• Journal of Sensor Science and Technology
• /
• v.11 no.6
• /
• pp.350-357
• /
• 2002

Micro gas sensor with single electrode was proposed for improving stability and sensitivity. Generally, metal oxide gas sensors have two electrodes for heating and sensing. This fabricated new type sensor have only a single electrode by forming a sensing material onto heating electrode. Pt as a heating and sensing electrode was sputtered on glass substrate and a $SnO_2$ sensing material was thermally evaporated on Pt electrode. $SnO_2$ was patterned by lift-off process and then thermally oxidized in $O_2$ condition for 1 hr., $600^{\circ}C$. The size of fabricated sensor was $1.9{\times}2.1\;mm^2$. As a result of CO gas sensing characteristics, this sensor showed 100 mV change for 1,000 ppm and linearity for wide range($0{\sim}10,000\;ppm$) of gas concentrations. And the sensor shows a good recovery characteristics of 1% deviation compared to initial resistance.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.43 no.8 s.350
• /
• pp.13-18
• /
• 2006

[ $SnO_2$ ] and ZnO nanostructures were grown on the surface of thin film by heat treatment of metal Sn, Zn under Ar gas flow and $O_2$ at atmospheric pressure, respectively. The sensitivity of the $SnO_2$ thin film device on which grown nanowires to CO gas(5,000 ppm) was 50 % at the operating temperature of $200^{\circ}C$. In case of using Pt as catalysts, the sensitivity was enhanced and operating temperature was reduced(73 % at $150^{\circ}C$ ). The sensitivity of the ZnO nanorods device using Cu as catalysts to NOx gas was 90 % at the operating temperature of $200^{\circ}C$. It was found that the sensitivity to CO and NOx gases for the device on which grown nanostructures was much higher than those for general thin film device.

• Journal of the Korean Vacuum Society
• /
• v.7 no.4
• /
• pp.368-373
• /
• 1998

As device dimensions approach submicrometer size in ULSI, the demand for interlayer dielectric materials with very low dielectric constant is increased to solve problems of RC delay caused by increase in parasitic resistance and capacitance in multilevel interconnectins. Fluorinated amorphous carbon in one of the promising materials in ULSI for the interlayer dielectric films with low dielectric constant. However, poor thermal stability and adhesion with Si substrates have inhibited its use. Recently, amorphous hydrogenated carbon (a-C:H) film as a buffer layer between the Si substrate and a-C:F has been introduced because it improves the adhesion with Si substrate. In this study, therfore, a-C:F/a-C:H films were deposited on p-type Si(100) by ECRCVD from $C_2F_6, CH_4$and $H_2$gas source and investigated the effect of forward power and composition on the thickness, chemical bonding state, dielectric constant, surface morphology and roughness of a-C:F films as an interlayer dielectric for ULSI. SEM, FT-IR, XPS, C-V meter and AFM were used for determination of each properties. The dielectric constant in the a-C:F/a-C:H films were found to decrease with increasing fluorine content. However, the dielectric constant increased after furnace annealing in $N_2$atomosphere at $400^{\circ}C$ for 1hour due to decreasing of flurorine content. However, the dielectric constant increased after furnace annealing in $N_2$atmosphere at $400^{\circ}C$ for 1hour due to decreasing of fluorine concentration.

• Journal of Energy Engineering
• /
• v.19 no.4
• /
• pp.215-220
• /
• 2010

Hydrogen is a clean and efficient energy source and is expected to take an important role in future energy demand. A possibly good route to produce hydrogen is by using biomass and organic wastes as a source through thermo-chemical conversion technology. In this study, pyrolysis of wood Pellet(Oregon pine) has been carried out in batch type fixed-bed reactor in $N_2$ atmosphere during 20 minutes to determine the optimum hydrogen generating conditions. At the influence of temperature, hydrogen yield was increased with increasing temperature. For the influence of Steam/Biomass Ratio(SBR), hydrogen yield was increased by steam addition at low temperature condition. However, effect of steam addition was insignificant over at SBR = 1. The hydrogen yield was increased with increasing SBR at high temperature condition. From result of $H_2$/CO and $H_2/CH_4$ ratio, dominant reaction was steam reforming in this experimental condition. The optimum condition for hydrogen production was determined as follows: $H_2$ yield = 38.3 vol.% (56.01 L/min kg) at $900^{\circ}C$, SBR=3.

• Journal of Sensor Science and Technology
• /
• v.11 no.2
• /
• pp.77-83
• /
• 2002

In order to get low cost and portability, semiconductor gas sensor need to have low operating temperature and high sensitivity. $Fe_2O_3$ based sensors which were doped with metal oxide catalysts($MoO_3$, $V_2O_5$, $TiO_2$, and CdO) were fabricated by screen printing method. To improve electrical stability of sensors, the $Fe_2O_3$ sensors were annealed in $N_2$ at $700^{\circ}C$ for 2 hours. The $V_2O_5$ doped $Fe_2O_3$ sensor showed about $80{\sim}90%$ sensitivity at alcohol 1,000 ppm and have good selectivity to hydrocarbon gas and tobacco odors. The fabricated sensor and PIC-chip were employed for portable alarm system.

• Journal of the Korean Institute of Gas
• /
• v.20 no.6
• /
• pp.16-22
• /
• 2016

Coating pipe(PLP) has been generally used in buried site for protecting the corrosion. To prevent the damage by occurring the defect, other construction or execution works, an anti-oxidation environment was forcibly made by using protective potential. Coating and protective potential are applied simultaneously, but corrosion rate or defects are not easy to observe because soil composition has many uncertainty. Also, defect of coating pipe can not be directly observed. A corrosion coupon can easily measure a corrosion rate directly. The corrosion rate was measured with 6 scenarios using corrosion coupon during about 1 year(6 scenarios are based on soil type and protective potential or not in this research. Resultingly, the corrosion coupon has not occurred in the case of protected by potential current, but corrosion has occurred in a non-protected site. The corrosion rate was measured at least in the clay, and the propensity of corrosion rate was similar in other soil(sand and loams). The local corrosion has occurred in the clay because of high water content. On the other hand, general corrosion was occurred in sand and loams. Commonly, sand is not to corrosive soil. Although, corrosion occurred in sand can be estimated by chemical component and valid with chemical analysis report.

• Journal of the Korean Applied Science and Technology
• /
• v.34 no.2
• /
• pp.217-224
• /
• 2017

This is a study on the removal of nitrate nitrogen from wastewater by oxidation and reduction reaction of zinc in an acidic atmosphere. The optimum removal rate of nitrate nitrogen and the optimum pH were studied by controlling the amount of zinc and sulfamic acid. The oxidation efficiency was higher at pH 2.0 in the range of pH 2.0 ~ 4.0 because the reaction occurred more strongly in strong acidic atmosphere. It is advantageous to reduce the nitrate ion to the final nitrogen gas by adding the sulfamic acid to the sulfurous acid because it consumes less $H^+$ ion than when the sulfamic acid is not present. According to the same amount of zinc, nitrate nitrogen was removed by 46.0% while sulfamic acid was not added, whereas nitrite nitrogen was removed by 93.0% by adding sulfamic acid. In addition, In this experiment, zinc was prepared in powder form and its reactivity was larger than that of other common zinc metal, so the removal efficiency was very high, about 80.0%, within one minute after the reaction.

• Journal of the Korean Vacuum Society
• /
• v.6 no.3
• /
• pp.200-205
• /
• 1997

Surface of polyethylene film was modified by ion assisted reaction in which ion beam is irradiated on polymer in reactive gas environments. Ion (argon and oxygen) beam energy was 1 keV, doses were varied from $1{\times}10^{14}$ to $1{\times}10^{17}$ inons/ $\textrm{cm}^2$, and amount of blowing oxygen from 0 to 4 sccm(ml/min). Wettability was measured by water contact angle measurement, and the surface functionality was analyzed by x-ray photoelectron spectroscopy. The contact angles of water to polyethylene modified by oxygen ion beam only decrease from 95 to degrees, and surface energy was not changed much. The contact angles remarkably decrease to 28 degrees and surface energy increase to 67 erg/ $\textrm{cm}^2$ when the films were modified by argon ion with various ion doses with blowing oxygen gases near the polyethylene surface. Improvement of wettability and surface energy are mainly due to the new functional group formation such as C-O or C=O, which are known as hydrophilic groups from the XPS analysis, and the assisted reaction is very effective to attach oxygen atoms to form functional groups on C-C bond chains of polyethylene.

• Applied Chemistry for Engineering
• /
• v.17 no.5
• /
• pp.471-475
• /
• 2006

$VO_x$ thin films with the thickness of 450 nm were prepared on a $Pt/Ti/SiO_{2}/Si$ substrate at room temperature by a reactive radio frequency (rf) magnetron sputtering method. The deposition rates of $VO_x$ thin films were investigated as a function of $O_{2}$ concentration and rf power. As the $O_{2}$ concentration in a $O_{2}/Ar$ mixture increased, the deposition rate decreased. However, the deposition rate increased with increasing rf power. The deposited $VO_x$ thin films were annealed at $450^{\circ}C$ for 2, 4, and 6 h in $O_{2}$ and $N_{2}$ ambient. After annealing, the phase changes of $VO_x$ thin films were investigated using X-ray diffraction analysis. The plane and cross-sectional views of $VO_x$ thin films before and after annealing were observed by field emission scanning electron microscopy. The metal-insulator transition (MIT) properties of $VO_x$ thin films were measured using current-voltage measurement. The excellent MIT properties were observed in $VO_x$ thin films annealed in $O_{2}$ ambient.

• Korean Journal of Materials Research
• /
• v.10 no.11
• /
• pp.778-783
• /
• 2000

Effects of the $Al_2$O$_3$surface protective layer, deposited on the SnO$_2$sensing layer by aerosol flame deposition (AFD) method, on the sensing properties of SnO$_2$thin film ags sensors were investigated.Effects of Pt doping to the $Al_2$O$_3$surface protective layer on the selectivity of CH$_4$ gas were also investigated. 0.3$\mu\textrm{m}$ thick SnO$_2$thin sensing layers on Pt electrodes were prepared by R.F. magnetron sputtering with R.F. power of 50 W, at working pressure of 4mTorr, and at 20$0^{\circ}C$ for 30 min. $Al_2$O$_3$surface protective layers on SnO$_2$layers were prepared by AFD using a diluted aluminum nitrade (Al(NO$_3$).9$H_2O$) solution. The sensitivity of CO gas in the SnO$_2$gas sensor with an $Al_2$O$_3$surface protective layer was significantly decreased. But that of CH$_4$gas remained almost same with pure SnO$_2$gas sensor. This result shows that the selectivity of CH$_4$gas is increased because of the $Al_2$O$_3$surface protective layer. In the case of SnO$_2$gas sensors with Pt-doped $Al_2$O$_3$surface protective layers, low sensing property to CO gas and high sensing property to CH$_4$were observed. This results in the increasing of selectivity of CH$_4$gas selectivity are discussed.