• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2003.04a
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• pp.26-26
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• 2003

• Proceedings of the Materials Research Society of Korea Conference
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• 2005.05a
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• pp.299-299
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• 2005

• Journal of Convergence for Information Technology
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• v.7 no.5
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• pp.123-128
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• 2017

Nanostructured materials have received attention due to their unique electronic, optical, optoelectrical, and magnetic properties as a results of their large surface-to-volume ratio and quantum confinement effects. Thermal chemical vapor deposition process has attracted much attention due to the synthesis capability of various structured nanomaterials during the growth of nanostructures. In this study, silicon oxide nanowires were grown on Si\$SiO_2$(300 nm)\Pt(5~40 nm) substrates by two-zone thermal chemical vapor deposition with the source material $TiO_2$ powder via vapor-liquid-solid process. The morphology and crystallographic properties of the grown silicon oxide nanowires were characterized by field-emission scanning electron microscope and transmission electron microscope. As results of analysis, the morphology, diameter and length, of the grown silicon oxide nanowires are depend on the thickness of the catalyst films. The grown silicon oxide nanowires exhibit amorphous phase.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.367.2-367.2
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• 2016

그 동안 열화학 기상 증착법으로 고결정의 그래핀을 합성하는 연구가 많이 진행되었다. 더불어 그래핀을 소자로 이용하기 위해서는 합성하는 과정에서 그래핀의 모양 및 형태를 제어하는 방법이 필요하기 때문에 이와 관련된 연구들 또한 진행되었다. 일반적으로 그래핀의 모양은 촉매의 모양에 의존하기 때문에 촉매 금속의 패터닝에 관심이 집중되었고, 보다 작은 크기의 구조를 완성하기 위해 포토리소그래피(photolithography)법을 이용하는 것이 보편화 되었다. 본 연구에서는 촉매 금속을 이용하여 그래핀을 합성시, 촉매 표면에 잔여하는 유기물(포토리소공정으로 인해 발생하는 잔여물)이 열화학 기상 증착법으로 그래핀을 합성하는 방법에 문제를 야기한다는 것을 확인하였다. 이를 해결하기 위해 플라즈마를 이용하여 잔여 유기물을 제거하였고, 그에 따라 합성된 그래핀의 결정성이 향상되는 것을 확인하였다.

• Journal of Institute of Convergence Technology
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• v.2 no.2
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• pp.30-34
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• 2012

The SI thermochemical cycle process accomplishes water splitting through distinctive three chemical reactions. We focused on thermodynamic models applicable to the process. Recently, remarkable models based on the assumed ionic species have been developed to describe highly nonideal behavior on the liquid phase reactions. ElecNRTL models with ionic reactions were proposed in order to provide reliable process simulation results for phase equilibrium calculations in Section II and III. In this study, the current thermodynamic models of SI thermochemical cycle process were briefly described and the calculation results of the applied ElecNRTL models for phase equilibrium calculations were illustrated for binary systems.

• Journal of the Korean Vacuum Society
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• v.5 no.4
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• pp.327-332
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• 1996

In this study, the effects of $WSi_x$, thickness and fluorine concentration in tungsten polycide gate structure on gate oxide were investigated. As $WSi_x$, thickness increases, gate oxide thickness increases with fluorine incorporation in gate oxide, and time-to-breakdown($T_{BD,50%}$) of oxide decreases. The stress change with $WSi_x$ thickness was also examined. But it is understood that the dominant factor to degrade gate oxide properties is not the stress but the fluorine, incorporated during $WSi_x$ deposition, diffused into $WSiO_2$ after heat treatment. In order to understand the effect of fluorine diffusion into oxidem fluorine ion implanted gates were compared. The thickness variation and $T_{BD,50%}$ of gate oxide is saturated over 600 $\AA$ thickness of $WSi_x$. The TEM and SIMS studies show the microstructure less than 600 $\AA$ thickness is dense and flat in surface. However, over 600$\AA$, the microstructure of $WSi_x$ is divided into two parts: upper porous phase with rugged surface and lower dense phase with smmoth interface. And this upper phase is transformed into oxygen rich crystalline phase after annealing, and the fluorine is captured in this layer. Therefore, the fluorine diffusion into the gate oxide is saturated.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.22.1-22.1
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• 2009

차세대 CMOS 공정에서 유전상수가 높은 게이트 절연막과 함께 게이트 전극이 관심을 끌고 있다. 게이트 전극은 전도도가 높아야 하고 p-MOS, n-MOS에 맞는 일함수를 가져야 하며 열적 특성이 안정해야 한다. 탄탈룸 계열 탄화물이나 질화물은 게이트 전극으로 관심을 끌고 있는 물질이며 이를 원자층 화학증착법으로 박막화 하는 공정이 관심을 끌고 있다. 원자층 화학공정에서는 전구체의 역할이 중요하며 이의 기상반응 메카니즘, 표면 반응 메카니즘을 제대로 이해해야 한다. 본 연구에서는 TBTDET (tert-butylimido tris-diethylamido tantalum) 전구체의 반응 메커니즘을 FTIR(Fourier Transform Infrared)을 이용해 진단하였다. 또한 수소, 암모니아, 메탄을 이용한 열화학 원자층 증착, 플라즈마 원자층 증착 공정을 수행하여 박막을 얻고 이들의 특성을 평가하였다. 각 공정에 따라 반응 메커니즘이 달라지고 박막의 조성이 달라지며 또한 박막의 물성도 달라진다. 특히 박막에 형성되는 TaC, TaN, Ta3N5, Ta2O5 (증착 후 산소의 유입에 의해 형성됨) 등의 조성이 공정에 따라 달라지며 박막의 물성도 달라진다. 반응메카니즘의 연구를 통해 각 공정에서 어떠한 조성의 박막이 얻어지는 지를 규명하였고 박막의 밀도에 따라 산소유입량이 어떻게 달라지는 지를 규명하였다.

• Journal of the Korean Institute of Gas
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• v.2 no.1
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• pp.74-82
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• 1998

The grain boundary etching method as a technique for assessing degradation of structural materials used at elevated temperature has received much attention since it is simple, inexpensive and easy to apply to real plant components. In this study, the technique is applied to some aged petroleum and chemical plant components such as reactors and drums. As a degradation parameter, intersection number ratio ($N_i/N_o$), is employed. The intersection number ratio ($N_i/N_o$) is defined as the ratio of intersection number ($N_i$) obtained from 5-minute picric acid etched surface to the number ($N_o$) obtained from Nital etched surface. In order to study degradation level, several relationships were measured such as the correlation between shift in ductile brittle transition temperature, $({\Delta}DBTT)_{sp}$ and intersection number ratio, ($N_i/N_o$) and the correlation between the measured ($N_i/N_o$) values and Larson-Miller Parameter values.

• Journal of Korean Society of Archives and Records Management
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• v.1 no.1
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• pp.177-200
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• 2001

The causes which affects the deterioation of paper arc paper structure, papermaking process, temperature and rative humidity, light and biological agents. Paper made from cllulose fibers by the wood and the nonwood, This paper structure is further hydrolyzed by acidic additive such as the sizing agents during the manufacturing process. These additives leave residual acids in the paper, which break the cellulose clown to simper molecules. The results is weak paper and bas caused most of the damage to book. This study was carried out to investigate the presevation and the deacidification for the permanenece by the book. The deacidification and the chemical agents aims to nutralized the aicd in paper and add alkaline to it as a buffer to withstand future acid attacks. By applying the system to the acid paper with a pH of 4.5 neutralized a pH of 8.5. The expected of alkaline reserved paper extend about 2times and 3times than acidic paper.

• Transactions of the Korean hydrogen and new energy society
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• v.19 no.3
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• pp.226-231
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• 2008

Cu/Fe/$Al_2O_3$ granules with various sizes have been prepared by a combination of sol-gel and oil drop method for the use in sulfur trioxide decomposition, a subcycle in thermochemical sulfur-iodine cycle to split water in the hydrogen and oxygen. The size of composite granules have been mainly changed by the flow-rate of the gel mixture before dropping in the synthesis. The structural properties of the samples were comparable with granule size. In the reaction, the catalytic activity was enhanced by decreasing size in the entire reaction temperature ranges.