• Title/Summary/Keyword: 빔거리

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대면적 표면처리용 1.55 m급 선형이온소스 개발 및 공정 기술 연구

  • Gang, Yong-Jin;Lee, Seung-Hun;Kim, Jong-Guk;Kim, Do-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.297-297
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    • 2013
  • 최근 각종 폴리머 및 강판과 같은 유연소재의 수요 증가로 인해 유연소재 표면의 전처리, 증착 및 기능성 부여를 위한 이온빔 또는 플라즈마 표면처리 기술이 세계적으로 활발히 연구개발 되고 있으며, 유연소재 표면처리 공정의 고속화 및 대면적화 기술이 요구되고 있다. 유연소재의 고속 및 대면적 표면처리 기술개발을 위해서는 Roll-to-Roll 공정에 적용 가능한 광폭 선형이온소스 기술 개발이 필요하다. 본 연구에서는 1.55 m급 광폭 Anode Layer 선형이온소스를 개발하였으며, 이온빔 인출 균일도 및 에너지 분포 특성을 평가하였다. 특히, 본 선형이온 소스 개발 시 시뮬레이션 연구를 통해 이온소소의 이온 인출 특성 및 내구성 향상을 위한 최적 구조를 설계하였다. 본 연구에서 개발한 선형이온소스는 최대 5 kV의 방전 전압 조건에서 평균 1.5 keV의 이온에너지를 가지는 Ar 이온빔이 1.55 m 폭에서 약 4.2%의 균일도를 보였다. 표면 처리 성능 평가시(Si wafer 기준) 소스와 기판과 거리 100 mm에서 에칭율은 15 nm/s였고, 이는 다른 표면처리 이온소스 대비 높은 효율을 나타냄을 확인할 수 있었다. 또한 4시간 이상 운전시에도 안정적인 인출 빔 전류 밀도를 확인하였으며, 소스 내부의 효율적인 냉각 구조로 인한 열손상은 발견되지 않았다.

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Development of Biotelemetry Method by Combining the SSBL Method and the Pinger Synchronizing Method (1) - Design and production of system - (SSBL 방식과 핑거동기 방식을 조합한 바이오텔레메터리 방식의 개발 (1) -시스템의 설계 및 제작 -)

  • 박주삼;고탁창언
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.39 no.3
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    • pp.218-229
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    • 2003
  • A new biotelemetry method that the installation and the treatment of equipment is convenient and the instantaneously detailed location of the fish attached the pinger is able to track comparatively easily was developed. The receiving system in this biotelemetry method was advanced for track the detailed behavior of the fish by the miniature tracking pinger, because it was a burden to fish to add the pinger with the water temperature and the pressure sensor. By combining of the super short base line (SSBL) method to detect the direction of pinger and the pinger synchronizing method to measure the range from receiving transducer to pinger, the three dimensional locations of fish to the receiving transducer is gotten instantaneously. The receiving system is devised to realize the high precision or wide detection range by application of the basic design method for receiving system of biotelemetry developed by the present authors and the hydrophone array configuration. The measurement distance error in the pinger synchronizing method is minimized through the correction of which the deviation of transmission pluse period of pinger is caused by changing water temperature. A prototype system which is able to track the instantaneously detailed location of the fish by the SSBL and pinger synchronizing biotelemetry (SPB) method was produced.

Beamforming Method for Target Range Estimation Using Near Field Shading Function (근거리 쉐이딩 함수를 이용한 표적 거리 추정 빔형성 기법)

  • Choi, Joo-Pyoung;Lee, Won-Cheol
    • The Journal of the Acoustical Society of Korea
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    • v.27 no.7
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    • pp.350-356
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    • 2008
  • In this paper, we propose shading functions to the appropriate focused beamforming for near-field target estimation. This near field shading functions are based on Chebychev and Manning windows. In order to obtain the optimum sensor weighting values with the help of the proposed shading technique, we assume that the sensor positions associated to the non-uniformly distributed array are precisely known. We calculate a series of sensor weighting values from the FFT operation of given shading functions in time domain. By applying the shading weights on the sensor array, we can see that the level of sidelobe becomes diminished and the performance of estimating range and azimuth gets improved. In addition, we propose a non-uniform structure in terms of frequency bands, which may minimize the attenuation of incoming signals.

Passive Range Estimation Based on Towed Line Array in Multi-Target Environment (다중 음원 환경에서의 수동 거리 추정)

  • 양인식;김준환;김기만
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2000.05a
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    • pp.367-370
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    • 2000
  • Various methods of enhancing the performance of passive range sonar arrays have been discussed, triangulation, wavefront curvature method etc. But they are not appropriate to the methods because of very low SNR in underwater environment. We made appropriate sub-arrays in a linear array and applied to the beamformers such as a minimum variance with null constraints.

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Millimeter Wave Energy Transfer based on Beam Steering (밀리미터파를 이용한 빔 조향 기반의 에너지 전송 기술)

  • Han, Yonggue;Jung, Sangwon;Lee, Chungyong
    • Journal of the Institute of Electronics and Information Engineers
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    • v.54 no.4
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    • pp.10-15
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    • 2017
  • Feedback burden of a full-digital energy beamforming, which is known as the optimal precoding scheme for radio frequency (RF) energy transfer, is huge because it uses a vector quantization for a channel feedback. To reduce the feedback burden, we consider a beam steering based wireless energy transfer, which uses a scalar quantization. Researches related to the beam steering based wireless energy transfer have been studied in special channel model with an assumption of full channel state information at the transmitter. In this paper, we analyze the beam steering scheme compared with the full-digital energy beamforming for practical channel models with channel estimation errors. According to characteristics of the millimeter wave channel, the number of antennas of the base station and the user, the distance between them, and channel estimation errors, we simulate the performance of the beam steering scheme and analyze reasons why.

Properties of $TiO_2$ thin films deposited by ion-beam assisted reactive magnetron sputtering (이온빔 보조 반응이온 마그네트론 스퍼터링으로 증착된 $TiO_2$박막의 특성)

  • 김성화;이재홍;황보창권
    • Journal of the Korean Vacuum Society
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    • v.11 no.3
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    • pp.141-150
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    • 2002
  • Titanium oxide thin films were deposited by DC reactive magnetron sputtering(RMS) with Ar ion-beam assistance using end-Hall ion source at low oxygen partial pressure and long target-to-substrate distance. The optical and structural properties of deposited films were investigated by the measurement of measured transmittance and reflectance, atomic force microscope(AFM), and X-ray diffraction(XRD). The results show that the Ax ion-beam assisted RMS for titanium oxide thin films induces the higher packing density, lower absorption, and smoother surface than the conventional RMS, suggesting that it can be employed in deposition of optical dielectric coatings.

스퍼터링으로 제조된 비정질 카본박막의 특성

  • 박형국;정재인;손영호;박노길
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.131-131
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    • 1999
  • 비정질 카본 박막은 다이아몬드와 유사한 높은 경도, 내마모성, 윤활성, 전기절연성, 화학적 안정성, 그리고 광학적 특성을 가진 재료로서 플라즈마 CVD를 이용한 합성방법으로 제조된 박막이 주로 연구되고 있다. 본 연구에서는 마그네트론 스퍼터링을 이용하여 다양한 조건의 카본 박막을 제조하였다. 카본 박막의 제조는 이온빔이 장착된 고진공 증착 장치를 이용하였고 시편의 청정시 사용된 이온빔의 조건은 빔 전압이 500V, 빔 전류는 0.1mA/cm2로 기판 청정을 거친 후 DC 마그네트론 스퍼터링을 이용하여 흑연을 증발시켜 박막을 제조하였다. 기판과 타겟의 거리는 13cm로 고정시킨 후 타겟 전류는 1A로 유지하면서 30분간 증착하였다. 기판은 Si-wafer와 glass를 주로 사용하였으며 기판 인가전압, 아세틸렌 유량, 기판 온도등을 변화시켜가면서 각각 카본 박막을 제조하였다. 비정질 카본박막의 막은 평균 두께는 0.4~1.2$\mu\textrm{m}$이며 SEM을 이용하여 단면의 성장구조를 관찰하였다. 라만 분광분석과 FTIR 분광분석을 통하여 비정질 카본 박막의 결합특성을 조사하였고 scratch tester를 이용하여 박막의 밀찰력을 관찰하였다. 제조된 박막의 두께는 아세틸렌 가스 이용시 1$\mu\textrm{m}$ 이상의 박막의 제조가 가능하였으며 카본 박막의 라만 분광특성은 고체 탄소 물질의 S와 G-peak으로 구성되어 있으며 기판 인가전압, 아세틸렌 가스 유량 변화에 따른 peak의 위치 이동 및 FWHM의 변화를 관찰하였다. RFIR 결과는 아세틸렌 가스의 유량이 증가에 따라 C-H 결합 분포가 증가며 기판 인가 전압이 증가할수록 C-H 결합분포가 감소하는 경향이 나타냈다. 이는 이온 충돌 효과에 따라 결합력이 약한 C-H 결합이 우선적으로 파괴되는 현상으로 생각되어 진다. Scartch tester 측정 결과 박막의 밀착력은 실험조건에 따른 경샹성은 보이고 있지 않으나 10N 정도이며 60N 이상의 강한 밀착력을 가진 박막도 제조되었다.

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Error Analysis of the Passive Localization Using Near-field Effect in the Sea (해양에서 근거리효과를 이용한 수동 위치추정 오차분석)

  • 박정수;최진혁
    • The Journal of the Acoustical Society of Korea
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    • v.20 no.6
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    • pp.75-81
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    • 2001
  • In this paper we analyzed the localization error of near-field detection algorithm in the sea. The near-field detection algorithms using triangulation and wavefront curvature basically assume a signal in two dimension of bearing and range. But the assumption causes localization error because there is three dimension of bearing, range, and depth in the sea. Even through three dimensional effect is considered, the localization error is occurred if multipath propagation in the sea is ignored. To analyze the localization error in the sea, we simulate the near-field localization using acoustic propagation model and focused beamforming considering wavefront curvature. The simulation results indicate that localization error always occurs in the sea and the error varied with sound velocity profile, water depth, bottom slope, source range, etc.

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A Virtual Array Design of 77 GHz Vehicle Radar for Detecting Moving Targets (이동표적 탐지를 위한 77 GHz 차량레이더용 가상배열 설계)

  • Kim, Doo-Soo;Hong, Dong-Hee;Joo, Jeong-Myeong;Yang, Jin-Mo;Lee, Sang-In
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.26 no.5
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    • pp.435-444
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    • 2015
  • This paper specifies on a virtual array design of a 77 GHz vehicle radar for detecting a moving target at a time division transmit and a near range. The virtual array designed reduces a hardware complexity, weight and price. However, a synthesized beam of the virtual array has a high side lobe by a phase distortion of receive signals when the moving target is detected at the time division transmit. For this, a subarray receive signal with a same phase is used and the side lobe of the synthesized beam is suppressed above at least 10 dB. Also the virtual array has a beam distortion by a spherical wave when the vehicle radar operates at near range. So a boresight receive signal of each target range is compensated at each receive signal. Therefore the synthesized beam with compensation recovers a normal main lobe and improves the side lobe about 10~15 dB.

A Study on the Near-Field Simulation Method for AESA RADAR using a Single Beam-Focusing LUT (단일 빔 집속 LUT를 이용한 AESA 레이다의 근전계 시뮬레이션 기법)

  • Ju, Hye Sun
    • Journal of the Korea Society for Simulation
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    • v.28 no.2
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    • pp.81-88
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    • 2019
  • Since the AESA radar scans and tracks a distant targets or ground, it requires a test field which meets far-field condition before flight test. In order to test beam foaming, targeting, and availability from cluttering and jamming, it is general to build a outdoor roof-lab test site at tens of meters high. However, the site is affected by surrounding terrain, weather, and noise wave and is also requires time, space, and a lot of costs. In order to solve this problem, theoretical near-field beam foaming method has proposed. However, it requires modification of associated hardware in order to construct near-field test configuration. In this paper, we propose near-field beam foaming method which use single LUT in order to calibrate the variation of TRM(transmit-receive module) which consists AESA radar without modification of associated hardware and software. It requires less costs than far-field test and multiple LUT based near-field test, nevertheless it can derives similar experimental results.