• 대한기계학회논문집A
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• 제36권7호
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• pp.777-787
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• 2012

본 논문에서는 여러 가지 충격하에서 압저항 고충격 미소가속도계의 과도 출력전압의 계산시 발생하는 방대한 계산 시간 문제를 모드중첩법 및 최소자승법을 이용하여 압저항 미소가속도계의 실시간 출력전압 계산이 가능하도록 효율적인 출력전압 과도해석 방법을 제안한다. 우선 정적 압저항-구조 해석을 통하여 미소가속도계의 변위와 출력전압을 계산하고 출력전압을 특정 위치의 변위에 관한 2차 다항식으로 근사화하여 그 회귀계수를 최소자승법을 통하여 결정한다. 이후에 모드중첩법을 통하여 여러 방향의 고충격하에서 미소가속도계의 과도 변위응답을 계산하고, 이 변위응답을 변위로 표현되는 출력전압 근사식에 대입하여 과도 출력전압을 예측한다. 100,000 G 고충격파, 사인파, 계단파 및 사각파 등의 여러 가지 고충격 입력에 대한 압저항 미소가속도계의 수치예제를 통하여 제안한 방법의 정확성 및 효율성을 검증하였다.

• 한국군사과학기술학회지
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• 제14권1호
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• pp.132-138
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• 2011

A micromachined silicon accelerometer capable of surviving and detecting very high accelerations(up to 200,000 times the gravitational acceleration) is necessary for a high impact accelerometer for earth-penetration weapons applications. We adopted as a reference model a piezoresistive type silicon micromachined high-shock accelerometer with a bonded hinge structure and performed structural analyses such as stress, modal, and transient dynamic responses and sensor sensitivity simulation for the selected device using piezoresistive-structural coupled-field analysis. In addition, structural optimization was introduced to improve the performances of the accelerometer against the initial design of the reference model. The design objective here was to maximize the sensor sensitivity subject to a set of design constraints on the impact endurance of the structure, dynamic characteristics, the fundamental frequency and the transverse sensitivities by changing the dimensions of the width, sensing beams, and hinges which have significant effects on the performances. Through the optimization, we could increase the sensor sensitivity by more than 70% from the initial value of $0.267{\mu}V/G$ satisfying all the imposed design constraints. The suggested simulation and optimization have been proved very successful to design high impact microaccelerometers and therefore can be easily applied to develop and improve other piezoresistive type sensors and actuators.

• 대한기계학회논문집A
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• 제20권2호
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• pp.408-413
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• 1996

A self-diagnostic, air-damped, piezoresitive, cantilever-beam microaccelerometer has been designed, fabricated and tested for applications to automotive electronic airbag systems. A skew-symmetric proof-mass has been designed for self-diagnostic capability and zero transverse sensitivity. Two kinds of multi-step anisotropic etching processes are developed for beam thickness control and fillet-rounding formation, UV-curing paste has been used for sillicon-to-glass bounding. The resonant frequency of 2.07kHz has been measured from the fabricated devices. The sensitivity of 195 $\mu{V}$/g is obtained with a nonlinearity of 4% over $\pm$50g ranges. Flat amplitude response and frequency-proportional phase response have been obserbed, It is shown that the design and fabricaiton methods developed in the present study yield a simple, practical and effective mean for improving the performance, reliability as well as the reproducibility of the accelerometers.