• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.496-496
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• 2012

Sputtering은 박막의 품질(부착력, 밀도, 균일도등)이 우수하고 대면적 증착이 용이하여 반도체, 디스플레이, MEMS기술등과 같은 첨단산업에서 널리 이용되고 있는 증착방법이다. 일반적인 평판형 스퍼터건은 전계와 자계가 직교하는 Target의 일부영역에서만 스퍼터링 현상이 발생하게 되어 증착물질의 사용효율이 20~30% 정도로 좋지 못하고 스퍼터링 되지않는 부분에서는 재증착 현상에 의한 파티클 발생을 유발하여 Substrate에 손상을 입혀 박막의 질을 떨어뜨리게 된다. 본 연구에서는 이러한 문제점들의 물리적 현상의 진단 및 최적화를 위해 Particle-In-Cell (PIC)시뮬레이션을 이용하여 그 특성들을 알아보았다. 인가전압, 압력, 증착물질과 기판사이의 거리를 변화시켜 자기장이 포함된 Paschen curve를 그렸다. 전기장만이 포함된 시스템에서의 Paschen curve는 이미 공식으로 알려져 있으며 마그네트론 스퍼터링의 시스템에서 Paschen curve와 비교하여 보다 낮은 압력에서 플라즈마가 형성할 수 있는 것을 확인하였다. 또한 Target에 충돌하는 아르곤이온의 양, 에너지 분포, 각도의 분포 등을 관찰하였는데, 대부분의 아르곤이온은 압력이 증가할수록 에너지가 큰 경향성을 가지며 입사각도는 Target에 보다 수직으로 충돌하는 경향을 볼 수 있었다. 증착물질과 기판사이의 거리의 변화에 대해서는 이온 특성의 변화는 없었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.375-375
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• 2012

최근 차세대 평판 디스플레이의 응용에 많은 주목을 받고 있는 AMOLED의 경우 전류구동 방식이기 때문에 a-Si TFT 보다는 LTPS-TFT가 요구되며, 대면적 기판에서의 결정립 크기의 균일도가 매우 중요한 인자이다. 비정질 실리콘 박막 상부 혹은 하부에 도전층을 개재하고, 상기도전층에 전계를 인가하여 그것의 주울 가열에 의해 발생한 고열에 의해 비정질 실리콘 박막을 급속 고온 고상 결정화하는 방법에 관한 기술인 JIC (Joule-heating Induced Crystallization) 결정화 공정은 기판 전체를 한번에 결정화 하는 방법이다. JIC 결정화 공정에 의하여 제조된 JIC poly-Si은 결정립 크기의 균일성이 우수하며 상온에서 수 micro-second내에 결정화를 수행하는 것이 가능하고 공정적인 측면에서도 별도의 열처리 Chamber가 필요하지 않는 장점을 가지고 있다. 그러나 고온 고속 열처리 방법인 JIC 결정화 공정을 수행 하면 Arc에 의하여 시편이 파괴되는 현상이 발견되었다. 본 연구에서는 Arc현상의 원인을 파악하기 위해 전압 인가 조건 및 시편 구조 조건을 변수로 결정화실험을 진행하였다. ARC가 발생하는 Si층과 Electrode 계면을 식각 분리하여 Electrode와 Si층 사이의 계면이 형성되지 않는 조건에서 전계를 인가하는 실험을 통하여 JIC 결정화 공정 중 고온에 도달하게 되면, a-Si층이 변형되어 형성된 poly-Si층이 전도성을 띄게 되고 인가된 전압이 도전층과 Poly-Si 사이에 위치한 $SiO_2$의 절연파괴(Dielectric breakdown)전압보다 높을 경우 전압 인가 방향에 수직으로 $SiO_2$가 절연 파괴되며 면저항 형태의 전도층의 단락이 진행되며 전도층이 완전히 단락되는 순간 Arc가 발생한다는 것을 관찰 할 수 있었다. 본 실험의 연구 결과를 바탕으로 Arc 발생을 방지하는 다양한 구조의 Equi-Potential 방법이 개발되었다.

• Journal of the Society of Naval Architects of Korea
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• v.28 no.1
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• pp.182-188
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• 1991

The modified arc-length algorithms for the automatic incremental solution of nonlinear finite element equations proposed by Riks are presented, which comprise the cylindrical arc-length method and the normal arc-length method. These methods are developed to trace the nonlinear path of large displacement problems such as a pre and post bucking/collapse response of general structures. These methods are applied to analyse the nonlinear behavior of arch and shell problems in parallel with the standard and modified Newton-Raphson method.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.37 no.5
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• pp.33-41
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• 2000

In this paper, a symmetric QMSA(Quarter-wavelength Microstrip Antenna) loading a capacitor to spread the electric flux lines is proposed. It was found that the bandwidth of this symmetric QMSA is broader than that of the asymmetric QMSA having a right-side Parallel plate only to load a capacitor. It was also found that this antenna could receive both vertically and horizontally polarized waves at 2.13GHz, and would be useful as a small antenna for wireless telephones and for indoor communication. A transmission line circuit model of this antenna was obtained and used to compute the resonant frequency and the return loss of the antenna accurately.

• Journal of the Korean Society of Propulsion Engineers
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• v.10 no.2
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• pp.87-94
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• 2006

An experimental research program providing knowledge to measure two-dimensional skin friction variation over a certain region of model surface is presented. In the oil-fringe imaging skin friction(FISF) technique, local slope of a thin oil applied on a test surface is measured from the interference fringe patterns on the oil surface, and its information is then related to the applied shear over the oil by the thin-oil lubrication theory. The FISF technique has been applied for a separation flowfield ahead of a circular cylinder vertically mounted on a flat plate, and it has been found that the FISF skin friction results show good comparison with the other numerical/experimental data obtained for similar conditions. implying an applicability of the technique.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.3 no.4
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• pp.222-230
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• 1991

Conjugate heat transfer by steady laminar natural convection from a conducting tube with two vertical axial fins has been studied by a finite difference numerical procedure under basic conditions; $Ra=10_6$, Pr = 5 and $L_F=0.15$. The maximum local tube Nusselt number appears at ${\theta}=140^{\circ}$ for $L_F=0.06$, at ${\theta}=130^{\circ}$ for $L_F=0.30$ and at ${\theta}=120^{\circ}$ for $L_F=0.30$, $L_F=0.06$, respectively. The maximum mean Nusselt number shows at $L_F=0.18$ for the downward fin and at $L_F=0.12$ for the upward fin. Therefore the optimized fin length is $L_F{\approx}0.15$ under these conditions. At $L_F=0.15$, the mean Nusselt number by increasing Rayleigh number is remarkably increased for downward fin and then is slowly increased except for downward fin, it by increasing Prandtl number is apparently increased at $Pr{\leq}2$, and slightly increased at Pr>2.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.8
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• pp.1566-1574
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• 1992

Local heat transfer characteristics for a round air jet impinging normally on a heated flat plate were experimentally investigated. The problem parameters investigated were jet Reynolds number, Re=4000,10000, and 20000, and nozzle-to-plate spacing(L/D) of 2,6, and 10. The temperature variations on the flat uniform heat flux surface were mapped using a thermo-sensitive liquid crytal sheet. The isochromatic images corresponding to the characteristic temperature of liquid crystal were analyzed with the help of a digital image processing system. The local Nusselt number, Nu decreased rapidly in the impingement region and exhibited a similar profiles in the wall jet region independent of the nozzle-to-plate spacing L/D. In the case of large Reynolds number, heat transfer rate (Nu) was proportional to 0.5 power of the Reynolds number. For L/D=2, a secondary peak in the heat transfer rate was seen in the region of X/D=1.5~3 due to the transition from laminar to turbulent boundary layer.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2006.05a
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• pp.637-640
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• 2006

In this paper, a microstrip antenna with a small loop consisting of the left and right parallel plate to load capacitor is proposed. It is obtained the improved small size than the antenna of the transformed Uh and the antenna of the left and right parallel plate to load capacitor on QMSA. Equivalent circuit of transmission line model is designed to find more accurate resonant frequency. Also, the designed and fabricated antenna can receive both vertically and horizontally polarized waves to operating frequency of 1.5GHz. Therefore proposed antenna is available as a small antenna for wireless communication and will be quite useful for indoor communication

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.18 no.11
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• pp.867-873
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• 2006

Vertical falling liquid film is extensively used in heat and mass transfer processes of many applications, such as evaporative coolers, cooling towers, and absorption chillers. In such cases, it is required that the falling film spreads widely in the surface forming thin liquid film to enlarge contact surface. An addition of surface active agent to a falling liquid film or hydrophilic surface treatment affects the fluid physical properties of the film. Surfactant addition not only decreases contact angle between the liquid and solid surface but also changes the surface from hydrophobicity to hydrophilicity. In this study, the effects of contact angle on falling film characteristics over a vertical surface have been investigated experimentally. The contact angle is varied either by an addition of surfactant to the liquid or by hydrophilic surface treatment. It is found that the wetted area is increased and film thickness is decreased by the hydrophilic treatment as compared with those of other surfaces. With this hydrophilic treatment, the falling liquid film spreads out widely in the surface. As surfactant concentration is increased, wetted area is also increased and the film thickness is substantially decreased.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.6
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• pp.465-474
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• 2014

To validate the accuracy of the boiling heat flux partitioning model, an experiment was performed to investigate how the wall heat flux is divided into the three heat transfer modes of evaporation, quenching, and single-phase convection during subcooled nucleate boiling on a vertical wall. For the experimental partitioning of the wall heat flux, the wall heat flux and liquid-vapor distributions were simultaneously obtained using synchronized infrared thermometry and the total reflection technique. Boiling experiments of water with subcooling of $10^{\circ}C$ were conducted under atmospheric pressure, and the results obtained at the wall superheat of $12^{\circ}C$ and average heat flux of $283kW/m^2$were analyzed. There was a large difference in the heat flux partitioning results between the experiment and correlation, and the bubble departure diameter and bubble influence factor, which account for a portion of the surrounding superheated liquid layer detached by the departure of a bubble, were found to be important fundamental boiling parameters.