• Title/Summary/Keyword: 오경은

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자장 강화된 유도결합형 플라즈마를 이용한 TFT-LCD용 Al-Nd 박막의 식각 특성 개선에 관한 연구

  • 한혜리;이영준;오경희;홍문표;염근영
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.195-195
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    • 2000
  • TFT-LCD의 제조공정은 박막층의 식각 공정에 대해 기존의 습식 공정을 대치하는 건식식각이 선호되고 있다. 건식 식각 공정은 반도체 공저에 응용되면서 소자의 최소 선폰(CD)이 감소함에 따라 유도결합셩 프라즈마를 비롯한 고밀도 플라즈마 이용한 플라즈마 장비 사용이 증가하는 추세이다. 여기에 평판디스플레이의 공정을 위해서는 대면적과 사각형 기판에 대한 균일도를 보장할 수 있는 고밀도의 균일한 플라즈마 유지가 중요하다. 본 실험에서는 자장강화된 유도결합형 플라즈마의 플라즈마 밀도 및 균일도를 살펴보고 TFT-LCD에 gate 전극으로 사용되는 Al-Nd 박막의 식각을 통하여 식각균일도와 식각속도 및 식각 선택도 등의 건식 식각 특성을 보고자 한다. 영구자석 및 전자석의 설치는 사각형의 유도결합형 플라즈마는 소형 영구자석을 배열하여 부착하였으며, 외부에는 chamber와 같이 사각형태의 전자석을 500mm$\times$500mm의 크기를 갖는 z축 방향의 Helmholtz형으로 제작하였다. 더. 영구자석 배열에 대해서는 자석간의 거리와 세기 변화를 조합하여 magnetic cusping의 변화를 주었으며 전자석의 세기는 전류값을 기준으로 변화시켜 보았다. 실험을 통하여 플라즈마 균일도를 5% 이하로 개선하고 이러한 균일도를 유지하며 플라즈마 밀도를 높일 수 있는 조건을 찾을 수 있었다. 이러한 적합화된 조건에서 저장강화된 유도결합형 프라즈마를 Al-Nd 박막 식각에 응용한 결과, Al-Nd의 식각속도 및 식각 선택도는 유도결합형 프라즈마에 비해 크게 증가하였으며, 식각균일도가 개선되는 것을 관찰하였다. 또한 electrostatic probe(Hiden, Analytical)를 이용하여 Al-Nd 식각에 사용된 반응성 식각가스에 대한 저장강화된 유도결합형 플라즈마의 특성 분석을 수행하였다.c recoil detection, Rutherford backscattering spectroscopy, X-ray diffraction, secondary electron microscopy, atomic force microscoy, $\alpha$-step, Raman scattering spectroscopu, Fourier transform infrared spectroscopy 및 micro hardness tester를 이용하여 기판 bias 전압이 DLC 박막의 특성에 미치는 영향을 조사하였다. 분석결과 본 연구에서 제작된 DLC 박막은 탄소와 수소만으로 구성되어 있으며, 비정질 상태임을 알 수 있었다. 기판 bias 전압의 증가에 따라 박막의 두께가 감소됨을 알 수 있었고, -150V에서는 박막이 거의 만들어지지 않았으며, -200V에서는 기판 표면이 식각되었다. 이것은 기판 bias 전압과 ECR 플라즈마에 의한 이온충돌 효과 때문으로 판단되며, 150V 이하에서는 증착되는 양보다 re-sputtering 되는 양이 더 많을 것으로 생각된다. 기판 bias 전압을 증가시킬수록 플라즈마에 의한 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 (dehydrogenation) 현상을 확인할 수 있었으며, 이것은 C-H 결합에너지가 C-C 결합이나 C=C 결합보다 약하여 수소 원자가 비교적 해리가 잘되므로 이러한 현상이 일어난다고 판단된다. 결합이 끊어진 탄소 원자들은 다른 탄소원자들과 결합하여 3차원적 cross-link를 형성시켜 나가면서 내부 압축응력을 증가시키는 것으로 알려져 있으며, hardness 시험 결과로 이것을 확인할 수 있었다. 그리고 표면거칠기는 기판 bias 전압을 증가시킬수록 더 smooth 해짐을 확인하였다.인하였다.을 알 수 있

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Improved Trend Estimation of Non-monotonic Time Series Through Increased Homogeneity in Direction of Time-variation (시변동의 동질성 증가에 의한 비단조적 시계열자료의 경향성 탐지력 향상)

  • Oh, Kyoung-Doo;Park, Soo-Yun;Lee, Soon-Cheol;Jun, Byong-Ho;Ahn, Won-Sik
    • Journal of Korea Water Resources Association
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    • v.38 no.8 s.157
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    • pp.617-629
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    • 2005
  • In this paper, a hypothesis is tested that division of non-monotonic time series into monotonic parts will improve the estimation of trends through increased homogeneity in direction of time-variation using LOWESS smoothing and seasonal Kendall test. From the trend analysis of generated time series and water temperature, discharge, air temperature and solar radiation of Lake Daechung, it is shown that the hypothesis is supported by improved estimation of trends and slopes. Also, characteristics in homogeneity variation of seasonal changes seems to be more clearly manifested as homogeneity in direction of time-variation is increased. And this will help understand the effects of human intervention on natural processes and seems to warrant more in-depth study on this subject. The proposed method can be used for trend analysis to detect monotonic trends and it is expected to improve understanding of long-term changes in natural environment.

Curve Number for a Small Forested Mountainous Catchment (산지 소유역 유출곡선지수)

  • Oh, Kyoung-Doo;Jun, Byong-Ho;Han, Hyung-Geun;Jung, Sung-Won;Cho, Young-Ho;Park, Soo-Yun
    • Journal of Korea Water Resources Association
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    • v.38 no.8 s.157
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    • pp.605-616
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    • 2005
  • In this paper, runoff curve numbers (CN's) for a small forested mountainous catchment are estimated using rainfall-runoff data measured at Sulma experimental catchment every 10 minutes and a new guideline for applying the antecedent rainfall conditions (ARC's) for small mountainous watersheds in Korea is proposed. Sulma experimental catchment is a typical natural mountainous basin with $97\%$ of forested land cover and CN's are estimated to be in the range between 51 and 89 with median value of 72. The test hypothesis stating as 1-day ARC is better than 5-day ARC in determining CN's for a small mountainous watershed is shown to be acceptable. Also, linear regression equations for the estimation of CN's for small mountainous catchments are proposed. As there is no significant investigations available on CN's for small mountainous catchments, the newly proposed relationships between CN's and ARC may be used as a preliminary guideline to assign CN's for the estimation of floods from rainfall data on mountainous regions.

Flexible 의료 영상 센서로 적용하기 위한 Flexible ITO substrate의 가스분압 특성 및 Bending의 전기적 특성 연구

  • Gang, Jin-Ho;Hong, Ju-Yeon;Kim, Dae-Guk;O, Gyeong-Min;Heo, Seung-Uk;Nam, Sang-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.185-185
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    • 2013
  • 최근 의료 영상 센서는 급속도로 발전을 이룩하여 미세 병변의 위치와 그 크기를 진단하는 데에 많은 이용이 되고 있다. 하지만 기존 flat panel형태의 의료영상 센서는 인체의 굴곡으로 인한 영상 왜곡으로 발전의 한계에 이르고 있는 실정이다. 이 영상 왜곡으로 인한 오진은 환자에게 불필요한 피폭, 수술적 요법, 약물치료 등 환자에게 치명적인 의료사고를 일으킬 수 있다. 이러한 한계를 극복하기 위하여 flexible substrate을 이용한 투명전극들이 의료영상 센서로서의 적용을 연구 되어 졌다. IZO, ITO, FTO 등의 투명전극들 중 Indium Tin Oxide(ITO)는 다른 전극에 비해 높은 투명도와 낮은 저항으로 인하여 다양한 부분에서 널리 이용 되고 있다. 그러나 ITO를 flexible substrate로 적용 시 불충분한 resistivity와 기계적 강도를 지니고 있으며, 유연성을 위해 전극 재료의 두께를 감소시키면 전도성의 문제를 일으키는 단점이 있는 것으로 알려져 있다. 이러한 문제점을 보완 및 해결하기 위하여 본 연구에서는 sputtering magnetron system를 이용하여 polyethylene terephthalate(PET) substrate 위에 ITO을 증착함으로써 전기적 특성을 알아보았다. PET 필름의 크기를 55 절단하였고 증착 온도는 고온에서 수축하는 PET 필름의 물성을 고려하여 $23^{\circ}C$로 설정 하였다. 가스의 분압 비를 Ar는 50ccm으로 고정하고 O2의 비율을 각각 0, 0.2, 0.4, 0.8, 1ccm으로 나눈 후, 비율에 따라 각각 30, 60, 90sec간 sputtering 증착을 하였다. 또한 각각 30, 60, 90sec간 sputtering 증착하여 O2 유량과 sputtering 증착 시간의 변화에 따른 ITO의 전도특성과 유연성에 대한 전도특성을 측정하였다. 유연성을 측정하기 위해선 bending 각도를 각각 $0^{\circ}$ $30^{\circ}$, $45^{\circ}$, $60^{\circ}$로 구부린 후, Two-point probe를 이용하여 변화된 저항을 통해 ITO의 전기적 성질의 변화를 측정 하였다. 측정결과 flexible ITO substrate의 전도특성은 sputtering 증착시간이 증가할수록 저항 값이 낮아지는 것을 확인하였지만, O2 유량이 증가 시 저항이 낮아지다가 다시 증가하는 결과를 알 수 있었다. 본 연구에서는 Ar:O2의 50:0.8의 조건에서 90sec동안 sputtering 증착한 ITO가 131 ${\Omega}/cm^2$의 저항 값이 측정 되었고 다른 조건에서는 164 ${\Omega}/cm^2$에서 4.7 $k{\Omega}/cm^2$까지 저항변화를 가져 Ar:O2의 50:0.8의 조건이 최적화에 좋은 조건이라 판단하였다. 또한 50:0.8의 조건의 ITO의 경우 bending test시에서도 131 ${\Omega}/cm^2$에서 316 ${\Omega}/cm^2$ 정도의 안정적인 저항변화를 가지는 반면 다른 조건에서는 128 ${\Omega}/cm^2$에서 6.63 $k{\Omega}/cm^2$까지의 변화를 나타나 기계적 형상변화에도 분압비가 영향을 주는 것을 확인 할 수 가 있었다. bending 각도에 따른 저항의 변화를 측정하였을 시, 각도 변화에 따라 중심부의 저항 값이 $60^{\circ}$에서 가장 높은 변화가 나타나 전기저항이 높아진 원인을 찾기 위해 Scanning Electron Microscope (SEM)촬영을 한 결과 저항값이 높아짐에 따라 ITO의 압축응력이 작용하는 부근에 Crack이 발생함을 알 수 있었다. 이러한 결과로 flexible ITO substrate의 Crack발생률을 최소화 시키고 bending시 전도성을 유지하기 위해서는 가스의 유량 최적화가 flexible substrate의 기계적형상변화에 대한 ITO의 내구성을 향상시킬 수 있는 해답이 될 것으로 사료된다.

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Mammary Gland Tumors Treated by Surgical Excision : A Retrospective Study in 79 Dogs (수술적으로 절제한 유선종양 79례)

  • Chae, Ho-Cheol;Byeon, Ye-Eun;Lee, Sun-Tae;Lim, Ji-Hey;Kweon, Oh-Kyeong;Kim, Wan-Hee
    • Journal of Veterinary Clinics
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    • v.24 no.3
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    • pp.331-336
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    • 2007
  • Mammary gland tumors are the most common neoplasms occurring in female dogs. The treatments of mammary gland tumors are surgery, chemotherapy, hormonal therapy and radiational therapy, but surgical removal remains widely accepted treatment option for mammary gland tumors. The purpose of this study is to evaluate clinical outcomes of dogs which are performed surgical excision. Medical records were reviewed for dogs(79 cases) with mammary gland tumors treated surgically at Veterinary Medical Teaching Hospital in Seoul National University from 2001 to 2005. While 49 cases(62.0%) were benign, 30 cases(38.0%) were malignant tumors. The mean age of these dogs was 10.4 years old(range $1{\sim}16$ years). The maximal diameter of malignant tumors were various, whereas most of the benign tumors were smaller than 3cm(36 cases, 73.5%). In 12 cases(15.2%), regional lymph nodes were enlarged and lymph nodes of 3 cases had resected surgically. The performed techniques were total mastectomy, regional mastectomy, simple mastectomy, lumpectomy and unilateral mastectomy in order. Twenty-eight cases(35.4%) had postoperative complications consisted of recurrence of tumors, necrosis, dehiscence, delayed healing and edema of limbs. The recurrence rates of benign and malignant mammary gland tumors were 8 cases(16.3%) and 6 cases(20.0%). Metastasis rate was 7 cases(8.9%). Although postoperative complications were no remarkable difference in recurrence rates among surgical techniques in this study, other complications such as edema of limbs, necrosis, dehiscence and delayed healing were remarkable difference as surgical techniques. Therefore, this result suggest that choice of appropriate surgical techniques should be determined according to each patient's physical status and characteristics of tumors.

Effect of Precipitator and Quantity on the Formation of Fe3(PO4)2 (Fe3(PO4)2 생성에 미치는 침전제와 첨가량의 영향)

  • An, Suk-Jin;Lee, Sun-Young;Oh, Kyoung-Hwan;Suhr, Dong-Soo
    • Korean Journal of Materials Research
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    • v.21 no.11
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    • pp.587-591
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    • 2011
  • The effect of the precipitator (NaOH, $NH_4OH$) and the amount of the precipitator (150, 200, 250, 300 ml) on the formation of $Fe_3(PO_4)_2$, which is the precursor used for cathode material $LiFePO_4$ in Li-ion rechargeable batteries was investigated by the co-precipitation method. A pure precursor of olivine $LiFePO_4$ was successfully prepared with coprecipitation from an aqueous solution containing trivalent iron ions. The acid solution was prepared by mixing 150 ml $FeSO_4$(1M) and 100 ml $H_3PO_4$(1M). The concentration of the NaOH and $NH_4OH$ solution was 1 M. The reaction temperature (25$^{\circ}C$) and reaction time (30 min) were fixed. Nitrogen gas (500 ml/min) was flowed during the reaction to prevent oxidation of $Fe^{2+}$. Single phase $Fe_3(PO_4)_2$ was formed when 150, 200, 250 and 300 ml NaOH solutions were added and 150, 200 ml $NH_4OH$ solutions were added. However, $Fe_3(PO_4)_2$ and $NH_4FePO_4$ were formed when 250 and 300 ml $NH_4OH$ was added. The morphology of the $Fe_3(PO_4)_2$ changed according to the pH. Plate-like lenticular shaped $Fe_3(PO_4)_2$ formed in the acidic solution below pH 5 and plate-like rhombus shaped $Fe_3(PO_4)_2$ formed around pH 9. For the $NH_4OH$, the pH value after 30 min reaction was higher with the same amount of additions of NaOH and $NH_4OH$. It is believed that the formation mechanism of $Fe_3(PO_4)_2$ is quite different between NaOH and $NH_4OH$. Further investigation on this mechanism is needed. The prepared samples were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and the pH value was measured by pH-Meter.

Test Anxiety Investigation of Students in Oriental Medicine College by Using Korea's version-Test Anxiey Inventory, State-Trait Anxiety Inventory, Symptom Check List-90-Revision (시험불안척도, 상태-특성불안 척도, 간이정신진단검사를 이용한 한의학과 대학생의 시험불안 특성)

  • Yang, Dong-Ho;Oh, Young-Jin;Cheun, Young-Ho;Cho, Youn-Song;Oh, Kyong-Min;Kim, Bo-Kyung
    • Journal of Oriental Neuropsychiatry
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    • v.19 no.1
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    • pp.55-70
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    • 2008
  • Objective : The aim of this study is to investigate and measure the Test-anxiety of college students in OO Oriental Medicine by using Korea's version-Test Anxiey Inventory(K-TAI-K), State-Trait Anxiety Inventory(STAI), Symptom Check List-90-Revision(SCL-90-R), etc. Methods : We studied 181 students who being at OO College of Oriental Medicine in second semester, 2007 We used some questionaries like K-TAI-K, STAI, SCL-90-R , College Life Satisfacaion, Life Event Questionnaire. Results and Conclusions : 1.141 persons(83,43%) of students feel the largest test anxiety before test. 18 persons(9.94%) of students feel the largest test anxiety after test. 2.The 1st grade students of preparatory course and 4th grade students of regular course have the lowest score in State Anxiety Inventory and obsessive-compulsive of SCL-90-R. The 2nd grade students of regular course have the lowest score in State Anxiety Inventory and obsessive-compulsive of SCL-90-R 3. Students who failed in test one time have the lowest score , and who failed in test more than two times have the highest score in K-TAl-K Students who failed one time in grade promotion more than two times showed high score in second K-TAI-K. 4. The higher grade, the lower score in College Life Satisfaction. The scores of College Life Satisfaction have negative correlations with those of K-TAI-K, STAI SCL-90-R except phobic anxiety, 5. The scores of Life Event Questionnaire have positive correlations with those of K-TAI-K, STAI and SCL-90-R except phobic anxiety. 6. The scores of K-TAl-K have positive correlations with those of STAI, SCL-90-R, College Life Satisfaction and Life Event Questionnaire. A correlation coefficient of obsessive-compulsive scale is highest, anxiety scale is second, interpersonal sensitivity scale is third, depression scale is fourth high among the scales of SCL-90-R.

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Effect of Glutathione on Lead Induced Modulation of NO Synthesis in RAW 264.7 Cell (RAW 264.7 Cell에서 납에 의한 NO 생성의 조절에 미치는 Glutathione의 효과)

  • Oh, Gyung-Jae;Kwon, Keun-Sang;Yoon, Wook-Hee;Shin, Sae-Ron
    • Journal of Preventive Medicine and Public Health
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    • v.35 no.4
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    • pp.269-274
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    • 2002
  • Objectives : To evaluate the elect of glutathione(GSH) on lead induced modulation of nitric oxide(NO) synthesis, and to examine how lead modulates NO production in macrophages. Methods : This study was observed in a culture of RAW 264.7 cells, which originated from a tumor in a Balb/c mouse that was induced by the Abelson murine leukemia virus. The compounds investigated were lead chloride, N-acetyl-cystein(NAC), and Buthionine Sulfoximine( BSO). Results : ATP synthesis in RAW 264.7 cells was unchanged by each lead concentration exposure in a dose dependent manner. The NO synthesis was decreased when exposed to lead($PbCl_2$) concentration $0.5{\mu}M$. The presence of $300{\mu}M$ NAC, used as a pretreatment in the culture medium, caused the recovery of the lead induced decrease in NO synthesis, but in the presence of $300{\mu}M$ BSO as a pretreatment, there was no recoverey. Pretreatment with NAC and BSO had no affect on ATP synthesis at any of the lead concentrations used. Conclusions : These results indicated that GSH has a protective effect toward lead toxicity, and suggested that the inhibition of NO production in macrophage due to lead toxicity may be related to cofactors of iNOS (inducible nitric oxide synthase)

Transportation and Distribution Temperatures Affect Fruit Quality and Physiological Disorders in 'Wonhwang' Pears (수송 및 유통온도에 따른 '원황' 배 품질 및 생리장해 발생)

  • Oh, Kyoung-Young;Lee, Ug-Yong;Moon, Seung-Joo;Kim, Young-Ok;Yook, Hong-Sun;Hwang, Yong-Soo;Chun, Jong-Pil
    • Horticultural Science & Technology
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    • v.28 no.3
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    • pp.434-441
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    • 2010
  • 'Wonhwang' pear ($Pyrus$ $pyrifolia$ Nakai) often showed physiological disorder and quality deterioration during long-term storage and shelf life although this cultivar has the advantage of a good appearance and better taste for overseas exportation. This study was conducted to investigate the effect of temperature during transportation and continuing market temperature on fruit quality, and the occurrence of physiological disorder to set up the appropriate transportation and distribution temperatures in the fruits harvested at different times. Unripe fruits harvested 120 days after full bloom maintained higher firmness until 21days of shelf life at both 18 and $25^{\circ}C$ than late harvested ones. Otherwise, ripe fruits harvested 130 days after full bloom showed high incidence of mealiness breakdown of flesh tissues in 21 days of shelf-life at $25^{\circ}C$ of market temperature, but not in the fruits stored at $18^{\circ}C$. Late harvested fruits showed much severe physiological disorders when compared with early harvested ones that showed relatively lower respiration rates. Fruit quality parameters were more highly affected by market temperature than transportation temperature. Results showed that unripe fruits harvested at 120 days after full bloom maintains high marketability until 21 days of shelf-life, while the maximum shelf-life of ripe fruits harvested 130 days after full bloom will be considered at within 7 days.

Development of a Food Frequency Questionnaire for the Korea National Health and Nutrition Examination Survey: Data from the Fourth Korea National Health and Nutrition Examination Survey (KNHANES IV) (국민건강영양조사 식품섭취빈도조사지 개발: 국민건강영양조사 제4기 (2007-2009) 자료 이용)

  • Yun, Sung Ha;Shim, Jee-Seon;Kweon, Sanghui;Oh, Kyungwon
    • Journal of Nutrition and Health
    • /
    • v.46 no.2
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    • pp.186-196
    • /
    • 2013
  • The objective of this study was to develop a semi-quantitative food frequency questionnaire (FFQ) for an adult population for use in the Korea National Health and Nutrition Examination Survey (KNHANES). The 24-hour recall data for 2,939 subjects aged 19 years and over from the fourth KNHANES first year (2007) were used to extract the items included in the questionnaire. The FFQ items were developed by selection of major dishes based on the cumulative contribution rate, between-person variability based on the cumulative R2 of energy and 14 nutrients (carbohydrate, protein, fat, crude fiber, calcium, phosphorous, iron, sodium, potassium, vitamin A, thiamin, riboflavin, niacin, and vitamin C) and the number of consumers of each dish. In addition, the FFQ items were revised with analysis of 24-hour recall data of the fourth KNHANES second and third year (2008, 2009). Finally, 112 items were included in the FFQ and grouped as follows: rice (5 items), noodles and dumplings (6), breads and rice cakes (8), soups and stews (12), soybeans, eggs, meat and fish (23), vegetables, seaweed and potatoes (27), milk and dairy products (4), fruits (13), beverages (5), snacks (6) and alcoholic beverages (3). The food items of FFQ accounted for an average of 87.0% of energy and 14 nutrient intakes and also accounted for 81.7% of the between-person variability. The frequency range of the FFQ items was classified into nine categories (never or seldom, once per month, 2-3 times per month, once per week, 2-4 times per week, 5-6 times per week, once per day, twice per day and three times per day) and the portion size was divided into three categories (small, medium and large). We expect that this developed dish-based FFQ could be used in assessment of longterm dietary intakes of Korean adults.