• KSBB Journal
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• v.18 no.3
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• pp.211-216
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• 2003

The removal yield of dissolved organic matter in drinking water by biological activated carbon (BAC) process was investigated. The tested processes wer raw water-AC process (BAC1), raw water-ozonation-BAC process (BAC2), and raw water-ozonation-coagulation/sedimentation-BAC process (BAC3). The amounts of organic matter was measured as dissolved organic carbon (DOC), ulta-violet radiation at 254 nm wavelength ($UV_{254}$), total nitrogen (T-N), ammonia nitrogen (NH_3$-N), and total phosphate (T-P). As a results, 30.7% DOC was removed by BAC2 process, which showed higher removal efficiency than BAC1 or BAC3 processes. The removal yield of $UV_{254}$ in BAC1, BAC2, and BAC3 processes were observed as 45.3%, 44.6%, 58.4%, respectively. And the removal yield of ammonia nitrogen were 66%, 81%, 29% in each BAC processes. The optimal empty bed contact time (EBCT) of BAC processes was estimated as 10 minute. This study has shown that BAC process combined with ozone treatment was efficient for removing dissolved organic matter in water.

• Journal of the Institute of Electronics and Information Engineers
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• v.50 no.11
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• pp.43-49
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• 2013

We have studied on ozonate water cleaning mechanisms to apply in manufacturing process of 156 mm silicon wafer which is used in the solar cell fabrication. We have analyzed contamination sources on wafer surface which causes poor quality and performance of products in fabrication process, and examined cleaning process using ozonate water to eliminate it. Using this novel technology particles are removed over 94%, and remained organic materials are removed more over 45%.

• Applied Chemistry for Engineering
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• v.10 no.5
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• pp.737-742
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• 1999

This study was conducted for the two purposes; one was removal of dissolved humic acid, the well-known precursor of trihalomethanes (THMs), by physicochemical treatment processes such as ozone oxidation, coagulation and activated carbon adsorption. The other was qualitative identification of by-products in chlorination of the dissolved humic acid. When ozone oxidation was applied to remove the dissolved humic acid, pH was abruptly decreased. It was indicated that humic acid was not perfectly converted to $CO_2$ and $H_2O$, but to low fatty acid. In coagulation process, the coagulant was polyaluminumchloride which was widely used for drinking water treatment in recent years. With the dosage of 160 mg/L, total organic carbon(TOC), $COD_{Cr}$ and color were removed with 23%, 24% and 5% respectively. Color was effectively removed by ozone oxidation process, which was the first order reaction, with the reaction rate constant of $0.067min^{-1}$. In activated carbon adsorption process, preozonation process could remove more effectively the dissolved humic acid than that without preozonation. When the dissolved humic acid and sodium hydrochloride were reacted with 1 mg-NaOCl/mg-TOC, only trihalomethanes were detected.

• Journal of Korean Society of Environmental Engineers
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• v.39 no.7
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• pp.412-417
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• 2017

Removal characteristics of methyl orange and their dependence on operating parameters in a catalytic ozonation were investigated through a series of batch experiments. Activated carbon enhanced the self-decomposition of ozone, generating $OH{\cdot}$, thus promoting methyl orange degradation. As the carbon dose increases, the pseudo-first order rate constants of methyl orange degradation increased, resulting in the fast removal of methyl orange. The increase of gaseous ozone concentration enhanced the mass transfer to the aqueous solution, therefore, promoted the methyl orange removal. The methyl orange degradation was not significantly affected by the change of pH in the range of 5~12, and TOC removal was negligibly affected by the variation of pH over 7. The results indicate that the catalytic ozonation can be considered as an effective dye treatment technology.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.81.1-81.1
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• 2012

나노임프린트 리소그라피(Nano-Imprint Lithography, NIL) 기술은 기판위의 resin을 나노구조물이 각인된 스탬프로 눌러서 나노구조물을 형성하는 기술로, 경제적이고 효과적으로 나노구조물을 제작할 수 있는 기술이다. 그중에서도 UV 기반의 나노임프린트(UV-NIL) 기술은 resin을 투명한 스탬프로 누른뒤 UV로 경화시켜 나노구조물을 형성하는 기술로써 고온, 고압($140{\sim}180^{\circ}C$, 10~30bar)이 필요한 가열식 나노임프린트 기술에 비해 상온, 상압($20^{\circ}C$, 1bar)에서도 구조물 형성이 가능하여 다층구조 형성에 적합하다. 연속적인 임프린팅 공정에 의해 resin이 quarz 스탬프에 잔류하여 패터닝에 결함을 유발하게 되므로 오염물을 제거하기 위한 세정공정이 필요하다. 하지만 UV에 의해 경화된 resin은 cross-linking을 형성하여 화학적인 내성이 증가하게 되므로 제거하기가 어렵다. 현재는 resin 제거를 위한 세정공정으로 SPM($H_2SO_4/H_2O_2$) 세정이 사용되고 있는데 세정시간이 길고 세정 후에 입자 또는 황 잔유물이 남으며 많은 유해용액 사용의 문제점이 있어 효과적으로 resin을 제거할 세정공정이 필요한 상황이다. 본 연구에서는 친환경적인 UV 세정 및 오존수 세정공정을 적용하여 경화된 resin을 제거하는 연구를 진행하였다. 실험샘플은 약 100nm 두께의 resin을 증착한 $1.5cm{\times}1.5cm$ $SiO_2$ 쿠폰 wafer를 사용하였으며, UV 및 오존수의 처리시간을 달리하여 resin 제거효율을 평가하였다. ATR-FTIR 장비를 사용하여 시간에 따른 resin의 두께를 측정한 결과, UV 세정으로 100nm 높이의 resin중에 80nm의 bulk resin이 단시간에 제거가 되었고 나머지 20nm의 resin thin film은 오존수 세정으로 쉽게 제거되는 것을 확인 하였다. 또한 표면에 남은 resin residue와 particle을 제거하기 위해서 SC-1 세정을 진행하였고 contact angle과 optical microscope 장비를 사용하여 resin이 모두 제거된 것을 확인하였다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.12
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• pp.13-19
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• 2004

We have been studied on the high concentration ozonized water production technology which substitute for the SPM wet cleaning solution process as the PR strip process after the photolithography process in the semiconductor and flat panel display manufacturing. In this work, we have developed the surface discharge type ozone generator which has the characteristics of the 12 ［wt%］ ozone concentration at the oxygen gas flow of 0.5［ℓ/min］ oxygen per cell and also developed the high efficiency ozone contactor for the mixing ozone gas with deionized water. As the production test results of the ozonized water, we obtained the ozonized water concentration above 80［ppm］ at the 10［wt%］ ozone gas concentration, and also had a good result of the PR strip rate of 147［nm/min］. at the 70［ppm］ ozonized water.

• Membrane Journal
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• v.11 no.4
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• pp.179-189
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• 2001

Effect of ozonation on permeate flux was studied by using polysulfone ultrafiltration membrane. The filtration was first carried out by permeating phenol solutions under 3$kg_{f}$/$cm^2$ until steady-state flux was obtained. Then, the ozone of concentration range between 10 and 45 mg/1.min was ozonated in water for reducing the fouling on the UF membrane. Treatment of chemical wastewater by combined ozone and membrane filtration methods was also investigated for the final purpose. The Fenton method assisted by chemical coagulation was employed as a prtreatment method and found to be highly efficient in removing a large amount of organic compounds. And it was found that the ozonation made the permeate flux enhance in the phenol solution and phenolic-chemical wastewaster by 10% and oxidation by ozone and hydrogen peroxide was more effective. Evidence was presented that TMP decreased in more ozone concentrated water and it was found that the ozone-mediated membrane would have a limited role to prevent the membrane fouling rather than to eliminate fully.

• Journal of Korean Society of Environmental Engineers
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• v.32 no.3
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• pp.241-247
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• 2010

The Effects of operating parameters such as initial pH, gaseous ozone concentration, supplied gas flow rate on dissolved ozone concentration and phenol degradation in ozone contact reactor were investigated. Dissolved ozone concentrations were saturated to constant values after a certain ozone contact time. The saturation values were influenced by experimental parameters. Dissolved ozone concentration decreased with the increase of initial pH because the ozone is unstable in high pH regions. The gaseous ozone concentration in a constant gas supply affected the saturation concentration of dissolved ozone and the injection rate of gas with a constant ozone concentration determined the rate to reach dissolved ozone saturation. Effects of operating parameters on phenol degradation were closely related with those of parameters on dissolved ozone concentration. Phenol degradation was enhanced by the increase of initial pH, because the degradation of dissolved ozone gave birth to free radicals which have much higher reactivity with phenol. Increase of gaseous ozone concentration and gas flow rate promoted the phenol degradation through the generation of dissolved ozone which plays the role in phenol degradation. The injection of methanol deteriorated the phenol degradation through the scavenging effect on OH radicals.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.259-260
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• 2012

산업화가 발달됨에 따라 대기 오염 물질은 점차 증가하고 있는 추세에 있고 특히 기름 및 석탄 연소 보일러, 자동차, 제철, 시멘트 플렌트, 소각로 등은 미세 분진을 발생시키는 주원인이 되어 왔다. 최근 대기환경법은 오염 분진의 중량 규제로부터 $10{\mu}m$ 미만의 PM10에서 $2.5{\mu}m$ 미만의 PM2.5의 미세 분진에 대한 규제로 점차 심화되고 있으나, 이러한 미세분진은 고전적인 제거 방법으로는 매우 어려우며 고가의 HEPA 필터를 사용하여야 한다. 한편 코로나 방전을 이용하는 전기 집진은 미세 먼지 제거에 매우 효율적이어서 $1{\mu}m$ 미만의 미세 분지도 99%까지 제거가 가능하다는 장점이 있지만 입자크기가 클 경우에는 효율이 떨어지는 단점이 있다. 한편 사이클론 집진기는 매우 오래전부터 개발되어 사용되어 왔는데 가격이 저렴하고 운영비가 적게 들며 $10{\mu}m$ 이상의 먼지는 99% 이상 제거가 가능하여 산업현장에서 오랜 기간 사용되어 왔지만 입자크기가 $10{\mu}m$ 미만으로 가면 집진율이 급격히 떨어지는 단점을 가지고 있다. 본 연구에서는 기존의 사이클론 집진기의 구조를 기본으로하여 사이클론 집진기 내부에 플라즈마 방전을 설치하여 원심력에 의한 집진과 코로나 방전에 의한 전기 집진을 동시에 수행할 수 있도록 하이브리드 사이클론 집진기를 제작하였다. 제작된 사이클론 집진기는 직경 30 cm 높이 120 cm의 사이클론 구조를 가지고 있으며 1 hp의 터보송풍기를 장착하여 $20m^3$/min 이상의 유량을 처리할 수 있도록 설계 제작되었다. 제작된 하이브리드 사이클론 집진기의 성능을 평가하기 위하여 $10m^3$의 체적을 가지는 테스트 챔버 내부에 사이클론 집진기를 설치하고 향을 태워 미세 먼지를 발생시킨 후 다양한 조건에서 집진 성능을 측정하여 보았다. 미세 먼지의 경우 사이클론을 작동시키지 않아도 테스트 챔버 벽면에 흡착되어 초기에는 급격히 감소하는 경향을 보여주나 일정 시간이 경과한 후에는 매우 느리게 감소하는 현상이 관찰 되었다. 코로나 방전을 하지 않고 오존 파괴기에 활성탄만 충진한 상태에서 사이크론을 작동시킬 경우 지속적으로 천천히 감소하는 경향을 보여주었으며, 코로나 플라즈마를 방전시킨 경우 미세 먼지는 HEPA filter를 장착한 것보다도 조금 빠르게 미세먼지를 제거하였다. 챔버 내부의 미세먼지가 초기 값의 1/10에 도달하는 시간은 코로나 방전 전류가 증가할수록 짧아지는 경향을 보여주었으며 최적 조건에서 100초 이내에 90% 이상 제거가 가능하였다. 하이브리드 사이클론 집진기는 집진 뿐 만 아리라 VOC 성분도 분해가 가능하여 유해물질을 제거하는 능력이 있다. 유해 가스 제거 능력을 실험하기 위하여 분진제거 실험에 사용된 챔버 안에 아세톤을 증발시켜 50 ppm이 되도록 한 후 다양한 조건에서 유해물질 제거 실험을 수행하였다. 미세먼지와는 달리 장비를 작동하지 않을 경우 매우 느리게 아세톤 농도가 감소하였다. 이는 미세 먼지와는 달리 흡착이 발생하지 않고, 측정 챔버 자체가 완전한 밀폐가 이루어지지 않아 자연적으로 조금씩 외부로 누출되기 때문으로 판단된다. 코로나 플라즈마만 방전시켰을 경우 초기 농도의 80%가 제거되는데 걸리는 시간은 약 28분 정도로 코로나 플라즈마가 VOC 제거에 효과가 있음은 확인하였으나 제거율이 그리 높지 않음을 알 수 있었다. 한편 오존 파괴를 위해 활성탄으로 충진 된 오존파괴기를 통과시킨 경우는 약 12분 경과 후 80%가 제거됨을 확인할 수 있었으나 그 이후에는 VOC의 감소가 매우 느리게 진행됨을 알 수 있었다. 한편 활성탄 대신 $MnO_2$ 복합촉매로 충진 된 오존파괴기를 통과한 경우 약 3분 정도 경과 후 80%의 아세톤이 제거됨을 관찰할 수 있었으며 코로나 플라즈마를 작동시키면서 $MnO_2$ 복합촉매로 충진 된 오존파괴기를 통과시킨 경우 약 2분 정도 경과 80% 이상의 아세톤이 제거되어 코로나 플라즈마와 복합촉매를 사용할 경우 VOC 성분이 효과적으로 제거됨을 알 수 있었다.

• Applied Chemistry for Engineering
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• v.20 no.1
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• pp.87-93
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• 2009

Pd/activated carbon (Pd/AC) and Pd/alumina (Pd/AO) catalysts were prepared by the impregnation of palladium into activated carbon and alumina. The catalytic characteristics according to the kinds of support materials were compared. The decomposition efficiencies of ozone according to kinds of support materials are about the same when these were compared by adding 10 g of catalysts into the water saturated with ozone. The decomposition efficiencies and the oxidation characteristics (TOC, $COD_{Cr}$) of dichloroacetic acid were compared with the ozone only process and the catalytic ozonations using Pd/activated carbon and Pd/alumina catalysts. The decomposition efficiencies of dichloroacetic acid by catalytic ozonations were better than the one by ozone only process, but there was slight difference of the one between Pd/activated carbon and Pd/alumina catalyst. The decomposition efficiency of dichloroacetic acid was increased with increasing ozone dose at a constant concentration of dichloroacetic acid, but the one was little increased with increasing ozone dose at more than 1.0 L/min of ozone dose. It was seemed that the bicarbonate and the chloric ion formed throughout the decomposition of dichloroacetic acid acted as the scavenger of hydroxyl radical.