• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.438-438
• /
• 2012

은(Ag) 또는 금(Au) 입자를 촉매로 이용하여 습식식각을 통해 선택적으로 짧은 시간동안 단결정 실리콘 웨이퍼의 표면을 텍스쳐링하여 반사방지막 특성을 효과적으로 얻을 수 있다. 일반적으로 금속입자는 주로 금속 이온이 포함된 용액이나, 전기증착법을 통해서 실리콘 웨이퍼 표면에 형성시켰지만, 금속입자의 크기와 분포를 조절하기 어려웠다. 하지만, 최근 진공장비를 이용하여 열증발증착법(thermal evaporation)과 급속열처리법(rapid thermal annealing)을 통해서 금속입자를 대면적으로 크기와 분포를 균일하게 조절할 수 있다. 이러한 현상은 열적 비젖음(thermal dewetting) 현상에 의해 실리콘 표면위에 증착된 금속 박막으로부터 나노입자로 형성할 수 있다. 본 연구에서는 실리콘 (100)기판위에 다양한 크기의 은 또는 금 나노입자를 형성시켜 식각용액에 짧은 시간동안 담그어 식각하여, 텍스쳐링 효과와 반사방지(antireflection) 특성을 분석하였다. 실험을 위해 각각 은 또는 금 박막을 열증발증착법을 이용하여 ~3-8 nm의 두께로 형성시켰으며, 급속가열장치를 이용하여 $500^{\circ}C$에서 5분 동안 열처리하였다. 그리고 탈이온수(de-ionized water)에 불화수소와 과산화수소가 혼합된 식각용액에 1-5분 동안 습식식각을 하였다. 각각의 텍스쳐링 된 샘플의 식각의 상태와 깊이를 관찰하기 위해 field emission scanning electron microscopy (FE-SEM)을 이용하여 측정하였으며, UV-vis-NIR spectrophotometer를 이용하여 300 nm에서 1,200 nm의 반사특성을 분석하였다. 또한 RCWA (rigorous coupled wave analysis) 시뮬레이션을 이용하여 텍스쳐링 된 기하학적구조에 대하여 반사방지막 특성을 이론적으로 분석하였다.

• Applied Chemistry for Engineering
• /
• v.22 no.5
• /
• pp.582-585
• /
• 2011

In this study, surface-adsorbed species of 1,2-dichlorobenzene (1,2-DCB) on mesoporous $V_2O_5/TiO_2$ catalysts synthesized by spray pyrolysis were investigated through the adsorption/desorption performed using in situ FT-IR cell. Also, the comparison of adsorbed species with $TiO_2$ and $V_2O_5/TiO_2$ synthesized by the incipient wetness was carried out.

• Polymer(Korea)
• /
• v.26 no.4
• /
• pp.501-507
• /
• 2002

In this work, diglycidylether of bisphenol-S (DGEBS) epoxy resin was prepared by alkaline condensation of bisphenol-S (BPS) with epichlorohydrin (ECH) in the presence of NaOH catalyst. The structure of the synthesized DGEBS epoxy resin was confirmed by IR, NMR spectra, and elemental analysis. The curing reaction and glass transition temperature ($T_g$) of DGEBS epoxy resin cured with phthalic anhydride (PA) and tetrahydrophthalic anhydride (THPA) at curing agents were studied by dynamic differential scanning calorimetry (DSC). The thermal stability of the cured specimen was investigated by thermogravimetric analysis (TGA). As a result, the activation energy ($E_a$) of DGEBS/PA system was higher than that of DGEBS/THPA system, whereas $T_g$, initial decomposed temperature (IDT), and decomposition activation energy ($E_t$) of DGEBS/PA were lower than those of DGEBS/THPA. This was probably due to the fact that the crosslinking density of DGEBS/THPA was increased by ring strain of curing agent.

• Journal of the Korean Vacuum Society
• /
• v.17 no.6
• /
• pp.576-581
• /
• 2008

High-quality double-walled carbon nanotubes (DWNTs) were synthesized without defects and amorphous carbonaceous particles by catalytic decomposition method at $800^{\circ}C$ in high yield. As-synthesized carbon materials almost consist of DWNT bundles with a diameter 12 - 20 nm.. The DWNTs rope have uniform diameter about 2 - 5 um and length up to several tens micrometer. DWNTs is inner tube diameter 0.9 - 1.5 nm and outer tube 1.6 - 2.2 nm. We investigate the crystallinity of DWNTs by TEM and Raman spectroscopy. We also found that the Fe-Mo bimetallic catalyst was active as a very efficient catalyst for the synthesis of DWNTs with the catalyst decomposition method. Our results also indicate that Tetra Hydro Furan (THF) is a very ideal carbon source for the synthesis of DWNTs.

• Journal of the Korean Chemical Society
• /
• v.60 no.1
• /
• pp.34-38
• /
• 2016

In this paper, zinc oxide nanoparticles (ZnO NPs) were synthesized using the sonochemical method, where equimolar amounts of zinc acetate dehydrate and sodium hydroxide were separately dissolved in deionized water, and then mixed for 30 min under magnetic stirring. The resultant white gel was sonicated for 60, 120, 180, 240, and 360 min with magnetic stirring. The obtained precipitates were centrifuged, repeatedly washed with ethanol to remove ionic impurities, and dried at 50 ℃ for 24 h. The formation of pure NPs was confirmed by X-ray diffraction, and their crystallinity and crystal phases were analyzed as well. Structural investigation was carried out by field-emission scanning electron microscopy (FE-SEM). The photocatalysis behavior of the ZnO NPs was investigated in a dark room under UV irradiation, using Rhodamine B. Spherical, rod, and flower-like ZnO NPs could be obtained by adjusting the sonication time, as observed by FE-SEM. The flower-like ZnO NPs exhibited excellent photocatalytic activity.

• Korean Chemical Engineering Research
• /
• v.45 no.6
• /
• pp.547-553
• /
• 2007

The catalytic cracking of n-octane over FER, MFI, MOR and BEA zeolites was studied by the protolytic cracking mechanism in order to understand the effect of pore structure of zeolites on their product composition and deactivation. The selectivities for $C_3$ and $C_3{^=}$ were high over the zeolites with medium pores due to additional cracking, while those for $C_4$ and $C_4{^=}$, the initial products, were high over the zeolites with large pores. MFI zeolite showed slow deactivation due to small carbon deposit, while FER zeolite with small pores deactivated rapidly with severe carbon deposit. The deactivation of BEA zeolite was slow even with a large amount of carbon deposit, but MOR zeolite showed a rapid deactivation even with a small amount of carbon deposit. The conversion measured along with the time on stream on these zeolite catalysts was simulated by a mechanism based on the simplified reaction path of n-octane cracking and the deactivation related to the pore blockage by carbon deposit.

• Korean Chemical Engineering Research
• /
• v.53 no.1
• /
• pp.53-56
• /
• 2015

In this study, investigated the synthesis method of p-Phenylenediamine (PPD) by amination of p-Diiodobenzene (PDIB) under supercritical ammonia and CuI catalyst conditions. We examined the effects of various process variables (e.g., reaction temperature, pressure, amount of ammonia inserted, amount of catalyst inserted, and reaction time) on the production yield of PPD by analyzing the Gas Chromatography (GC). The experimental results demonstrated that PPD was not produced under non-catalyst conditions, and PPD production yield increased with increasing temperature, pressure, amount of catalyst inserted, and reaction time. However, for the reaction temperature case, it was found that $200^{\circ}C$ was the optimal temperature, because thermal degradation of PPD occurred above $250^{\circ}C$. In addition, we confirmed the structure of PPD and the bonding characteristics of the amine group via FT-IR and H-NMR analysis.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.120.1-120.1
• /
• 2014

고온 plasma는 전자, 이온, 중성입자로 구성된 이온화된 기체로 국소열평형 상태의 구성입자가 수천도에서 수만도에 이르는 큰열용량을 갖는 불꽃형태를 이루고있다. 따라서 고온 plasma는 고온, 고열로 대상물질을 용융 또는 기화시켜 물질의 물리적상태를 변화시키는 열원역활을 하거나, 높은반응성을 갖는 입자들에 의한 화학반응을 촉진하는 반응촉매로 작용하여 고기능성 부품소재, 에너지 환경, 원자력, 항공우주,유가금속 재활용등의 분야에서 핵심적인 역활을 하고 있슴니다. 본 발표에서는 연구소에서 지금까지 국책과제로 수행되었던 고온 plasma을 유해폐기물(병원, 유독 액상폐기물, 군화공폐기물, 중금속 함유 폐기물, 폐 plastic 가스화 등)처리에 관한 전반적인기술을 소개하고져함.

• Clean Technology
• /
• v.16 no.1
• /
• pp.46-50
• /
• 2010

This study focuses on the removal of water-suspended toluene of a representative sick house compounds in a liquid photo-system using nanometer-sized Sn-incorporated $TiO_2$ which was synthesized by a solvothermal method. The characteristics of the synthesized Sn-$TiO_2$ were analyzed by X-ray Diffraction (XRD), Transmission electron microscopy (TEM), Scanning electron microscopy (SEM), and UV-visible spectroscopy (UV-Vis). To estimate the photocatalytic activity of Sn-$TiO_2$, the photodegradation of water-suspended toluene was performed, and the remaining concentration was determined using UV-visible spectroscopy. The water-suspended toluene photodegradation over Sn-incorporated $TiO_2$ catalyst was better than that over pure $TiO_2$ (anatase). The water-suspended toluene of 500 ppm was perfectly decomposed within 300 minutes over 0.01 mol% Sn-$TiO_2$.

• Korean Chemical Engineering Research
• /
• v.56 no.5
• /
• pp.725-731
• /
• 2018

The effects of catalysts addition on the carbonization reaction of biomass have been studied in a thermogravimetric analyzer (TGA). The sample biomasses were Bamboo and Pine. The catalysts tested were K, Zn metal compounds. The carbonization reactions were tested in the nonisothermal condition from the room temperature to $850^{\circ}C$ at a heating rate $1{\sim}10^{\circ}C/min$ on the flowing of $N_2$ purge gases. Also, the effects of catalyst on the torrefaction were tested in the temperature condition of 220, 250, $280^{\circ}C$ at 30 min. Combustion characteristic for the torrefied catalyst biomass were studied in the nonisothermal conditions of $200{\sim}850^{\circ}C$. As the results, the initial decomposition temperatures of the volatile matters ($T_i$) and the temperature of maximum reaction rate ($T_{max}$) were decreased with increasing the catalyst amounts in the sample biomass. The char amounts remained after carbonization at $400^{\circ}C$ increased with the catalyst amounts. Therefore catalysts addition can be decreased the energy for carbonization process and improved the heating value of product char. The catalysts reduced the optimum torrefaction conditions from $250^{\circ}C$ to $220^{\circ}C$. The torrefied catalyst biomass have lower activated energy from 46.5~58.7 kJ/mol to 25.1~27.0 kJ/mol in the nonisothermal combustion reaction.