• 제목/요약/키워드: 스틱/슬립

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A Study on Stick-slip Friction and Scratch in Cu CMP (Cu CMP에서 스틱-슬립 마찰과 스크래치에 관한 연구)

  • Lee, Hyun-Seop;Park, Boum-Young;Jeong, Suk-Hoon;Jeong, Jae-Woo;Seo, Heon-Deok;Jeong, Hae-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.653-654
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    • 2005
  • Stick-slip friction is one of the material removal mechanisms in tribology. This stick-slip friction occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction force monitoring system for chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. It seems that the stick-slip friction causes scratches on the surface of moving parts. In this paper, A study on the scratches which occur during copper CMP was conducted in a view of stick-slip friction.

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Analysis of Friction Mechanisms Associated with Write Feeling (필기 감성에 관련한 마찰메커니즘 분석)

  • Park, JinHwak;Kim, MinSeob;Lee, YoungZe
    • Tribology and Lubricants
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    • v.32 no.6
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    • pp.207-211
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    • 2016
  • To interpret the perception that originates from tactile sensibility during people touch and recognize the object surfaces, this study focuses on the development of a friction model that can describe the interaction of a stylus pen sliding over the counter surfaces. In addition, the study includes several other experimental factors such as the pressure, temperature, and topology of surface, which can have an effect on the emotional user experience concerning various surfaces; this research aims to suggest a method to quantitatively evaluate the relation between these experimental parameters and emotional user experience. Accordingly, the objective of research comprises the friction characteristic technology for measurement of fine tribological behavior and a standard to quantify the emotional feedback. Existing panels or input devices that provide interaction feedback about user actions simply operate with a single frequency vibration or sound response. On the contrary, this research investigates various interaction characteristics including friction force, frequency, and surface topology synthetically. Using the developed model, which can explain the relation between the friction parameters and emotional user experience, developers can design their product in order to provide the user with expected emotional sensibility. Consequently, it can contribute to reduce the development cost about sensitivity model.

Micro-positioning of a Smart Structure Using an Enhanced Stick-slip Model (향상된 스틱-슬립 마찰 모델을 이용한 스마트 구조물의 마이크로 위치제어)

  • Lee, Chul-Hee;Jang, Min-Gyu;Choi, Seung-Bok
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.18 no.11
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    • pp.1134-1142
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    • 2008
  • In this paper, a model-based stick-slip compensation for the micro-positioning is proposed using an enhanced stick-slip model based on statistical rough surface contact model. The smart structure is comprised with PZT(lead (Pb) zirconia(Zr) Titanate(Ti)) based stack actuator incorporating with the PID(proportional-integral-derivative) control algorithm, mechanical displacement amplifier and positioning devices. For the stick-slip compensation, the elastic-plastic static friction model is used considering the elastic-plastic asperity contact in the rough surfaces statistically. Mathematical model of system for the positioning apparatus was derived from the dynamic behaviors of structural parts. PID feedback control algorithms with the developed stick-slip model as well as feedforward friction compensator are formulated for achieving the accurate positioning performance. Experimental results are provided to show the performances of friction control using the developed positioning apparatus.

The Effects of Damping on the Limit Cycle of a 2-dof Friction Induced Self-oscillation System (마찰 기인 2자유도계 시스템의 자려진동에 대한 댐핑의 영향)

  • 조용구;신기홍;이유엽;오재응
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.12 no.7
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    • pp.502-509
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    • 2002
  • A two-degree of freedom model Is suggested to understand the basic dynamical behaviors of the interaction between two masses of the friction induced vibration system. The two masses may be considered as the pad and the dusk of the brake. The phase space analysis is performed to understand complicated dynamics of the non-linear model. Attractors in the phase space are examined for various conditions of the parameters of the model especially by emphasizing on the damping parameters. In certain conditions, the attractor becomes a limit cycle showing the stick-slip phenomena. In this Paper, not only titre existence of the limit cycle but also the sloe of the limit cycle is examined to demonstrate the non-linear dynamics that leads the unstable state. For the two different cases of the system frequency[(1) Two masses with same natural frequencies, (2) with different natural frequencies] . the propensity of limit cycle Is discussed In detail. The results show an important fact that it may make the system worse when too much damping Is present in the only one part of the masses.

Study on Influence of Spring Constant on Frictional Behavior at the Nanoscale through Molecular Dynamics Simulation (나노스케일 마찰거동에서 스프링 상수가 마찰에 미치는 영향에 대한 분자동역학 연구)

  • Kang, Won-Bin;Kim, Hyun-Joon
    • Tribology and Lubricants
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    • v.37 no.2
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    • pp.77-80
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    • 2021
  • In this study, we investigated the effect of the spring constant on frictional behavior at a nanoscale through molecular dynamics simulation. A small cube-shaped tip was modeled and placed on a flat substrate. We did not apply the normal force to the tip but applied adhesive force between the tip and the substrate. The tip was horizontally pulled by a virtual spring to generate relative motion against the substrate. The controlled spring constant of the virtual spring ranged from 0.3 to 70 N/m to reveal its effect on frictional behavior. During the sliding simulation, we monitored the frictional force and the position of the tip. As the spring constant decreased from 70 to 0.3 N/m, the frictional force increased from 0.1 to 0.25 nN. A logarithmic relationship between the frictional force and spring constant was established. The stick-slip instability and potential energy slope increased with a decreasing spring constant. Based on the results, an increase in the spring constant reduces the probability of trapping in the local minima on the potential energy surface. Thus, the energy loss of escaping the potential well is minimized as the spring constant increases.

Rear Drum Brake Grunt(stick-slip) Noise Improvement on Braking During Nose-dive & Return Condition (제동시 발생하는 리어 드럼브레이크 Grunt(stick-slip) Noise 개선)

  • Hong, Ilmin;Jang, Myunghoon;Kim, Sunho;Choi, Hongseok
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.23 no.9
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    • pp.781-788
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    • 2013
  • Grunt(stick-slip) noise happens between rear lining and drum on braking condition while vehicle is returning to steady position after nose-dive. The study presents a new testing and analysis methods for improving brake grunt noise on vehicle. Grunt noise is called a kind of stick slip noise with below 1 kHz frequency that is caused by the surfaces alternating between sticking to each other and sliding over each other with a corresponding change in friction force. This noise is typically come from that the static friction coefficient of surfaces is much higher than the kinetic friction coefficient. For the identification of the excitation mechanism and improvement of grunt noise, it is necessary to study variable parameters of rear drum brake systems on vehicle and to implement CAE analysis with stick slip model of drum brake. The aim of this study has been to find solution parameters throughout test result on vehicle and dynamo test. As a result of this study, it is generated from stick slip between rear lining and rear drum and it can be solved to reduce contact angle of lining with asymmetric and is effected not only brake drum strength but also rear brake size and brake factor.

Investigation of Mechanism of Frictional Impulse Noise in Closed Cabinet (캐비닛 구조물의 내부 마찰소음 발생 메커니즘에 관한 실험적 연구)

  • Lee, Dong Gyu;Park, Jung-Hyun;Park, Ki Hong;Ha, Byung-Kuk;Kim, Hyeong-Sik;Park, Sang Hu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.2
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    • pp.249-255
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    • 2013
  • A large-sized refrigerator has a complicated inner structure such as a shelf and a rack for product loading. Therefore, when the refrigerator door is opened and closed, the temperature inside the refrigerator varies and vibrations occur due to the physical force applied for opening and closing the door. Owing to these factors, an abnormal sound is generated by the relative distortion between the inner structures. In this study, we aimed to clarify the mechanism that generates this abnormal noise inside the refrigerator using experimental approaches, and we also investigated ways by which to reduce this noise. Toward this end, we developed an experimental setup for measuring the noise, temperature, inner pressure, as well as amount of vibration, and we analyzed the main factors causing the noise based on the experimental results. Furthermore, we suggested a way by which to reduce the noise; this method can be applied in the design stage itself.

A Study on the Design of a Double Cantilever Structure Friction Tester for Precision Friction Measurement (정밀 마찰측정을 위한 이중 캔틸레버 구조 마찰시험기의 설계에 관한 연구)

  • Kang, Won-Bin;Kim, Hyun-Joon
    • Tribology and Lubricants
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    • v.34 no.4
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    • pp.125-131
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    • 2018
  • A precision tribometer consisting of a cantilever was designed to measure frictional forces in the micro-Newton range. As frictional forces are measured based on the bending of the cantilever, vibration of the cantilever is the most significant factor affecting the quality of the friction measurement. Therefore, improved design of the tribometer with double cantilevers and a connecting plate that united the two cantilevers mechanically was suggested. For the verification of the modified design of the tribometer, numerical analysis and experiments were conducted. Examination using the finite element method revealed that the tribometer with a double cantilever and a connecting plate exhibited faster damping characteristics than the tribometer with a single cantilever. In the experiment, effectiveness of the double cantilever and connecting plate for vibration reduction was also confirmed. Vibration of the tribometer with double cantilever decreased eight times faster than that of the tribometer with a single cantilever. The faster damping of the double cantilever design is attributed to the mechanical interaction at the contacting surfaces between the cantilever and the connecting plate. Tribotesting using the tribometer with a single cantilever resulted in random fluctuation of frictional forces due to the stick-slip behavior. However, using the tribometer with a double cantilever and connecting plate for the tribotest gave relatively uniform and steady measurement of frictional forces. Increased stiffness owing to using a double cantilever and mechanical damping of the connecting plate were responsible for the stable friction signal.

Friction and Wear of Inconel 690 for Steam Generator Tube in Fretting (증기발생기 세관용 Inconel 690 의 프레팅 마찰 및 마멸특성)

  • Lee, Young-Ze;Lim, Min-Kyu;Oh, Se-Doo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.3
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    • pp.432-439
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    • 2003
  • Inconel 690 for nuclear steam generator tube has more Chromium than the conventionally used Inconel 600 in order to increase the corrosion resistance. To evaluate the tribological characteristics of Inconel 690 under fretting condition the fretting tests were carried out in air and elevated temperature water. Fretting tests of the cross-cylinder type were done under various vibrating amplitudes and applied normal loads in order to measure the friction forces and wear volumes. From the results of fretting wear tests. the wear of Inconel 690 can be predictable using the work rate model. The amounts of friction forces were proportional to relative movement between two fretting surfaces. The friction coefficients were decreased as increasing the normal loads and deceasing the vibrating amplitudes. Depending on fretting environment, distinctively different wear mechanisms and often drastically different wear rates can occur It was found that the fretting wearfactors in air and water at 2$0^{\circ}C$, 5$0^{\circ}C$, and 8$0^{\circ}C$ were 7.38 $\times$ $10^{-13}$$Pa^{-1}$, 2.12 $\times$$10^{-13}$$Pa^{-1}$, 3.34$\times$$10^{-13}$$Pa^{-1}$and 5.21$\times$$10^{-13}$$Pa^{-1}$, respectively flexibility to model response data with multiple local extreme. In this study, metamodeling techniques are adopted to carry out the shape optimization of a funnel of Cathode Ray Tube, which finds the shape minimizing the local maximum principal stress. Optimum designs using two metamodels are compared and proper metamodel is recommended based on this research.

Development of Rattle and Squeak Detection Methodology Considering Characteristics of Road Vibration Input (차량 부품의 노면 가진 특성을 고려한 래틀과 스퀵 현상 검출 방법의 개발)

  • Lyu, Su Jung;Jun, In Ki;Choi, Jae Min;Lee, Won Ku;Woo, Jae Chul
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.5
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    • pp.679-683
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    • 2013
  • BSR noise emerges in a vehicle as a result of road vibrations, engine vibrations, and speaker vibrations. BSR noise occurs with an irregular impact or stick slip friction phenomenon as the influence of the resonance mode when the vibration input load is transferred along poor joint and contacting pairs of the system. A sub-structure method of finite element analysis is required to detect impacts and slip in the full vehicle model. This study presents a method for sub-structure modeling and a rattle and squeak detection methodology that considers the characteristics of road vibration inputs.