• The Optical Journal
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• v.13 no.2 s.72
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• pp.36-38
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• 2001

1998년에 20$\%$ 이상의 성장을 보인 산업용 레이저 시장은 1998년과 1999년 사이에, 재료가공분야에서 약 5$\%$의 성장률에 그쳤다. 2000년도에는 21$\%$로 성장이 회복되어 2001년에는 계속적인 두자리수 성장이 예상되고 있다. 산업용 레이저 시장은 빠르면 2003년부터는 20억불대의 시장이 형성될 것으로 예상되며, 2001년에 약 3만 여대의 레이저가 판매될 것으로 보인다

• Proceedings of the Materials Research Society of Korea Conference
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• 2000.11a
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• pp.163-163
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• 2000

• Laser Solutions
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• v.6 no.3
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• pp.19-28
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• 2003

The manufacturing process for the microfluidic device can include sequential steps such as master fabrication, electroforming, and injection molding. The laser ablation, using masks, has been applied to the fabrication of channels in microfluidic devices. In this research, an excimer laser was used to engrave microscopic channels on the surface of PET (polyethylene terephthalate), which shows a high absorption ratio for an excimer laser beam with a wavelength of 248 m. When 50-${\mu}{\textrm}{m}$-wide rectangular microscopic channels are ablated with a 500 ${\times}$ 500 ${\mu}{\textrm}{m}$ square mask at a magnification ratio of 1/10, ditch-shaped defects were found in both corners. The measurement of laser beam intensity showed that a coherent image in the PET target caused such defects. Analysis based on the Fourier diffraction theory enabled the prediction of the coherent shape at the image surface as well as the diffraction beam shape between the mask and the image surface. It also showed that the diameter of the aperture had a dominant effect. The application of aperture with a diameter of less than 3 mm helped to eliminate such defects in the ablated rectangular microscopic channels on PET without such ditch-shaped defects.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.12
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• pp.13-20
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• 2004

Manufacturing process for the microfluidic device can include such sequential steps as master fabrication, electroforming, and injection molding. The laser ablation using masks has been applied to the fabrication of channels in microfluidic devices. In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation of PET (polyethylene terephthalate) by the excimer laser radiation could be used successfully to make three dimensional master fur nickel mold insert. The mechanism fur ablative decomposition of PET with KrF excimer laser $({\lambda}: 248 nm, pulse duration: 5 ns)$ was explained by photochemical process, while ablation mechanism of PMMA (polymethyl methacrylate) is dominated by photothermal process, the .eaction between PC (polycarbonate) and KrF excimer laser beam generate too much su.face debris. Thus, PET was adopted in polymer master for nickel mold insert. Nickel electroforming using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

• Proceedings of the Optical Society of Korea Conference
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• 2002.07a
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• pp.78-79
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• 2002

눈의 시력을 진단하는 도구 또는 장비로는 자각식 측정법인 시력표, 타각식 계측기로는 검영기와 자동굴절력측정기 등이 있다. 이들 방법으로 얻는 결과는 시력 또는 굴절력 값으로 제한된다. 그러나 인체안도 일반 광학계와 같이 공간적으로 불균일한 광학적 특성을 가지기 때문에, 눈의 광학적 기능을 정확하게 진단하기 위해서는 공간에 따른 광학수차 분포를 측정할 필요가 있다. 특히 엑시머레이저를 이용한 굴절각막교정수술에서, 광학수차 정보는 정교한 교정수술을 위한 기초 자료가 될 수 있다. (중략)

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.5
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• pp.99-103
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• 2012

Presently, A glass is widely used in telecommunication system, optoelectronic devices and micro electro mechanical systems. Micro drilling of glass using the laser can save processing cost and improve the accuracy. This paper experiments micro drilling using KrF excimer laser on the pyrex glass of $500{\mu}m$ thickness. We have experiment to find out optimum laser machining conditions of micro drilling of glass and ablation depth and influence by processing parameter suc'h pulse repetition rate, energy density and number of pulses. Pulse repetition rate don't influence ablation depth at the micro drilling of pyrex glass. Energy density influence micro drilling of parallelism and maximum thickness that can be drilled. Ablation depth is most influenced by number of pulses.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.33A no.6
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• pp.172-177
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• 1996

We have characterized XeCl excimer-laser-induced crystallization of thin amorphous silicon films deposited by PECVD (${\alpha}$-Si:H) and LPCVD (${\alpha}$-Si). The electrical properties, surface roughness and crystallinity of crystallized thin films have been measured. The dc conductivities, crystallinity andsurface roughness of the films increased as the laser energy density and shot density were increased. The properties of laser annealed films deposited by LPCVD were better than those of thin films deposite by PECVD. We have also found that the multiple shots with relative low energy density were more benifical to the improsvement of surface roughness than the single shot with high energy density preserving the crystallinity.

• Korean Journal of Optics and Photonics
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• v.2 no.4
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• pp.186-192
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• 1991

For the micro-lithography using a excimer laser beam $(\lambda\leq0.248$\mu\textrm{m})$. a mirror system consisting of four spherical surfaces with reductlon magnification 5X is designed. Initially the aplanat, flat field and the distortion free condition of the system are analytically investigated within Seidel 3rd order aberrations. And the computer-aided optimization technique has been employed for the further improved performance of the system. The final system has N.A. of 0.15 and image field diameter 3.3 mm, and has the diffraction-limited performance for KrF eximer laser beam.

• Proceedings of the Optical Society of Korea Conference
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• 2006.07a
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• pp.507-508
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• 2006

Sol-gel 및 MCVD 공정을 사용하여 Ag 가 함유된 광섬유를 제조하였다. KrF 엑시머 레이저에서 출력된 248 nm 의 UV 빔을 광섬유에 조사한 경우 450 nm 를 중심으로 광흡수가 6 dB/cm 로 급격히 증가하는 것을 확인할 수 있었으며, 이는 UV 레이저 조사에 의한 Ag 나노입자 형성에 따른 것으로 추측된다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.12
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• pp.1582-1582
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• 2000

Rayleigh scattering and laser induced predissociative fluorescence are employed for capturing two-dimensional images of temperature and species concentration in a laminar nonpremixed flame of a diluted hydrogen jet. Rayleigh scattering cross-sections are experimentally obtained at 248nm. Dispersed LIPF spectra of OH and O₂ are also measured in a flame in order to confirm the excitation of single vibronic state of OH and O₂are excited on the P₁(8) line of the A ²∑+ (v＇=3) - X ²∏(v˝=0) band and R(17) line of the Schumann-Runge band B ³∑u- (v＇=0) - X ³∑g-∏(v˝=6), respectively. Fluorescence spectra of OH and Hot O₂ are captured and two-dimensional images of the hydrogen flame field are successfully visualized.