• Journal of the Korean Vacuum Society
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• v.6 no.1
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• pp.9-19
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• 1997

The reaction mechanisms of dry cleaning with UV-excited chlorine radical for Zn, Fe and Ti trace contaminants on the Si wafer have been studied by SEM, AFM and XPS analyses in this work. The patterned Zn, Fe and Ti films were deposited on the Si wafer surface by thermal evaporation and changes in the surface morphology after dry cleaning with $Cl_2$and UV/$Cl_2$at $200^{\circ}C$ were studied by optical microscopy and SEM. In addition, changes in the surface roughness of Si wafer with the cleaning was observed by AFM. The chemical bonding states of the Zn, Fe and Ti deposited silicon surface were observed with in-line XPS analysis. Zn and Fe were easily cleaned in the form of volatile zinc-chloride and iron-chloride as verified by the surface morphology changes. Ti which forms involatile oxides was not easily removed at room temperature but was slightly removed by UV/$Cl_2$at elevated temperature of $200^{\circ}C$. It was also found that the surface roughness of the Si wafer increased after $Cl_2$and UV/$Cl_2$cleaning. Therefore, the metallic contaminants on the Si wafer can be easily removed at lower temperature without surface damage by a continuous process using wet cleaning followed by UV/$Cl_2$dry cleaning.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.110-110
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• 2016

금속재료 중 철강은 기계적 성질이 우수하고 대량생산에 의한 뛰어난 경제성을 가지기 때문에 다양한 산업 분야에서 널리 사용되고 있다. 그러나 스테인리스강 등과 같은 일부 특수한 용도의 강을 제외하고는 부식 환경에 취약하기 때문에 그 용도에 따라 표면처리를 함으로서 내식특성을 부여하고 있다. 일반적으로 이러한 철강재료에 대한 부식문제를 해결하기 위한 방법으로는 습식프로세스 중 아연(Zn)도금이 사용되는데, 아연은 그 자체가 보유하고 있는 차폐(barrier)효과는 물론 상대적으로 이온화 경향이 크기 때문에 철에 대하여 전자를 공급하는 희생양극적(Sacrificial anode)역할을 하여 철을 방식하는 원리를 가지고 있다. 하지만 최근에 이르러 기존의 도금 프로세스 처리된 제품의 사용 및 적용분야가 확대되고 가혹해 짐에 따라서 내식성 향상을 위한 새로운 재료 및 신기술 개발이 요구되고 있는 실정이다. 본 연구에서는 친환경 프로세스 방법인 PVD법 중 하나인 스퍼터링(Sputtering)을 이용하여 0.8mm 두께의 냉연강판 (cold rolled steel) 상에 Al에 대한 Mg 함량을 10~30wt.%로 하여 약 $5{\mu}m$ 두께의 막을 제작하였다. 이때 20wt.% 막의 경우 공정압력조건을 증가시켜 증착 막의 결정배향성을 변화시켰다. 뿐만 아니라 제작된 막들에 대해서 $400^{\circ}C$온도에서 10분간 열처리함으로서 코팅막의 성분변화에 따른 영향을 살펴보기 위해 시편을 추가 제작하였다. 이와 같이 제작된 막들에 대한 형성메커니즘과 내식성의 상관관계 해명을 위해 막의 조성분포, 표면 및 단면의 모폴로지 관찰 및 결정구조 등 재료특성분석과 더불어 염수분무(Salt spray test), 침지시험 그리고 양극분극 시험 등을 통해 내식성 평가를 진행하였다. 이상의 종합적인 결과를 살펴보면 제작된 Al-Mg 막은 마그네슘 함량비 및 열처리 조건에 따라 조성분포와 막의 모폴로지 및 결정배향성이 변화한다는 것을 알 수 있었는데, 마그네슘 함량이 증가하고 열처리한 막의 내식성이 가장 양호한 것으로 나타났다. 이것은 Al-Mg 성분이 표면을 중심으로 균일 분산-분포하며, Al에 대한 Mg의 고용으로 인해 안정적으로 형성된 부식생성물과 금속화합물의 단계적 반응 효과에 의해 차폐효과와 희생양극적 특성이 동시에 향상되었기 때문으로 생각된다. 한편 공정 압력을 증가시켜 형성한 막은 결정학적 구조에서 보다 높은 표면 에너지와 증가한 격자 정수에 의해 Mg이 부식환경에서 빠르게 반응하여 안정적 피막을 형성하기 때문에 내식성이 향상된 것으로 보여 진다. 이상의 연구를 통해서 고내식성을 Al-Mg막의 유효성 확인하였으며, 설계에 대한 기초적인 응용지침을 제시할 수 있을 것으로 사료된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.123-123
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• 2000

선폭이 초미세화됨에 따라 게이트 전극에서의 공핍 현상 및 불순물 확산의 물제를 갖는 poly-Si 게이트를 대체할 전극 물질로 텅스텐(W)이 많이 연구되어 왔다. 반도체 소자의 배선물질로 일찍부터 사용되어온 텅스텐은 내화성 금속의 일종으로 용융점이 높고, 저항이 낮다. 그러나, 일반적으로 사용되고 있는 CVD에 의한 텅스텐의 증착은 반응가스(WF6)로부터 오는 불소(F)의 게이트 산화막내로의 확산으로 인해 MOS 소자가 크게 열화될수 있다. 본 연구에서는 W/TiN 이중 게이트 전극 구조를 갖는 MOS 캐패시터를 제작하여 전기적 특성을 살펴보았다. P-Type (100) Si위에 RTP를 이용, 85$0^{\circ}C$에서 110 의 열산화막을 성장 및 POA를 수행한 후, 반응성 스퍼터링법에 의해 상온, 6mTorr, N2/Ar=1/6 sccm, 100W 조건에서 TiN 박막을 150, 300, 500 의 3그룹으로 증착하였다. 그 위에 LPCVD 방법으로 35$0^{\circ}C$, 0.7Torr, WF6/SiH4/H2=5/5~10/500sccm 조건에서 2000~3000 의 텅스텐을 증착하였다. Photolithography 공정 및 습식 에칭을 통해 200$\mu\textrm{m}$$\times$200$\mu\textrm{m}$ 크기의 W/TiN 복층 게이트 MOSC를 제작하였다. W/TiN 복측 게이트 소자와 비교분석하기 위해 같은 조건의 산화막을 이용한 알루미늄(Al) 게이트, 텅스텐 게이트 MOSC를 제작하였다. 35$0^{\circ}C$에서 증착된 텅스텐 박막은 10~11$\Omega$/ 의 면저항을 가졌고 미소한 W(110) peak값을 나타내는 것으로 보아 비정질 상태에 가까웠다. TiN 박막의 경우 120~130$\Omega$/ 의 면저항을 가졌고 TiN (200)의 peak 값이 크게 나타난 반면, TiN(111) peak가 미소하게 나타났다. TiN 박막의 두께와 WF/SiH4의 가스비를 변화시켜가며 제작된 MOS 캐패시터를 HF 및 QS C-V, I-V 그리고 FNT를 통한 전자주입 방법을 이용하여 TiN 박막의 불소에 대한 확산 방지막 역할을 살펴 보았다. W/TiN 게이트 MOS 소자는 모두 순수 텅스텐 게이트보다 우수하였고, Al 게이트와 유사한 전기적 특성을 보여주었다. W/TiN 게이트 MOS 소자는 모두 순수 텅스텐 게이트보다 우수하였고, Al 게이트와 유사한 전기적 특성을 보여주었다. TiN 박막이 300 , 500 이고 WF6/SiH4의 가스비가 5:10인 경우 소자 특성이 우수하였으나, 5:5의 경우에는 FNT 전자주입 특성이 열화되기 시작하였다. 그리고, TiN박막의 두께가 150 으로 얇아질 경우에는 WF6/SiH4의 가스비가 5:10인 경우에서도 소자 특성이 열화되기 시작하였다. W/TiN 복층 게이트 MOS 캐패시터를 제작하여 전기적인 특성 분석결과, 순수 텅스텐 게이트 소자의 큰 저전계 누설 전류 특성을 해결할 수 있었으며, 불소확산에 영향을 주는 조건이 WF6/SiH4의 가스비에 크게 의존됨을 알 수 있었다. TiN 박막의 증착 공정이 최적화 될 경우, 0.1$\mu\textrm{m}$이하의 초미세소자용 게이트 전극으로서 텅스텐의 사용이 가능할 것으로 보여진다.

• Clean Technology
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• v.28 no.4
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• pp.293-300
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• 2022

The remarkable mechanical, electrical, and thermal properties of graphene have recently sparked tremendous interest in various research fields. One of the most promising methods to produce large quantities of graphene dispersion is liquid-phase exfoliation (LPE) which utilizes ultrasonic waves or shear stresses to exfoliate bulk graphite into graphene flakes that are a few layers thick. Graphene dispersion produced via LPE can be transformed into graphene ink to further boost graphene's applications, but producing high-quality graphene more economically remains a challenge. To overcome this shortcoming, an advanced LPE process should be developed that uses relatively cheap natural graphite as a graphene source. In this study, a flow-LPE process was used to exfoliate natural graphite to produce graphene that was three times cheaper and seven times larger than synthetic graphite. The optimal exfoliation conditions in the flow-LPE process were determined in order to produce high-quality graphene flakes. In addition, the structural and electrical properties of the flakes were characterized. The electrical properties of the exfoliated graphene were investigated by carrying out an ink formulation process to prepare graphene ink suitable for inkjet printing, and fabricating a printed graphene pattern. By utilizing natural graphite, this study offers a potential protocol for graphene production, ink formulation, and printed graphene devices in a more industrial-comparable manner.

• Analytical Science and Technology
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• v.19 no.3
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• pp.244-254
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• 2006

Flame retardants are added to prevent catching fire and to slow down the burning process. PBDEs are known to affect thyroid hormones and hormone disruption. The aim of this study was to propose a manual for determination of PBDEs, and investigate the accumulation of PBDEs(BDE-28, 47, 99, 100, 153, 154 and 183) in fish&shellfish and human milk samples. Pre-treatment for PBDEs determination, alkali digestion and L-L(Liquid-Liquid) extraction method could be applied to fish and shellfish. When Multi-layer column was used for cleaning up the sample, 50 mL of hexane and 100 mL of hexane:dichloromethane(9:1) solutions were used for pre- and post-elution, respectively. Activated-carbon column was optimized by a 100 mL of hexane:dichloromethane(3:1). The result of fish, highest concentration was detected in flatfish, 890 pg/g(wet weight). The other side, lowest concentration was detected in pollack, 40 pg/g(wet weight). The result of breast milk, PBDEs was detected 2,580 and 3,600 pg/g(lipid weight) from breast milk of Seoul and Juju, respectively. BDE-153 and 183 were not detected in all samples. There was no difference in PBDEs level was not difference between first and second delivery. In this study, we could find that PBDEs level in Korea is lower than other countries.

• Journal of the Korean Recycled Construction Resources Institute
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• v.1 no.1
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• pp.17-25
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• 2013

Thermal storage technology used for indoor heating and cooling to maintain a constant temperature for a long period of time has an advantage of raising energy use efficiency. This, the phase changing material, which utilizes heat storage properties of the substances, capsulizes substances that melt at a constant temperature. This is applied to construction materials to block or save energy due to heat storage and heat protection during the process in which substances melt or freeze according to the indoor or outdoor temperature. The micro-encapsulation method is used to create thermal storage from phase changing material. This method can be broadly classified in 3 ways: chemical method, physical and chemical method and physical and mechanical method. In the physical and chemical method, a wet process using the micro-encapsulation process utilized. This process emulsifies the core material in a solvent then coats the monomer polymer on the wall of the emulsion to harden it. In this process, a surfactant is utilized to enhance the performance of the emulsion of the core material and the coating of the wall monomer. The performance of the micro-encapsulation, especially the coating thickness of the wall material and the uniformity of the coating, is largely dependent on the characteristics of the surfactant. This research compares the performance of the micro-capsules and heat storage for product according to molecular mass and concentration of the surfactant, SSMA (sulfonated styrene-maleic anhydride), when it comes to micro-encapsulation through interfacial polymerization, in which Dodecan-1 is transformed to melamin resin, a heat storage material using phase changing properties. In addition, the thickness of the micro-encapsulation wall material and residual melamine were reduced by adjusting the concentration of melamin resin microcapsules.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.43 no.1
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• pp.61-68
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• 2017

The key quality attributes of the pressed powder, one of base makeup products, are skin-affinity and spreadability. In general, there was a limit to meet skin-affinity and spreadability simultaneously, which are opposite attributes each other. In this study, air jet mill process was tried to satisfy two main properties. Skin-affinity was improved by a wet coating of sericite with a mixture of lauroyl lysine (LL) and sodium cocoyl glutamate (SCG). The application of mono-dispersed polymethyl methacrylate (PMMA) and diphenyl dimethicone/vinyl diphenyl dimethicone/silsesquioxane crosspolymer (DDVDDSC) improved both qualities. Air jet mill process has been mainly applied in the pharmaceutical and food industries, and is a method used for processing powder materials in cosmetic field. In this study, we were able to complete makeup cosmetics with an optimum particle size $6.8{\mu}m$ by combining the air jet mill process at the manufacturing stage. It was confirmed that the Ti element was uniformly distributed throughout the cosmetics by EDS mapping, and that the corners of the tabular grains were rounded by SEM analysis. It is considered that this can provide an effect of improving the spreadability when the cosmetic is applied to the skin by using a makeup tool. LL with excellent skin compatibility and SCG derived from coconut with little skin irritation were wet coated to further enhance the adhesion of sericite. SEM images were analyzed to evaluate effect of the dispersion and uniformity of PMMA on spreadability. With the spherical shapes of similar size, it was found that the spreading effect was further increased when the distribution was homogeneously mono-dispersed. The dispersion and spreadability of PMMA were confirmed by measuring the kinetic friction and optimal content was determined. The silicone rubber powder, DDVDDSC, was confirmed by evaluating the hardness, spreading value, and drop test. Finally, it was found that the dispersion of PMMA and silicone rubber powder affected spreadability. Such makeup cosmetics have excellent stability in drop test while having appropriate hardness, and good stability over time. Taken together, it is concluded that air jet mill process can be utilized as a method to improve skin-affinity and spreadability of the pressed powder.

• Journal of Korean Society of Environmental Engineers
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• v.32 no.2
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• pp.165-174
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• 2010

The numerical modeling of a coal gasification reaction occurring in an entrained flow coal gasifier is presented in this study. The purposes of this study are to develop a reliable evaluation method of coal gasifier not only for the basic design but also further system operation optimization using a CFD(Computational Fluid Dynamics) method. The coal gasification reaction consists of a series of reaction processes such as water evaporation, coal devolatilization, heterogeneous char reactions, and coal-off gaseous reaction in two-phase, turbulent and radiation participating media. Both numerical and experimental studies are made for the 1.0 ton/day entrained flow coal gasifier installed in the Korea Institute of Energy Research (KIER). The comprehensive computer program in this study is made basically using commercial CFD program by implementing several subroutines necessary for gasification process, which include Eddy-Breakup model together with the harmonic mean approach for turbulent reaction. Further Lagrangian approach in particle trajectory is adopted with the consideration of turbulent effect caused by the non-linearity of drag force, etc. The program developed is successfully evaluated against experimental data such as profiles of temperature and gaseous species concentration together with the cold gas efficiency. Further intensive investigation has been made in terms of the size distribution of pulverized coal particle, the slurry concentration, and the design parameters of gasifier. These parameters considered in this study are compared and evaluated each other through the calculated syngas production rate and cold gas efficiency, appearing to directly affect gasification performance. Considering the complexity of entrained coal gasification, even if the results of this study looks physically reasonable and consistent in parametric study, more efforts of elaborating modeling together with the systematic evaluation against experimental data are necessary for the development of an reliable design tool using CFD method.

• Korean Journal of Food Science and Technology
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• v.40 no.6
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• pp.603-610
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• 2008

The principal objective of current study was to evaluate the potential of near infrared reflectance spectroscopy (NIRS) as a non-destructive method for the prediction of the amylose and protein contents of un-hulled and brown rice in broad-based calibration models. The average amylose and protein content of 75 rice accessions were 20.3% and 7.1%, respectively. Additionally, the range of amylose and protein content were 16.6-24.5% and 3.8-9.3%, respectively. In total, 79 rice germplasms representing a wide range of chemical characteristics, variable physical properties, and origins were scanned via NIRS for calibration and validation equations. The un-hulled and brown rice samples evidenced distinctly different patterns in a wavelength range from 1,440 nm to 2,400 nm in the original NIR spectra. The optimal performance calibration model could be obtained by MPLS (modified partial least squares) using the first derivative method (1:4:4:1) for un-hulled rice and the second derivative method (2:4:4:1) for brown rice. The correlation coefficients $(r^2)$ and standard error of calibration (SEC) of protein and amylose contents for the un-hulled rice were 0.86, 2.48, and 0.84, 1.13, respectively. The $r^2$ and SEC of protein and amylose content for brown rice were 0.95, 1.09 and 0.94, 0.42, respectively. The results of this study suggest that the NIRS technique could be utilized as a routine procedure for the quantification of protein and amylose contents in large accessions of un-hulled rice germplasms.

• Journal of dental hygiene science
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• v.11 no.4
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• pp.333-337
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• 2011

The purpose of this experiment was to examine possibility of microleakage by water, temperature change, and bite force inside the mouth during the period of using light-activated temporary filling materials. 2 kinds of light-activated temporary filling materials were used in order to measure weight and compressive strength and to evaluate microleakage between filling material and cavity wall according to frequency of thermal circulation. First, Light-activated temporary filling material was increased the weight, which was measured according to the period of using. As for the result of comparing between products, the weight of Quicks was indicated to be higher. Second, Compressive strength of Spacer had significant difference depending on period of using. However, significant difference wasn't shown in the compressive strength of Quicks. In Spacer that showed significant difference, the compressive strength increased greatly in the difference of 3 days. Third. As for micro-leakage according to frequency of thermal circulation, the microleakage was indicated to be the highest in the group that carried out 7,000 times. The group with operation of 1,000 times and the group with operation of 3,000 times were indicated the statistically lower micro-leakage than the group with operation of 7,000 times. This study brought about a rise in micro-leakage depending on the passage in the period of using. However, it is obvious fact that micro-leakage increases according to the passage of time after restoration.