• Title/Summary/Keyword: 상변환 거동

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Metalorganic Chemical Vapor Deposition of Copper Films on TiN Substrates Using Direct Liquid Injection of (hfac)Cu(vtmos) Precursor ((hfac)Cu(vtmos)의 액체분사법에 의한 TiN 기판상 구리박막의 유기금속 화학증착 특성)

  • Jun, Chi-Hoon;Kim, Youn-Tae;Kim, Dai-Ryong
    • Korean Journal of Materials Research
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    • v.9 no.12
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    • pp.1196-1204
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    • 1999
  • We have carried out copper MOCVD(metalorganic chemical vapor deposition) onto the reactive sputtered PVD-TiN and rapid thermal converted RTP-TiN substrates using direct liquid injection for effective delivery of the (hfac)Cu(vtmos) [$C_{10}H_{13}O_{5}CuF_{6}$Si: 1,1,1,5,5,5-hexafluoro-2,4- pentadionato (vinyltrimethoxysilane) copper (I)] precursor. Especially, the influences of deposition conditions and the substrate type on growth rate, crystal structure, microstructure, and electrical resistivity of copper deposits have been discussed. It is found that the film growth with 0.2ccm precursor flow rate become mass-transfer controlled up to Ar flow rate of 200sccm and pick-up rate controlled at a vaporizer above 1.0Torr reactor pressure. The surface-reaction controlled region from 155 to 225$^{\circ}C$ at 0.6Torr reactor pressure results in the apparent activation energies of 12.7~14.1kcal/mol, and above 224$^{\circ}C$ the growth rate with $H_2$ addition could be improved compared to the pure Ar carrier. The Cu/RTP-TiN structures which have high copper nucleation density in initial stage of growth show more pronounced (111) preferred orientations and lower electrical resistivities than those on PVD-TiN. The variation of electrical resistivity with substrate temperature reflects the three types of film microstructure changes, showing the lowest value for the deposit at 165$^{\circ}C$ with small grains of good contacts.

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Characteristics of Bearing Capacity under Square Footing on Two-layered Sand (2개층 사질토지반에서 정방형 기초의 지지력 특성)

  • 김병탁;김영수;이종현
    • Journal of the Korean Geotechnical Society
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    • v.17 no.4
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    • pp.289-299
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    • 2001
  • 본 연구는 균질 및 2개층 비균질지반에서 사질토지반 상에 놓인 정방형 기초의 극한지지력과 침하에 대하여 고찰하였다. 본 연구는 얕은기초의 거동에 대한 정방형 기초의 크기, 지반 상대밀도, 기초 폭에 대한 상부층의 두께 비(H/B), 상부층 아래 경계면의 경사($\theta$) 그리고 지반강성비의 영향을 규명하기 위하여 모형실험을 수행하였다. 동일 상대밀도에서 지지력 계수($N_{{\gamma}}$)는 일정하지 않으며 기초 폭에 직접적으로 관련되며 지지력계수는 기초 폭이 증가함에 따라 감소하였다. 기초크기의 영향과 구속압력의 영향을 고려하는 Ueno 방법에 의한 극한지지력의 예측값은 고전적인 지지력 산정식보다 더 잘 일치하며 그 값은 실험값의 65% 이상으로 나타났다. $\theta$=$0^{\circ}$인 2개층 지반의 결과에 근거하여, 극한지지력에 대한 하부층 지반의 영향을 무시할 수 있는 한계 상부층 두께는 기초 폭의 2배로 결정되었다. 그러나, 73%의 상부층 상대밀도인 경우는 침하비($\delta$B) 0.05 이하에서만 이 결과가 유효하였다. 경계면이 경사진 2개층 지반의 결과에 근거하여, 상부층의 상대밀도가 느슨할수록 그리고 상부층의 두께가 클수록 극한지지력에 대한 경계면 경사의 영향은 크지 않는 것으로 나타났다. 경계면의 경사가 증가함에 따른 극한침하량의 변화는 경계면이 수평인 경우($\theta$=$0^{\circ}$)를 기준으로 0.82~1.2(상부층 $D_{r}$=73%인 경우) 그리고 0.9~1.07(상부층 $D_{r}$=50%인 경우) 정도로 나타났다.Markup Language 문서로부터 무선 마크업 언어 문서로 자동 변환된 텍스트를 인코딩하는 경우와 같이 특정한 응용 분야에서는 일반 문자열에 대한 확장 인코딩 기법을 적용할 필요가 있을 수 있다.mical etch-stop method for the etching of Si in TMAH:IPA;pyrazine solutions provides a powerful and versatile alternative process for fabricating high-yield Si micro-membranes. the RSC circle, but also to the logistics system in the SLC circle. Thus, the RSLC model can maximize combat synergy effects by integrating the RSC and the SLC. With a similar logic, this paper develops "A Revised System of Systems with Logistics (RSSL)" which combines "A New system of Systems" and logistics. These tow models proposed here help explain several issues such as logistics environment in future warfare, MOE(Measure of Effectiveness( on logistics performance, and COA(Course of Actions) for decreasing mass and increasing velocity. In particular, velocity in logistics is emphasized.

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A Review on Ultimate Lateral Capacity Prediction of Rigid Drilled Shafts Installed in Sand (사질토에 설치된 강성현장타설말뚝의 극한수평지지력 예측에 관한 재고)

  • Cho Nam Jun;Kulhawy F.H
    • Journal of the Korean Geotechnical Society
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    • v.21 no.2
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    • pp.113-120
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    • 2005
  • An understanding of soil-structure interaction is the key to rational and economical design for laterally loaded drilled shafts. It is very difficult to formulate the ultimate lateral capacity into a general equation because of the inherent soil nonlincarity, nonhomogeneity, and complexity enhanced by the three dimensional and asymmetric nature of the problem though extensive research works on the behavior of deep foundations subjected to lateral loads have been conducted for several decades. This study reviews the four most well known methods (i.e., Reese, Broms, Hansen, and Davidson) among many design methods according to the specific site conditions, the drilled shaft geometric characteristics (D/B ratios), and the loading conditions. And the hyperbolic lateral capacities (H$_h$) interpreted by the hyperbolic transformation of the load-displacement curves obtained from model tests carried out as a part of this research have been compared with the ultimate lateral capacities (Hu) predicted by the four methods. The H$_u$ / H$_h$ ratios from Reese's and Hansen's methods are 0.966 and 1.015, respectively, which shows both the two methods yield results very close to the test results. Whereas the H$_u$ predicted by Davidson's method is larger than H$_h$ by about $30\%$, the C.0.V. of the predicted lateral capacities by Davidson is the smallest among the four. Broms' method, the simplest among the few methods, gives H$_u$ / H$_h$ : 0.896, which estimates the ultimate lateral capacity smaller than the others because some other resisting sources against lateral loading are neglected in this method. But it results in one of the most reliable methods with the smallest S.D. in predicting the ultimate lateral capacity. Conclusively, none of the four can be superior to the others in a sense of the accuracy of predicting the ultimate lateral capacity. Also, regardless of how sophisticated or complicated the calculating procedures are, the reliability in the lateral capacity predictions seems to be a different issue.