• Title/Summary/Keyword: 오존 $(O_3)$농도

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A Study on the Characteristics of the High Concentration Ozone Generator for the Semiconductor Wafer Cleaning with the Ozone Dissolved De-ionized Water (반도체 웨이퍼의 오존 수(水) 세정을 위한 고농도 오존발생장치 특성 연구)

  • 손영수;함상용;문세호
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.52 no.12
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    • pp.579-585
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    • 2003
  • Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

Factors Affecting the Morbidity Related to Respiratory Dieseases in Urban Korea (한국 도시의 만성호흡기 질환 이환율에 영향을 주는 요인)

  • Han, Sung-Hyun;Park, Jae-Sung;Seo, Seung-Hee;Yoon, Jee-Eun;Jee, Sun-Ha
    • Korea journal of population studies
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    • v.28 no.2
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    • pp.205-217
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    • 2005
  • Purpose: To evaluate the factors affecting hospital utilization for respiratory diseases by ecological study design and GIS tool. To raise the social concern for respiratory disease by the result. Methods: Hospital admission data supported by national health insurance cooperation were transformed to spread sheet data format and combined with air monitoring dataset. Air pollution data were collected from the annual report of air monitoring published by Korea Ministry of Environment. Socioeconomic statistics including population density, age distribution, forest ratio etc.. were filed using Korea National Statistical Office database. Multiple linear regression analysis was performed to evaluate the factors affecting hospital utilization for respiratory diseases. Analytical unit was 52 cities. Results: The factors affecting hospital utilization for respiratory diseases were the proportion of population 60 years and over, seaside city, $O_3$ level, smoking rate. Conclusions: However, outdoor pollutants monitoring data and smoking rate have weakness in reflecting individual exposure. Further research is required to propose more illustrative means to evaluate causal relationship between air pollution and respiratory health effect factors.

Removal Characteristics of Phenol at Advanced Oxidation Process with Ozone/Activated Carbon Impregnated Metals (오존/촉매 산화공정에서 금속담지 활성탄을 이용한 페놀의 분해 특성)

  • Choi, Jae Won;Yoon, Ji Young;Park, Jin Do;Lee, Hak Sung
    • Applied Chemistry for Engineering
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    • v.23 no.3
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    • pp.302-307
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    • 2012
  • Advanced oxidation processes (AOP) such as O3/activated carbon process and O3/catalysts process were used to compare the decomposition of phenol. Catalysts such as Pd/activated carbon (Pd/AC), Mn/activated carbon (Mn/AC), Co/activated carbon (Co/AC) and Fe/activated carbon (Fe/AC) were prepared by impregnation of Pd, Mn, Co and Fe into the activated carbon of pellet form, respectively. Based on an hour of reactions, the following descending order for the decomposition ratios of dissolved O3 to the 1.48 mg/L of saturated dissolved O3 was observed: Mn/AC (45%) > Pd/AC (42%) > Co/AC (33%) > AC (31%) > Fe/AC (27%). The removal efficiencies of phenol were also arranged in the descending order of AOP as follows: Mn/AC (89%) > Pd/AC (85%) > Co/AC (77%) > AC (76%) > Fe/AC (71%). The remaining ratios (C/Co) of TOC (total organic carbon) after an hour of experiments were arranged in the ascending order of AOP as follows : Pd/AC (0.29) < Mn/AC (0.36) < AC (0.40) < Co/AC (0.49) < Fe/AC (0.51). However, the catalytic effects in the Co/AC and the Fe/AC processes were little in comparison with O3/AC process. The maximum concentrations of intermediates such as hydroquinone and catechol formed from the decomposition of phenol were arranged in the ascending order of AOP as follows: Pd/AC < Fe/AC < Co/AC < AC < Mn/AC. In the case of Pd/AC process, these intermediates were almost disappeared after an one hour of reaction.

Investigation of SO2 Effect on TOMS O3 Retrieval from OMI Measurement in China (OMI 위성센서를 이용한 중국 지역에서 TOMS 오존 산출에 대한 이산화황의 영향 조사 연구)

  • Choi, Wonei;Hong, Hyunkee;Kim, Daewon;Ryu, Jae-Yong;Lee, Hanlim
    • Korean Journal of Remote Sensing
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    • v.32 no.6
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    • pp.629-637
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    • 2016
  • In this present study, we identified the $SO_2$ effect on $O_3$ retrieval from the Ozone Monitoring Instrument (OMI) measurement over Chinese Industrial region from 2005 through 2007. The Planetary boundary layer (PBL) $SO_2$ data measured by OMI sensor is used in this present study. OMI-Total Ozone Mapping Spectrometer (TOMS) total $O_3$ is compared with OMI-Differential Optical Absorption Spectrometer (DOAS) total $O_3$ in various $SO_2$ condition in PBL. The difference between OMI-TOMS and OMI-DOAS total $O_3$ (T-D) shows dependency on $SO_2$ (R (Correlation coefficient) = 0.36). Since aerosol has been reported to cause uncertainty of both OMI-TOMS and OMI-DOAS total $O_3$ retrieval, the aerosol effect on relationship between PBL $SO_2$ and T-D is investigated with changing Aerosol Optical Depth (AOD). There is negligible aerosol effect on the relationship showing similar slope ($1.83{\leq}slope{\leq}2.36$) between PBL $SO_2$ and T-D in various AOD conditions. We also found that the rate of change in T-D per 1.0 DU change in PBL, middle troposphere (TRM), and upper troposphere and stratosphere (STL) are 1.6 DU, 3.9 DU and 4.9 DU, respectively. It shows that the altitude where $SO_2$ exist can affect the value of T-D, which could be due to reduced absolute radiance sensitivity in the boundary layer at 317.5 nm which is used to retrieve OMI-TOMS ozone in boundary layer.

Effect of Microbubble Ozonation Process on Performance of Biological Reactor System for Excess Sludge Solubilisation (마이크로버블오존을 이용한 잉여슬러지 가용화 처리가 생물반응조의 성능에 미치는 영향)

  • Lee, Shun-Hwa;Jung, Kye-Ju;Kwon, Jin-Ha;Lee, Se-Han
    • Journal of Korean Society of Environmental Engineers
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    • v.33 no.2
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    • pp.113-119
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    • 2011
  • The study purpose was to examine an effect of zero emission of excess sludge on biological reactor and treated water quality within the biological reactor in the process of biological treatment combined with excess sludge reduction system with ozone. Under an ozone injection rate 0.03 g $O_3/g$ SS, Sludge Disintegration Number (SDN) 3 and less than pH 4 as pre-treatment process, it was possible to maintain a stable biological treatment process without sludge disintegration. In the test of $OUR_{max}$, of sludge, its value was hardly under the condition of ozone injection rate 0.03 g $O_3/g$ SS. There were almost no changes of MLVSS/MLSS within biological reactor followed by a solubilization of excess sludge. Accumulation of microorganism within biological reactor was also not observed. After solubilization of excess sludge, an increase for organic matter and SS concentrations of an effluent was not observed and T-N concentration was reduced by increasing nitrification and denitrification rate within biological reactor. Most of T-P was not removed by zero emission of excess sludge and was leaked by being included in effluents.

Synthesis of FeOOH by Ozone Oxidation Using Ferrous Sulfate(Effect of Ozone Concentration and Reaction Time) (황산제일철 용애그이 오존산화에 의한 FeOOH 합성(오존농도 및 반응시간의 영향))

  • Kim Sam-Joong;Song Kyung-Sub;Eom Tae-Hyoung;Suhr Dong-Soo
    • Korean Journal of Materials Research
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    • v.15 no.12
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    • pp.760-764
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    • 2005
  • The influences of the oxidant($O_2\;and\;O_3$) on the FeOOH formation were studied with fixed $FeSO_4{\cdot}7H_2O$ concentration (0.5M) and NaOH equivalent ratio(0.5). The characteristics of the synthesized powders were evaluateed by XRD, and equantitative phase analysis. $\alpha-FeOOH$ (Geothite) and/or $\gamma-FeOOH$ was promoted when $O_3$ was used as a oxidant which is stronger oxidizing agent than $O_2$.

Individual Differences of Ozone Resistance for Seed Germination and Seedling Development of Pinus thunbergii (해송의 종자 발아 및 유묘 생장에 대한 오존저항성의 개체간 차이)

  • Kim, Du-Hyun;Han, Sim-Hee
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.12 no.3
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    • pp.207-216
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    • 2010
  • Individual differences of ozone ($O_3$) resistance for seed production, seed germination and seedling development were examined in this study. Five in each healthy and damaged trees of Pinus thunbergii growing in air polluted area for 12 years were chosen based on visible foliar injury and growth. The cones of P. thunbergii, which were collected from healthy and damaged trees, were analyzed for physical characteristics and seeds from the cones were used to test germination percentage under $O_3$ treatment. The germinated seeds were continuously exposed to $O_3$ treatment and the lipid peroxidation and activities of antioxidative enzymes were determined for both seeds and seedlings. The $O_3$ treatment for seed germination and seedling development were conducted at three conditions: control, 150 ppb and 300 ppb of $O_3$. The non-treated seeds from the damaged trees showed 21.6% lower germination than those from the healthy ones. On the $O_3$ treatment of 300 ppb, seed germination decreased approximately 10% for the healthy trees and 19% for the damaged trees compared to that on the control. The seeds from the healthy trees showed significantly higher activities of superoxide dismutase (SOD), glutathione reductase (GR), and catalase (CAT) than those from the damaged trees. The activities of GR, ascorbate peroxidase (APX), and CAT decreased along with the increasing $O_3$ concentration in two tree grades. Malondialdehyde (MDA) content of seeds was not influenced by $O_3$ treatment for two tree grades. In seedling development, there were no significant differences for length and biomass of needle and root of two tree grades at both the control and 150 ppb of $O_3$. At 300 ppb of $O_3$ treatment, however, the length and biomass of needle and stem decreased for two tree grades but no significant differences was detected in root. The seedlings from the damaged trees were more sensitive to the $O_3$ treatment, showing higher activities of SOD, APX, and CAT and content of MDA compared to those from the healthy tree seedlings. Our results indicate that seed germination and seedling development are vulnerable to increasing $O_3$ concentrations and that attention must be paid to the individual selection of tree species for reforestation.

Effects of Coagulants and Ozone Concentration on the Livestock Manure Treatment Efficiency of AOF Process (AOF공정 중 응집제와 오존 농도가 가축분뇨 처리효율에 미치는 영향)

  • Jeong, Sung-Chol;Yun, Rin
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.28 no.8
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    • pp.311-315
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    • 2016
  • The efficiency of manure treatment was investigated in terms of the pH, BOD, COD, SS, T-N and TP with a variation in the injection amount of PAC, polymer and ozone. The wastewater flow rate to the AOF is of $7.4m^3/hr$ with a reaction time of 30 minutes. The amount of PAC and polymer changed by 30, 35, 40 ml/min, and 30, 40, 50 ml/min, respectively. The amount of ozone injected varied from 110, 125, and $150kg-O_3/hr$. The optimum manure treatment performance was found for a PAC of 35 ml/min for the COD and SS, with polymer of 30 ml/min, and ozone injection of $150kg-O^3/hr$. A substantially optimum dose for each PAC, polymer, and ozone was also found to exist.

Measurement of $O_3$ and $SO_2$ at Dukjuk Island : April~September in 1999 (덕적도에서의$O_3$, $SO_2$ 측정 : 1999년 4월~9월 결과)

  • 이승복;배귀남;김용표;진현철;문길주
    • Proceedings of the Korea Air Pollution Research Association Conference
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    • 1999.10a
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    • pp.317-318
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    • 1999
  • 바다의 오염은 하수에 의한 오염물질의 유입에 의해서 뿐만 아니라 대기를 통한 대기오염물질의 유입에 의해서도 이루어지게 되므로(홍기훈 등, 1997), 황해의 오염을 이해하기 위해서는 황해 대기 중 오염물질의 농도 특성과 그 이동 경로 등을 파악하여야 한다. 본 연구에서는 황해 대기 중 기체상 대기오염물질의 농도 특성과 그 배출원을 살펴보기 위해 인천에서 남서쪽으로 약 49 km 떨어져 있는 덕적도 측정소에서 1999년 4월 8일부터 9월 15일까지 오존(O$_3$)과 아황산가스(SO$_2$)를 측정하였다.(중략)

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