• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.10a
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• pp.417-422
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• 2002

One of the major limitations of productivity and quality in metal cutting is the machining accuracy of machine tools. The machining accuracy is affected by geometric errors, thermally-induced errors, and the deterioration of the machine tools. Geometric and thermal errors of machine tools should be measured and compensated to manufacture high quality products. In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. In this study, the compensation device and temperature-based algorithm have been implemented on the machining center in order to compensate thermal error of machine tools under the real-time. The thermal errors are predicted using the neural network and multi-regression modeling methods. In order to compensate thermal characteristics under several operating conditions, experiments performed with five gap sensors and manufactured compensation device on the horizontal machining center.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.11
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• pp.4121-4128
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• 2010

A probe card is used in testing semiconductor wafers. It must maintain a precise location tolerance for a fine pitch due to highly densified chips. However, high heat transferred from its lower chuck causes thermal deformations of the probe card. Vertical deformation due to the heat will bring contact problems to the pins in the probe card, while horizontal deformation will cause positional inaccuracies. Therefore, probe cards must be designed with proper materials and structures so that the thermal deformations are within allowable tolerances. In this paper, heat transfer analyses under realistic loading conditions are simulated using ANSYS$^{TM}$ finite element analysis program. Thermal deformations are calculated based on steady-state temperature gradients, and an optimal structure of the probe card is proposed by adjusting a set of relevant design parameters so that the deformations are minimized.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.399-404
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• 2002

Improvement of measuring accuracy is an essential part of quality control manufacturing process. The OMM is less than the CMM in measure accuracy but the OMM system is more efficient, easier to use than other measurement system. About 40~70% of the machine tool errors are induced by the thermal errors. Therefore, a key requirement for improving the measuring accuracy is to reduce the geometric and thermal errors. Thermal errors are measured by a ball bar system and predicted by the thermal error modeling. Furthermore, using the pre-defined thermal error map approach compensates the geometric accuracy of the OMM. Appropriate experiments are performed using ball-bar system, temperature measuring devices and touch-type probe. Compensated results are compared with those obtained using CMM to verify the proposed methods.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.10 no.4
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• pp.70-75
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• 2001

In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindel unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball arti-fact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.453-457
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• 2001

One of the major limitations of productivity and quality in metal cutting is the machining accuracy of machine tools. The machining accuracy is affected by geometric and thermal errors of the machine tools. In this study, the compensation device is manufactured in order to compensate thermal error of machine tools under the real-time. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindle unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball artifact, and five gap sensors. In order to compensate thermal characteristics under several operating conditions, experiments performed with five gap sensors and manufactured compensation device on the horizontal machining center.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.10a
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• pp.449-453
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• 2000

In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindle unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball artifact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.215-221
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• 1999

The object of the thermal error compensation system in machine tools is improving the accuracy of a machine tool through real time error compensation. The accuracy of the machine tool totally depends on the accuracy of thermal error model. A thermal error model can be obtained by appropriate combination of temperature variables. The proposed method for optimal variable selection in the thermal error model is based on correlation grouping and successive regression analysis. Collinearity matter is improved with the correlation grouping and the judgment function which minimizes residual mean square is used. The linear model is more robust against measurement noises than an engineering judgement model that includes the higher order terms of variables. The proposed method is more effective for the applications in real time error compensation because of the reduction in computational time, sufficient model accuracy, and the robustness.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.4
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• pp.135-141
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• 2000

The major role of temperature sensors in thermal error compensation system of machine tools is improving machining accuracy by supplying reliable temperature data on the machine structure. This paper presents a new method for fault diagnosis of temperature sensors and recovery of faulted data to establish the reliability of thermal error compensation system. The detection of fault and its location is based on the correlation coefficients among temperature data from the sensors. The multiple linear regression model which is prepared using complete normal data is also used fur the recovery of faulted data. The effectiveness of this method was tested by comparing the computer simulation results and measured data in a CNC machining center.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.10a
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• pp.214-219
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• 2001

One of the major limitations of productivity and quality in metal cutting is the machining accuracy of machine tools. The machining accuracy is affected by geometric errors, thermally-induced errors, and the deterioration of the machine tools. Geometric and thermal errors of machine tools should be measured and compensated to manufacture high quality products. In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. In this study, the compensation device and temperature-based algorithm have been presented in order to compensate thermal error of machine tools under the real-time. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindle unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball artifact, and five gap sensors. In order to compensate thermal characteristics under several operating conditions, experiments performed with five gap sensors and manufactured compensation device on the horizontal machining center.

• Proceedings of the Optical Society of Korea Conference
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• 2003.02a
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• pp.90-91
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• 2003

대부분의 가공기 혹은 측정기에 있어 이송테이블은 그 기능수행의 기본을 담당하고 있으며 이송테이블의 운동 정밀도와 고속화는 목표하는 정밀도와 생산성으로 직결된다. 종래에는 형상특성, 열변형 등의 계통 오차만을 오프라인(Off-line)으로 측정하고 소프트웨어적으로 보상하는 방법을 사용하였으나 초정밀 분야에서 요구되는 테이블의 운동정밀도는 기계적 강성한계를 넘는 정밀도이므로, 테이블 이송 시 발생하는 운동오차를 실시간으로 측정하고, 보상할 수 있는 온라인(On-line)개념의 능동형 보상이 필요하다. (중략)