• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2003.05a
• /
• pp.14-14
• /
• 2003

Silicon carbide (SiC)는 높은 power 영역과 높은 온도영역에서도 작동 가능한 우수한 반도체 물질이다. 또한 우수한 열적 화학적, 안정성을 가지고 있어 가흑한 조건에서의 소자로써도 사용 가능하다. 현재 SiC 적용분야로는 우수한 전기적, 기계적 성질을 이용한 미세소자(MEMS)와 GaN 와 거의 유사한 격자상수를 가지는 것을 이용한 GaN epitaxial 성장의 기판으로도 사용되어진다. 그러나 SiC 는 기존의 습식식각 용매에 대해 화학적 안정성을 가지고 있기 때문에 전자소자의 제작에 있어서 플라즈마를 이용한 건식식각의 중요성이 대두되어지고 있다. 소자제작에 있어 이러한 건식식각시 식각 단면의 제어, 이온에 의한 낮은 손상 정도, 매끄러운 식각 표면, 그리고 고속의 식각 속도둥이 요구되어진다. 본 실험에서는 식각 속도의 증가와 수직한 식각 단면둥을 획득하기 위하여 SF6 플라즈마에서 Source power, dc bias voltage, 그리고 외부에서 인가되는 자속의 세기를 변화시쳐가며 식각 속도, 식각 마스크와의 식각 션택비, 식각 단면둥과 같은 SiC 의 식각 특성을 관찰하였다. 식각 후 식각 단면은 주사전자 현미경(SEM)을 통해 관찰하였다. 본 실험에서의 가장 높은 식각 속도는 분당 1850n 로써 이때의 공정조건은 1400W 의 inductive power, -600V 의 dc bias voltage, 20G 의 외부자속 세기이었다. 또한, 높은 inductive power 조건과 낮은 dc bias voltage 조건에서 Cu는 $SF_6$ 플라즈마 내에서 식각부산물의 증착으로 인해 SiC 와 무한대의 식각선택비를 보였다. 이러한 Cu 마스크를 사용한 SiC 의 식각에서는 식각 후 수직한 식각 단변을 관찰할 수 있었다. 것올 알 수 있다. 따라서, 기존의 pve 보다 세라믹 기판의 경우가 수분 흡수율이 높아 더 오랫동안 전류를 흐르게 하여 방식성이 개선된 것으로 판단된다.을 통해 경도가 증가한 시편의 경우 석출상의 크기가 5nm 이하로 매우 작고 대체로 기지와 연속적인 계면을 형성하나, 열처리가 진행될수록 석 출상의 크기가 커지고 임계크기 이상에 이르면 연속적인 계면은 거의 발견되지 않고, 대부 분 불연속적이고 확연한 계면을 형성함을 관찰 할 수 있었다. 알루미나(${\alpha}-Al_2O_3$) 기판 위에 증착한 $(Ti_{1-x}AI_{x})N$ 피막은 마찬가지로 (200) 우선 방위를 나타내었으나, 그 입자의 크기가 수십 nm로 고속도강위에 증착한 피막에 비해 상당히 크게 형성되었다. 또한 열처리 후에 AIN의 석출이 진행됨에도 불구하고 경도 증가는 나타나지 않고, 열처리가 진행됨에 따라 경도가 감소하는 양상만을 나타내었다. 결국 $(Ti_{1-x}AI_{x})N$ 피막이 열처리 전후에 보아는 기계적 특성의 변화 양상은 열역학적으로 안정한 Wurzite-AlN의 석출에 따른 것으로 AlN 석출상의 크기에 의존하며, 또한 이러한 영향은 $(Ti_{1-x}AI_{x})N$ 피막에 존재하는 AI의 함량이 높고, 초기에 증착된 막의 업자 크기가 작을 수록 클 것으로 여겨진다. 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$의 범위를 벗어나지 않는다. 그렇기 때문에

• 한국지구물리탐사학회:학술대회논문집
• /
• 2009.10a
• /
• pp.147-154
• /
• 2009

Physical properties of rocks, such as velocity, are strongly dependant on detailed pore structures, and recently, pore micro-structures by X-ray tomography techniques have been used to simulate and understand the physical properties. However, the smoothing effect during the tomographic reconstruction procedure often causes an artifact - overestimating the contact areas between grains. The pore nodes near a grain contact are affected by neighboring grain nodes, and are classified into grain nodes. By this artifact, the pore structure has higher contact areas between grains and thus higher velocity estimation than the true one. To reduce this artifact, we tried two image processing techniques - sharpening filter and neural network classification. Both methods gave noticeable improvement on contact areas between grains visually; however, the estimated velocities showed only incremental improvement. We then tried to change the resolutions of tomogram and quantify its impact on velocity estimation. The estimated velocity from the tomogram with higher spatial resolution was improved significantly, and with around 2 micron spatial resolution, the calculated velocity was very close to the lab measurement. In conclusion, the resolution of pore micro-structure is the most important parameter for accurate estimation of velocity using pore-scale simulation techniques. Also the estimation can be incrementally improved if combined with image processing techniques during the pore-grain classification.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.14 no.1
• /
• pp.344-350
• /
• 2013

A recent study reporting significantly reduced symmetry in arm swing amplitude in early Parkinson's disease (PD), as measured during gait by auditory cues velocity, led to this investigation of arm swing symmetry and amplitude in PD. The subjects were 14 elderly patients diagnosed with PD. Patients were measured of three conditions performed in random order: slow, general, fast. The auditory cue velocity consisted of a metronome beat ${\pm}20%$ than the subject's general gait speed. Using a motion analysis measurement system, changes in kinematic variables were compared to arm swing analysis. PD groups showed a highly significant reduction of the arm swing amplitude on the more affected body side(MAS)(p<.05). Comparison between the auditory cues velocity, there was a significant increase arm swing amplitude in fast velocity gait than slow and general velocity gait(p<.05). We conclude that motion analysis during gait by auditory cues velocity allows reliable investigation of asymmetric arm movements in early PD patients which attenuate with ongoing disease. The measurement of limb kinematics during gait by auditory cues velocity can broaden our methodological line-up for the analysis of complex motor programs in movement disorders.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.18 no.1
• /
• pp.537-544
• /
• 2017

An experimental study was carried out to investigate the characteristics of the propagation distance of a flood wave considering the levee failure speed in a flat inundation area. The Ritter solution for one dimensional flow was considered to formulate the experimental results and a representative form with coefficients of k and m, which consider the three dimensional flow characteristics, was applied. The experiments showed that the propagation velocity of the wave front in the inundation area was influenced by the levee breach speed as well as the initial water level, which is a significant variable representing the flood wave behavior. In addition, coefficients k and m are not constants, but variables that vary with levee breach speed. An empirical formula was also suggested using the experimental results in the form of the relationships between k and m. In this study, a large-scale experiment for flood inundation was carried out to examine the behavior of flooding in the inundated area and the relationships between the levee breach speed and wave-front propagation velocity were suggested based on the experimental results. These research results are expected to be used as the baseline data to draw a flow inundation map, establish an emergency action plan, and verify the two-dimensional numerical model.

• KSCE Journal of Civil and Environmental Engineering Research
• /
• v.33 no.3
• /
• pp.1037-1047
• /
• 2013

A systematic laboratory compaction testing was performed with the laboratory seismic measurements of the compacted specimens sampled from various compaction fills and was supplemented with in-situ seismic testing to investigate the effects of compaction energy on the elastic wave velocities of the railway roadbed materials. The both variances of the compressive and shear wave velocities with moisture content curve ($V_p$-w and $V_s$-w curves) are similar to the general trend of the density-moisture content curve(${\gamma}_d$-w curve). At the wet side of optimal moisture content (OMC), either $V_p$ or $V_s$ does not significantly increase, which is well reflecting the no gaining in density with the increasing compaction energy exceeding modified-D compaction effort. $V_p$ increases linearly with ${\gamma}_d$ at the dry side of OMC, while it does exponentially at the wet side. The in-situ wave velocities were found to be influenced by the level of confinement and $V_s$ was more sensitive to compaction energy than $V_p$.

• Geophysics and Geophysical Exploration
• /
• v.19 no.1
• /
• pp.29-36
• /
• 2016

Recently, the studies about rock physics model (RPM) in shale reservoir are widely performed. In shale reservoir, the degree of the maturity can be estimated by kerogen and GOR (Gas-Oil Ratio). The researches on the rock physics model of shale reservoir with the amount of kerogen have been actively carried out but not with GOR. Thus, in this study, we analyzed the changes in seismic velocity and density, and AVO (Amplitude Variation with Offset) response depending on changes in GOR and the amount of kerogen. Since the shale consists of plate-like particles, it has vertical transverse isotropy (VTI). Therefore we estimated the seismic velocity and density by using Backus averaging method and analyzed AVO responses based on these estimated properties. The results of analysis showed that the changes in the velocity with the GOR variation are small but the velocity changes with the variation in kerogen amount are relatively larger. In case, GOR 180 (Litre/Litre) which is boundary between heavy oil and light oil, when volume fraction of kerogen increased from 5% to 35%, the P-wave velocity normal to the layering increased 51%. That is, it helps estimating maturity of kerogen through the velocity. Meanwhile, when rates of oil-gas mixture are large, the effect of GOR variation on the velocity change became larger. In case volume fraction of kerogen is 5%, the P-wave velocity normal to the layering was estimated $1.46km/s^2$ in heavy oil (GOR 40) but $1.36km/s^2$ in light oil (GOR 300). The AVO responses analysis showed class 4 regardless of the GOR and amount of kerogen because variation of poisson's ratio is small. Therefore, shale reservoir has possibility to have class 4.

• KOREAN JOURNAL OF CROP SCIENCE
• /
• v.46 no.3
• /
• pp.202-208
• /
• 2001

Under the constant daylength of 13 hours and growth temperatures of 15$^{\circ}C$ to 27$^{\circ}C$, the final number of loaves (FNL) on the main culm was constant as 15 regardless of temperature in rice variety 'Kwanganbyeo'. Leaf appearance rate (LAR) increased with rising temperature and decreased with phenological development. Threshold temperature (T$_{o}$) was not constant across growth stages, but increased with phenological development. Effective accumulated temperature (EAT), which is calculated by the summation of values subtracting T0 from daily mean temperature, is closely related with number of leaves appeared (LA). LA was fitted to bilinear, quadratic, power and logistic function of EAT. Among the functions, logistic function had the best fitness of which coefficient of determination was $R^2$=0.995. Therefore, LAR prediction model was established by differentiating this function in terms of time: (equation omitted). where dL/dt is LAR, T$_1$ is daily mean temperature, L is the number of leaves appeared, and a, b, and c are constants that were estimated as 41.8, 1098.38, and -0.9273, respectively. When predictions of LA were made by LAR prediction model using data independent of model establishment, the observed and predicted LA showed good agreement of $R^2$$\geq$0.99.

• Economic and Environmental Geology
• /
• v.31 no.1
• /
• pp.21-29
• /
• 1998

Broadband receiver functions are developed from teleseismic P waveforms recorded at Wonju (KSRS), Inchon (IRIS), and Pohang (PHN), and are analyzed to examine the crustal structure beneath the three stations. The teleseismic receiver functions are inverted in the time domain to the vertical P wave velocity structure beneath the stations. Clear P-to-S converted phases from the Moho interface are observed in teleseismic seismograms recorded at the three stations. We estimated the crustal velocity structures beneath the stations using the receiver function inversion. The general features of inversion results are as follows: (1) For Pohang station, there is a high velocity gradient at a 4~5 km deep for SE and NW back azimuth and a low velocity zone at around 10 km deep. The Moho depth is 28 km for NW direction. (2) The shallow crustal structure beneath Wonju station is somewhat complex and there is a high-velocity zone ($V_p{\simeq}6.8km/sec$) at 3 to 4 km deep. The average crustal thickness is 33 km, and a transition zone exists at a 30~33 km deep of lower crust, of which velocity is abruptly changed 6.4 to 7.9 km/sec. (3) For Inchon station, the crustal velocity gradient monotonously increases up to the Moho discontinuity and the velocity is abruptly changed from 6.2 km/sec to 7.9 km/sec at 29 km deep.

• Geophysics and Geophysical Exploration
• /
• v.10 no.1
• /
• pp.19-28
• /
• 2007

In this study, we propose a joint inversion method, using genetic algorithms, to estimate an S-wave velocity structure for deep sedimentary layers from receiver functions and surface-wave phase velocity observed at several sites. The method takes layer continuity over a target area into consideration by assuming that each layer has uniform physical properties, especially an S-wave velocity, at all the sites in a target area in order to invert datasets acquired at different sites simultaneously. Numerical experiments with synthetic data indicate that the proposed method is effective in reducing uncertainty in deep structure parameters when modelling only surface-wave dispersion data over a limited period range. We then apply the method to receiver functions derived from earthquake records at one site and two datasets of Rayleigh-wave phase velocity obtained from microtremor array surveys performed in central Tokyo, Japan. The estimated subsurface structure is in good agreement with the results of previous seismic refraction surveys and deep borehole data. We also conclude that the proposed method can provide a more accurate and reliable model than individual inversions of either receiver function data only or surface-wave dispersion data only.

• Tunnel and Underground Space
• /
• v.27 no.4
• /
• pp.230-242
• /
• 2017

Seismic velocities measured from in-situ tests (n=177) and through rock core samples (n=1,035) are reviewed in light of construction standards, widely used standards as a first-hand approximation of rock classification solely based on seismic velocities. In-situ down hole tests and refraction survey for soft rocks showed seismic velocities of 1,400~2,900 m/s which is faster than those specified in construction standards. For moderate~ hard rocks, in-situ down hole tests and refraction survey showed 2,300~3,800 m/s which roughly corresponds with the range specified in the construction standards. A similar trend is also observed for seismic velocities measured from rock core samples. The observed differences between construction standards and seismic velocities can be explained in two ways. If construction standards are correct the observed differences may be explained with seismic velocities affected by underlying fast velocities and also possibly with selection of intact cores for velocity measurement. Alternatively, construction standards may have intrinsic problems, namely artificial discrete boundaries between soft rocks and moderate rocks, application of foreign standards without consideration of geologic setting and lack of independent verification steps. Therefore, we suggest a carefully designed verification studies from a test site. We also suggest that care must be exercised when applying construction standards for the interpretation and accessment of rock mass properties.