• Title/Summary/Keyword: 엑시머레이저

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Mo 기판에 성장된 a-Si:H의 결정화 연구

  • 임동건;김도영;정세민;이준신
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1997.10a
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    • pp.145-146
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    • 1997
  • 수소화된 비정질 규소(a-Si:H)는 전자소자에서 광범위하게 사용되고 있다. 하지만 a-Si:H는 반송자 이동도가 느리고 불안정하기 때문에 그 특성개선이 요구되어진다. 본 논문은 금속기판 Mo위에 a-Si:H를 성장하고 후속 결정화 연구를 수행하였다. a-Si:H 박막은 DC 글로우 방전으로 Mo 기판위에 증착되었다. 실험에 사용되어진 열처리로는 질소분위기, 진공상태, 급속가열 및 엑시머레이저 열처리를 행하였다. 열처리 온도는 10$0^{\circ}C$에서 120$0^{\circ}C$까지 행하였다. 엑시머레이저의 에너지는 단위 펄스당 90에서 340mJ이였다. 결정화에 영향을 주는 요소로는 불순물 주입, 온도, 박막의 두께 및 열처리 시간등을 조사하였다. 불순물이 주입된 비정질규소는 진성규소보다 더 좋은 결정화를 보였다. 불순물 주입은 낮은 온도에서의 결정화에 도움을 주었다. 열처리 시간은 결정화에 큰 영향을 미치지 못하였다. 반면에 열처리 온도는 결정화에 큰 영향을 주었다.

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A study of excimer laser ablation of polymer (폴리머의 엑시머레이저 어블레이션에 관한 연구)

  • Shin, Dong-Sik;Lee, Je-Hoon;Seo, Jung;Kim, Do-Hoon
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1857-1860
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    • 2003
  • The ablative decomposition mechanism of PMMA(polymethyt methacrylate), PET(polyethylene terephthalate) and PC(polycarbonate) with KrF excimer laser(λ: 248nm, pulse duration: 5ns) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET, PC are a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET, PC are dominated by photochemical process.

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해외광산업 신기술정보

  • Korea Association for Photonics Industry Development
    • Photonics industry news
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    • s.10
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    • pp.50-54
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    • 2002
  • 본지에서는 한국과학기술정보연구원(KISTI)의 자료 협조를 받아 광산업과 관련된 해외 신기술 동향을 소개하고 있습니다.

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Processing of gelatin using nanosecond and femtosecond pulsed lasers (나노초 및 펨토초 레이저를 이용한 젤라틴의 미세가공)

  • Seo, C.;Ahn, D.;Kim, D.
    • Laser Solutions
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    • v.15 no.2
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    • pp.1-5
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    • 2012
  • Gelatin is used as a model for soft biological tissues in studying laser interaction with the soft tissues. In this work, we analyze the interaction between gelatin and excimer and Ti:Sapphire femtosecond laser under various conditions, especially by varying the laser, laser fluence and pulse number. The results show that swelling of the surface and ablation depth can be controlled by adjusting the process parameters.

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Fabrication optimization of Fiber Bragg gratings (광섬유 브래그 격자(Fiber Bragg grating) 제작과 제작 조건에 따른 특성 향상)

  • Choi, Bo-Hun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.14 no.7
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    • pp.1680-1686
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    • 2010
  • Optical fiber Bragg grating to have the lowest transmitivity at 1549.9nm wavelength was fabricated using a Gaussian distributed KrF Eximer laser of 248nm lasing wavelength and a phase mask of 1.072um period. The proper alignment of an optic setup to fabricate fiber gratings was investigated and the reproductivity of the grating fabrication was examined using the obtained optimum fabrication condition in this experiment.

Improving the efficiency in discharge pumped excimer laser (방전여기 엑시머 레이저의 고효율화 방안)

  • Lee Young-Woo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2006.05a
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    • pp.368-370
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    • 2006
  • 자외선영역에서 발진하는 엑시머 레이저 장치의 가스 장수명화에 의한 고효율화 방안을 제안하였다. 가스수명에 대하여 불소$(F_2)$의 감소와 불순물 발생에 의한 출력 변화의 이론적 해석 결과를 보고한다.

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Comparison of Clinical Results of Excimer Laser Correction of Myopia and Compound Myopic Astigmatism Using VISX 20/20B $VisionKey^{TM}$ (VISX 20/20B $VisionKey^{TM}$ 엑시머레이저의 version 4.01 software를 이용한 근시교정술 및 근시성난시교정술의 임상성적 비교)

  • Lee, Sang-Bumm;Bae, Sang-Bok
    • Journal of Yeungnam Medical Science
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    • v.17 no.1
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    • pp.55-65
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    • 2000
  • Purpose: To compare the efficacy, predictability, stability and safety of excimer laser photorefracive keratectomy(PRK) for myopia and photoastigmatic refractive keratectomy(PARK) for compound myopic astigmatism. Methods: Two-hundred and three eyes(l18 eyes < -7D spherical equivalent, 85 eyes ${\geq}$ -7D spherical equivalent) received excimer laser correction for compound myopic astigmatism and 152 eyes(116 eyes < -7D, 36 eyes ${\geq}$ -7D) for simple myopia. A VISX 20/20B $VisionKey^{TM}$ excimer laser was used to perform either PARK or PRK. Visual acuity with and without correction, refraction, IOP, corneal haze, and topography were evaluated at 1, 3, 6, and 12 months postoperatively. All patients were followed up for more than 12 months. Results: Postoperative refraction were generally stable after 3 months without significant early overcorrection. At 12 months, 110(94.8%) eyes that underwent PRK and 104(88.1%) eyes that underwent PARK achieved UCVA of 20/30 or better in the group who had lower than -7D correction. For eyes treated with -7D or more, these figures were 31(86.1%) eyes after PRK and 57(67.1%) eyes after PARK. The incidences of within 1D of plano refraction at 1 year follow-up were 97.4% after PRK and 93.2% after PARK in the group who had lower than -7D correction. For eyes treated with -7D or more, these figures were 80.6% after PRK and 70.6% after PARK. Conclusions Myopia with or without astigmatism was successfully treated in most of the eyes using PRK or PARK with VISX 20/20B $VisionKey^{TM}$ excimer laser. The predictability and stability of the postoperative refraction during the first 12 months seem to be quite reliable. Further improvement of excimer laser system and software should increase the clinical outcomes and safety of refractive procedures.

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