• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.56.1-56.1
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• 2015

RF 마그네트론 스퍼터링법을 이용하여 유리 기판위에 ZnO:Al 박막을 증착하고 열공정에 따른 박막의 구조적, 광학적, 전기적 특성을 연구하였다. 열공정 파라미터로는 공정 온도와 어닐링 온도를 이용하였다. 각각의 열공정 파라미터 변화에 따라 ZnO:Al 박막의 특성이 영향 받음을 확인하였다. 모든 샘플에서(002) 우선 배향성을 보였으며 80% 이상의 투과도 특성을 보였다. 하지만, 열공정에 따라 결정성이 나빠지기도 좋아지기도 하였다. 표면 거칠기는 열공정 종류에 상관없이 온도 증가에 따라 증가하였다. 또한, 투과도도 열공정 종류에 상관없이 온도 증가에 따라 감소함을 보인 반면 광학적 밴드갭은 적색이동 현상을 나타내었다. 적색이동 현상은 Burstein-Moss effect와 관련이 있으며 온도증가에 따라 캐리어 이동도가 감소하여 나타난 현상이다. 열공정에서 따라 비저항이 민감하게 변화하였다. 각각의 열공정에서 온도가 증가함에 따라 비저항이 증가하였고 캐리어 농도와 이동도는 감소함을 보이고 있다. ZnO:Al 박막의 화학적인 상태를 분석한 결과, 열공정 온도에 따라 Al 농도 변화와 불순물 표면 흡착 변화가 발생하였으며 이에 따라캐리어 농도와 이동도의 감소가 나타난 것으로 판단된다.

• Applied Chemistry for Engineering
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• v.9 no.4
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• pp.481-485
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• 1998

Hydrated aluminum sulfate, an inorganic polymer, was synthesized from kaolin in $H_2SO_4$ solution using microwave energy. The maximum rates of alumina extracted from calcined kaolin were 72.8% in a conventional process ($80^{\circ}C$, 1M, and 180min) and 99.9% in a microwave process ($90^{\circ}C$, 1M, and 60 min). Compared with the conventional one, the hydrated aluminum sulfate synthesized under the microwave process had layer structure consisting of plate-shaped large grains. After synthesis and then calcination at $1100^{\circ}C$, both products on conventional and microwave processes were ${\gamma}-Al_2O_3$ with agglomerated powders of spherical shape. The specific area of the products in conventional and microwave processes were 113.5 and $106.6m^2/g$, and their average grain sizes were 46.5 an $26.3{\mu}m$, respectively.

• Journal of Platform Technology
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• v.8 no.2
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• pp.22-31
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• 2020

The construction and operation of industrial automation has been actively taking place from manufacturing plan to production for improving operational efficiency of production line and flexibility of equipment. ISO/TC184 is standardizing on operating methods that can share information of programmable device controllers such as PLC and IoT that are geographically distributed in the production line. In this study, the design of the cell controller consists of PLC group and IoT group that perform signals such as temperature sensors, gas sensors, and pressure sensors for thermal processes and corresponding motors or valves. The operation and analysis of the cell controller were performed using SDN(Software Defined Network) and the three types of process services performed in thermal processes are real-time transmission service, loss-sensitive large-capacity transmission service, and normal transmission service. The simulation result showed that the average loss rate improved by about 17% when the traffic increased before and after the application of the SDN route technique, and the delay in the real-time service was as low as 1 ms.

• Plant Journal
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• v.9 no.1
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• pp.43-49
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• 2013

In this study, the natural frequency of the actual operating vertical pump in the P combined cycle power plant is measured and the cause of high vibration is determined by using fluid-structure coupled vibration theory. Choosing the vibration reduction plan suited for field conditions and using the numerical analysis verify effectiveness of the plan. The plan is applied to the actual pump and the empirical experiments are conducted.

• Transactions of Materials Processing
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• v.12 no.5
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• pp.487-492
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• 2003

Tension variations with heat treatment in shadow mask for flat braun tubes are investigated in this study. In CRT, landing shift of the electron beam due to thermal deformation of the tension mask made the color purity of screen worse. In order to get the final results of thermal deformation, the tensile force within the mask and the welding processes between the rail and the extended mask have to be analysed sequentially. In this study, the effect of heat treatment is studied in terms of tension variations of shadow mask during its manufacturing process.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.137-138
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• 2012

박막태양전지의 경우 기판재와 태양전지를 구성하는 반도체 층간의 열팽창 거동 차이가 태양전지의 변형을 야기한다. 이러한 열변형은 태양전지의 효율에 영향을 주는 것으로 알려져 있다. 그러므로 태양전지를 구성하는 반도체 층과 열팽창 거동이 유사한 기판재의 적용이 필요하다. 본 연구에서는 연성 CIGS 태양전지를 구성하는 기판과 박막층의 두께변화가 열공정 중 발생하는 잔류응력에 미치는 영향을 전산해석 하고자 하였다. 전산해석 결과 Fe-52wt%Ni 기판재의 두께가 증가함에 따라 CIGS 박막층 내부의 잔류응력은 감소하였다. SiO2 절연층의 두께가 증가하면 CIGS 박막층의 잔류응력이 증가하였다. Mo 후면전극층이 얇아지면 잔류응력이 감소하였으나 CIGS층의 두께변화는 CIGS층의 잔류응력에 큰 영향을 미치지 않았다.

• Journal of the Korean neurological association
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• v.36 no.4
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• pp.381-383
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• 2018

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.192-193
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• 2006

A 16Mb ITIC FeRAM device was fabricated with BLT capacitors. The average value of the switchable 2 polarization obtained m the 32k-array (unit capacitor size: 068 ${mu}m^2$) capacitors was about 16 ${\mu}C/cm^2$ at 3V and the uniformity within an 8-inch wafer was about 2.8%. But a lot of cells were failed randomly during the measuring the bit-line signal of each cell. It was revealed that the Grain size and orientation of the BLT thin film were severely non-uniform. Therefore, the uniformity of the grain size and orientation was improved by changing the process conditions of post heat treatment. The temperature of nucleation step was the very effective on varying the microstructure of the BLT thin film. The optimized temperature of the nucleation step was $560^{\circ}C$.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.7
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• pp.747-754
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• 2004

Thermo-fluid characteristics in coke oven, sintering machine and blast furnace in iron-making facility are key processes related to the quality and productivity of the pig iron. Solid material in the processes usually forms a bed in a gas flow. For simulation of the processes by mathematical model, the solid beds are idealized to be a continuum and a reacting solid flow in the gas flow. Governing equations in the form of partial differential equations for the solid material can be constructed based on this assumption. Iron ore sintering bed is simulated and limited amount of parametric study have been performed. The results have a good agreement with the experimental results or physical phenomena, which shows the validity and applicability of the model.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.7
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• pp.575-580
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• 2007

A 16 Mb 1T1C FeRAM device was integrated with BLT capacitors. But a lot of cells were failed randomly during the measuring the bit-line signal distribution of each cell. The reason was revealed that the grain size and orientation of the BLT thin film were severely non-uniform. And the grain size and orientation were severely affected by the process conditions of post heat treatment, especially nucleation step. The optimized annealing temperature at the nucleation step was $560^{\circ}C$. The microstructure of the BLT thin film was also varied by the annealing time at the step. The longer process time showed the finer grain size. Therefore, the uniformity of the grain size and orientation could be improved by changing the process conditions of the nucleation step. The FeRAM device without random bit-fail cell was successfully fabricated with the optimized BLT capacitor and the sensing margin in bit-line signal distribution of it was about 340 mV.