• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.380-384
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• 1997

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. Reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, correctwe machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysls method proposed in the previous paper. These processes can be rtcrated if the analized motion errors are worse than target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail after corrective machining are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm IS effective to acquire the corrective machming information to improve the accuracy of hydrostatic table.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.425-428
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• 1997

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective lapping work to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13pm of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07pm of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by the unskilled person after he experienced a little of preliminary machining. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.70-76
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• 2002

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective machina work practically to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13$\mu$m of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07$\mu$m of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by an unskilled person after he experienced a little of preliminary machining training. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.62-69
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• 2002

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, corrective machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysis method proposed in the previous paper. These processes can be iterated until the analized motion errors are satisfied with target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail, after corrective machining, are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm is effective to acquire the corrective machining information to improve the accuracy of hydrostatic table.