• Title/Summary/Keyword: 스캔라인

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A Study on the Analysis of Multi-beam Energy for High Resolution with Maskless Lithography System Using DMD (DMD를 이용한 마스크리스 리소그래피 시스템의 고해상도 구현을 위한 다중 빔 에너지 분석에 관한 연구)

  • Kim, Jong-Su;Shin, Bong-Cheol;Cho, Yong-Kyu;Cho, Myeong-Woo;Lee, Soo-Jin
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.2
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    • pp.829-834
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    • 2011
  • Exposure process is the most important technology to fabricate highly integrated circuit. Up to now, mask type lithography process has been generally used. However, it is not efficient for small quantity and/or frequently changing products. Therefore, maskless lithography technology is raised in exposure process. In this study, relations between multi-beam energy and overlay were analyzed. Exposure experiment of generating pattern was performed. It was from presented scan line by multi- beam simulation. As a result, optimal scan line distance was proposed by simulation, and micro pattern accuracy could be improved by exposure experiment using laser direct imaging system.

A Real-time Copper Foil Inspection System using Multi-thread (다중 스레드를 이용한 실시간 동판 검사 시스템)

  • Lee Chae-Kwang;Choi Dong-Hyuk
    • Journal of KIISE:Computing Practices and Letters
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    • v.10 no.6
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    • pp.499-506
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    • 2004
  • The copper foil surface inspection system is necessary for the factory automation and product quality. The developed system is composed of the high speed line scan camera, the image capture board and the processing computer. For the system resource utilization and real-time processing, multi-threaded architecture is introduced. There are one image capture thread, 2 or more defect detection threads, and one defect communication thread. To process the high-speed input image data, the I/O overlap is used through the double buffering. The defect is first detected by the predetermined threshold. To cope with the light irregularity, the compensation process is applied. After defect detection, defect type is classified with the defect width, eigenvalue ratio of the defect covariance matrix and gray level of defect. In experiment, for high-speed input image data, real-time processing is possible with multi -threaded architecture, and the 89.4% of the total 141 defects correctly classified.

The Influence Evaluation of $^{201}Tl$ Myocardial Perfusion SPECT Image According to the Elapsed Time Difference after the Whole Body Bone Scan (전신 뼈 스캔 후 경과 시간 차이에 따른 $^{201}Tl$ 심근관류 SPECT 영상의 영향 평가)

  • Kim, Dong-Seok;Yoo, Hee-Jae;Ryu, Jae-Kwang;Yoo, Jae-Sook
    • The Korean Journal of Nuclear Medicine Technology
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    • v.14 no.1
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    • pp.67-72
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    • 2010
  • Purpose: In Asan Medical Center we perform myocardial perfusion SPECT to evaluate cardiac event risk level for non-cardiac surgery patients. In case of patients with cancer, we check tumor metastasis using whole body bone scan and whole body PET scan and then perform myocardial perfusion SPECT to reduce unnecessary exam. In case of short term in patients, we perform $^{201}Tl$ myocardial perfusion SPECT after whole body bone scan a minimum 16 hours in order to reduce hospitalization period but it is still the actual condition in which the evaluation about the affect of the crosstalk contamination due to the each other dissimilar isotope administration doesn't properly realize. So in our experiments, we try to evaluate crosstalk contamination influence on $^{201}Tl$ myocardial perfusion SPECT using anthropomorphic torso phantom and patient's data. Materials and Methods: From 2009 August to September, we analyzed 87 patients with $^{201}Tl$ myocardial perfusion SPECT. According to $^{201}Tl$ myocardial perfusion SPECT yesterday whole body bone scan possibility of carrying out, a patient was classified. The image data are obtained by using the dual energy window in $^{201}Tl$ myocardial perfusion SPECT. We analyzed $^{201}Tl$ and $^{99m}Tc$ counts ratio in each patients groups obtained image data. We utilized anthropomorphic torso phantom in our experiment and administrated $^{201}Tl$ 14.8 MBq (0.4 mCi) at myocardium and $^{99m}Tc$ 44.4 MBq (1.2 mCi) at extracardiac region. We obtained image by $^{201}Tl$ myocardial perfusion SPECT without gate method application and analyzed spatial resolution using Xeleris ver 2.0551. Results: In case of $^{201}Tl$ window and the counts rate comparison result yesterday whole body bone scan of being counted in $^{99m}Tc$ window, the difference in which a rate to 24 hours exponential-functionally notes in 1:0.114 with Ventri (GE Healthcare, Wisconsin, USA), 1:0.249 after the bone tracer injection in 12 hours in 1:0.411 with 1:0.79 with Infinia (GE healthcare, Wisconsin, USA) according to a reduction a time-out was shown (Ventri p=0.001, Infinia p=0.001). Moreover, the rate of the case in which it doesn't perform the whole body bone scan showed up as the average 1:$0.067{\pm}0.6$ of Ventri, and 1:$0.063{\pm}0.7$ of Infinia. According to the phantom after experiment spatial resolution measurement result, and an addition or no and time-out of $^{99m}Tc$ administrated, it doesn't note any change of FWHM (p=0.134). Conclusion: Through the experiments using anthropomorphic torso phantom and patients data, we found that $^{201}Tl$ myocardium perfusion SPECT image later carried out after the bone tracer injection with 16 hours this confirmed that it doesn't receive notable influence in spatial resolution by $^{99m}Tc$. But this investigation is only aimed to image quality, so it needs more investigation in patient's radiation dose and exam accuracy and precision. The exact guideline presentation about the exam interval should be made of the validation test which is exact and in which it is standardized about the affect of the crosstalk contamination according to the isotope use in which it is different later on.

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An Improved Online Algorithm to Minimize Total Error of the Imprecise Tasks with 0/1 Constraint (0/1 제약조건을 갖는 부정확한 태스크들의 총오류를 최소화시키기 위한 개선된 온라인 알고리즘)

  • Song, Gi-Hyeon
    • Journal of KIISE:Computer Systems and Theory
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    • v.34 no.10
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    • pp.493-501
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    • 2007
  • The imprecise real-time system provides flexibility in scheduling time-critical tasks. Most scheduling problems of satisfying both 0/1 constraint and timing constraints, while the total error is minimized, are NP-complete when the optional tasks have arbitrary processing times. Liu suggested a reasonable strategy of scheduling tasks with the 0/1 constraint on uniprocessors for minimizing the total error. Song et at suggested a reasonable strategy of scheduling tasks with the 0/1 constraint on multiprocessors for minimizing the total error. But, these algorithms are all off-line algorithms. In the online scheduling, the NORA algorithm can find a schedule with the minimum total error for the imprecise online task system. In NORA algorithm, EDF strategy is adopted in the optional scheduling. On the other hand, for the task system with 0/1 constraint, EDF_Scheduling may not be optimal in the sense that the total error is minimized. Furthermore, when the optional tasks are scheduled in the ascending order of their required processing times, NORA algorithm which EDF strategy is adopted may not produce minimum total error. Therefore, in this paper, an online algorithm is proposed to minimize total error for the imprecise task system with 0/1 constraint. Then, to compare the performance between the proposed algorithm and NORA algorithm, a series of experiments are performed. As a conseqence of the performance comparison between two algorithms, it has been concluded that the proposed algorithm can produce similar total error to NORA algorithm when the optional tasks are scheduled in the random order of their required processing times but, the proposed algorithm can produce less total error than NORA algorithm especially when the optional tasks are scheduled in the ascending order of their required processing times.

Semi-automated Tractography Analysis using a Allen Mouse Brain Atlas : Comparing DTI Acquisition between NEX and SNR (알렌 마우스 브레인 아틀라스를 이용한 반자동 신경섬유지도 분석 : 여기수와 신호대잡음비간의 DTI 획득 비교)

  • Im, Sang-Jin;Baek, Hyeon-Man
    • Journal of the Korean Society of Radiology
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    • v.14 no.2
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    • pp.157-168
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    • 2020
  • Advancements in segmentation methodology has made automatic segmentation of brain structures using structural images accurate and consistent. One method of automatic segmentation, which involves registering atlas information from template space to subject space, requires a high quality atlas with accurate boundaries for consistent segmentation. The Allen Mouse Brain Atlas, which has been widely accepted as a high quality reference of the mouse brain, has been used in various segmentations and can provide accurate coordinates and boundaries of mouse brain structures for tractography. Through probabilistic tractography, diffusion tensor images can be used to map comprehensive neuronal network of white matter pathways of the brain. Comparisons between neural networks of mouse and human brains showed that various clinical tests on mouse models were able to simulate disease pathology of human brains, increasing the importance of clinical mouse brain studies. However, differences between brain size of human and mouse brain has made it difficult to achieve the necessary image quality for analysis and the conditions for sufficient image quality such as a long scan time makes using live samples unrealistic. In order to secure a mouse brain image with a sufficient scan time, an Ex-vivo experiment of a mouse brain was conducted for this study. Using FSL, a tool for analyzing tensor images, we proposed a semi-automated segmentation and tractography analysis pipeline of the mouse brain and applied it to various mouse models. Also, in order to determine the useful signal-to-noise ratio of the diffusion tensor image acquired for the tractography analysis, images with various excitation numbers were compared.

The Analysis of Amplitude and Phase Image for Acoustic Microscope Using Quadrature Technique (쿼드러춰 방식에 의한 초음파현미경의 진폭과 위상영상 분석)

  • Kim, Hyun;Jun, Kye-Suk
    • The Journal of the Acoustical Society of Korea
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    • v.18 no.3
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    • pp.55-61
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    • 1999
  • In this study, we have constructed the acoustic microscope using quadrature technique and analyzed the relative variation of image intensity and the quality of image by reconstructing the amplitude and phase image for surface defects with tiny hight variation. In this experiment, we have constructed the scanning acoustic microscope using the focused transducer with 3㎒ center frequency and the quadrature detector. And we have fabricated aluminum samples with round defects whose depth is different and reconstructed the amplitude and phase images for the samples. One sample has round defects with 2㎜ diameter and 100㎛ depth and the other has round defects with 4㎜ diameter and 5㎜ depth. In the result of line scanning for the sample with 100㎛ round defects, it has been shown that the variation rate of amplitude image intensity is 7% and the variation rate of phase image intensity is 89%. The phase image has better contrast than amplitude image for the sample. In contrast to this, the amplitude image has better contrast than phase image for the sample with 5㎜ depth's defects. Accordingly there is big difference between amplitude image and phase image for depth variation of defects whose boundary is 1 wavelength. Consequently the acoustic microscope using quadrature detector can be evaluated efficiently more than using envelope detector, for detecting defects which have height variation less than 1 wavelength. And also the phase image and the amplitude image can be used for detecting defects of tiny height variation with complimentary relation.

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Development Testing/Evaluating Methods about Security Functions based on Digital Printer (디지털 프린터의 보안기능 시험/평가방법론 개발)

  • Cho, Young-Jun;Lee, Kwang-Woo;Cho, Sung-Kyu;Park, Hyun-Sang;Lee, Hyoung-Seob;Lee, Hyun-Seung;Kim, Song-Yi;Cha, Wook-Jae;Jeon, Woong-Ryul;Won, Dong-Ho;Kim, Seung-Joo
    • The KIPS Transactions:PartC
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    • v.16C no.4
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    • pp.461-476
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    • 2009
  • Digital Printers that are mainly used in enterprises and public institutions are compound machinery and tools which are combined into various functions such as printing, copying, scanning, and fax so on. Digital Printers has security functionality for protecting the important data related with confidential industry technology from leaking. According to the trends, CC(Common Criteria) evaluation and assurance about digital printer is on progress in Japan and USA. Domestically CC evaluation and assurance is started recently. However, the know-how about the digital printer evaluation is not enough and the developers and the evaluators have difficulty in CC evaluation of digital printer products in the country. Therefore, the testing method of digital printer security functionality and evaluation technology is essentially needed for increasing demand for the evaluation afterwards. In this study, we analyze the security functionality and developing trends of digital printer products from internal and external major digital printer companies. Moreover, we research the characters of each security functions and propose guideline for digital printer security functionality evaluation and vulnerability testing methods.

NDT of a Nickel Coated Inconel Specimen Using by the Complex Induced Current - Magnetic Flux Leakage Method and Linearly Integrated Hall Sensor Array (복합 유도전류-누설자속법과 고밀도 홀센서배열에 의한 니켈 코팅 인코넬 시험편의 비파괴검사)

  • Jun, Jong-Woo;Lee, Jin-Yi;Park, Duk-Keun
    • Journal of the Korean Society for Nondestructive Testing
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    • v.27 no.5
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    • pp.375-382
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    • 2007
  • Nondestructive testing (NDT) by using the electromagnetic methods are useful for detecting cracks on the surface and subsurface of the metal. However, when the material contains both ferromagnetic and paramagnetic materials, it is difficult for NDT to detect and analyze cracks using this method. In addition the existence of a partial ferromagnetic material can be incorrectly characterized as a crack in the several cases. On the other hand a large crack has sometimes been misunderstood as a partially magnetized region. Inconel 600 is an important material in atomic energy plant. A nickel film is coated when a crack a appears on an Inconel substrate. Cracks are difficult to detect on the combined material of an Inconel substrate with a nickel film, which are paramagnetic and ferromagnetic material respectively. In this paper, a scan type magnetic camera, which uses a complex induced current-magnetic flux leakage (CIC-MFL) method as a magnetic source and a linearly integrated Hall sensor array (LIHaS) on a wafer as the magnetic sensors, was examined for its ability to detect cracks on the combined material. The evaluation probability of a crack is discussed. In addition the detection probability of the minimum depth was reported.

Operation and Analysis of Network for Multivendor PLC Group Management in the Wall Paper Process (발포 벽지 공정에서 이기종 PLC 그룹 관리를 위한 네트워크 운영과 해석)

  • Gang, Seong-Deok;Lee, Dong-Chun;Kim, Jeong-Ho;Lee, Sang-Beom
    • The Transactions of the Korea Information Processing Society
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    • v.3 no.2
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    • pp.283-294
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    • 1996
  • To operate the automatic devices of manufacturing process more effectively and to solve the needs of the resource sharing, network technology is applied to the unit control devices located in common manufacturing zone and operated by connecting them. This paper introduces deign and test operation of cell system for the management of multivendor PLC by applying to wall paper process based on the manufacturing standardization of CIM. The analysis of designed multivendor PLC group is performed by selecting the parameters such as variation of data packet size and node number of PLC ladder logic program and variation by analyzing the corresponding variation values of token rotation time and waiting time for the system operation. For the method of the analysis,the equation is considering the overhead such as indicated packet service time and transmission safety margin for PLC network connection in M/G/1 queue model,and it is applied to the cell system and PLC group manage-ment for operation .Through the experiment,it is found that the realtime processing is possible with expanded and better result than the resuit obtained by Jayasumana.Browaka with PLC scan time considered,response lower limit of 10-20 msec. data packet size not more than 50 bytes.and the number of nodes less than 40.

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Adaptive Thresholding Method Using Zone Searching Based on Representative Points for Improving the Performance of LCD Defect Detection (LCD 결함 검출 성능 개선을 위한 대표점 기반의 영역 탐색을 이용한 적응적 이진화 기법)

  • Kim, Jin-Uk;Ko, Yun-Ho;Lee, Si-Woong
    • The Journal of the Korea Contents Association
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    • v.16 no.7
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    • pp.689-699
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    • 2016
  • As the demand for LCD increases, the importance of inspection equipment for improving the efficiency of LCD production is continuously emphasized. The pattern inspection apparatus is one that detects minute defects of pattern quickly using optical equipment such as line scan camera. This pattern inspection apparatus makes a decision on whether a pixel is a defect or not using a single threshold value in order to meet constraint of real time inspection. However, a method that uses an adaptive thresholding scheme with different threshold values according to characteristics of each region in a pattern can greatly improve the performance of defect detection. To apply this adaptive thresholding scheme it has to be known that a certain pixel to be inspected belongs to which region. Therefore, this paper proposes a region matching algorithm that recognizes the region of each pixel to be inspected. The proposed algorithm is based on the pattern matching scheme with the consideration of real time constraint of machine vision and implemented through GPGPU in order to be applied to a practical system. Simulation results show that the proposed method not only satisfies the requirement for processing time of practical system but also improves the performance of defect detection.