• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.123.1-123.1
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• 2013

반도체 공정에서는 사용하는 power source의 형태는 pulse-DC이다. Pulse-DC는 DC power에 비해 증착율이 좋고, 박막의 특성도 우수한 특성을 가진다. 이러한 장점에도 불구하고 pulse-DC나 DC power는 플라즈마 내 이온이 가지는 에너지가 크고, 이온화율도 낮다. 이러한 단점을 극복하기 위해 등장한 power source가 modulated pulsed power이다. Modulated pulsed power는 이온이 가지는 에너지가 DC power의 1/2 수준이며, 이온화율은 4배 이상 높은 특징을 가진다. 본 연구에서는 modulated pulsed power를 사용하여 Cr 박막을 Si wafer 위에 증착하여 박막의 특성을 관찰하였다. 연구에 사용된 power는 5 kV (800 V, 12.5 A), 20~120 KHz, 3 step까지 설정이 가능한 장비이며, base pressure $1.5{\times}10^{-6}$ Torr에서 실험이 진행되었고, 실험에 사용된 불활성 기체는 Ar을 사용하였다.

• Journal of Korean Society of Environmental Engineers
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• v.38 no.3
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• pp.144-149
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• 2016

The metal-impregnated activated carbon was produced from bamboo activated carbon by soaking method of metal nitrate solution. The carbonization and activation of raw material was conducted at $900^{\circ}C$. The specific surface area and pore size distribution of the prepared activated carbons were measured. Also, NO and activated carbon reaction were conducted in a thermogravimetric analyzer in order to use as de-NOx agents of used activated carbon. Carbon-NO reactions were carried out with respect to reaction temperature ($20^{\circ}C{\sim}850^{\circ}C$) and NO gas partial pressure (0.1 kPa~1.8 kPa). As results, the specific volume and surface area of bamboo activated carbon impregnated with copper were decreased with increasing Cu amounts of activated carbon. In NO reaction, the reaction rate of Cu impregnated bamboo activated carbon[BA(Cu)] was promoted to compare with that of bamboo activated carbon[BA]. But the reaction rate of Ag impregnated bamboo activated carbon[BA(Ag)] was retarded. Measured reaction orders of NO concentration and activation energy were 0.63[BA], 0.92[BA(Cu)], and 80.5 kJ/mol[BA], 48.5 kJ/mol[BA(Cu)], 66.4 kJ/mol[BA(Ag)], respectively.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.36 no.6
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• pp.560-567
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• 1991

Photosynthetic variation in field grown soybean [Glycine max (L.) Merr. cv Hodgson78］ was studied in relation to leaf anatomical variation. Variations in mesophyll morphology were accentuated by manipulating source and sink size. At R3 stage, two treatments were started: one was thinning and continu-ous debranching(6. 5 plants rather than 26 plants per m of row and remaining plants were debranched weekly), and the other was continuous partial depodding (allowing only one pod to develop at each mainstem node). Gas exchange characteristics, mesophyll cell volume and surface area per unit leaf surface, and microclimatic parameters were measured on the intact terminal leaflet at the 10th node. Observations were made 5 times with 3 to 4 day intervals starting R4 stage. Two models were used to compute leaf photosynthetic rates: one considered no effect of mesophyll morphology on photosynthesis, and the other considered potential effects of variations in mesophyll cell volume and surface area on diffusion and biochemical processes. Seventy nine percent of total photosynthetic variations observed in the experiment was explained by the latter, while 69% of the same variations was explained by the former model. By incorporating the mesophyll morphology concept, the predictability was improved by 14.6% in the field condition. Additional Index Words: photosynthesis model, leaf anatomy, Glycine max (L.) Merr., mesophyll surface area, mesophyll cell volume.

• Journal of Korean Society of Environmental Engineers
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• v.32 no.10
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• pp.936-941
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• 2010

This study was conducted to investigate formaldehyde removals by silver nano-particles attached on the surface of granular activated carbon (Ag-AC) and to compare the results to those obtained with ordinary activated carbon (AC). The BET analysis showed that the overall surface area and the fraction of micropores (less than $20{\AA}$ diameter) of the Ag-AC were significantly decreased because the silver particles blocked the small pores on the surface of the Ag-AC. The formaldehyde removal capacity of the Ag-AC determined using the Freundlich isotherm was higher than that of AC. Despite the decreased BET surface area and micropore volume, the Ag-AC had the increased removal capacity for formaldehyde, presumably due to catalytic oxidation by silver nano-particles. In contrast, the adsorption intensity of the Ag-AC, estimated by 1/n in the Freundlich isotherm equation, was similar to that of the ordinary AC, indicating that the surface modification using silver nano-particles did not affect the adsorption characteristics of AC. In a column experiment, the Ag-AC also showed a longer breakthrough time than that of the AC. Simulation results using the homogeneous surface diffusion model (HSDM) were well fitted to the breakthrough curve of formaldehyde for the ordinary AC, but the predictions showed substantial deviations from the experimental data for the Ag-AC. The discrepancy was due to the catalytic oxidation of silver nano-particles that was not incorporated in the HSDM. Consequently, a new numerical model that takes the catalytic oxidation into accounts needs to be developed to predict the combined oxidation and adsorption process more accurately.

• Journal of the Korean Chemical Society
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• v.46 no.3
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• pp.265-278
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• 2002

A concept test was administered to college students and teachers to identify their understanding of chemical equilibrium and equilibrium shift. The subjects were 53 freshmen in the General Chemistry class, 28 juniors in the Physical Chemistry class and 26 seniors from a university and 10 high school teachers in Seoul. Test items include the calculations of partial pressure and concentration of the gas in the mixture, the equilibrium constant cal-culation and the prediction of equilibrium shift when an inert gas is added to the gaseous reaction system, and the equilibrium concentration calculation and the prediction of equilibrium shift when water or common ion is added to the weak acid solution. The test was focused to identify whether the subjects can predict equilibrium shift using the reaction quotient change for the situations in which Le Chatelier principle is difficult to apply. The results showed that the achievements of teachers and juniors were significantly higher than those of freshmen and seniors. Many stu-dents had difficulties in predicting equilibrium shift using the reaction quotient while they could calculate partial pres-sure and concentration for the same situation. It means they are lack of conceptual understanding of chemical equilibrium shift.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.213-216
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• 2009

WGS(Water Gas Shift)반응은 일산화탄소(CO)를 이산화탄소($CO_2$)로 전환하는 반응으로 일체형 수소생산시스템의 실현을 위한 고순도 수소생산에 있어서 중요한 단계이다. WGS 반응은 열역학적 평형을 고려하여 고온전이반응(HTS: High Temperature Shift)과 저온전이반응(LTS: Low Temperature Shift) 두 단계 반응으로 진행된다. 두 단계 공정의 통합을 위해 낮은 온도에서 높은 활성을 갖는 WGS 반응용 촉매 개발이 필요하다. 최근 낮은 온도에서 높은 활성을 갖는 귀금속 촉매에 다양한 담체를 적용시킨 연구가 활발히 진행되고 있다. 선행 연구 결과, Ce-$ZrO_2$ 구조는 Ce/Zr 비에 따라 다양한 특성 변화를 관찰하였다. 따라서 낮은 온도에서 높은 활성을 갖는 WGS 반응용 촉매 제조를 위해 환원성 담체인 $CeZrO_2$에 Pt 을 담지시켜 성능을 평가하였다. 제조된 모든 담체는 공침법(Co-precipitation)으로 제조 하였으며 $500^{\circ}C$에서 6시간 소성하였다. 제조된 담체에 백금(Pt)을 함침법(Incipient Wetness Impregnate)으로 담지시켰다. 특성분석은 BET를 이용하여 표면적을 측정하였다. 촉매 반응 실험조건은 $200^{\circ}C{\sim}400^{\circ}C$ 온도범위에서 기체공간속도(GHSV: Gas Hourly Space Velocity) 45,000 ml/$h{\cdot}g-cat$ 으로 혼합가스($H_2$:60%, $N_2$:20%,$CH_4$:1%,CO:9%,$CO_2$:10%)를 흘려 반응 후 배출되는 가스를 Micro-Gas Chromatography 를 이용하여 측정하였다.

• Journal of Korean Society of Environmental Engineers
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• v.28 no.7
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• pp.770-775
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• 2006

Biofilters packed with various materials commonly show problems such as low performance and clogging in a long-term operation. Recently, a bioactive foam reactor(BFR) using surfactants has been suggested to ensure efficient and stable VOCs removal performance. This study was mainly conducted to investigate the feasibility of the BFR system using styrene as a model compound. An abiotic md a biotic tests were conducted to estimate a mass transfer coefficient($K_La$) and a specific substrate utilization coefficient(k) for the BFR, showing the rate of mass transfer was greater in the BFR than in other diffuser systems. A dynamic loading test also indicated that the performance of the BFR was stable under a shock loading condition. Furthermore, the maximum elimination capacity of the BFR was determined to be 109 $g/m^3/hr$ for styrene, which was much higher than those for biofilter systems generally reported in the literature. Overall, the experimental results suggest that the BFR be a potential alternative to the conventional packed-bed biofilters.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2000.04a
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• pp.16-16
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• 2000

충격파를 포함하는 초음속 유동을 해석하는 수치해법 중에서 많이 사용되어진 것은 엄밀 및 근사 리만 해법과 플럭스 분할 기법들로서 이들은 Euler 방정식에 기반을 두고 선형 또는 비선형파의 상호작용을 풍상 차분법으로 기술하는 방법들이다. 이러한 수치기법들은 과거 광범위하게 사용되어 왔으나 최근 여러 가지 단점이 발견되었다. 이와 같은 문제점을 극복하고자 입자의 통계적인 운동을 기술하는 기체 운동론에 근거하여 BGK 수치기법이 제시되었다. 이는 비충돌 볼츠만 방정식으로부터 입자의 수준에서 플럭스 분할 기법 형태의 풍상차분법을 구현하는 것으로 볼츠만 방정식의 충돌항을 BGK 모델로 대치하고 이것의 적분해로부터 수치 플럭스를 구한다. 이 수치기법은 기존의 리만해법에 비하여 수치적으로나 물리적으로 매우 타당한 성질인 강건성, 정확성, 엔트로피 조건, 양수보존성 등을 가지고 있음이 밝혀졌다. 이와 같은 수치기법을 사용하여 로켓 노즐 내의 아음속, 천이음속, 초음속에서의 유동장 해석을 위한 프로그램을 작성하였다. 시간 적분에 대하여는 정상 상태의 계산을 위하여 내재적 시간 적분 방법을 사용하였으며, 공간 이산화 방법으로는 임의의 제어체적에 대하여 적분형 보존 방정식을 적용하는 유한 체적법을 사용하였다. 초음속 입구 유동과 출구에서 초음속과 저음속 유동의 두가지 경우를 고려하여 얻은 결과를 기존의 연구 결과와 비교하여 본 결과 잘 일치하였다. 입구 유동이 저음속이고 출구 유동이 초음속인 경우에 대하여도 해석결과가 실험결과와 잘 일치하였다. 상대적으로 낮은 온도, 압력 조건과 높은 온도, 압력 조건을 가지는 고체 로켓 모터 노즐 내의 유동을 해석하였다. 이들 해석 결과를 전압, 전온도로 표준화시킨 결과 서로 일치하였으며, 파라서 저온, 저압에서 얻은 결과도 표준화시킬 경우, 고온, 고압에서도 사용될 수 있음을 알 수 있었다.의 영향에 초점을 맞추었다.다고 판단되며 배기 가스 자체에 대기 공기중에 함유되어 있던 습기가 얼어붙는(Icing화) 문제가 발생하기 때문에 배기가스의 Icing을 방지하기 위하여 압축기 끝단에서 공기를 추출하여 배기부분에 송출할 필요성이 있는 것으로 판단되었다. 출구가스의 기체 유동속도가 매우 빠르므로 (100-l10m.sec) 이를 완화하기 위한 디퓨저의 설계가 요구된다고 판단된다. 또 연소기 후방에 물을 주입하는 경우 열교환기 및 기타 부분품에 발생할 수 있는 부식 및 열교환 효율 저하도 간과할 수 없는 문제로 파악되었다. 이러한 기술적 문제가 적절히 해결되는 경우 비활성 가스 제너레이터는 민수용으로는 대형 빌딩, 산림, 유조선 등의 화재에 매우 적절히 사용되어 질 수 있을 뿐 아니라 군사적으로도 군사작전 중 및 공군 기지의 화재 그리고 지하벙커에 설치되어 있는 고급 첨단 군사 장비 등의 화재 뿐 아니라 대간첩작전 등에 효과적으로 활용될 수 있을 것으로 판단된다.가 작으며, 본 연소관에 충전된 RDX/AP계 추진제의 경우 추진제의 습기투과에 의한 추진제 물성 변화는 미미한 것으로 나타났다.의 향상으로, 음성개선에 효과적이라고 사료되었으며, 이 방법이 편측 성대마비 환자의 효과적인 음성개선의 치료방법의 하나로 응용될 수 있으리라 생각된다..7%), 혈액투석, 식도부분절제술 및 위루술·위회장문합술을 시행한 경우가 각 1례(2.9%)씩이었다. 13) 심각한 합병증은 9례(26.5%)에서 보였는데 그중 식도협착증이 6례(17.6%), 급성신부전증 1례(2.9%), 종격동기흉과 폐염이 병발한 경우와 폐염이 각 1례(2.9%)였다. 14) 식도경 시행회수는 1회가 17례(54.8%), 2회가 9례(29.0%), 3회 이상이 5례(16.1%)였다.EX>$IC_{50}$/ 값이 210 $\mu\textrm{g}$<

• Applied Chemistry for Engineering
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• v.9 no.2
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• pp.286-293
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• 1998

Two methods were used to enhance the adsorption capacity of activated carbons. One is to impregnate activated carbons with chemical compounds which have a good affinity for $CO_2$. The other is to activate by heat-treating after impregnation with KOH on activated carbons(AC). The chemical compounds impregnated on AC were alkali metal, alkaline earth metal, and transition metal chlorides. The adsorption capacity of $CO_2$ on AC impregnated with these metals was less than that of pure AC. These compounds have not the chemical affinity for $CO_2$ and obstruct the micropore of AC. The experiment of breakthrough for $CO_2$ on AC impregnated with KOH showed the increase of the adsorbed amount of $CO_2$ in influent gases containing water vapor. This means that KOH adsorbes $CO_2$ gas. However, the adsorbents impregnated with KOH had not the reproducibility because of the production of $K_2CO_3$ by the reaction of KOH with $CO_2$. The amount of $CO_2$ adsorbed on the heat-treated AC at $800^{\circ}C$ increased with the amount of impregnation. The adsorption capacity of $CO_2$ was the largest when the ratio of weight of KOH to AC equal to 4. The isosteric heat of adsorption was calculated by the equation of Clausius-Clapeyron form adsorption capacity data of $CO_2$ for the temperature change. In addition, the characteristics of $CO_2$ breakthrough curve were surveyed for the change of flow rate and concentration.

• Journal of Korean Society of Environmental Engineers
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• v.27 no.5
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• pp.468-475
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• 2005

Biofilters packed with various materials have emerged as a sustainable technology for the treatment of volatile organic compounds (VOCs); however, problems including low performance and clogging are commonly encountered. Recently, a bioactive foam reactor (BFR) using surfactants has been suggested to ensure efficient and stable VOCs removal performance. This study was mainly conducted to investigate the feasibility of BFRs using toluene as a model compound. Prior to bioreactor studies, a series of bottle tests were used to select a suitable surfactant for the BFR application. Experimental results of the batch bottle tests indicated that TritonX-100 was the most appropriate one among the surfactants tested, since it showed a minimal effect on the toluene biodegradation rate while the other surfactants lowered the toluene biodegradation rate significantly. Using the selected surfactant, the BFR performance was determined by changing operating parameters including gas residence time and toluene loading. As the gas residence time increased from 0.5 minutes to 2 minutes, the toluene removal efficiency increased from approximately 50% to 80%. In addition, an increase of the toluene loading from $38\;g/m^3/hr$ to $454\;g/m^3/hr$ resulted in a decrease of toluene removal efficiency from approximately 70% to 20%. The BFR had a maximum elimination capacity of $108\;g/m^3/hr$ for toluene, which was much higher than those generally reported in the literature. The high toluene-elimination performance indicates that the BFR be a potential alternative to the conventional, packed-type biofilters. However, the limitation of toluene solubilization and foam stability at either high or low gas flow rate are still problems to be challenged.