• 대한기계학회논문집B
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• 제35권12호
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• pp.1249-1255
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• 2011

최근의 반도체 제조용 대규모 클린룸에서는 도입 외기를 가열가습 및 냉각감습하는 외기공조시스템의 에너지소비량이 클린룸 환경을 유지하기 위해 필요한 전체 공조에너지의 약 45 %를 차지하고 있다. 특히 동기(겨울철)의 경우 외기를 가습하기 위한 에너지소비량은 매우 높다. 따라서 에너지절감을 통한 제조비용 절감 및 온실가스 감축을 위해 외기부하와 관계되는 공조에너지의 사용효율 증대 및 철저한 사용합리화가 요구되고 있다. 따라서 반도체 클린룸용 외기공조시스템의 핵심 가습방식인 증기가습과 수분무가습 방식에 대한 소비전력량을 분석하는 것은 에너지절약적 측면에서 상당히 가치가 있다고 판단된다. 본 연구에서는 전극봉식 가습기에 의한 증기가습방식 및 에어와셔에 의한 수분무가습방식 외기공조시스템들의 공조프로세스 및 소비전력량을 외기량 1000 $m^3$/h의 경우 기흥지역의 동기 및 하기의 피크부하에 대해 비교하는 실험을 수행하였다. 실험결과들로부터 에어와셔 수분무가습 외기공조시스템이 전극봉식 증기가습 외기공조시스템보다 연간 소비전력량이 적어서 에너지절약적임을 보여주었다.

• 공기청정기술
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• 제18권4호통권71호
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• pp.81-81
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• 2005

• 설비공학논문집
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• 제25권2호
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• pp.55-63
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• 2013

For a large-scale semiconductor manufacturing clean room, the energy consumed in an outdoor air conditioning system to heat, humidify, cool and dehumidify incoming outdoor air is very large. In particular, the energy requirement to humidify outdoor air in the winter season is generally known to be high. Recently, in order to overcome the high energy consumption nature of a steam generator in a conventional steam humidification type outdoor air conditioning system, an air washer is often introduced instead of the steam generator in the outdoor air conditioning system, which can be called a water spray humidification type outdoor air conditioning system. Therefore, the assessment and comparison of the annual energy consumed in the steam humidification type and the water spray humidification type outdoor air conditioning systems deserves to be examined in order to reduce the outdoor air conditioning load of a clean room. In the present study, a numerical analysis was conducted to obtain the annual electric power consumption of the two outdoor air conditioning systems. It was shown from the comparison of the numerical results that the water spray humidification type outdoor air conditioning system can reduce about 30% of annual electric power consumption of the steam humidification type outdoor air conditioning system.

• 공기청정기술
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• 제28권4호
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• pp.24-36
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• 2015

• 한국입자에어로졸학회지
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• 제13권2호
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• pp.65-77
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• 2017

In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.