Polishing of Oxide film by colloidal silica coated with nano ceria (나노 세리아 입자가 표면 코팅된 콜로이달 실리카 슬러리의 Oxide film 연마특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.07a
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- pp.35-37
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- 2005