• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.12
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• pp.1877-1883
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• 2010

We examined the mechanism of generation of higher harmonics by theoretically analyzing the frequency characteristics of a narrow-band surface wave generated by a laser beam with line-arrayed slit masks. We experimentally analyzed the effects of slit opening width and laser intensity on the acoustic nonlinearity of aluminum 6061-T6 alloy by using single-slit and line-arrayed slit masks. The magnitude of the harmonic wave depended on the slit opening width. In our experiment, we generated a 1.75-MHz surface wave by using an arrayed slit with intervals of 1.67 mm. The magnitude of the second harmonic component decreased about by 80% when the slit opening width was increased from 0.5 mm to 1.0 mm. In addition, the relationship between the magnitudes of the fundamental and the second harmonic wave showed good linearity, which agreed well with the typical behavior of acoustic nonlinearity.

• Laser Solutions
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• v.15 no.2
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• pp.11-14
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• 2012

In this paper, we have made a proposal concerning the beam shaping mask(BSM) using random-array slits to control intensity distribution profile of laser beam and demonstrated its proprieties experimentally. When a lot of slits are set out irregularly, diffraction patterns of light does not appear but granularity patterns as a bundle of fibers appear. Intensity distribution profile is controlled by densities distribution of circular slits arrayed randomly because the number of slits and its area means amount of light energy through BSM. Namely as the number of slits in high intensity area is increased and that in low intensity area decreased, amount of light energy is same over all local parts. So gaussian intensity distribution could be changed to flat-top.

• Korean Journal of Optics and Photonics
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• v.16 no.6
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• pp.508-515
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• 2005

We propose a fabrication method for refractive lens by variable velocity moving mask lithography and slit pattern. Distribution of exposure dose should be controlled for the curved photoresist surface that works as a refractive surface. We analyze theoretically the distribution of exposure dose by change of moving velocity, moving direction of mask and the shape of mask pattern, and confirm for the curved surface experimentally. The lens could have sag height of a few of hundreds ${\mu}m$, by using thick photoresist or Deep RIE process.

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.1
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• pp.20-26
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• 2012

The objective of this study is to assess plastic deformation in aluminium alloy by acoustic nonlinearity of laser-generated surface waves. A line-arrayed laser beam made by high-power pulsed laser and mask slits is utilized to generate the narrowband surface wave and the frequency characteristics of laser-generated surface waves are controlled by varying the slit opening width and slit interval of mask slits. Various degrees of tensile deformation were induced by interrupting the tensile tests so as to obtain aluminum specimens with different degrees of plastic deformation. The experimental results show that the acoustic nonlinear parameter of a laser-generated surface wave increased with the level of tensile deformation and it has a good correlation with the results of micro-Vickers hardness test and electron backscatter diffraction (EBSD) test. Consequently, acoustic nonlinearity of laser-generated surface wave could be potential to characterize plastic deformation of aluminum alloy.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.68-68
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• 2009

최근 디스플레이 산업의 발달로 LCD 판넬의 수요가 급증함에 따라 검사장치 분야도 동반 성장하고 있다. LCD 검사를 위한 probe unit은 미세전기기계시스템 (MEMS) 공정을 이용하여 제작된다. 본 연구에서는 probe card의 미세 슬릿을 제작하기 위한 Si 깊은 식각 공정을 수행하였다. 공정에 사용된 장비는 STS 사의 D-RIE 시스템으로 식각가스로 $SF_6$, passivation용으로 $C_4F_8$ 가스를 각각 사용하였다. 식각용 마스크는 $30{\sim}50{\mu}m$의 선폭을 probe card의 패턴에 따라 제작되었으며, 분석은 SEM 측정을 이용하였다. 식각 공정 중 발생하는 scallop은 시료를 oxidation 시켜 $SiO_2$ 층을 형성한 후에 식각용액에 에칭하여 제거하였다. 제거전 scallop의 크기는 약 120 nm에서 제거후 약 $50{\mu}m$로 크게 개선됨을 SEM 사진으로 확인하였다.

• Proceedings of the Optical Society of Korea Conference
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• 2000.02a
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• pp.70-71
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• 2000

Ge이 도핑된 실리카 광도파로 코어는 GeO$_2$분자의 산소결핍에 의하여 248nm의 파장을 갖는 자외선에 대해서 광감응성을 가지게 된다. 따라서 248nm 파장의 레이저를 간섭시켜 조사할 경우, Ge가 도핑되지 않은 overcladding 부분은 투과하고 간섭 패턴의 에너지 분포에 따라 코어의 굴절률이 주기적으로 변화한다. 이 주기적인 굴절률 변화는 잘 알려진 광학적 브래그 격자(Bragg grating)의 역할을 하게된다. 자외선 레이저를 이용하여 영구적인 굴절률 변화를 코어 내부에 형성시키는 방법으로는 홀로그램법과 위상 마스크를 이용하는 방법, 그리고 단일 슬릿을 이용하는 방법등이 있다[1][2]. (중략)

• Journal of the Korean Society for Precision Engineering
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• v.27 no.8
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• pp.84-90
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• 2010

In focused ion beam (FIB) fabrication processes the ion beam intensity with Gaussian profile has a drawback for high resolution machining. In this paper, the fabrication method to modify the beam profile at substrate using silt mask is proposed to increase the machining resolution at high current. Slit mask is utilized to block the part of beam and transmit only high intensity portion. A nano manipulator is utilized to handle the silt mask. Geometrical analysis on fabricated profile through silt mask was conducted. By utilizing proposed method, improvement of machining resolution was achieved.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.8
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• pp.138-148
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• 1999

Thermal deformations of tension mask under localized heating are analyzed using finite element method and electron beam landing shifts are predicted by the analysis results. In CRT, electron beam landing shifts due to thermal deformations of the tension mask make the color purity of screen worse. In order to get the final results of thermal deformations, firstly the tension processes of the mask and following welding processes between the tensional mask and rail must be analyzed sequentially. And then, nonlinear transient thermo-elastic finite element analysis is performed on every part inside CRT including tension mask, wherein thermal radiation is a main heat transfer mechanism. Because the tension mask has numerous slits, the effective thermal conductivity and effective and effective elastic modulus is calculated, and the tension mask is modeled as a shell without slits. From the displacement results of tension mask, electron beam landing shifts is calculated directly. Experiments are performed to confirm our analysis results. Temperature distributions and beam landing shifts of tension mask are measured and the results are in good agreement with those of analyses.

• Journal of the Korean Society for Nondestructive Testing
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• v.21 no.2
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• pp.163-168
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• 2001

Due to aging, adhesively bonded and riveted aircraft lap joints can contain distends, cracks around rivet holes, fatigue induced flaws, and corrosion. It is required for the safety of aircraft to inspect these defects through the whole region of mint in rapid speed. Bond quality or adhesively bonded and riveted aluminum lap splice joints is investigated using non-contact remote ultrasonic nondestructive evaluation (NDE). Non-contact ultrasonic tests are performed using laser generation and air-coupled transducer detection. A Q-switched Nd:YAG laser and a periodic transmission mask are used to generate a selected Lamb mode. The Lamb wave is generated on one side of the lap splice joint, propagates along the plate, interacts with the joint and is detected on the other side by a micromachined air-coupled capacitance transducer. Analysis of recorded signals allows to evaluate the condition of the bond.

• Journal of Biomedical Engineering Research
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• v.20 no.1
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• pp.107-113
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• 1999

The purpose of this study was to develop a miniature imaging gamma probe with high performance that can detect small or residual tumors after surgery. Gamma probe detector system consists of NaI(Tl) scintillator, position sensitive photomultiplier tube (PSPMT), and collimator. PSPMT was optically coupled with 6.5 mm thick, 7.62 cm diameter of NaI(Tl) crystal and supplied with -1000V for high voltage. Parallel hexagonal hole collimator was manufactured for characteristics of 40-mm hole length, 1.3-mm hole diameter, and 0.22 mm septal thickness. Electronics consist of position and trigger signal readout systems. Position signals were obtained with summing, subtracting, and dividing circuit using preamplifer and amplifier. Trigger signals were obtained using summing amplifier, constant fraction discriminator, and gate and delay generator module with preamplifer. Data acquisition and processing were performed by Gamma-PF interface board inserted into pentium PC and PIP software. For imaging studies, flood and slit mask images were acquired using a point source. Two hole phantom images were also acquired with collimator. Intrinsic and system spatial resolutions were measured as 3.97 mm and 5.97 mm, respectively. In conclusion, Miniature gamma probe images based on the PSPMT showed good image quality, we conclude that the miniature imaging gamma probe was successfully developed and good image data were obtained. However, further studies will be required to optimize imaging characteristics.