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검색결과 3건 처리시간 0.017초

제진 테이블의 미진동 저감을 위한 PZT stack 가력기 기반 복합형 마운트 시스템 (PZT stack actuator-based hybrid mount system for mitigating micro-vibration of vibration isolation table)

  • 문영종;장동두;문석준;최상민;정형조
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2009년도 추계학술대회 논문집
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    • pp.292-298
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    • 2009
  • This paper investigates the control performance of the proposed hybrid mount system for vibration isolation table. The hybrid mount system consists of an air spring as a passive device and a PZT stack actuator as an active device in series. The feasibility of the PZT stack actuator as an active actuator was examined through the simple experiments. After that, a series of numerical simulations were carried out to evaluate the control performance of the proposed hybrid mount system. The equations of motion of the table with a set of hybrid mount systems consisting of four devices are derived. The air spring is considered as a 1 spring and 1 dashpot elements, and PID control algorithm is adopted to estimate the control force. The results of the numerical simulations presents that the proposed hybrid mount system could be the promising control system for vibration isolation table.

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