Prediction model of plasma deposition process using genetic algorithm and generalized regression neural network (유전자 알고리즘과 일반화된 회귀신경망을 이용한 플라즈마 증착공정 예측모델)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2004.07b
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- pp.1117-1120
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- 2004