• Title/Summary/Keyword: 시편제작온도

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자화된 $SF_6$ 유도결합형 플라즈마를 이용한 SiC 식각 특성에 관한 연구

  • 이효영;김동우;박병재;염근영
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.05a
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    • pp.14-14
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    • 2003
  • Silicon carbide (SiC)는 높은 power 영역과 높은 온도영역에서도 작동 가능한 우수한 반도체 물질이다. 또한 우수한 열적 화학적, 안정성을 가지고 있어 가흑한 조건에서의 소자로써도 사용 가능하다. 현재 SiC 적용분야로는 우수한 전기적, 기계적 성질을 이용한 미세소자(MEMS)와 GaN 와 거의 유사한 격자상수를 가지는 것을 이용한 GaN epitaxial 성장의 기판으로도 사용되어진다. 그러나 SiC 는 기존의 습식식각 용매에 대해 화학적 안정성을 가지고 있기 때문에 전자소자의 제작에 있어서 플라즈마를 이용한 건식식각의 중요성이 대두되어지고 있다. 소자제작에 있어 이러한 건식식각시 식각 단면의 제어, 이온에 의한 낮은 손상 정도, 매끄러운 식각 표면, 그리고 고속의 식각 속도둥이 요구되어진다. 본 실험에서는 식각 속도의 증가와 수직한 식각 단면둥을 획득하기 위하여 SF6 플라즈마에서 Source power, dc bias voltage, 그리고 외부에서 인가되는 자속의 세기를 변화시쳐가며 식각 속도, 식각 마스크와의 식각 션택비, 식각 단면둥과 같은 SiC 의 식각 특성을 관찰하였다. 식각 후 식각 단면은 주사전자 현미경(SEM)을 통해 관찰하였다. 본 실험에서의 가장 높은 식각 속도는 분당 1850n 로써 이때의 공정조건은 1400W 의 inductive power, -600V 의 dc bias voltage, 20G 의 외부자속 세기이었다. 또한, 높은 inductive power 조건과 낮은 dc bias voltage 조건에서 Cu는 $SF_6$ 플라즈마 내에서 식각부산물의 증착으로 인해 SiC 와 무한대의 식각선택비를 보였다. 이러한 Cu 마스크를 사용한 SiC 의 식각에서는 식각 후 수직한 식각 단변을 관찰할 수 있었다. 것올 알 수 있다. 따라서, 기존의 pve 보다 세라믹 기판의 경우가 수분 흡수율이 높아 더 오랫동안 전류를 흐르게 하여 방식성이 개선된 것으로 판단된다.을 통해 경도가 증가한 시편의 경우 석출상의 크기가 5nm 이하로 매우 작고 대체로 기지와 연속적인 계면을 형성하나, 열처리가 진행될수록 석 출상의 크기가 커지고 임계크기 이상에 이르면 연속적인 계면은 거의 발견되지 않고, 대부 분 불연속적이고 확연한 계면을 형성함을 관찰 할 수 있었다. 알루미나(${\alpha}-Al_2O_3$) 기판 위에 증착한 $(Ti_{1-x}AI_{x})N$ 피막은 마찬가지로 (200) 우선 방위를 나타내었으나, 그 입자의 크기가 수십 nm로 고속도강위에 증착한 피막에 비해 상당히 크게 형성되었다. 또한 열처리 후에 AIN의 석출이 진행됨에도 불구하고 경도 증가는 나타나지 않고, 열처리가 진행됨에 따라 경도가 감소하는 양상만을 나타내었다. 결국 $(Ti_{1-x}AI_{x})N$ 피막이 열처리 전후에 보아는 기계적 특성의 변화 양상은 열역학적으로 안정한 Wurzite-AlN의 석출에 따른 것으로 AlN 석출상의 크기에 의존하며, 또한 이러한 영향은 $(Ti_{1-x}AI_{x})N$ 피막에 존재하는 AI의 함량이 높고, 초기에 증착된 막의 업자 크기가 작을 수록 클 것으로 여겨진다. 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$의 범위를 벗어나지 않는다. 그렇기 때문에

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Effect of cooling rate on precipitation hardening of a Pd-Cu-Ga-Zn metal-ceramic alloy during porcelain firing simulation (금속-세라믹용 Pd-Cu-Ga-Zn계 합금의 모의 소성 시 냉각 속도가 석출 경화에 미치는 영향)

  • Kim, Min-Jung;Shin, Hye-Jeong;Kwon, Yong-Hoon;Kim, Hyung-Il;Seol, Hyo-Joung
    • Korean Journal of Dental Materials
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    • v.44 no.3
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    • pp.207-216
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    • 2017
  • The effect of cooling rate on precipitation hardening of a Pd-Cu-Ga-Zn metal-ceramic alloy during porcelain firing simulation was investigated and the following results were obtained. When the cooling rate was fast (Stage 0), the hardness of the alloy increased at each firing step and the high hardness value was maintained. When the cooling rate was slow (Stage 3), the hardness was the highest at the first stage of the firing, but the final hardness of the alloy after complete firing was lower. The increase in hardness of the specimens cooled at the cooling rate of Stage 0 after each firing step was caused by precipitation hardening. The decrease in hardness of the specimens cooled at the cooling rate of Stage 3 after each firing step was attributed to the coarsening of the spot-like precipitates formed in the matrix and plate-like precipitates. The matrix and the plate-like precipitates were composed of the $Pd_2(Cu,Ga,Zn)$ phase of CsCl-type, and the particle-like structure was composed of the Pd-rich ${\alpha}$-phase of face-centered cubic structure. Through the porcelain firing process, Cu, Ga, and Zn, which were dissolved in Pd-rich ${\alpha}$ particles, precipitated with Pd, resulting in the phase separation of the Pd-rich ${\alpha}$ particles into the Pd-rich ${\alpha}^{\prime}$ particles and ${\beta}^{\prime}$ precipitates composed of $Pd_2(Cu,Ga,Zn)$. These results suggested that the durability of the final prosthesis made of the Pd-Cu-Ga-Zn alloy can be improved when the cooling rate is fast during porcelain firing simulation.

Comparison of Thermal Insulation of Multi-Layer Thermal Screens for Greenhouse: Results of Hot-Box Test (온실용 다겹보온자재의 보온성 비교 -Hot box 시험 결과를 중심으로-)

  • Yun, Sung-Wook;Lee, Si-Young;Kang, Dong-Hyeon;Son, Jinkwan;Park, Min-Jung;Kim, Hee-Tae;Choi, Duk-Kyu
    • Journal of Bio-Environment Control
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    • v.28 no.3
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    • pp.255-264
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    • 2019
  • In this study, we conducted the hot box tests to compare the changes in thermal insulation for the four types of multi-layer thermal screens by the used period after collecting them from the greenhouses in the field when they were replaced at the end of their usage. The main materials for these four types of multi-layer thermal screens were matt georgette, non-woven fabrics, polyethylene (PE) foam, chemical cotton, etc. These materials were differently combined for each multi-layer thermal screen. We built specimens ($70{\times}70cm$) for each of these multi-layer thermal screens and measured the temperature descending rate, heat transmission coefficient, and thermal resistance for each specimen through the hot box tests. With regard to the material combinations of multi-layer thermal screens, thermal insulation can be increased by applying a multi-layered PE foam. However, it is considered that the multi-layered PE foam significantly less contributes to heat-retaining than chemical wool that forms an air-insulating layer inside multi-layer thermal screens. For the suitable heat-retaining performance of multi-layer thermal screens, basically, materials with the function of forming an air-insulating layer such as chemical cotton should be contained in multi-layer thermal screens. The temperature descending rate, heat transmission coefficient, and thermal resistance of multi-layer thermal screens were appropriately measured through the hot box tests designed in this study. However, in this study, we took into consideration only the four kinds of multi-layer thermal screens due to difficulties in collecting used multi-layer thermal screens. This is the results obtained with relatively few examples and it is the limit of this study. In the future, more cases should be investigated and supplemented through related research.

Interaction of Hydroxyethylidene bisphosphonate (HEBP) with other endodontic irrigants on tissue dissolving capacity and antimicrobial effect (근관세정제와 상호작용시 Hydroxyethylidene bisphosphonate (HEBP)의 조직용해능력, 항균효과에 대한 연구)

  • Kim, Ranah;Kim, Yoon Gun;Kim, Mi-Yeon;Song, Byung Chul;Kim, Sun-ho;Kim, Jeong-hee
    • Journal of Dental Rehabilitation and Applied Science
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    • v.33 no.2
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    • pp.106-113
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    • 2017
  • Purpose: The purpose of this study was to evaluate tissue dissolving capacity, antimicrobial effect of Hydroxyethylidene bisphosphonate (HEBP) interacting with sodium hypochlorite (NaOCl), Ethylenediaminetetraacetic acid (EDTA) as conventional endodontic irrigants and to determine tissue dissolving efficacy depended on temperature. Materials and Methods: A total of 80 bovine muscles were randomly distributed into 8 groups (n = 10). After their initial weights determined on a precision scale, the specimens in each group were immersed in the solutions for 5, 10 and 15 min and reweighted at each time period. Agar diffusion test inoculated with Enterococcus faecalis was performed for antimicrobial effect of each endodontic irrigants. Results: The ability to dissolve organic matter was greater in NaOCl group following NaOCl and HEBP mixture. Heated NaOCl ($40^{\circ}C$) and NaOCl/ HEBP mixture was greater tissue dissolving efficacy than room temperature ($25^{\circ}C$). Antimicrobial effect was greater and significant in the following order EDTA > EDTA + 1% NaOCl > $1%\;NaOCl{\geq}1%\;NaOCl$ + HEBP. Conclusion: HEBP as soft chelating agent does not disturb antimicrobial effect and less affected tissue dissolving efficacy as inherent properties of NaOCl. In the heated NaOCl/HEBP mixture analyzed, it dissolved more the organic matter than room temperature.

Application of One-Sided Stress Wave Velocity Measurement Technique to Evaluate Freeze-Thaw Damage in Concrete (콘크리트 동결-융해 손상의 비파죄 평가를 위한 One-Sided 응력파 속도 측정기법의 적용에 관한 연구)

  • Lee, Joon-Hyun;Park, Won-Su
    • Journal of the Korean Society for Nondestructive Testing
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    • v.20 no.4
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    • pp.269-275
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    • 2000
  • It is well recognized that damage resulting from freeze-thaw cycles is a serious problem causing deterioration and degradation of concrete. In general, freeze-thaw cycles change the microstructure of the concrete ultimately leading to internal stresses and cracking. In this study, a new method for one-sided stress wave velocity measurement has been applied to evaluate freeze-thaw damage in concrete by monitoring the velocity change of longitudinal and surface waves. The freeze-thaw damage was induced in a $400{\times}350{\times}100mm$ concrete specimen in accordance with ASTM C666 using s commercial testing apparatus. A cycle consisted of a variation of the temperature from -14 to 4 degrees Celsius. A cycle takes 4-5 hours with approximately equal times devoted to freezing-thawing. Measurement of longitudinal and surface wave velocities based on one-sided stress wave velocity measurement technique was made every 5 freeze-thaw cycle. The variation of longitudinal and surface wave velocities due to increasing freeze-thaw damage is demonstrated and compared to determine which one is more effective to monitor freeze-thaw cyclic damage progress. The variation in longitudinal wave velocity measured by one-sided technique is also compared with that measured by the conventional through transmission technique.

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The Effects of Scale Growth Inhibition on Water Pipe using Frequency Driver (Frequency Driver를 이용한 냉온수관의 스케일 방지억제효과)

  • Jang, Mi-Jeong;Sung, Il-Wha
    • Journal of Korean Society of Environmental Engineers
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    • v.33 no.4
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    • pp.258-266
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    • 2011
  • Scale induced by hardness materials in water must be controled because of it can be result in remarkable damages of pipeline as well as water quality deterioration. Especially hot water system is one of scale management required facility as scale formation can be accelerated by temperature. The scale control performance of frequency driver (FD) was tested instead of existing methods such as chemical, physical and electromagnetic methods which needs chemicals and electric power. Three kinds of pipe coupons were submerged in test water with 500 mg/L of hardness for 33 days and XRD and SEM were analysed for comparing scale formation characteristics of these coupons. Calcite ($CaCO_3$) which came from hardness of water was formed on only cast iron pipe coupon and this coupon showed higher corrosion rate than copper and stainless steel pipe coupon. Hot water circulating system connected cast iron pipe with and without FD was operated with 300 mg/L of hardness water at $50^{\circ}C$ for monitoring of scale formation and water quality with and without FD. XRD showed that FD leaded to magnetite ($Fe_3O_4$) scale which is good scale for preventing corrosion than calcite and SEM image also indicated the scale control effect of FD. Scales of 16% on pipe joint, 14% on pipe length, and 42% on heat exchanger decreased with FD comparing scales of those parts without FD. From the results of water quality, FD reduced crystallization of hardness material without chemical reaction in water and it can indicate that FD is safe and proenvironmental technology for scale reduction.

Physical Properties of High-Solid Coatings with Acrylic Resins Containing Acetoacetoxy Group and Allophanate-Trimer (Acetoacetoxy기 함유 아크릴수지와 Allophanate-Trimer에 의한 하이솔리드 도료의 도막물성)

  • Jo Hye-Jin;Shim Il-Woo;Park Hong-Soo;Kim Seung-Jin;Kim Seong-Kil
    • Polymer(Korea)
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    • v.30 no.3
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    • pp.230-237
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    • 2006
  • Copolymers(HSA-98-20, HSA-98-0, HSA-98+20) which we acrylic resin containing 80% solid content were synthesized by the reaction of monomers, including methyl methacrylate, n-butyl acrylate, and 2-hydroxyethyl acrylate with a functional monomer, acetoacetoxyethyl methacrylate (AAEM), which nay give improvements in cross-linking density and physical properties of films. The physical properties of prepared acrylic resins, containing AAEM, are as follows viscosities, $1420\sim5760cps$ ; number average molecular weight, $2080\sim2300g/mol$; polydispersity index, $2.07\sim2.19$ ; and conversions, $88\sim93%$. In the next step, high-solid coatings (HSA-98-20C, HSA-98-0C, HSA-98+20C) were prepared by the curing reaction between acrylic resins containing 80% solid content and isocyanate at room temperature. Various properties were examined on the film coated with the prepared high-solid coatings. The introduction of AAEM to the coatings enhanced the abrasion resistance and solvent resistance, which indicated the possible use of high- solid coatings for top-coating materials of automobile. Since the curing by viscoelastic measurement occurred in sequence of HSA-98+20C > HSA-98-0C > HSA-98-20C, it was concluded that the curing rates became faster with incresing $T_g$ values.

Spot marking of the multilayer thin films by Nd:YAG laser (Nd:YAG 레이저에 의한 다층 박막의 미소 점 마킹)

  • Kim, Hyun-Jin;Shin, Yong-Jin
    • Korean Journal of Optics and Photonics
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    • v.15 no.4
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    • pp.361-368
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    • 2004
  • We separated the multilayer structure of CD-R(compact disk-recordable) and investigated optimal spot marking conditions and physical and chemical transitions in response to various laser beam energh levels. Spot marking(80 ${\mu}{\textrm}{m}$ spot size) was produced on the surface of each layer using a Q-switched Nd:YAG laser between 27 mJ and 373mJ. By investigating resulting pit formation with Optical Microscopy(OM) and Optical Coherence Tomography(OCT), we analyzed the formation process of spot marking in the multilayer structure of different chemical composition. The localized heating of the substrate in the multilayer thin film caused the short temporal thermal expansion, and absorbed optical energy between reflective and dye interfaces melted dye and increased the volume. During the cooling phase, formation of pit and surrounding rim can be explained by three distinct processes; effect of surface tension, evaporation by spontaneous temperature increase due to laser energy, and mass flow from the recoil pressure. Our results shows that the spot marking formation process in the multilayer thin film is closely related to the layers' physical, chemical, and optical properties, such as surface tension, melt viscosity, layer thickness, and chemical composition.

Analysis of Material Characteristics for Blackwares at Excavated from the Bonggok Kiln Site of Jinan-gun (진안 봉곡도요지 출토 흑유자기의 재료학적 특성 분석)

  • Park, Minsoo;Chung, Kwang Yong
    • Journal of Conservation Science
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    • v.32 no.4
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    • pp.549-560
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    • 2016
  • The purpose of this study is to identify the material characteristics of blackwares excavated from the Bonggok kiln site in Jinan-gun, Jeollabuk-do Province, South Korea, by scientific analyses and a reproduction experiment. Scientific analyses were conducted to determine the physical properties, chemical composition and for microscopic observation of blackwares. A reproduction experiment was also conducted by producing ceramic samples with black glaze, red ocher and limestone, and then cross sections of the samples were observed. The analysis results showed that all the excavated blackwares have similar properties such as chromaticity, specific gravity, absorption factor and porosity, but there is a difference depending on the crystallization of the ceramics. Thermal analysis showed that the exothermic peak was observed at about $1200^{\circ}C$, and crystal structure analysis indicated the presence of mullite. Hence, it can be concluded that the firing temperature of the excavated blackwares was around $1100-1200^{\circ}C$. Moreover, the glaze present on these blackwares has about 22% higher $Fe_2O_3$ content than those excavated from other places; however, the former has lower CaO content. For the reproduction experiment, samples were made using limestone as a flux and red ocher as a glaze. The results show that the cross section of the glaze layer of the reproduced sample have iron crystals with dendritic structures, similar to those present in the excavated black-wares. It is assumed that such iron crystals were formed during the process of melting and solidification of the iron oxide present in the blackwares.

Exchange coupling of Co/NiMn bilayer (Co/NiMn의 교환 자기결합에 관한 연구)

  • 안동환;조권구;주승기
    • Journal of the Korean Magnetics Society
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    • v.10 no.4
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    • pp.171-177
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    • 2000
  • Exchange coupling of Co/NiMn bilayers fabricated by RF magnetron sputtering method was studied. We investigated the variation of exchange coupling field (H$\sub$ex/) for different annealing temperature and time. The maximum exchange coupling field was obtained after 13hr annealing at 300 $^{\circ}C$. With respect to deposition sequence, it was demonstrated that NiMn-top bilayers had higher exchange coupling field than NiMn-bottom bilayers. Ta capping layer was shown to be essential in achieving exchange coupling and Auger Electron Spectroscopy (AES) proved that uncapped NiMn/Co bilayers did not have exchange coupling because of oxygen incorporation into film. We also observed the effect of Ta underlayer on exchange coupling. It was found that Ta underlayer had better not be used for attaining higher exchange coupling. XRD analysis showed that Ta underlayer helped bilayers develop texture, but it was not essential to exchange coupling of Co/NiMn bilayers, which is in contrast to NiFe/NiMn system. Furthermore, the NiMn and Co thickness dependence of exchange coupling has been investigated. The exchange coupling strength reached the maximum above 200 ${\AA}$ NiMn thickness and had inversely proportional relation with Co thickness.

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