• Journal of the Microelectronics and Packaging Society
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• v.28 no.1
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• pp.39-46
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• 2021

The quantitative measurement of interfacial adhesion energy (Gc) of multilayer thin films for Cu interconnects was investigated using a double cantilever beam (DCB) and 4-point bending (4-PB) test. In the case of a sample with Ta diffusion barrier applied, all Gc values measured by the DCB and 4-PB tests were higher than 5 J/㎡, which is the minimum criterion for Cu/low-k integration without delamination. However, in the case of the Ta/Cu sample, measured Gc value of the DCB test was lower than 5 J/㎡. All Gc values measured by the 4-PB test were higher than those of the DCB test. Measured Gc values increase with increasing phase angle, that is, 4-PB test higher than DCB test due to increasing plastic energy dissipation and roughness-related shielding effects, which matches well interfacial fracture mechanics theory. As a result of the 4-PB test, Ta/Cu and Cu/Ta interfaces measured Gc values were higher than 5 J/㎡, suggesting that Ta is considered to be applicable as a diffusion barrier and a capping layer for Cu interconnects. The 4-PB test method is recommended for quantitative adhesion energy measurement of the Cu interconnect interface because the thermal stress due to the difference in coefficient of thermal expansion and the delamination due to chemical mechanical polishing have a large effect of the mixing mode including shear stress.

• Journal of the Korea Organic Resources Recycling Association
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• v.31 no.1
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• pp.85-100
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• 2023

In this study, in order to improve the installation periodical inspection method of waste treatment facilities, we conducted on-site surveys of waste treatment facilities classified into six fields, grasped the problems of inspection methods, and made improvements accordingly. And revised the inspection method for waste treatment facilities. As a result, in the field of incineration and incineration heat recovery, inspection methods such as total temperature measurement and one-year TMS data comparison using a thermal imaging camera were established. And for the safety of the inspected person, it was applied so that the waste can be replaced with a document without opening it. In the case of landfill facilities, the details regarding the use of video information processing equipment and the management of facilities covering the upper part of the landfill facility are presented in the law, but the items that do not have a inspection methods were applied to the inspection method. In the case of Food Waste Treatment Facility, inspection methods were put in place to ensure compliance with standards for foul-smelling fish in odor control, a major cause of complaints. As a result, 10 out of 18 improvement proposals were reflected in the incineration and sterilization grinding, cement kiln, and incineration heat recovery facilities, and 11 out of 12 improvement proposals were reflected in the landfill facility. In the case of food distribution waste treatment facilities, 10 out of 12 improvement proposals were reflected, and a total of 31 inspection methods were improved.

• Journal of the Korean Geotechnical Society
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• v.39 no.5
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• pp.51-63
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• 2023

Numerical analysis was conducted to determine the effect of soil behavior by thawing and freezing of seasonal frozen soil on pile foundations. The analysis was performed using the finite element method (FEM) to simulate soil-pile interaction based on the atmosphere temperature change. Thermomechanical coupled modeling using FEM was applied with the temperature-dependent nonlinear properties of the frozen soil. The analysis model cases were applied to the MCR and HDP models to simulate the elastoplastic behavior of soil. The numerical analysis results were analyzed and compared with various conditions having different length and width sizes of the pile. The results of the numerical analysis showed t hat t he HDP model was relat ively passive, and t he aspect and magnit ude of t he bearing capacit y and displacement of the pile head were similar depending on the length and width of the pile conditions. The vertical displacement of the pile head by thawing and freezing of the ground showed a large variation in displacement for shorter length conditions. In the MCR model, the vertical displacement appeared in the maximum thaw settlement and frost heaving of 0.0387 and 0.0277 m, respectively. In the HDP model, the vertical displacement appeared in the maximum thaw settlement and frost heaving of 0.0367 and 0.0264 m, respectively. The results of the pile bearing capacity for the two elastoplastic models showed a larger difference in the width condition than the length condition of the pile, with a maximum of about 14.7% for the width L condition, a maximum of about 5.4% for M condition, and a maximum of about 5.3% for S condition. The significance of the effect on the displacement of the pile head and the bearing capacity depended on the pile-soil contact area, and the difference depended on the presence or absence of an active layer in the soil and its thickness.