• Title/Summary/Keyword: 사각형 빔

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Wet-etching Properties of GaAs Using $NH_4OH-H_2O_2-H_2O$ Mixed Solution and Its Application to Fabrication Method for Released GaAs Microstructures with Rectangular Cross Section ($NH_4OH-H_2O_2-H_2O$ 혼합액을 이용한 GaAS의 습식식각 특성 연구 및 이를 이용한 부유된 사각형 단면을 가지는 GaAs 미세구조물의 제작 방법)

  • Kim, Jong-Pal;Park, Sang-Jun;Paik, Seung-Joon;Kim, Se-Tae;Koo, Chi-Wan;Lee, Seung-Ki;Cho, dong-Il
    • Journal of Sensor Science and Technology
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    • v.10 no.5
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    • pp.304-313
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    • 2001
  • In this research, we investigate wet-etching properties of GaAs in $NH_4OH-H_2O_2-H_2O$, and develop the fabrication method of GaAs microstructures with rectangular cross section using (001) GaAs substrate. For obtaining wet-etching properties with respect to crystallographic orientation, the etch rates and cross-section etch profiles of (001) GaAs with 16 different compositions and the undercut rates with 5 different compositions are measured using $NH_4OH-H_2O_2-H_2O$ mixed solutions. From these experimental data, a new GaAs micromachining method in bulk (001) GaAs is proposed, and used to fabricate a released microbridges with a rectangular cross section. The developed GaAs micromachining method can be very useful for low-loss, highly-tunable capacitors for RF components and for integration with GaAs optical components.

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Fabrication of an acceleration sensor using silicon micromachining and reactive ion etching (실리콘 마이크로머시닝과 RIE를 이용한 가속도센서의 제조)

  • Kim, Dong-Jin;Kim, Woo-Jeong;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.6 no.6
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    • pp.430-436
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    • 1997
  • A piezoresistive acceleration sensor for 30 G has been fabricated by silicon micromachining method using SDB(silicon direct bonding) wafer. The structure of the piezoresistive acceleration sensor consists of a seismic square pillar type mass and four beams. This structure was fabricated by reactive ion etching and chemical etching using KOH-etchant. The rectangular square structure is used in order to compensate the deformation of the edges due to underetching. The fabricated sensor showed a linear output voltage-acceleration characteristics and its sensitivity was about $88{\mu}V/V{\cdot}g$ from 0 to 10 G.

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Determination of Lattice Parameters and Observation of Lattice Misfits on Rene 80 Cast Blades (Rene 80 주조블레이드에서 격자상수의 결정 및 격자어긋남의 관찰)

  • An, Seong-Uk
    • Analytical Science and Technology
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    • v.6 no.5
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    • pp.515-520
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    • 1993
  • By the real use of Rene 80 cast blades at high temperature ${\gamma}^{\prime}$ precipitates in the matrix(${\gamma}$) mainly due to the operating temperature. These precipitates play main role for strenthening of the blades. Generally known that dislocation density increases due to ${\gamma}-{\gamma}^{\prime}$ mismatch by the generation and growth of the precipitates, because the lattice parameter of ${\gamma}^{\prime}$ is higher than that of ${\gamma}$. These lattice parameters of ${\gamma}$ and ${\gamma}^{\prime}$ are determined through the CBED(Convergent Beam Electron Diffraction) method by STEM(Scanning Transmission Electron Microscope) in this work. And also studied, whether and how much the dislocation density increases by the generation and growth of the precipitates.

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Research on the geographic characteristics of the sea bed and the distribution of artificial reefs in Saran Bay (자란만의 해저지형 및 인공어초의 분포 조사 연구)

  • 김승철;신현옥
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.37 no.3
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    • pp.214-222
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    • 2001
  • A precise echosounding system to investigate the topographical characteristics of the coastal fishing ground was composed of a public-DGPS receiver, a single beam echosounder and a survey software. To confirm the usefulness of the system, a set-net fishing ground and the distribution of artificial reefs were surveyed. The results obtained are as follows : 1. The 2-D positioning error of the public-DGPS receiver with a DGPS mode and a GPS mode was 5.47 m, 7.03 m, respectively. 2. The experimented set-net fishing ground was located on the level ground at the depth of 9-10 m, a small size valley 1-2 m deep and approximately 10 m wide was found at a distance of 120 m from the set-net to the south. 3. In the artificial reefs' water area near the Jaran Bay, it was confirmed that twenty rectangular artificial reefs were established by the piece at the depth of 15-25 m and a natural reef 5-8 m high on the sea bed was located near the group of artificial reefs. 4. It was confirmed that the precise echosounding system was a useful tool in the pre-study to choice an appropriate water area to provide the artificial reef.

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Sectorial Form UWB Antenna with a CPW-fed Uni-Planar (CPW 급전 단일 평면 부채꼴형 UWB 안테나 설계 및 제작)

  • Kim, Nam;Son, Gui-Bum;Park, Sang-Myeong
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.18 no.3 s.118
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    • pp.305-314
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    • 2007
  • In this paper, we suggested a CPW-fed UWB antenna with uni-planar sectoral structure. The area where radiation device face ground is designed to have the shape of tapered slot based on exponential function. We modified a rectangular bow-tie dipole structure antenna and thus formed a multi-resonant mode. From this, we expanded the impedance bandwidth and made a feature satisfying VSWR of less than 2 between $3.1\sim10.6GHz$. The test result showed that the return loss less than -10 dB was met in the full-band UWB system and maximum gain of $0.9\sim3.1dB$ was made with the half-power beamwidth of $40.1\sim89.9^{\circ}$ on XY plane(Theta, $Phi=90^{\circ}$) and the full band. By using CPW-fed structure with no ground on the back of the substrate, the suggested antenna is easy to design and its miniaturization is also possible.

Analysis for Torsion of Hollow Beam by Least Squares and Boundary Elements Method (최소자승법 및 경계요소에 의한 중공단면 보의 비틀림 해석)

  • Kim, Chi-Kyung;Bae, Joon-Tai
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.25 no.2
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    • pp.175-182
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    • 2012
  • In this paper we are concerned with the performance of structural stability of torsion in square cross section of a beam with holes. The critical load is defined as the smallest load at which the equilibrium of the structure fails to be stable as the load is slowly increased from zero. The beams subjected to torsion are frequently encountered in general structures and these forces influence to the stability of structure. The boundary element method is found to be very efficient and accurate for the analysis of torsion problems including complex boundary conditions with respect to its simplicity and generality. In this paper, it is required to derive the boundary element formulation for torsion problem and integrate directly on the discrete boundary. To investigate the validity of the developed computer program, three distinctly solid cross-sections which are elliptical, rectangular and triangular one are analyzed, and comparisons are made with analytical approaches where these can also be used.