• Journal of the Microelectronics and Packaging Society
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• v.9 no.4
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• pp.17-23
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• 2002

The more productive and stable fabrication can be obtained by applying chemical mechanical polishing (CMP) process to shallow trench isolation (STI) structure in 0.18 $\mu\textrm{m}$ semiconductor device. However, STI-CMP process became more complex, and some kinds of defect such as nitride residue, tern oxide defect were seriously increased. Defects like nitride residue and silicon damage after STI-CMP process were discussed to accomplish its optimum process condition. In this paper, we studied how to reduce torn oxide defects and nitride residue after STI-CMP process. To understand its optimum process condition, We studied overall STI-related processes including trench depth, STI-fill thickness and post-CMP thickness. As an experimental result showed that as the STI-fill thickness becomes thinner, and trench depth gets deeper, more tern oxide were found in the CMP process. Also, we could conclude that low trench depth whereas high CMP thickness can cause nitride residue, and high trench depth and over-polishing can cause silicon damage.

• Journal of Broadcast Engineering
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• v.21 no.6
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• pp.878-888
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• 2016

This paper proposes an efficient method to remove the boundary artifacts of rendered views caused by damaged depth maps in the 3D video system. First, characteristics of boundary artifacts with the compression noise in depth maps are carefully studied. Then, the artifacts suppression method is proposed by the iterative projection onto convex sets (POCS) algorithm with setting the convex set in pixel and frequency domain. The proposed method is applied to both texture and depth maps separately during view rendering. The simulation results show the boundary artifacts are greatly reduced with improving the quality of synthesized views.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2019.05a
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• pp.600-602
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• 2019

Metals are used in a variety of industrial sites and daily life. Metals are often used in machinery, automobile parts, wires, and robots. Metal causes small damage to the metal surface for a variety of reasons, such as the processing process and the user's operating environment. In this paper, phase detection for the inspection of defects in metals has been implemented. Using the electrical conductivity of metal, a circuit whose phase varies with the depth and size of the defect, and with the changed phase, the depth and size of the defect can be estimated.

• Journal of Conservation Science
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• v.30 no.4
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• pp.427-438
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• 2014

To measure the depth and extension on the surface cracks of the stone monument, ultrasonic pulse velocity targeted at the Mulgyeseowon Stele in Changnyeong was used in this research. Additionally, to establish a long-term countermeasure of management and conservation for this stele, we have investigated the material properties and damage on it and have conducted a precise diagnosis by a variety of non-destructive techniques. Our research has revealed that stones of the stele are composed mainly of three rock types according to the parts of it, alkali-feldspar granite, gabbro and diorite. The result of the deterioration evaluation has occurred that cracks, which are observed from every direction in the body of the stele, are the significant factors to reduce structural stability. The ultrasonic velocity for an evaluation on the properties of the stele has revealed that the speed was high in the order of body, pedestal and crown. Furthermore, to understand the present condition and occurrences of the cracks which have measured in many different forms on the stele quantitatively, we have estimated from 0.6 to 24.1cm deep of the cracks by To-Tc method using ultrasonic velocity.

• Proceedings of the Korea Concrete Institute Conference
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• 2005.11a
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• pp.45-48
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• 2005

The purpose of this study is to investigate evaluation technique of damaged depth of concrete exposed at high temperature. In order to evaluate damaged depth of core picked at member under fire, the 12 specimens have been made with variables of concrete strength(20Mpa, 40Mpa, 60Mpa). Water absorption after heating has been measured and split tensile stress test was performed. The results show that the deeper of the depth from heating face, water absorption ratio is smaller and tensile failure stress is larger. Using this technique at damage evaluation of fired structure, We evaluate damaged depth of member under fire and determine the reasonable strengthening range.

• Journal of the Korean Vacuum Society
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• v.3 no.3
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• pp.341-345
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• 1994

As+ 와 P+ 이온들이 주입된 실리콘에서 주입 이온들의 확산 및 실리콘의 재결정화에 열처리가 미치는 영향에 대해서 조사하였다, 여기서 이온 주입량은 실리콘 표면영역을 비정질화하기에 충분한 양 이었다. 이온 주입 시실리콘 내부에 생성된 손상들을 제거하기 위해 온도와 시간을 변화시켜 가며 시편 을 전기로 속에서 열처리하였다. 그러나 이때 야기된 도우펀트들의 과도적인 확산에 의해서 접합깊이는 예측한 것보다 더욱 깊은 곳에서 나타나다. 이러한 과도적인 확산은 주로 이온 주입으로 인해 야기된 시편들이 손상들을 제거하기 위한 열처리 과정동안 일어난 것으로 생각된다. 이것은 SIMS와 SUPREM IV simulation 에 의해서 확인할 수 가 있었다. As+ 와 P+ 이온이 주입된 실리콘의 결정성 회복을 Raman 분광법을 이용하여 조사하였다.

• Journal of the Earthquake Engineering Society of Korea
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• v.4 no.2
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• pp.65-72
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• 2000

콘크리트 구조물이 지진 등으로 손상을 입었을 때 그 내부 상태를 파악하는 일은 구조물의 안전성 판단에 필요한 중요 과정중 하나이다 손상도 파악에 사용되는 비파괴 검사 방법 중 레이더법은 현재 콘크리트 부재의 두께와 매립된 철근 및 공동 탐사에 적용되고 있다 레이더법은 다른 비파괴 검사 방법에서와 마찬가지로 측정된 신호의 처리와 해석에 따라 그 결과가 좌우된다 . 이논문에서는 상용 레이더 시스템에서 얻어지는 화상 데이트터를 개선하는 방법을 개발하여 철근이 매립된 콘크리트 시편에 적용하였다 실험에 사용된 기편의 크기는 1,000mm(길이)$\times$600mm (폭) $\times$140mm(두께) 이고 철근의 매립깊이는 표면으로부터 철근 중심까지 60mm 이다 레이더 실측 실험에서 철근의 수평배근 간격을 60 90, 120, 150 mm 로 변화시켜 간격탐사가능성을 시험하였다 결과적으로 상용 시스템에 비해 샹상된 판별효과를 나타냈으며 배근 간격이 90, 120, 150mm 인 시편에서 그 간격을 정확히 찾아내었다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.12 no.1
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• pp.27-34
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• 1999

We investigated the effect of mechanical back side damage in viewpoint of electrical and surface morphological characteristics in Czochralski silicon wafer. The intensity of mechanical damage was evaluated by minority carrier recombination lifetime by laser excitation/microwave reflection photoconductance decay technique, atomic force microscope, optical microscope, wet oxidation/preferential etching methods. The data indicate that the higher the mechanical damage degree, the lower the minority carrier lifetime, and surface roughness, damage depth and density of oxidation induced stacking fault increased proportionally.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.10a
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• pp.36-40
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• 2001

파인 세라믹은 대부분의 기계적 특성에 있어서 일반금속보다 우수한 특성을 가지기 때문에 각종기계 및 부품 재료로서의 기대가 크다. 그러나 세라믹재료의 고경강도, 고취성에 기인하는 난가공성 및 가공손상층의 발생은 이들 재료의 실용화에 큰 장애로 되어 있다. 현재, 다종의 세라믹이 개발되어져 있고, 이들을 어떠한 제품의 형태로 만들기 위해서는 기계적 가공을 필요로 하게된다. 오늘날, 세라믹의 기계적 가공법으로서 가장 일반적으로 사용되어지는 것은 다이야몬드숫돌에 의한 연삭가공이다.

• Proceedings of the Korean Society of Crop Science Conference
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• 1996.10a
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• pp.84-85
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• 1996