• Title/Summary/Keyword: 비정질화

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Characteristics of tungsten nitride films deposited by reactive sputtering method (Reactive sputtering 방법으로 증착된 W nitride 박막의 특성)

  • 이연승;이원준;나사균;이윤직;임관용;황정남
    • Journal of the Korean Vacuum Society
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    • v.11 no.1
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    • pp.22-27
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    • 2002
  • We investigated the crystal structure, resistivity, and chemical states change of the tungsten nitride $(WN_x)$ films prepared by reactive sputtering method with various $N_2$ flow ratios. Crystal structures of $WN_x$ films deposited at the $N_2$ flow ratios of 20%, 40%, and 60% were bcc $\beta$-W, amorphous, and fcc $W_2$N, respectively. Surface roughness of $WN_x$ film was smallest when the $WN_x$ film is amorphous. After the air exposure of $WN_x$ films, $WO_3$ layer was formed at the surface of all samples. Both the nitrogen content of $WN_x$ film and the binding energy of W $4f_{7/2}$ peaks increased with increasing $N_2$ flow ratio. However, after $Ar^+$ ion etching, the shift of W $4f_{7/2}$ peaks was not observed with $N_2$ flow ratio due to the amorphization of the $WN_x$ film surface. The resistivity of $WN_x$ films increased with increasing $N_2$ flow ratio.

Fabrication and structural observation of amorphous V-Co alloy by mechanical alloying (MA법에 의한 V-Co계 비정질합금의 제조 및 구조분석)

  • Lee, Chung-Hyo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.1
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    • pp.51-56
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    • 2012
  • In the present study, we investigated the effect of mechanical alloying (MA) on the formation of amorphous VCo system through solid state reaction during ball milling. Two types of powder samples, ${\sigma}$-VCo intermetallic compound and $V_{50}Co_{50}$ powder mixture, were applied as a starting materials. With increasing milling time, a structural characteristics into the amorphous state is distinctly observed from the structural factor and radial distribution by X-ray diffraction. Amorphization has been observed in all two types of samples after the milling for 120 hrs. DSC spectrum of $V_{50}Co_{50}$ powder sample milled for 60 hrs indicates a sharp exothermic peak from the crystallization at $600^{\circ}C$. The structure factor, S(Q) and radial distribution function, RDF(r), observed by X-ray diffraction gradually change into a structure characteristic of an amorphous state with increasing MA time.

Correlation between a Structural Change and a Thermoelectric Performance of a Glassy Carbon Thin Film Induced by Electron Beam Irradiation (전자빔 조사에 의한 유리상 탄소에서의 구조적 변화와 열전 성능의 상관관계)

  • Oh, Inseon;Jo, Junhyeon;An, Ki-Seok;Yoo, Jung-woo
    • Composites Research
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    • v.29 no.4
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    • pp.156-160
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    • 2016
  • Glassy carbon can be utilized in a variety of harsh environment due to exceptional thermal stability and chemically impermeability along with scalability and low electrical resistance. In this work, we studied effects of electron(e)-beam irradiation on thermoelectric properties of the glassy carbon film. E-beam irradiation triggered local crystallization and/or amorphization of glassy carbon thin films, which was determined by a Raman spectroscopy. The structural change by e-beam irradiation leads to the change in the doping level of the glassy carbon, which can be inferred from the change of a Seebeck coefficient and an electric conductivity. The optimal power factor we obtained for the irradiated glassy carbon film was ~200% higher than that of the non-irradiated sample.

Effect of Dry Grinding of Laterite on the Extraction of Nickel and Cobalt (라테라이트광의 건식분쇄가 니켈 및 코발트의 침출에 미치는 영향)

  • Kim, Wan-Tae;Choi, Do-Young;Kim, Sang-Bae
    • Journal of the Mineralogical Society of Korea
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    • v.23 no.3
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    • pp.227-234
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    • 2010
  • We investigated the effect of dry grinding of laterite on the extraction of nickel and cobalt. The major chemical compositions of the sample for this work were $SiO_2$, $Fe_2O_3$ and MgO. The sample contained 0.81% Ni and 0.02% Co. The major minerals of the sample were lizardite and quartz with minor amounts of forsterite and enstatite. The mean particle size, specific surface area and density of the ground sample decreased with increasing grinding time, while the amorphization of lizardite increased as identified by XRD analysis. The grinding enabled the extraction ratio of Ni and Co to increase by the breakdown of Mg-OH bonding in the lizardite structure. However, physical properties of quartz were not changed by grinding. The extraction ratio of Ni and Co increased with increasing grinding time. Approximately 80% of Ni and Co were extracted regardless of the kind of acid solutions when the sample was ground for 60 minutes.

The Study on the Electrical and Optical Properties of As-Se-Ge Chalcogenide Glasses (As-Se-Ge계 칼코게나이드 유리의 전기적.광학적 성질에 관한 연구)

  • 이명원;강원호;이기암;박창만
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.3 no.2
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    • pp.140-148
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    • 1993
  • In this study, the electrical and optical properties of amorphous, crystallization and thin film of As-Ge-Se Chalcogenide System was investigated. Typical composition of this material has $As_{20~50}Se_{40~70} and Ge_{10~40}$ at%. Materials having Se was fixed to 40 at% and As was above 30 at% much more increased the electrical conductivity. After crystallization at the temperature of $476^{\circ}C$ for 3 hour was showed the best electrical conductivity of 1.74E-13$(\Omega cm)^{-l}$. And the main crystalline phase of this sample can be investigated using the mixed crystalline, i.e, $GeSe_2 and As_2Se_3$ phases. The thin film shows the optical absorption coefficient in the range $2{times}10^3 to 7{times}10^4$ and the optical energy gap of 1.85eV.

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Structural determination of Fe-Zr-B-Ag Soft Magnetic Thin Films (Fe-Zr-B-Ag 연자성 박막의 제조 및 구조분석)

  • Min, B.K.;Lee, W.J.;Song, J.S.;Heo, J.S.;Kim, H.S.
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.1806-1808
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    • 2000
  • MHz영역에서 사용 가능한 Fe계 연자성 재료를 초미세 결정립으로 제조하기 위해 $Fe_{93}Zr_{3}B_4$ 박막을 기본조성으로 하여 Fe와 비고용이며 약반자성인 Ag 원소를 0, 3, 4, 5, 6, 10 at.% 첨가시킨 $Fe_{93-x}Zr_{3}B_{4}Ag_{x}$ 박막을 DC 마그네트론 스퍼터링법으로 제조하였다. 그리고, 300-600$^{\circ}C$ 온도 범위에서 1시간동안 열처리한 후 강제공냉법으로 냉각한 후 XRD를 이용하여 열처리 온도 및 Ag 첨가량에 따른 결정상 동정을 조사하였다. Ag가 첨가되지 않은 $Fe_{93}Zr_{3}B_4$ 박막의 경우 $\alpha$-Fe의 (110) 피크만 관찰되었다. Ag가 첨가된 경우에는, Ag의 양이 증가함에 따라 $\alpha$-Fe 결정상의 형성이 억제되고, 비정질형태의 broad한 ${\alpha}-Fe_{(110)}$ 피크와 Ag피크가 관찰되었다. Ag가 첨가된 As-deposited 시편을 열처리 할 경우 박막의 비정질화로 주 peak인 $\alpha$-Fe 피크의 강도가 현저히 낮아지고 상대적으로 Ag peak가 두드러졌다. Ag의 양이 3a/o인 경우는 열처리온도 400$^{\circ}C$이상에서 박막의 결정화로 $\alpha$-Fe Peak가 나타나고 상대적으로 Ag 구성원소의 피크의 강도는 현저하게 낮아졌다 또한. Ag의 양 증가할수록 As-deposited 박막 내에 Ag 구성원소외 피크의 강도는 증가하여 $\alpha$-Fe와 Ag가 서로 비고용 상태로 서로 혼재되어 있었다.

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Damage of Minerals in the Preparation of Thin Slice Using Focused Ion Beam for Transmission Electron Microscopy (투과전자현미경분석용 박편 제작 시 집속이온빔에 의한 광물 손상)

  • Jeong, Gi Young
    • Journal of the Mineralogical Society of Korea
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    • v.28 no.4
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    • pp.293-297
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    • 2015
  • Focused ion beam (FIB) technique is widely used in the precise preparation of thin slices for the transmission electron microscopic (TEM) observation of target area of the minerals and geological materials. However, structural damages and artifacts by the Ga ion beam as well as electron beam damage are major difficulties in the TEM analyses. TEM analyses of the mineral samples showed the amorphization of quartz and feldspar, curtain effect, and Ga contamination, particularly near the grain edges and relatively thin regions. Although the ion beam damage could be much reduced by the improved procedures including the adjustment of the acceleration voltage and current, the ion beam damage and contamination are likely inevitable, thus requiring careful interpretation of the micro-structural and micro-chemical features observed by TEM analyses.

A Study on the Magnetic Properties and Microstructures of Mn-Ir/Ni-Fe/Zr Muti layers with Various Compositions, Thicknesses and Base Pressures (Mn-Ir의 조성과 두께 및 초기진공도에 따른 Mn-Ir/Ni-Fe/Zr 다층막의 자기적특성과 미세구조 연구)

  • 노재철;최영석;이경섭;김용성;서수정
    • Journal of the Korean Magnetics Society
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    • v.9 no.3
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    • pp.166-172
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    • 1999
  • The magnetic properties between Mn-Ir antiferromagnetic layer and Ni-Fe ferromagnetic layer have been investigated in Mn-Ir/Ni-Fe/Zr on Si wafer formed by magnetron sputtering. Mn-Ir was sputtered from Ir chips and Mn target using D.C. power, Ni-Fe and Zr were deposited from Ni-Fe and Zr targets using D.C. power under Ar atmosphere. We studied the dependence of the magnetic properties on Ir content of Mn-Ir layer for Mn-Ir/Ni-Fe bilayer, and obtained the highest $H_ex$ of 219 Oe and the low $H_c$ of 30 Oe. And then focused on the effect of base pressure for Mn-Ir containing multilayers. Our experimental data showed that if the base pressure is higher than $3.0{\times}10^{-6}\;Torr$, the exchange anisotropy of Mn-Ir/Ni-Fe/Zr disappeared probably due to the grain refining of Mn-Ir film. In addition we have studied the dependence of Zr buffer on magnetic properties of Mn-Ir/Ni-Fe/Zr multilayers, and observed that Zr buffer about (111) texture and lower $H_c$ of Mn-Ir/Ni-Fe/Zr multilayer.

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Influence of thickness ratio and substrate bias voltage on mechanical properties of AlCrN/AlCrSiN double-layer coating (두께 비율과 기판 바이어스 전압이 AlCrN/AlCrSiN 이중층 코팅의 기계적 특성에 미치는 영향)

  • Kim, Hoe-Geun;Ra, Jeong-Hyeon;Lee, Sang-Yul;Han, Hui-Deok
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.162-162
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    • 2017
  • AlCrN 코팅은 높은 경도, 낮은 표면 조도 등의 상온에서의 우수한 기계적 특성 이외에 고온에서 안정한 합금상의 형성으로 인하여 우수한 내열성을 보이는 코팅이며, Si을 첨가하여 나노복합구조를 갖는 AlCrSiN 코팅은 고경도 특성을 나타내는 나노결정립과 고내열성을 나타내는 $Si_3N_4$ 비정질이 동시에 존재함으로써 뛰어난 고온 특성까지 보유하여 공구 코팅으로의 적용 가능성이 크다. 본 연구에서는, 가혹화된 공구사용 환경 대응 하는 더욱 우수한 내마모성 및 내열성을 보이는 코팅막을 개발하기 위해 AlCrN/AlCrSiN 이중층 코팅을 합성하였다. 합성된 코팅의 구조 및 물성을 분석하기 위해 field emission scanning electron microscopy(FE-SEM), nano-indentation, atomic force microscopy(AFM) 및 ball-on-disk wear tester를 사용하였다. 내열성을 확인하기 위하여 코팅을 furnace에 넣어 500, 600, 700, 800, 900도에서 30분 동안 annealing한 후에 nano-indentation을 사용하여 경도를 측정을 하였다. 5:5, 7:3, 9:1의 두께 비율로 AlCrN/AlCrSiN 이중층 코팅을 합성하였으며 모든 코팅의 두께는 $3{\mu}m$로 제어되었다. AlCrN 코팅층의 두께가 증가할수록, 이중층 코팅의 경도 및 내마모성은 점차 향상되었지만 코팅의 밀착력은 감소하였다. 일반적으로 AlCrN 코팅은 상대적으로 높은 잔류응력을 갖고 있으므로, AlCrN 층의 두께비율이 증가함에 따라 코팅내의 잔류응력이 높아져 코팅의 경도는 증가하고 밀착특성은 낮아진 것으로 판단된다. AlCrSiN 상부층 공정시 기판 바이어스 전압을 -50 ~ -200V 로 증가시키면서 이중층 코팅을 합성하였다. XRD 분석 결과, 공정 바이어스 전압이 증가함에 따라 AlCrSiN 상부층은 점차 비정질화 되었고, 코팅의 경도와 표면 특성이 향상되는 것을 확인하였다. 이러한 특성 향상은 높은 바이어스 인가가 이온 충돌효과의 증가를 야기시켰으, 이로 인해 치밀한 코팅층 합성에 의한 결과로 판단된다. AlCrN/AlCrSiN 이중층 코팅을 어닐링 한 후 경도 분석 결과, -150, -200V에서 합성한 코팅은 900도 이상에서 26GPa 이상의 높은 경도를 보인 것으로 보아 우수한 내열성을 갖는 것으로 확인 되었다. 이는 AlCrSiN 상부층의 높은 Si 함량 (11at.%) 으로 인한 충분한 $Si_3N_4$ 비정질상의 형성과, 고바이어스 인가로 인한 AlCrN 결정상과 $Si_3N_4$ 비정질상의 고른 분배가 코팅의 내열성을 향상시키는데 기여를 한 결과로 판단된다.

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Grinding Effects of Coal-Fired Pond Ash on Compressive Strength of Geopolymers (화력발전소 매립 석탄재의 분쇄가 지오폴리머의 강도에 미치는 영향)

  • Lee, Sujeong;Kang, Nam-Hee;Chon, Chul-Min;Jou, Hyeong-Tae
    • Resources Recycling
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    • v.23 no.6
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    • pp.3-11
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    • 2014
  • Bottom ash from coal fired power plants is not widely used due to a broad range of particle sizes and a high carbon content for producing geopolymers. The effect of mechanical activation on compressive strength of bottom ash- based geopolymers was examined by rod and planetary-ball milling to encourage full-fledged recycling of bottom ash, the main component of pond ash. The amount of amorphous component in the milled ash samples did not change significantly after the mechanical activation. It is presumably because needle-shaped mullite crystals, which is a major crystalline phase and grown in a glassy matrix, possess high strength and toughness, and therefore, they could endure external shocks and remain almost intact. Milling operation, however, decreased the particle size and improved the homogeneity of ash, thereby leading to increase reactivity of milled ash with alkali activators. Rod milling produced a relatively narrow particle size distribution of the milled ash particles; however, it was less effective in reducing the particle size. Nevertheless, it was interesting to observe that rod milling had equal effect on improving the compressive strength of geopolymers up to about 37%, as that of planetary ball milling. Rod milling is believed to be suitable process for enhancing the reactivity of bottom ash for large-scale recycling of bottom ash and producing geopolymers.