and no exhaust fan operation, 2) the case with natural wind but no exhaust fan operation and 3) the case with no natural wind but exhaust fan operation, are considered for the numerical analyses. The numerical results show that the natural wind causes a rapid spread of the fire along the tunnel resulting in rapid spread of the smoke and heat over the platform which affects the escape. The operation of the exhaust fan also results in the rapid spread of smoke and heat over the platform, but the time required for reaching the safe escaping height of the smoke layer with the exhaust fan operation is much longer than that without the exhaust fan operation. The numerical results also show that the required capacity of the exhaust fan becomes larger when the effect of the natural wind is included.

• Journal of the Korean Magnetics Society
• /
• v.16 no.1
• /
• pp.6-10
• /
• 2006

The sulphur spinel $FeCr_{2-x}M_xS_4$(M=Ga, In) have been studied with Mossbauer spectroscopy, x-ray diffraction (XRD), and vibrating sample magnetometer. The XRB patterns for samples $FeCr_{2-x}M_xS_4$(M=Ga, In: x=0.1, 0.3) reveal a single phase, which the Ga and In ions are partially occupied to the tetrahedral (A) site. The Neel temperature for the Ga substituted samples increases from 180 to 188 K, with increase from x=0.1 to 0.3. While, it decreases from 173 to 160 K, for the In substituted samples of the x=0.1 and 0.3, respectively. The Mossbauer spectra were collected from 4.2 K to room temperature. We have analyzed the Mossbauer spectra using eight Lorentzian lines fitting method for the $FeCr_{2-x}In_xS_4$(x=0.1) at 4.2 K, yielding the 1311owing results; $H_{hf}=146.0kOe,\;{\Delta}E_Q=1.88mm/s,\;\theta=36^{\circ},\;\phi=0^{\circ},\;\eta=0.6$, and R=1.9. The Ga ions enter into the both sites octahedral (B) and tetrahedral (A), simultaneously the same amounts of Fe ions migrate from the A to the B site, this result is an agreement with XRD results, too. The ${\Delta}E_Q$ of the A and B site in Mossbauer spectra of the samples $FeCr_{2-x}Ga_xS_4$(x=0.3) are 0.83 and 2.94mm/s, respectively. While they are 0.56 and 2.36mm/s for the $FeCr_{2-x}In_xS_4$(x=0.3). It is noticeable that the ${\Delta}E_Q$ for the Ga doped samples are larger than that of the corresponding In doped samples, in spite of the larger ionic radius for In ions. The bond lengths of Cr-S, for the Ga and In doped samples (x=0.3) are found to be 2.41 and $2.43\;{\AA}$, respectively. We interpret that the larger covalence effect from the smaller bond length induces a large asymmetric charge distribution. Finally, it gives a large quadrupole interaction.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.19 no.8
• /
• pp.8-13
• /
• 2018

Nitrogen oxides (NOx) have recently been very influential in the generation of ultrafine dust, which is of great social interest in terms of improving the atmospheric environment. Nitrogen oxides are generated mainly by the reaction of nitrogen and oxygen in air in a combustion gas atmosphere of high temperature in a combustion apparatus such as thermal power generation. Recently, research has been conducted on the combustion that recirculates the exhaust gas to the cylindrical burner by using a piping using a Coanda nozzle. In this study, three types of burners were carried out through computational fluid analysis. Case 1 burner with the outlet of the combustion gas to the right, Case 2 burner with both sides as gas exit, Case 3 burner with left side gas exit. The pressure, flow, temperature, combustion reaction rate and distribution characteristics of nitrogen oxides were compared and analyzed. The combustion reaction occurred in Case 1 and Case 2 burner in the right direction with combustion gas recirculation inlet and Case 3 burner in the vicinity of mixed gas inlet. The temperature at the outlet was about $100^{\circ}C$ lower than that of the other burners as the Case 2 burner was exhausted to both sides. The NOx concentration of Case 1 burner at the exit was about 20 times larger than that of the other burners. From the present study, it could be seen that it is effective for the NOx reduction to exhaust the exhaust gas to both side gas exits or to exhaust the exhaust gas to the opposite direction of inlet of recirculation gas.