• Clean Technology
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• v.6 no.1
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• pp.79-84
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• 2000

In this study, to reduce the consumption of chemicals in cleaning processes, Si-wafers contaiminated with metallic impurities were cleaned with electrolyzed water(EW), which was generated by the electrolysis of a diluted electrolyte solution or ultra pure water(UPW). Electrolyzed water could be controlled for obtaining wide ranges of pH and ORP(oxidation-reduction potential). The pH and oxidation-reduction potential of anode water and cathode water were measured to be 4.7 and +1000mV, and 6.3 and -550mV, respectively. To analyze the amount of metallic impurities on Si-wafer surfaces, ICP-MS was introduced. Anode water was effective for Cu removal, while cathode water was more effective for Fe removal.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.10a
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• pp.182-182
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• 2009

실란, 실리카, 이산화티탄($TiO_2$) 광촉매의 sol-gel 반응을 통하여 자기세정 기능과 Cr-free 기능을 동시에 나타낼수 있는 친수성 자기세정 강판용 공중합체를 제조하여용융 아연 도금 강판위에박막으로 코팅하여 그 특성을 분석하였다. 코팅층의 상부에 위치한 TI층에 의하여 광활성화를 통한 친수성표면을 형성하였으며, 코팅표면에서의 수(水) 접촉각 측정결과 10도 이하의 초친수성 특성을 나타내었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.59-59
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• 2009

현재 CMP분야는 광역 평탄화 반도체 소자의 집적화 및 소형화가 진행됨에 따라서 CMP 공정의 중요성은 날로 성장하고 있다. 하지만 이러한 CMP공정은 불가피하게도 scratch, pit, CMP residue와 같은 defect들을 발생시키고 있으며, 점점 선폭이 작아짐에 따라, 이러한 defect들이 반도체 수율에 미치는 영향은 심각해지고 있다. Defect들 중에 특히 scratch는 반도체에 치명적인 circuit failure를 일으키게 된다. 또한 반도체 내구성과 신뢰성을 감소시키게 되고, 누전전류를 증가시키는 등 바람직하지 못한 현상들이 생기게 된다. 본 연구에서는 scratch 와 같은 deflect들을 효율적으로 검출, 분석하고, scratch를 감소시키는데 그 목적이 있다. 본 실험을 위해 8" TEOS wafer와 commercial oxide slurry 및 friction polisher (Poli-500, G&P tech., Korea)를 사용하여 CMP 공정을 진행하였으며, CMP 공정조건은 각각 80rpm/80rpm/1psi(Platen speed/Head speed/Pressure)에서 1분 동안 연마를 한 후 scratch 발생 경향을 살펴보았다. CMP 후 wafer위에 오염되어 있는 slurry residue들을 제거하기 위해 SC-1, HF 세정을 이용하여 최적화된 post-CMP 공정기술을 제안하였다. Scratch 검출 및 분석을 위해 wafer surface analyzer (Surfscan 6200, Tencor, USA)와 optical microscope (LV100D, Nicon, Japan)를 사용하였다. CMP 공정 변수들에 따른 scratch 발생정도를 비교하였으며, scratch 발생 요인들에 따른 scratch 형태 및 발생정도를 살펴보았다. 최적화된 post-CMP 세정 조건은 메가소닉과 함께 SC-1 세정을 실시하여 slurry residue들을 제거한 후, HF 세정을 실시하여 잔여 오염물들을 제거하고 검출이 용이하도록 scratch를 확장시킬 수 있도록 제안하였으며, 100%의 particle removal efficiency (PRE)를 얻을 수 있었다. 실제 CMP 공정후 post-CMP 세정 단계별 scratch 개수를 측정한 결과, SC-1 세정 후 약 220개의 scratch가 검출되었으며, 검출되지 않았던 scratch가 HF 세정 후 확장되어 드러남에 따라 약 500개의 scratch 가 검출되었다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.3 no.4
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• pp.295-302
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• 2002

PAHs (polycyclic aromatic hydrocarbons) deposited in soil are one of serious problems against sustainable land use. In this paper, chemical soil flushing in a packed sandy soil matrix using a natural surfactant, $\beta$-cyclodextrin (CD) was studied via a fluorescence spectroscopy and a dye labelling. The contaminants are lipophilic ring compounds- phenanthrene and naphthalene. Sand type and flushing intensity (rate and concentration) are chosen as important investigation variables. The removal efficiencies were proportional to flow rate, concentration, temperature of the flushing solution and voidity of the sand column. Initial sorption of the surfactant onto the soil matrix was found to be a key step while flow shear was more crucial in the latter steps. The residual portion of the surfactant, which was most likely to be due to the initial sorption, would not be so influential on this type of soil washing for long times. These results will be useful in future for pilot scale in situ washing and for establishing better soil washing strategy.

• The Korean Journal of Zoology
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• v.36 no.1
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• pp.36-50
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• 1993

한국산 관박쥐(Rhinolophusfewmequinum Jroma의 웅성생식 pattern을 알아보기 위하여 정소의 형태변화와 세정관 정상피의 1년주기를 조사하여 다음과 같은 결론을 얻었다. 정자형성은 5월에 시작되어 10월말에 완료되었다. 7월초부터 10월중순까지는 정자변태과정이며, 정자형성과정의 활성도가 가장 높은 달은 8월 중순경이었다. 또한 교미가 끝난 11월경부터 세정관내에는 미성숙한 정자세포가 Sertoli cell의 식작용과정의 일환으로 포식되어졌고, 91년 12월부터 92년 1월, 2월, 3월, 그리고 동면각성기인 4월의 실험군에서도 역시 점진적으로 식작용 과정을 관찰할 수 있었다. 교미가 끝난 후의 세정관 내에는 새로운 정자를 만들기 위한 준비단계로서 미성숙된 정자들이 Sertoli cell의 식작용에 의해 정화(cleaning)되므로 이 기간을 정화기간(cleaning time)이라 볼 수 있다. 따라서 정소내 세정관의 1년 주기를 볼 때 정화기간은 동면 개시기인 11월부터 익년 4월까지 약 6개월에 걸쳐 이루어 진다. 이상의 결과로 볼때, 정자형성은 동면각성 직후부터 시작하여 10월경에 완료되며 교미개시기에는 정지되고, 동면기 동안 정자형성이 일어나지 않는 점으로 보아 한국산 관박쥐는 'Pipistnfluspottem'에 속한다고 할 수 있다.

• Clean Technology
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• v.13 no.2
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• pp.143-150
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• 2007

The objective of this study is to develop hydrocarbon-based cleaning agents by blending paraffins, glycol ethers and siloxanes in oder to effectively clean contaminants such as flux, solder and grease. And the effect of cleaning ability by wetting index, aniline points and solubility parameter of the formulated hydrocarbon-based cleaning agents were studied in this work. The formulated hydrocarbon-based cleaning agents were prepared on the base of physical properties of their individual components. Wetting indexes and aniline points of their were measured through experiments and solubility parameters of their were calculated based on the Hansen's equation. In this study, evaluation of cleaning ability by cleaning agents were carried out using contaminants such as flux, solder, and grease. The experimental results showed that the cleaning ability of the formulated cleaning agents was excellent in cleaning contaminants such as flux, solder and grease and that the influencing parameters on their cleaning efficiency were found to be different according to contaminant types. MC($20.3MPa^{1/2}$), DF-1 ($24.2MPa^{1/2}$) and DF-2($21.5MPa^{1/2}$) with similar solubility parameter as flux ($21.3MPa^{1/2}$) showed 100% cleaning efficiency within 3 minutes in flux cleaning. And CFC-113, MC and 1,1,1-TCE with low aniline point less than $-20^{\circ}C$ showed excellent cleaning efficiency in solder cleaning. DG-1($16.2\;MPa^{1/2}$) and DG-2($15.5\;MPa^{1/2}$) with similar solubility parameter as grease($15.0{\sim}17.0\;MPa^{1/2}$) showed relatively low cleaning efficiency of grease, but CFC-113 and MC with high wetting index and low aniline point showed good cleaning efficiency in grease cleaning. As a result of this study, the hydrocarbon-based cleaning agents alternative to regulated cleaning agents such as CFC-113, 1,1,1-TCE and MC were able to be developed through properly blending paraffins, glycol ethers and siloxanes for cleaning flux, solder and grease. And it can be shown that various influencing parameters of cleaning efficiency such as wetting index, aniline point, solubility parameter and etc. of the non-aqueous cleaning agent should be reviewed for prediction of their cleaning ability and can be applied to formulation of cleaning agents.

• Journal of the Korean Vacuum Society
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• v.18 no.2
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• pp.97-101
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• 2009

In the modem semiconductor industry, the progress that consumes the most capital and labor is cleansing process. Cleansing process is to remove impurities that can affect the operation of the device and deteriorate its function. Especially, Photoresist (PR) progress that etches the device always requires cleansing at the end of the progress. Also, HDI-PR (High-Dose Ion-implanted Photoresist) created from PR progress is difficult to remove. Thus, in modem IC cleansing, many steps of cleansing are used, including dry and wet cleansing. In this paper, we suggested to combine existing dry-cleansing and wet-cleansing, each represented by plasma cleansing and stripper solution, as Plasma Liquid-Vapor Activation (PLVA). This PLVA method enhances the effect of existing cleansing solution, and decreases the amount of solution and time required to strip. We stripped HDI-PR by activated solution and measured surface hardness and Young's modulus by Nano-indenter. Nano-indenter is the equipment that determines the hardness and the modulus of elasticity by indenting nano-sized tip with specific shape into the surface and measuring weight and z-axis displacement. We measured the change of surface hardness and Young's modulus before and after the cleansing. As a result, we found out that the surface hardness of the sample sharply decreased after the cleansing by plasma-activated PR stripper solution. It can be considered that if physical surface-cleansing process is inserted after this, more effective elimination of HDI-PR is possible.

• Clean Technology
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• v.11 no.3
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• pp.129-139
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• 2005

Fluoride-type cleaning agents such as TFEA (2,2,2-trifluoroethanol) and HFE (hydrofluoroether) are noticed to be next generation cleaning agents alternative to CFCs since they do not destruct ozones in the stratosphere due to no containment of chloride in the molecule, have lower global warming potential compared to HFCs and HCFCs, and are thermally stable compounds. Thus, the physical properties and cleaning agents were measured and compared with those of CFC-113, 1,1,1-TCE and HCFC-141b which are ozone destruction substances. They were also compared and evaluated with those of IPA and methanol which are currently employing as alternative cleaning agents. And TFEA-based cleaning agents consisted of TFEA and alcohols or HFEs were formulated, their physical properties and cleaning abilities were measured and their utilization as alternative cleaning agents was evaluated. As a result, TFEA and HFEs have lower cleaning ability for their removal of various soils compared to chloride-type cleaning agents, but theyshow excellent cleaning ability for Fluoride-type soils. And it is observed that the formulated cleaning agents of TFEA and alcohols or HFEs caused to increase cleaning ability of flux and unsoluble cutting oil more than 100% compared to their individual component. Therefore, the fluoride-type cleaning agents are expected to be utilized for development of environmental-friendly non aqueous cleaning agents with excellent cleaning ability if they are formulated with proper solvents or additives.

• Clean Technology
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• v.12 no.4
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• pp.250-258
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• 2006

CFC compounds such as CFC-113 and 1,1,1-TCE, etc. have been used in various industries due to their excellent chemical stability, thermodynamic characteristics, non-inflammability and anti-corrosiveness. However, in oder to protect the earth environment, "the Montreal Protocol on substances that deplete the ozone layer" was adopted in 1989 for prevention of production and utilization of these CFC compounds and alternative cleaning agent have been required in the industry. The objective of this study is to develop non-aqueous cleaning agents that do not require major change of cleaning system, have excellent cleaning efficiency, are favorable to the environment, are harmless to the human body, and are not generated corrosive materials. In this work, non-aqueous cleaning agents have been formulated with glycol ether series and paraffinic hydrocarbon series with siloxane, and their physical properties and cleaning efficiencies were analyzed and compared with those of regulated materials. As a result of physical properties measurement of the formulated cleaning agents, it is expected that they may have good penetration ability into contaminated materials due to their properties with low density and low surface tension. Measurement of flash point and vapor pressure of the cleaning agents will be helpful for evaluation of their safety and working environment. The experimental results of cleaning flux, solder and grease by the formulated cleaning agents show that their cleaning abilities of soils were good and that there were no residues on the substance after cleaning. Therefore, alternative cleaning agents which have equivalent cleaning ability to regulating materials, good penetration ability and low hazard to human body, have been developed in this work.

• Food Science and Preservation
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• v.7 no.4
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• pp.395-402
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• 2000

To enlarge application field of electrolyzed acid-water(EAW) on food industry, the changes of EAW properties by storage conditions and heating were investigatet. It was showed that storing EAW in closed container is mon effective to keep up the oxidation-reduction potentials(ORP), hyperchloride content and pH than stored in opened ones. ORP of EAW stored in closed container could be kept mon than 1 month as 1,150 mV levels. Ruing heating from 2$0^{\circ}C$ to 95$^{\circ}C$, ORP was increased to 1,150 mV levels at 95$^{\circ}C$ after gradual decrease to 5$0^{\circ}C$. Tyrosinase activity was decreased approximately to 26%~35% in EAW having a 950 mV~1,140 mV ORP. Also it was confirmed that EAW has anti-browning effect as sliced apple and potato, and their juices treated with EAW had conspicous difference in their $\Delta$E value. 12 kinds of pesticides such as aldrine, capful diazinon, diedrin, $\alpha$-endosulfan $\beta$-endosulfan, endosulfan sulfate, endrin, $\alpha$-BHC, o,p'-DDT, procymidone, PCNB added in EAW were recovered from ND~73.6% comparing to ones added in distilled water. The recovered amounts of pesticides, procymidone and diazinon in lettuce after soaking in EAW were 1.12 ppm and ND, compared with those of amounts soaked in distilled water were 3.67 ppm and 3.05 ppm respectively. So, it seems that EAW has potentials to promote the degradation of pesticides.