• Title/Summary/Keyword: 산소 센서

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Improvement of the Characteristics of PZT Thin Films deposited on LTCC Substrates (LTCC 기판상에 증착한 PZT 박막의 특성 향상에 관한 연구)

  • Hwang, Hyun-Suk;Kang, Hyun-Il
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.12 no.1
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    • pp.245-248
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    • 2012
  • In this paper, the optimized growing conditions of PZT thin films on low temperature co-fired ceramics (LTCC) substrates are studied. The LTCC technology is an emerging one in the fields of mesoscale (from 10 um to several hundred um) sensor and actuator against silicon based technology due to low cost, high yield, easy manufacturing of 3 dimensional structure, etc. The LTCC substrates with thickness of 400 um are fabricated by laminating 100 um green sheets using commercial power (NEG, MLS 22C). The Pt/Ti bottom electrodes are deposited on the LTCC substrates, then the growing conditions of PZT thin films using rf magnetron sputtering method are studied. The growing conditions are tested under various rf power and gas ratio of oxygen to argon. And the crystallization and ingredient of PZT films are analyzed by X-ray diffraction method (XRD) and energy dispersive spectroscopy (EDS). The optimized growing conditions of PZT thin films are rf power of 125W, Ar/O2 gas ratio of 15:5.

Characteristics of Thin Film Electric Resistance Probe Prepared at Various Sputtering Condition (박막형 전기저항식 부식속도 측정 센서의 금속층 증착조건에 따른 전기화학적 특성 변화)

  • 방일환;원덕수;송홍석;장상엽;이성민;고영태;김지영
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 1998.05a
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    • pp.95-95
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    • 1998
  • 현장에서 부식속도를 측정하는 방법의 하나인 전기저항 프로브(Electric Resistance Probe, ER probe)는 시편이 부식되는 양에 비례하여 저항이 증가하는 원리를 이용한 것으로 부식기구에 무관하게 직접적인 부식속도의 측정이 가능하다. 그러나, 와이어나 판형으로 기계 가공된 프로브로 제작되어 미량의 부식에는 저항변화폭이 작아 긴 측 정시간이 필요하고, 특히 국부 부식의 경우 부식이 상당히 진행되더라도 전체 저항변 화가 크지 않은 문제점이 있다. 박막형 전기저항프로브는 미량의 부식에서도 저항변화폭이 크게 나타나도록하기 위 하여 금속 박막을 스퍼터링으로 증착하여 동일 부식량에서 저항 변화율을 크게 향상 시킨 프로브이다. 이 프로브는 좁은 선폭(O.25-1mm)의 세선을 복수개 포함한 형상으로 프로브를 설계하여 핏팅이 발생하면 하나의 세선이 끊어지도록 하여 국부적인 부식이 일어날 경우에도 저항변화가 크게 나타나도록 고안되었다. 탄소강의 경우 일반적인 환경에서는 부식속도가 결정립의 크기, 가공경화의 정도등 에 민감하게 변화되지 않는 것으로 알려져 있으나, 박막으로 증착되었을 경우에는 별 크재료와는 전혀 다른 미세구조를 가지므로 벌크의 부식거동과는 다른 거동을 보일 수 있다. 이 연구에서는 증착조건을 달리하여 증착된 철 박막의 결정성, 비저항, 표면 상태, 조성등을 4 point 프로브, SEM, Auger spectroscopy등을 이용하여 조사하고 각각의 전위, 부식속도등과의 상관관계를 조사하였다. 증착된 박막의 비저항은 증착중 혼입된 산소의 양에 따라 매우 민감하게 변화하였다. 산소가 l0at%이상 함유된 철은 강의 알려진 비저항보다 수십배 높은 비저항을 보이며, 부식전위가 높아지고 실제 부식속도 또한 매우 낮게 나타났다. 박막의 부식거동은 미량 불순물에 의해서도 크게 변화하였는데 동일한 수준의 비저 항을 갖는 철 박막에서도 99.9% 순도의 철을 타켓으로 하여 증착된 막은 일반 저탄소 강을 타켓으로 하여 증착된 막보다 훨씬 낮은 부식속도를 보였다.

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Electrical and optical properties of ZnO thin films grown by MOCVD (MOCVD 법으로 성장한 ZnO 박막의 전기적, 광학적 특성 평가)

  • Kong, Bo-Hyun;Kim, Dong-Chan;Han, Won-Suk;Kim, Young-Yi;Ahn, Cheol-Hyoun;Kang, Si-Woo;Yi, Yu-Jin;Cho, Hyung-Koun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.150-150
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    • 2007
  • ZnO는 3.37eV의 넓은 에너지 밴드갭을 가지고 있으며, 60meV의 큰 엑시톤(exciton) 결합에너지의 특성을 가지고 있어 UV 영역의 소스로서 가장 활용도가 클 것으로 예상된다. 특히 ZnO 박막은 청색과 자외선 발광소자 및 광전자 소자, 화학적 센서로 활용이 가능하다. 최근 ZnO 박막을 이용한 LED 및 LD 소자 제작에 대한 연구가 국내외적으로 매우 활발하게 이루어지고 있다. 이런 소자를 제작할 때 가장 우선시 되는 것이 ZnO 박막의 전기적은 특성(캐리어 밀도, 전도도, 이동도, 비저항)이다. ZnO 박막을 성장하는 방법으로는 sputtering, PLD, MOCVD, sol-gel 법 등 여러방법이 있지만, MOCVD 법은 소스인 DEZn 와 산소의 유량이 조절이 가능하여 박막의 특성 다양하게 변화시킬 수 있는 장정이 있다. 본 연구에서는 MOCVD 법을 이용하여 사파이어 기판위에 ZnO 박막을 성장 시켰다. 성장 시 VI족 소스인 산소가스와 II족 소스인 DEZn 양을 조절함으로써 이때 변화되는 박막의 전기적, 광학적, 구조적 특성에 대해 연구하였다.

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$Al_2O_3$ 기판 위에 형성된 CuO 나노입자의 열처리 온도변화에 따른 구조적, 광학적 및 전자적 성질에 대한 연구

  • Park, Gyeong-Hun;Son, Dong-Ik;Kim, Tae-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.106-106
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    • 2010
  • CuO 나노입자는 전기화학적 전지, 가스 센서 및 태양전지와 같은 나노 전자소자에 응용할 수 있는 대단히 유용한 물질이다. CuO 나노구조를 형성하기 위한 방법은 솔-겔법, 전기 화학적 방법 및 전구체의 열적 탈착방법 등으로 연구되어 왔으나 CuO 나노입자의 열처리 효과는 상대적으로 연구가 미흡하다. 본 연구에서는 $Al_2O_3$ 기판 위에 스핀 코팅법과 열처리를 사용하여 형성한 CuO 나노입자의 물리적 성질을 살펴보았다. CuO 나노 입자를 형성하기 위해 methanol에 Cu(I) acetate (5 wt%) 을 적절히 분산한 용액을 $Al_2O_3$ 기판 위에 7000 rpm으로 스핀 코팅을 한 후 $300^{\circ}C$, $500^{\circ}C$$700^{\circ}C$로 각각 1 시간 동안 산소 분위기에서 열처리를 하였다. X-선 회절법 결과는 CuO의 (200)$K_{\alpha}$와 (400) $K_{\alpha}$ 회절에 해당하는 피크가 나타났고 주사 전자현미경 상의 결과는 CuO 나노입자가 형성되었음을 확인하였다. 나노입자의 크기는 고배율 투과 전자현미경상에 의하여 3-5 nm 인 것으로 확인하였고 300 K에서 측정한 광루미네선스 스펙트럼은 CuO의 주된 스펙트럼 피크가 푸른색 영역에서 나타남을 알 수 있었다. X-선 광전자 분광법 스펙트럼은 Cu $2p_{3/2}$와 O 1s의 전자상태를 보여주었으며 복잡한 산화상태를 갖는 CuO는 Cu-O 결합과 산소의 화학적 흡착상태를 가지는 것으로 확인되었다. 이러한 결과는 $Al_2O_3$ 기판 위에 최적화된 CuO 나노 입자의 형성 방법과 구조적, 광학적 및 전자적 특성을 이해하는데 도움을 제공해 줄 것이다.

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Prediction of Sea Water Condition Changes using LSTM Algorithm for the Fish Farm (LSTM 알고리즘을 이용한 양식장 해수 상태 변화 예측)

  • Rijayanti, Rita;Hwang, Mintae
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.26 no.3
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    • pp.374-380
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    • 2022
  • This paper shows the results of a study that predicts changes in seawater conditions in sea farms using machine learning-based long short term memory (LSTM) algorithms. Hardware was implemented using dissolved oxygen, salinity, nitrogen ion concentration, and water temperature measurement sensors to collect seawater condition information from sea farms, and transferred to a cloud-based Firebase database using LoRa communication. Using the developed hardware, seawater condition information around fish farms in Tongyeong and Geoje was collected, and LSTM algorithms were applied to learning results using these actual datasets to obtain predictive results showing 87% accuracy. Flask and REST APIs were used to provide users with predictive results for each of the four parameters, including dissolved oxygen. These predictive results are expected to help fishermen reduce significant damage caused by fish group death by providing changes in sea conditions in advance.

Effectiveness of Real-time Oxygen Control in Fresh Produce Container Equipped with Gas-diffusion Tube (기체확산 튜브 부착 신선 농산물 용기에서의 실시간 산소농도 제어의 효과)

  • Jo, Yun Hee;An, Duck Soon;Lee, Dong Sun
    • KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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    • v.19 no.3
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    • pp.119-123
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    • 2013
  • Simplified control logic was devised to fabricate and operate the modified atmosphere (MA) container of fresh produce equipped with gas-diffusion tube whose opening/closing was controlled in response to real time $O_2$ concentration. This is a simplified ramification of the previously developed control logic using both $O_2$ and $CO_2$ concentrations ([$O_2$] & [$CO_2$]). The developed logic was applied to and tested by a container system filled with spinach at $10^{\circ}C$ having optimum MA window of [$O_2$] of 7~10% and [$CO_2$] of 5~10%. It was shown that setting the proper on-off limit (11%) for $O_2$ control based on the assumed relationship $[O_2]+[CO_2]$=21% could attain the desired $CO_2$ concentration just below the upper tolerance limit ($[CO_2]_H$, 10%). The $O_2$ control point can be the lower tolerance limit or adjusted one (21-$[CO_2]_H$) depending on the commodity's MA requirement. The developed logic using single $O_2$ sensor could attain the equilibrated [$O_2$] of 11% with [$CO_2$] of 8~9% which was desired and similar to that of its predecessor ([$O_2$] of 9~10% with [$CO_2$] of 10%) using both $O_2$ and $CO_2$ sensors. Both MA containers (one only with single $O_2$ sensor control and one with $O_2$ and $CO_2$ sensors) could also keep the spinach quality without significant difference between them, but significantly better than perforated control package of air.

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A Study on Microorganisms Antifouling and Optical Properties of the Sensing Membrane Surface Modified by Hydrophobic Sol-gels (소수성 졸-겔로 개질된 센서 막 표면의 미생물 비점착과 광학 특성 연구)

  • Kim, Sun-Yong;Rhee, Jong Il
    • Applied Chemistry for Engineering
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    • v.19 no.2
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    • pp.222-227
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    • 2008
  • In this work we have studied the antifouling properties of the hydrophobic sol-gel modified sensing membrane and its optical properties for sensor application. E. coli JM109, B. cereus 318 and P. pastoris X-33 were cultivated in confocal cultivation dishes with glass surface, respectively. The glass surface was coated with the hydrophobic sol-gels prepared by the dimethoxy-dimethyl-silane (DiMe-DMOS) and tetramethyl-orthosilicate (TMOS). After cultivation, microorganisms adhered on the surface coated with sol-gels and glass surface were dyed by gram-staining method and the numbers of microorganisms were analyzed based on the image data of the scanning electronic microscope (SEM). A great number of microorganisms, about $2{\sim}3{\times}10^4/mm^2$, was adhered on the glass surfaces which no hydrophobic sol-gels were coated. However, the antifouling effect of the hydrophobic sol-gels was large, that microorganisms of less than $200{\sim}300/mm^2$ were adhered on the coated glass surface. The performance of the sensing membranes for detection of pH and dissolved oxygen was enhanced by recoating the light insulation layer prepared with the mixture of the hydrophobic sol-gel and graphite particles.

Analysis of Photoplethysmographic Waveform for Assessment of Pulpal Blood Flow in Children (소아 환자의 치수 혈류 평가를 위한 광용적맥파 파형 분석)

  • Kim, Hyo-Eun;Shin, Teo Jeon;Kong, Hyoun-Joong;Kim, Pil-Jong;Hyun, Hong-Keun;Kim, Young-Jae;Kim, Jung-Wook;Jang, Ki-Taeg;Kim, Chong-Chul;Lee, Sang-Hoon
    • Journal of the korean academy of Pediatric Dentistry
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    • v.43 no.2
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    • pp.158-165
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    • 2016
  • The purpose of this study was to analyze photoplethysmographic waveforms from pulse oximeter using raw data of red and infrared light and investigate the reference values of parameters (Height, Width50, Maximum slope, Minimum slope, Area) for evaluating pulpal blood flow in maxillary central incisors with normal pulp vitality in children. The study was performed in 30 pediatric patients, aged 7-16 years old, using pulse oximeter (MEKICS Co., Ltd, Korea) combined with a custom-made sensor. The raw data was obtained and recorded by custom-made software and analyzed by LabChart (v.7.3, ADInstruments, Germany) offline. In this study, we analyzed photoplethysmographic waveforms from pulse oximeter applied to maxillary central incisor for assessment of pulpal blood flow and suggested several reference values of young permanent maxillary central incisor with normal pulp. On average, the waveform of red light was higher, stiffer and wider than that of infrared light. Future studies about reference values for other normal teeth and the teeth with impaired pulp vitality are needed.

Design of 1.0V O2 and H2O2 based Potentiostat (전원전압 1.0V 산소 및 과산화수소 기반의 정전압분극장치 설계)

  • Kim, Jea-Duck;XIAOLEI, ZHONG;Choi, Seong-Yeol;Kim, Yeong-Seuk
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.21 no.2
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    • pp.345-352
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    • 2017
  • In this paper, a unified potentiostat which can measure the current of both $O_2$-based and $H_2O_2$-based blood glucose sensors with low supply voltage of 1.0V has been designed and verified by simulations and measurements. Potentiostat is composed of low-voltage operational transconductance amplifier, cascode current mirrors and mode-selection circuits. It can measure currents of blood glucose chemical reactions occurred by $O_2$ or $H_2O_2$. The body of PMOS input differentional stage of the operational transconductance amplifier is forward-biased to reduce the threshold voltage for low supply voltage operation. Also, cascode current mirror is used to reduce current measurement error generated by channel length modulation effects. The proposed low-voltage potentiostat is designed and simulated using Cadence SPECTRE and fabricated in Magnachip 0.18um CMOS technology with chip size of $110{\mu}m{\times}60{\mu}m$. The measurement results show that consumption current is maximum $46{\mu}A$ at supply voltage of 1.0V. Using the persian potassium($K_3Fe(CN)_6$) equivalent to glucose, the operation of the fabricated potentiostat was confirmed.

EGCG induces Apoptosis under Hypoxic State in B16F10 Melanoma Cancer Cells (저산소증 상태에서 B16F10 피부암 세포에 EGCG를 처리하였을 때의 apoptosis 효과)

  • Kim, Yoon-Yi;Kim, In-Seop;Park, Ock-Jin;Kim, Young-Min
    • Journal of Life Science
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    • v.21 no.2
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    • pp.251-256
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    • 2011
  • EGCG, catechins in green tea, is a kind of phytochemical. Through the regulation of signal pathways, EGCG has been known to show anti-oxidant and anti-tumor effects in cells. In this study, we investigated the apoptotic effects of EGCG through AMP-activated protein kinase (AMPK) signal pathways, including hypoxia inducible factor-1 alpha (HIF-$1{\alpha}$). The experiments were performed in B16F10 melanoma cells in a hypoxic state. AMPK is activated by ATP consumption such as nutrient deficiency, exercise, heat shock, etc. The activated AMPK that plays an important role as an energy sensor inhibits proliferation of cancer cells, as well as inducing apoptosis. HIF-$1{\alpha}$, the primary transcriptional regulator of the response to oxygen deprivation, plays a critical role in modulating tumor growth and angiogenesis in a hypoxic state. The apoptotic effects of EGCG were studied in B16F10 cells in a hypoxic state. The results show that EGCG inhibits the transcriptional activity of HIF-$1{\alpha}$ and induces apoptosis. These observations suggest that EGCG may exert inhibitory effects of angiogenesis and control tumor cell growth in hypoxic melanoma cells.