• Title/Summary/Keyword: 산가스

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반도체 및 Optic Industries 클린룸 배기가스의 오염제어 및 청정화기술

  • 황유성
    • Air Cleaning Technology
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    • v.17 no.4 s.67
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    • pp.39-57
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    • 2004
  • 첨단산업으로 불리는 반도체, LCD, PDP, 유기EL(OLED) 등의 생산 공정은 고도의 청정상태를 요구하며, 때문에 이들의 생산공정 중 대부분이 클린룸 내에서 이루어진다. 클린룸 내에서의 주요공정은 크게 박막형성(Layering), 노광(Photo Lithography), 식각(Etching) 등 3가지 공정으로 나눌 수 있으며, 반도체 제조공정의 경우 특별히 도핑(Doping) 공정이 추가된다. 오염물질을 함유하는 클린룸 배기는 일반적으로 산, 알칼리, Toxic(PFCs, Flammable), VOC 등으로 분류하며, 각각의 배기는 각 배기특성에 맞는 오염제어 장치를 통해, 정화된 후, 대기로 방출된다. 산, 알칼리 배기는 일반적으로 최종 단계에서 중앙집중식 습식스크러버에 의해 흡수, 중화 처리되며, VOC의 경우 농축기(Concentrator) & 축열식 열 산화장치(RTO) 설비에 의해 연소 처리된다. 하지만 CVD공정으로부터의 배기가 주를 이루는 Toxic배기의 경우, 다량의 PFCs(과불소화합물) 가스를 함유하고 있는 이유로, 대부분 클린룸 내부에 P.O.U(Point of use) 처리장치가 설치되며, P.O.U에 의해 1차 처리된 후 최종적으로 중앙집중식 습식스크러버를 거쳐 대기로 방출된다. 알칼리배기의 주성분으로는 암모니아($NH_3$), HMDS (Hexa Methyl DiSilazane), TMAH (Tetra Methyl Ammonium Hydroxide), LGL, CD 등이며 흡수액에 황산(Sulfuric Acid)용액을 공급, 중화처리하고 있다. 탄소성분을 먹이로 하는 미생물의 번식에 의한 막힘 문제를 제외하고는 큰 문제가 없다. 하지만 Toxic배기 및 산배기의 경우 처리효율이, 가스흡수 이론에 의한 계산결과와 비교할 때, 매우 저조하게 나타나는 효율부족 현상을 겪고 있으며, 이는 잔여 PFCs 가스성분 및 반응에어로졸, 응축에어로졸 등의 영향으로 추정하고 있다. 최근 Toxic 배기의 경우, P.O.U 설비를 Burn & Wet type으로 변경하여, 배기 중 PFCs 및 반응에 에어로졸($SiO_2$)의 농도를 원천적으로 감소시키는 노력이 진행 중이다. 산배기의 경우, 산결로 현상에 의한, 응축에어로졸이 문제가 되고 있으나 내식열교환기(Anti-Corrosive Heat Exchanger), 하전액적스크러버 시스템(Charged Droplets Scrubber System), Wet ESP(Wet Electrostatic Procipitator) 등의 도입을 통해 문제해결을 위한 노력을 경주하고 있다.

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The Cracking Reaction of Vacuum Gas Oil on Mordenite Modified by HF and Steaming (불화수소산과 스팀처리한 모더나이트상에서 진공가스유의 분해반응)

  • Lee, Kyong-Hwan;Ha, Baik-Hyon
    • Applied Chemistry for Engineering
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    • v.7 no.5
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    • pp.925-937
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    • 1996
  • Three types of mordenites treated by steaming($SM_{6.5}$), HF solution for $SM_{6.5}(FM_a)$ and HF solutlon+steaming for $SM_{6.5}(FM_b)$ were prepared and used as cracking catalysts of vacuum gas oil. These samples were analysed by XRF and XPS for average and surface Si/Al atomic ratio, XRD for unit cell constants, nitrogen adsorption/desorption for porosity, pyridine-IR for acidic properties. In comparison with three type samples, $SM_{6.5}$ had a lot of acid amount and showed micropore volume mostly(>85% to total volume). Dealuminated $FM_a$, compared with $SM_{6.5}$, was decreased a little in acid amount and improved for porosity. Also, $FM_b$ was decreased further in acid amount and developed in mesopore dramatically. The catalytic activity and the yield of gasoline, kerosine+diesel and branched aromatic over the modified mordenites which have developed mesopore were improved. This is due to limited access of diffusion of large molecules within pore of the modified mordenites.

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내부순환유동층 반응기에서 수증기를 이용한 석탄가스화 연구

  • 전석구;이운재;김상돈
    • Proceedings of the Korea Society for Energy Engineering kosee Conference
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    • 1993.11a
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    • pp.42-45
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    • 1993
  • 내경 0.1 m 의 draft tube 를 갖는 직경 0.3 m, 높이 2.7 m 인 내부순환유동층 가스화반응기에서 호주산 준 역청탄을 공기와 수증기를 사용하여 가스화 하였다. draft tube에 공기를 주입하여 연소반응, annulus 구역에 수증기를 주입하여 가스화하여 연소반응에서 생성된 열을 annulus 에 공급하였다. 반응기온도와 석탄주입량에 따라 H$_2$, CO 및 발열량이 증가하였으나 공기의 유량증가에 따른 H$_2$, CO는 감소하고 $CO_2$ 는 증가하였으며 발열량은 감소하였다.

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Durability Evaluation Method of Handling Structure using Hand Calculation and Simulation (수계산과 해석을 이용한 핸드링구 내구성 평가 방법 고찰)

  • Cho, Sung-Min;Bang, Hyo-Jung;Kang, Byung-Ik
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.18 no.4
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    • pp.1-9
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    • 2019
  • Most product structural components are assembled by various members and castings except casting products. In such cases, a particular structure is required to move and fix each component. In particular, the safety uncertainty of heavy product assemblies can be linked to large accidents. Thus, the safety design and evaluation of additional structures have become more important. In the field and factories, these additional structures are called handling structures, which are designed and manufactured. As the types of products produced become more diverse, the design and manufacture of a handling structure are also diversified. The results of each evaluation should be derived. We develop a logical design and evaluation method, which was previously designed based on empirical data, for the handling structure.

Research of Dry Reduction Process of Waste Tin Oxide using Methane (메탄가스를 이용한 폐주석산화물의 건식환원시스템)

  • Hyun-Chul Jung;Se-Kwon Kim;Sang-Yeol Kim
    • Resources Recycling
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    • v.31 no.6
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    • pp.18-24
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    • 2022
  • Dry reduction using natural gas was proposed to recover tin from waste tin oxide generated in a tin bath that was used for controlling the smoothness of architectural glass during production, and the reduction behavior was investigated. The utilized vertical natural gas dry reduction system is capable to process 4 L or 20 kg depending on input raw materials. The system was established by applying the upper intake and lower discharge method. The recovery rate was 97.2% at 800 ℃ and 4 sccm flow rate and increased with the amount of input gas. Hydrogen accounted for 23% of the discharge gas, showing a 16.6% hydrogen conversion rate. The reaction behavior of tin recovered via natural gas reduction provides basic data on the new waste resource reduction/recovery technology.

Overall Study for the Imports Storage and Usage of the Liquefied Petroleum Gas (L.N.G) (No.2 the form of the encerprise of the L.N.G. project) (액화천연가스의 수입저장이용에 관한 종합적 조사연구 (그의 2 액화천연가스의 기업형태))

  • 나윤호
    • Journal of the Korean Professional Engineers Association
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    • v.12 no.3
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    • pp.12-17
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    • 1979
  • The form of the Enterprise of the L.N.G project Consists of such three enterprises that the Construction and operation of the liquefcation plant of the Natural gas, and L.N.G. tankers Operating enterprise and the receiving and storaging plant of the L. L.N.G., above mentined three enterprises Concerned with capital and technique mutually, and so it arises such results that the foundmental requirements of the fuel the long-term and safty-price suply of the L.N.G. are met.

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Effect of Organic Acids on Suppression of Fishy Odor in Salted Clam Pickle (유기산에 의한 조개젓 비린내 억제효과에 관한 연구)

  • Lee, Young-Eun;Rhee, Hei-Soo
    • Korean Journal of Food Science and Technology
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    • v.14 no.1
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    • pp.6-10
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    • 1982
  • To investigate the effect of organic acids on suppression of fishy odor, the change of the odor and the remaining amount of trimethyamine (TMA), selected as the representative component of fishy odor in clam pickle (15.5% NaCl) were examined by sensory evaluation and gas chromatography. The fishy odor linearly decreased as the amount of vinegar increased at ${\alpha}=0.01$, but there was no significant difference of fishness score for the changes of storage period and kinds of acid. Overall acceptability score was found to be the best when 8 ml vinegar added to 100g clam pickle. The remaining amount of TMA showed the tendency to decrease as the amount of acetic acid and storage time increased and kinds of acid were changed in order of acetic, malic and citric acid. However when $4\;{\mu}l/ml$ acetic acid (=8 ml vinegar/100g clam pickle) was added, the percentage of the remaining amount of TMA showed little decrease from about 95% for 72 hours of storage time. From the results of sensory evaluation and gas chromatography, it was considered that acids have the effect on suppression of fishy odor by producing non-volatile salts by combining with TMA chemically and that the effect of acids on suppression of fishy odor is mainly due to the masking effect at the concentration commonly used.

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