• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.4
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• pp.391-398
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• 2010

In this paper, we propose a sensor design by using a polysilicon strain gauge bonded to a metal diaphragm. The fabrication process of the thin polysilicon strain gauges having thicknesses of $50\;{\mu}m$ was established using conventional MEMS technologies; further, the technique of glass frit bonding of the polysilicon strain gauge to the stainless steel diaphragm was established. Performance of the polysilicon strain gauge bonded to the metal cantilever beam was evaluated. The gauge factor, temperature coefficient of resistance (TCR), nonlinearity, and hysteresis of the polysilicon strain gauge were measured. The results demonstrate that the resistance increases linearly with tensile stress, while it decreases with compressive stress. The value of the gauge factor, which represents the sensitivity of strain gauges, is 34.0; this value is about 7.15 times higher than the gauge factor of a metal-foil strain gauge. The resistance of the polysilicon strain gauge decreases linearly with an increase in the temperature, and TCR is $-328\;ppm/^{\circ}C$. Further, nonlinearity and hysteresis are 0.21 % FS and 0.17 % FS, respectively.

• Journal of the Korean Society for Marine Environment & Energy
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• v.14 no.4
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• pp.280-286
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• 2011

In this research, the oil detection method and the characteristic of sensor using the selective reaction of silicone rubber in response to hydrocarbon oil will be described. As a sensing principle, the swelling property of silicone rubber in response to hydrocarbon fuel is used, also a strain gauge is used to transduce the volume change to an electrical signal. The sensor core is manufactured with a strain gauge embedded in silicone rubber by the curing process and experiments for characteristics of sensor core with various oils were carried out. It is shown that the sensor core can be used as an oil spill detection sensor. Also, for the application to the sea area, a buoy type sensor platform is integrated with a sensor core and a strain amplifier and it is tested in the simulated oil spill condition. In this study, it is proven that the integrated sensor can be used for the detection of various oils.