• Title/Summary/Keyword: 비배기성 오염물질

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SELF-PALSMA OES의 능동형 오염 방지 기법

  • Kim, Nam-Sik
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.82.1-82.1
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    • 2013
  • SPOES(Self Plasma Optical Emission Spectroscopy)는 반도체 및 LCD 제조 장비의 Foreline에 장착되는 센서로써, Foreline에 흐르는 Gas를 이온화시켜 이때 발생되는 빛을 분광시켜 공정의 상태 및 장비의 상태등을 종합적으로 점검할 수 있는 센서입니다. SPOES의 최대 장점은 공정 장비에 영향을 주기 않으면서 공정을 진단할 수 있고, 장비의 메인챔버에서 플라즈마 방전이 발생하지 않는 RPS (Remote Plasma System)등에 적용이 가능하며, 설치 및 분해이동과 운용이 용이한 장점이 있습니다. 하지만, SPOES는 오염성 가스 및 물질에 의한 오염에 취약한 단점이 있습니다. 예컨대, 플라즈마 방전에 의한 부산물들이 SPOES의 내부에 있는 윈도우의 렌즈에 부착되어 감도를 저하시켜, SEOES의 수명을 단축시킵니다. 또한 오염 물질이 SPOES 내부의 방전 CHAMBER에 증착되어 플라즈마 방전 효울을 저하시켜 센서의 효율을 저하시킵니다. 예를들면, 장비의 공정 챔버에서 배출되는 탄소와 같은 비금속성 오염물질과 텅스텐과 같은 금속성 오염물질이 SPOES의 방전 CHAMBER 내벽과 윈도우에 증착되어 오염을 유발합니다. 오염이 진행된 SPOES는 방전 CHAMBER의 오염으로 CHAMBER의 유전율을 변화시켜, 플라즈마 방전 효율의 저하를 가져오고, 윈도우의 오염은 빛의 투과율을 저하시켜, OES 신호의 감도를 저하시켜, SPOES 감도를 저하시키는 요인으로 작용합니다. 이러한 문제를 해결하기위한 방법으로 능동형 오염 방지 기술을 채용 하였습니다. 능동형 오염 방지 기법은 SPEOS의 방전 챔버에서 플라즈마 방전시 발생하는 진공의 밀도차를 이용하는 기술과 방전 챔버와 연결된 BYPASS LINE에 의해 발생되는 오염물질 자체 배기 시스템, 그리고 고밀도 플라즈마 방전을 일으키는 멀티 RF 기술 및 고밀도 방전을 일으키는 챔버 구조로 구성 되어 있습니다. 능동형 오염 방지 기법으로 반도체 공정에서 6개월 이상의 LIFETIME을 확보 할 수 있고, 고밀도 플라즈마로 인한 UV~NIR 영역의 감도 향상등을 확보 할 수 있습니다.

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Chemical Characteristics of Fine Particulate and Acidic Air Pollutants during Worldcup Game in Korea (월드컵기간 중 산성오염물질과 미세먼지의 화학적 특성에 관한 연구)

  • 장기석;김윤신;이종태;조용성;엽무종
    • Proceedings of the Korea Air Pollution Research Association Conference
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    • 2002.11a
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    • pp.308-309
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    • 2002
  • 대기오염의 주요발생원은 자동차 배기가스, 산업시설 발전소, 배경오염물질이다. 비차량 발생원, 질산화물, 일산화탄소, 차량으로부터 배출되는 일부 미세먼지들의 비교는 과거 30년에 걸쳐 사용되고 있는 전세계 차량의 증가 때문에 불균형하게 증가하였다. 대기질에 있어 인위적인 개선의 건강상 영향을 연구할 기회는 드물다. 월드컵기간동안 서울에서의 대기질 개선을 위한 노력의 일환으로 차량 2부제를 시행은 대도시 교통수단 변화의 영향을 연구할 기회를 제공하였다. (중략)

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선박 디젤엔진용 스크러버 시스템의 파일롯 실험 연구

  • Lee, Seong-Yeong;Park, Jae-Hyeon;Park, Chan-Do;Yang, Hui-Seong;Go, Jun-Ho;Song, Seok-Yong;Lee, Jae-U;Ryu, Seung-Ho;An, Gwang-Heon
    • Proceedings of the Korean Society of Marine Engineers Conference
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    • 2011.10a
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    • pp.44-44
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    • 2011
  • 디젤 엔진 배기가스 중의 황산화물(SOx)은 산성비의 원인이 될 뿐 아니라 인체에 대해서도 상당히 치명적인 위험을 초래하는 성분으로 지금까지는 다른 오염물질인 질소산화물 (NOx), 입자상 물질(particulate matter) 등에 비해서 상대적으로 덜 주목을 받아왔다. 국제적인 황산화물 배출규제의 경우, '황산화물 배출규제지역' (SECA : SOx Emission Control Area)에 대해 엄격한 배출규제가 시행되고 있는데, 대부분 황함량을 1.5%이하의 연료를 사용하거나, 후처리 설비를 설치해서 배기가스 중의 황산화물을 6.0g/kWh 이하로 유지하도록 규정하고 있다. 따라서 본 연구에서는 강화되고 있는 디젤엔진 배기가스 중의 황산화물과 입자상 물질을 저감하기 위한 설비로서, 높은 경제성 및 신뢰성 등의 장점으로 인해 선정 가능성이 가장 높은 스크러버 시스템에 대해 독자모델 설계를 수행하였으며 파일롯 설비를 활용한 실제 디젤엔진에 대한 실험을 통하여 운전조건에 따른 제거효율, 발생되는 처리수의 성분, 그리고 디젤엔진 운전에 영향을 미치는 압력손실 등에 대한 데이터를 확보함으로써 실제 선박적용에 대한 가능성을 확인하였다.

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Measurements of Diesel Particle Size Distribution Using an ELPI (ELPI를 이용한 디젤 입자상물질의 입경 분포 측정)

  • 김홍석;조규백;정용일;이상수;성낙원
    • Proceedings of the Korea Air Pollution Research Association Conference
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    • 2003.11a
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    • pp.75-76
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    • 2003
  • 본 연구는 ELPI(Electrical Low Pressure Impactor)를 이용하여 소형디젤기관에서 배출되는 입자상물질의 입경분포를 측정하였으며, 희석공기온도, 희석비, 측정위치가 측정에 미치는 영향을 고찰하였다. 본 연구에서는 배기량이 3000 cc인 간접분사식 소형디젤기관에서 발생하는 입자상물질의 입경분포를 고찰하고자 Dekati사의 ELPI를 사용하였다. 다단임팩터의 오염을 막기위해 ejector 형식의 2단 희석장치를 사용하였다.(중략)

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Characteristics of Flue Gas Using Direct Combustion of VOC and Ammonia (휘발성 유기 화합물 및 암모니아 직접 연소를 통한 배기가스 특성)

  • Kim, JongSu;Choi, SeukCheun;Jeong, SooHwa;Mock, ChinSung;Kim, DooBoem
    • Clean Technology
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    • v.28 no.2
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    • pp.131-137
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    • 2022
  • The semiconductor process currently emits various by-products and unused gases. Emissions containing pollutants are generally classified into categories such as organic, acid, alkali, thermal, and cabinet exhaust. They are discharged after treatment in an atmospheric prevention facility suitable for each exhaust type. The main components of organic exhaust are volatile organic compounds (VOC), which is a generic term for oxygen-containing hydrocarbons, sulfur-containing hydrocarbons, and volatile hydrocarbons, while the main components of alkali exhaust include ammonia and tetramethylammonium hydroxide. The purpose of this study was to determine the combustion characteristics and analyze the NOX reduction rate by maintaining a direct combustion and temperature to process organic and alkaline exhaust gases simultaneously. Acetone, isopropyl alcohol (IPA), and propylene glycol methyl ether acetate (PGMEA) were used as VOCs and ammonia was used as an alkali exhaust material. Independent and VOC-ammonia mixture combustion tests were conducted for each material. The combustion tests for the VOCs confirmed that complete combustion occurred at an equivalence ratio of 1.4. In the ammonia combustion test, the NOX concentration decreased at a lower equivalence ratio. In the co-combustion of VOC and ammonia, NO was dominant in the NOX emission while NO2 was detected at approximately 10 ppm. Overall, the concentration of nitrogen oxide decreased due to the activation of the oxidation reaction as the reaction temperature increased. On the other hand, the concentration of carbon dioxide increased. Flameless combustion with an electric heat source achieved successful combustion of VOC and ammonia. This technology is expected to have advantages in cost and compactness compared to existing organic and alkaline treatment systems applied separately.

Air Pollution and Its Effects on E.N.T. Field (대기오염과 이비인후과)

  • 박인용
    • Proceedings of the KOR-BRONCHOESO Conference
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    • 1972.03a
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    • pp.6-7
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    • 1972
  • The air pollutants can be classified into the irritant gas and the asphixation gas, and the irritant gas is closely related to the otorhinolaryngological diseases. The common irritant gases are nitrogen oxides, sulfur oxides, hydrogen carbon compounds, and the potent and irritating PAN (peroxy acyl nitrate) which is secondarily liberated from photosynthesis. Those gases adhers to the mucous membrane to result in ulceration and secondary infection due to their potent oxidizing power. 1. Sulfur dioxide gas Sulfur dioxide gas has the typical characteristics of the air pollutants. Because of its high solubility it gets easily absorbed in the respiratory tract, when the symptoms and signs by irritation become manifested initially and later the resistance in the respiratory tract brings central about pulmonary edema and respiratory paralysis of origin. Chronic exposure to the gas leads to rhinitis, pharyngitis, laryngitis, and olfactory or gustatory disturbances. 2. Carbon monoxide Toxicity of carbon monoxide is due to its deprivation of the oxygen carrying capacity of the hemoglobin. The degree of the carbon monoxide intoxication varies according to its concentration and the duration of inhalation. It starts with headache, vertigo, nausea, vomiting and tinnitus, which can progress to respiratory difficulty, muscular laxity, syncope, and coma leading to death. 3. Nitrogen dioxide Nitrogen dioxide causes respiratory disturbances by formation of methemoglobin. In acute poisoning, it can cause pulmonary congestion, pulmonary edema, bronchitis, and pneumonia due to its strong irritation on the eyes and the nose. In chronic poisoning, it causes chronic pulmonary fibrosis and pulmonary edema. 4. Ozone It has offending irritating odor, and causes dryness of na sopharyngolaryngeal mucosa, headache and depressed pulmonary function which may eventually lead to pulmonary congestion or edema. 5. Smog The most outstanding incident of the smog occurred in London from December 5 through 8, 1952, because of which the mortality of the respiratory diseases increased fourfold. The smog was thought to be due to the smoke produced by incomplete combustion and its byproduct the sulfur oxides, and the dust was thought to play the secondary role. In new sense, hazardous is the photochemical smog which is produced by combination of light energy and the hydrocarbons and oxidant in the air. The Yonsei University Institute for Environmental :pollution Research launched a project to determine the relationship between the pollution and the medical, ophthalmological and rhinopharyngological disorders. The students (469) of the "S" Technical School in the most heavily polluted area in Pusan (Uham Dong district) were compared with those (345) of "K" High School in the less polluted area. The investigated group had those with subjective symptoms twice as much as the control group, 22.6% (106) in investigated group and 11.3% (39) in the control group. Among those symptomatic students of the investigated group. There were 29 with respiratory symptoms (29%), 22 with eye symptoms (21%), 50 with stuffy nose and rhinorrhea (47%), and 5 with sore thorat (5%), which revealed that more than half the students (52%) had subjective symptoms of the rhinopharyngological aspects. Physical examination revealed that the investigated group had more number of students with signs than those of the control group by 10%, 180 (38.4%) versus 99 (28.8%). Among the preceding 180 students of the investigated group, there were 8 with eye diseases (44%), 1 with respiratory disease (0.6%), 97 with rhinitis (54%), and 74 with pharyngotonsillitis (41%) which means that 95% of them had rharygoical diseases. The preceding data revealed that the otolaryngological diseases are conspicuously outnumbered in the heavily polluted area, and that there must be very close relationship between the air pollution and the otolaryngological diseases, and the anti-pollution measure is urgently needed.

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Environmental Pollution in Korea and Its Control (우리나라의 환경오염 현황과 그 대책)

  • 윤명조
    • Proceedings of the KOR-BRONCHOESO Conference
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    • 1972.03a
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    • pp.5-6
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    • 1972
  • Noise and air pollution, which accompany the development of industry and the increase of population, contribute to the deterioration of urban environment. The air pollution level of Seoul has gradually increased and the city residents are suffering from a high pollution of noise. If no measures were taken against pollution, the amount of emission of pollutant into air would be 36.7 thousand tons per year per square kilometer in 1975, three times more than that of 1970, and it would be the same level as that of United States in 1968. The main sources of air pollution in Seoul are the exhaust has from vehicles and the combustion of bunker-C oil for heating purpose. Thus, it is urgent that an exhaust gas cleaner should be instaled to every car and the fuel substituted by less sulfur-contained-oil to prevent the pollution. Transportation noise (vehicular noise and train noise) is the main component of urban noise problem. The average noise level in downtown area is about 75㏈ with maximum of 85㏈ and the vehicular homing was checked 100㏈ up and down. Therefore, the reduction of the number of bus-stop the strict regulation of homing in downtown area and a better maintenance of car should be an effective measures against noise pollution in urban areas. Within the distance of 200 metres from railroad, the train noise exceeds the limit specified by the pollution control law in Korea. Especially, the level of noise and steam-whistle of train as measured by the ISO evaluation can adversely affect the community activities of residents. To prevent environmental destruction, many developed countries have taken more positive action against worsening pollution and such an action is now urgently required in this country.

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질화 및 Diamond-like Carbon (DLC) 동시처리가 가능한 장치 및 처리물의 특성평가

  • Bang, Hyeon-Bae;Park, Min-Seok;Sin, Chang-Seok;Jeong, U-Chang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.172-174
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    • 2011
  • 표면경도와 내마모특성을 가진 질화처리는 다양한 철강재료에 적용되고 있다. 플라즈마를 이용한 질화법은 다른 질화처리법에 비해 처리시간이 짧고 폐수 및 배기가스와 같은 오염물질의 발생이 거의 없어 친환경적이며 낮은 온도에서 처리가 가능하기 때문에 변형 및 금속학적 물성의 변화가 없는 것이 특징이다. 한편 DLC 처리법은 물리화학적 특성이 다이아몬드와 유사하면서도 저온 합성이 가능하고, 표면이 평활하다는 합성기술상의 장점을 가지고 있기 때문에 많은 분야에서의 응용이 연구되고 있는 재료이다. 특히 고경도, 고윤활성 등의 물리적, 화학적, 광학적 특성과 화학적 안정성과 신체적합성 등의 특성으로 인해 기계부품, 공구, 광학기기, 전자부품, 자동차부품과 의료용 기기분야 등에 적용하고 있다. 본 연구에서는 질화처리 및 DLC 처리를 한 챔버내에서 동시처리하여 그 특성을 평가하였다. 이와같이 얻어진 처리물을 Field Emission Scanning Electron Microscope를 이용하여 단면분석을 하였고, 시편의 경도는 나노인덴터로 측정하였다. ball-on-disk 방식의 마모시험기를 이용하여 내마모특성을 관찰하였으며, 접합력을 측정하기 위해 스크래치 테스트를 실시하였다.

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Catalytic Oxidation of Volatile Organic Compounds Over Spent Three-Way Catalysts (배기가스 정화용 폐 자동차 촉매를 이용한 휘발성 유기화합물의 제거)

  • Shim, Wang Geun;Kim, Sang Chai
    • Applied Chemistry for Engineering
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    • v.19 no.5
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    • pp.574-581
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    • 2008
  • The optimum regeneration conditions for the regeneration of three way spent catalysts (TWCs), which were taken from automobiles with different driving conditions, were investigated to evaluate the suitability as alternative catalysts for removing VOCs. The spent catalysts were washed with five different acids ($HNO_3$, $H_2SO_4$, $C_2H_2O_4$, $C_6H_8O_7$, and $H_3PO_4$) to remove contaminants and examine the optimum conditions for recovering the catalytic activity. The physicochemical properties of spent and its regenerated TWCs were evaluated by using nitrogen adsorption-desorption isotherms, XRD, and ICP. The relative atomic ratios of contaminants and platinum group metals (PGMs) of the spent TWCs were greatly dependent on the placed positions. The main contaminants formed were lubricant oil additives and metallic components. Also, the regeneration treatment increased the PGMs ratio, BET surface area, and average pore diameter of TWCs. The catalytic activity results indicated that the spent TWCs have the possibility for removing VOCs. Moreover, the employed acid treatments greatly enhanced the catalytic activity of the spent TWCs. Especially, nitric and oxalic acids provided the most improvement in the catalytic behavior. The catalytic activities of the regenerated TWCs were significantly influenced by the containing platinum ratios rather than the removal ratios of contaminants and the changes in the structural properties offered by the acid treatments.

A Study on Structure and Reactivity of Pt-Rh Bimetallic Catalysts (Pt-Rh 이원금속 촉매의 구조와 반응성에 관한 연구)

  • Kim, Young-Kil;Shin, Ki-Whan;Yie, Jae-Eui
    • Applied Chemistry for Engineering
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    • v.7 no.4
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    • pp.661-669
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    • 1996
  • Pt-Rh/NaY catalysts with various Pt/Rh ratios were prepared by an ion-exchange method and their characteristics were investigated by $^{129}Xe$-NMR and EXAFS. Both the $^{129}Xe$-NMR and EXAFS data indicate that the surface of PtRh bimetallic clusters was enriched with Rh atoms. The catalytic activities of these catalysts for conversion of CO, HC and $NO_x$ were measured by using simulated automobile engine exhausts under lean, rich and stoichiometric conditions. The Pt-Rh/NaY(Pt/Rh=1) catalyst exhibited the greatest reactive activity among the catalysts used in this study.

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