Fabrication and Electrical Properties of High Reliability Ceramic Capacitor by RF Sputtering (RF Sputtering을 이용한 고신뢰성 Ceramic Capacitor의 제조 및 전기적 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2010.06a
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- pp.300-300
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- 2010