• Title/Summary/Keyword: 비증발형게터

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Study on the measurement of activation temperature of Non-Evaporable Getter (비증발형 게터의 활성화 온도 측정방법에 관한 연구)

  • Lee D. J.;Kim K. B.;In S. R.;Lim J. Y,;Kim W. B.
    • Journal of the Korean Vacuum Society
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    • v.14 no.1
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    • pp.1-6
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    • 2005
  • Getters are invariably covered with thin layers of oxides even in air. For the getter to function properly it is necessary to activate them by heating in vacuum during which the oxide layer is removed exposing clean surface. The so-called activation temperature is an important parameter along with gas sorption capacity since it determines the maximum temperature of a device in which a getter can be installed. Nevertheless, no standard method to measure activation temperature has been documented yet. In this study, a relatively simple method to measure the activation temperature based on the ultimate pressure measurement was suggested. The activation temperature of TiZrV alloy measured by the method was between 100℃~200℃.

Pumping Performance Test of the NEG Elements (비증발형 게터소자 배기특성 평가시험)

  • 인상렬;박미영;정기석
    • Journal of the Korean Vacuum Society
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    • v.13 no.2
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    • pp.47-53
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    • 2004
  • A getter pump test system is being developed as a core item of the national project for establishing the foundation of the vacuum technology in our country. A preliminary test system was prepared for developing the getter test procedure, and providing design requirements and system specifications before setting up the getter pump test system. The pumping speed and the pumping capacity of getter elements of low activation temperature used in the seal-off vacuum devices, for the hydrogen, carbon monoxide and nitrogen gases, were measured using the preliminary test system. The pumping characteristics of a domestic getter, developed mainly for the gas purifier, were compared with those of a foreign getter used widely in the lamp factories.