• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.306-306
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• 2007

The surface was transformed to porous titanium oxide by the anodization of pure titanium. Titanium was anodized in non-aqueous and aqueous electrolytes at different potentials between 5 V and 150 V. Various electrolytes were compose of ethylene glycerol, $H_2SO_4,\;NH_4F\;and\;H_2O$. We obtained titania nanotube arrays on the micro pore of titanium. Micro pores and nano tubes were obtained by anodization at high potentials and low potentials, respectively. Morphologies of nanotubes and micro pore were characterized by FE-SEM. The unique surface structure is very attractive to electrical and medical applications such as gas sensor, biosensor, dental implant and stent.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.11
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• pp.1218-1223
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• 2004

Porous silicon materials have been shown to have bright prospects for applications in light emitting, solar cell, as well as light- and chemical-sensing devices. In this report, structures of porous silicon prepared by anodic etching in HF-based solution with various etching times were studied in detail by Atomic Force Microscopy and Small Angle X -ray Scattering technique using the high energy beam line at Pohang Light Source in Korea. The results showed the coexistence of the various pores with nanometer and submicrometer scales. For nanameter size pores, the mixed ones with two different shapes were identified: the larger ones in cylindrical shape and the smaller ones in spherical shape. Volume fractions of the cylindrical and the spherical pores were about equal and remained unchanged at all etching times investigated. On the whole uniform values of the specific surface area and of the size parameters of the pores were observed except for the larger specific surface area for the sample with the short etching time. The results implies that etching process causes the inner surfaces to become smoother while new pores are being generated. In all SAXS data at large Q vectors, Porod slope of -4 was observed, which supports the fact that the pores have smooth surfaces.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.87-88
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• 2005

AAO(Anodic Aluminum Oxide)는 양극산화 방법을 이용하여 얻을 수 있는 알루미늄의 다공성 산화막이다. 기존의 방법에서는 DC전압을 이용하여 AAO를 성장시켰는데 본 연구에서는 AC전압을 이용하여 AAO의 성장 특성을 제어하였다. 전압원으로 DAQ를 사용하였는데 출력전압을 증폭하기 위하여 2 단 차동증폭기를 제작하였다. 실험 결과는 AAO 기판의 SEM 사진을 촬영, 분석함으로써 얻을 수 있었다. SEM 시진을 분석한 결과 pore size는 전압의 변화에 큰 영향을 받지 않음을 알 수 있었던 반면 성장 길이는 AC전압의 주기가 증가함에 따라 길어지는 성향을 확인할 수 있었다. 또한 주기와 AAO 성장 길이와의 관계를 로그스케일 그래프로 나타내보면 선형적인 특성을 나타내었다. 이를 통해 인가한 전압의 주파수에 따라 AAO의 성장 길이를 예측할 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.374-375
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• 2006

This paper describes anodic bonding characteristics of MCA to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with the same properties were deposited on MCA under optimum RF sputter conditions (Ar 100 %, input power $1\;W/cm^2$). After annealing at $450^{\circ}C$ for 1 hr, the anodic bonding of MCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in $110^{-6}$ Torr vacuum condition. Then, the MCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation and simulation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity being 0.05-0.08 %FS. Moreover, any damages or separation of MCNSi bonded interfaces did not occur during actuation test. Therefore, it is expected that anodic bonding technology of MCNSi-wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.637-638
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• 2005

AAO templates were fabricated using a two-step anodization process with pretreatment such as electro polishing and annealing. To reduce process time and get well-aligned pore array, rapid thermal processor by an halogen lamp was employed in vacuum state at $500^{\circ}C$ for various time. The pore array of AAO template annealed at $500^{\circ}C$ for 2 h is comparable to a template annealed in conventional furnace at $500^{\circ}C$ for 30 h. The well-fabricated AAO template has the mean pore diameter of 70 nm, the barrierlayer thickness of 25 nm, and the pore depth of $9{\mu}m$. And the pore density can be as high as $2.0\times10^{10}cm^{-2}$.

• Korean Journal of Materials Research
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• v.12 no.7
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• pp.533-539
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• 2002

Porous anodic aluminum oxide layer for nano templates was prepared in acidic solutions. In order to investigate effects of 2nd anodization on ordered formation behaviors of the porous oxide layers, electrochemical and microstructural studies were performed, primarily using TEM, FE- SEM, AFM, and Ultramicrotomy. The pore diameter of the anodic oxide layer increased approximately linearly with increasing voltages, and to the contrary, the pore density decreased. It was shown that 2nd anodizing on the cell base after dissolving 1st anodic oxide layer was remarkably effective for forming ordered array of the pores, comparing with the case for 1st anodization only. And for controlling the diameter of pores, widening method by chemical dissolution seemed more practical than by electrochemical methods.

• Korean Journal of Materials Research
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• v.12 no.7
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• pp.540-544
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• 2002

Hydration treatments were performed on the pure aluminum substrate at $100^{\circ}C$ followed by anodizing and heat treatments on the layers. The transformation behaviors of the oxide layers according to the hydration treatment were studied using TEM, XRD, RBS etc. Above $90^{\circ}C$ the hydrous oxide film could be formed, which were turned out to be hydrous oxides(AlOOH $nH_2$O). The anodization on the hydrous oxide film was more effective for the transition of amorphous anodic oxides to the crystalline $\Upsilon-Al_2$ $O_3$ comparing with the case for anodizing on the aluminum substrate without hydration treatment And additional heat treatments were also helpful for the acceleration of the transformation of the hydrous oxide to $\Upsilon-Al_2$ $O_3$. During the heat treatment the interface between $\Upsilon-Al_2$ $O_3$and the hydrous oxide layers migrated to the outer side of hydrous layer.

• Korean Journal of Materials Research
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• v.16 no.10
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• pp.639-646
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• 2006

Over the last two decades, microbiologically influenced corrosion (MIC) of metallic materials has received considerable attention due to its serious effects on industrial field. In this context, it is important to devise control methods which inhibit biofilm formation on various metallic compounds and are compatible with environment. It was change of various conditions (duty cycle, current density, $AgNO_3$ concentration and pH) for injection of Ag particles in anodized Aluminum alloy pore using pulsed current. Optimal condition was obtained by means of FE-SEM, ICP analysis etc. The antibacterial metal's specimen were manufactured under optimal condition and this specimen were tested the antibacterial characterization and anticorrosion characterization. In result of test, we can confirmed that the antibacterial characterization and anticorrosion characterization of the specimens of injected Ag particles in anodized Aluminum alloy pore using pulsed current were better than the anodized Aluminum alloy specimens.

• Korean Journal of Materials Research
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• v.6 no.11
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• pp.1074-1081
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• 1996

Mg-8Li-4AI 합금의 부식특성에 미치는 Y의영향을 전기화학적 분극시험 및 침지시험을 통하여 조사하였다. 전기 화학적 분극시험에서는 Y첨가량이 증가함에 따라 활성화 영역이 감소하엿고 부식전위가 증가하였으며, Y이 4.08wt% 첨가된 경우가 Y이 첨가되지 않은 경우에 비해 부식속도가 크게 감소하였다. 침지시험에서도 Y의 첨가량이 증가함에 따라 Y을 첨가하지 않은 시편에 비하여 무게감량 및 부시속도가 감소하였으며, Y이 첨가되지 않은 합금의 부식속도는 침지시간에 따라 급격히 증가하였지만 Y이 첨가되지 않은 합금의 부식속도는 침지시간에 따라 급격히 증가하였지만 Y이 4.8wt% 첨가된 합금은 96시간 이후부터 더 이상 증가하지 않았다. 이러한 결과는 Y 화합물(Mg24Y5)이 $\alpha$/$\beta$계면에서 희생 양극으로 작용하였기 때문이라고 생각된다. 따라서 Y의 첨가는 Mg-Li-AI 합금의 내식성을 향상시키는 역할을 한 것으로 판단된다.

• Korean Journal of Metals and Materials
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• v.48 no.6
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• pp.514-522
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• 2010

Graphite epoxy composite material (GECM) shows high specific strength and its application in the aerospace industry is gradually increasing. However, its application would induce galvanic corrosion between GECM and metallic materials. This work focused on the effects of anodizing and thermal oxidation on galvanic corrosion in a 3.5% NaCl solution between GECM and aluminium and titanium. In the case of anodized aluminium, galvanic corrosion resistance to the GECM was greatly improved by the anodizing treatment regardless of area ratio. In the case of anodized titanium, the anodizing by a formation voltage of 50V increased corrosion resistance of titanium in galvanic tests. Thermal oxidation of titanium also improved corrosion resistance of Ti to GECM.