• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.192-192
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• 2010

Transparent Conductive Oxides (TCO) 박막은 지금 까지 산업 전반에 걸쳐 많이 응용되어 사용되어지는 박막 중에 하나이다. 그대표적인 산업은 디스플레이 산업 중 평면디스플레이 산업에서 투명 전극으로 사용하는 LCD 및 터치패널에 사용되는 전극으로 사용되어져 왔다. 현재에는 솔라 셀의 전극 및 기판으로서의 응용이 많이 연구되어지고 있다. 이와 같은, 산업에서 사용되는 투명전극 재료는 낮은 전기적 특성 및 애칭특성이 우수하고 높은 광 투과도를 필요로 하고 있으며, 이러한 특성을 모두 만족하며 가장 우수한 물성을 나타내는 물질이 (Indium Tin Oxide) film이다. 하지만 Indium의 고갈과 희소성에 따른 고가라는 점의 문제로 인해 대체재료로써 부상되고 있는 ZnO의 연구가 활발히 진행되고 있다. 본 연구에서는 투명 전도성 산화물인 ZnO박막과 Al이 도핑된 AZO박막을 저온공정이 가능한 대향 타겟식 스퍼터링 방법(FTS)을 이용하여 산소가스 분압과 Al타겟에 인가되는 Current에 따른 박막의 전기적, 광학적 특성을 파악하여 적용여부에 대해 조사하였다. ZnO박막의 결정성은 유입되는 산소가스의 유량에 따라 증가하며 일정 영역이상에서는 감소하였다. 산소가스 유량이 1.2 sccm일 때 가장 높은 결정성을 얻었다. 또한 산소가스 유량을 1.2 sccm으로 고정시킨 후 Al타겟에 인가되는 Current에 변화를 주었을 때 0.5A에서 가장 낮은 비저항을 얻었다. ZnO박막의 미세구조는 Xray-diffraction method를 이용하여 측정하였고, 산소 분압에 따른 표면조도 분석을 위해 AFM을 사용하였고 Zn와 Oxide bonding의 화학적 분석을 위해 XPS를 이용하여 분석하였다. 또한 전기적 특성은 Hall measurement, 광 투과도는 UV-VIS Spectrometer를 이용하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.176-176
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• 2010

전자기술이 발전함에 따라 전자부품 소자는 소형화, 다기능화, 고집적화, 대용량화 되고 있다. 그에 따른 부품들의 고밀도화는 높은 열을 발생시켜 각종 전자부품을 기판으로부터 단락 시키거나 기능을 상실하게 하는 문제점이 발생된다. 이와 같은 문제점을 해결하기 위해서는 발생된 열을 가능한 빠르게 방열 시켜주는 것이 대단히 중요하고 높은 방열 특성을 가지는 금속 PCB기판의 중요성이 높아지고 있다. 하지만 금속을 PCB에 적용하기 위해서는 금속기판과 회로전극사이에 절연층이 반드시 필요하다. 본 실험에서는 RF-Magnetron Sputtering 방법을 이용하여 AlN(질화알루미늄)을 절연물질로 사용, Aluminum기판위에 후막을 제작하여 열적 전기적 구조적 특성을 분석 하였다. 스퍼터링시 아르곤과 질소 분압비에 따른 특성과 후막의 두께에 따른 열적, 전기적, 구조적 특성을 측정 분석하였고, 후열처리를 통하여 AlN 후막의 특성 측정 결과 $200^{\circ}C$로 후열처리 했을 경우 절연파괴전압이 후열처리 전 0.56kV보다 1.125kV로 높아지고 SEM 이미지 상의 AlN 입자 밀도가 더욱 조밀해지는 것으로 확인 하였다. 결론적으로 AlN를 RF-Magnetron Sputtering 방법으로 증착 금속 PCB의 절연물질로 적용하기 위해서는 적정한 가스분압비와 후열처리가 필요하며 이를 통하여 금속 PCB의 절연층으로 응용 가능성이 높을 것으로 사료된다. 본 연구는 한국 산업기술 진흥원의 사업화 연계 연구개발(R&BD)사업의 연구비 지원에 의한 것입니다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.178.1-178.1
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• 2013

산화물 반도체는 가시광선영역인 380~780nm에서의 투과율이 80% 이상이고, 3.2eV 이상의 밴드갭과 높은 이동도를 가지는 물질로 투명하고 휘어지는 디스플레이에 전도유망한 물질로 연구되고 있다. $10cm^2/V{\cdot}s$ 이상의 이동도를 확보하기 위해 IGZO에서 Ga대신 Sn을 첨가한 ITZO 산화물 반도체에 대한 연구가 되고 있다. 본 연구에서 ITZO 산화물 반도체 박막 증착 시 가장 중요한 특성으로 알려진 산소의 영향에 따른 광학적 특성을 알아보기 위한 실험이다. RF 마그네트론 스퍼터링을 이용하여 산소 가스 분압에 따라 ITZO 박막을 증착하였다. $(Ar+O_2)$의 합을 20으로 고정하고 $O_2/(Ar+O_2)$의 비율을 0~40%까지 가변하였고, $O_2$의 비율이 증가함에 따라 증착율은 감소하는 경향을 보였다. 투명 소자로서의 가능성을 판단하기 위하여 밴드갭과 투과도를 측정하였다. 광학적 밴드갭은 증착 시 산소 분압이 0%에서 40%로 증가할수록 3.46eV에서 3.32eV로 감소하였고, 또한 투과도가 가시광 영역(380~770nm)에서 87%에서 85% 감소하였다. In, Sn, Zn 의 금속 원자와의 결합 과정에서 산소의 빈자리가 줄어들어 전도도가 감소하여 광학적 밴드갭이 감소함에 따라 투과도가 감소하는 것을 확인하였다.

• Journal of the Korea Organic Resources Recycling Association
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• v.12 no.1
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• pp.49-57
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• 2004

The effect of gas sparging on continuous fermentative $H_2$ production was investigated using external gases ($N_2$, $CO_2$) with various flow rates (100, 200, 300, 400 ml/min). Gas sparging showed a higher $H_2$ yield than no sparging, indicating that the decrease of $H_2$ partial pressure by gas sparging had a good effect on $H_2$ fermentation. Especially, $CO_2$ sparging was more effective in the reactor performance than $N_2$ sparging. The composition of butyrate, the main metabolic product of $H_2$ fermentation by Clostridium sp., was much higher in $CO_2$ sparging. $H_2$ production increased with increasing flow rate only in $CO_2$ sparging. The best performance was obtained by $CO_2$ sparging at 300 ml/min, resulting in the highest $H_2$ yield of 1.65 mol $H_2/mol$ hexoseconsumed and the maximum $H_2$ production of 6.77 L $H_2/g$ VSS/day. Compared to $N_2$ sparging, there could be another beneficial effect in $CO_2$ sparging apart from lowering down the $H_2$ partial pressure. High partial pressure of $CO_2$ had little effect on $H_2$ producing bacteria but inhibitory effect on other microorganisms like lactic acid bacteria and acetogens which were competitive with $H_2$ producing bacteria.

• Tuberculosis and Respiratory Diseases
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• v.63 no.5
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• pp.423-429
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• 2007

Background: Alveolar recruitment (RM) is one of the primary goals of respiratory care for an acute lung injury (ALI) and acute respiratory distress syndrome (ARDS). The purposes of alveolar recruitment are an improvement in pulmonary gas exchange and the protection of atelectrauma. This study examined the effect and safety of the alveolar RM using pressure control ventilation (PCV) in early ALI and ARDS patients. Methods: Sixteen patients with early ALI and ARDS who underwent alveolar RM using PCV were enrolled in this study. The patients data were recorded at the baseline, and 20 minutes, and 60 minutes after alveolar RM, and on the next day after the maneuver. Alveolar RM was performed with an inspiratory pressure of $30cmH_2O$ and a PEEP of $20cmH_2O$ in a 2-minute PCV mode. The venous $O_2$ saturation, central venous pressure, blood pressure, pulse rate, $PaO_2/FiO_2$ ratio, PEEP, and chest X-ray findings were obtained before and after alveolar RM. Results: Of the 16 patients, 3 had extra-pulmonary ALI/ARDS and the remaining 13 had pulmonary ALI/ARDS. The mean PEEP was 11.3 mmHg, and the mean $PaO_2/FiO_2$ ratio was 130.3 before RM. The $PaO_2/FiO_2$ ratio increased by 45% after alveolar RM. The $PaO_2/FiO_2$ ratio reached a peak 60 minutes after alveolar RM. The Pa$CO_2$ increased by 51.9 mmHg after alveolar RM. The mean blood pressure was not affected by alveolar RM. There were no complications due to pressure injuries such as a pneumothorax, pneumomediastinum, and subcutaneous emphysema. Conclusion: In this study, alveolar RM using PCV improved the level of oxygenation in patients with an acute lung injury and acute respiratory distress syndrome. Moreover, there were no significant complications due to hemodynamic changes and pressure injuries. Therefore, alveolar RM using PCV can be applied easily and safely in clinical practice with lung protective strategy in early ALI and ARDS patients.

• Journal of Sensor Science and Technology
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• v.10 no.4
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• pp.222-231
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• 2001

The material properties of $SnO_2$ were investigated as a function of the amount of $Fe_2O_3$, the partial pressure of oxygen, the concentration of CO gas, and temperature. $Fe_2O_3$-doped $SnO_2$ thick films were prepared by the screen printing technique on alumina substrate. The specimens sintered at $700^{\circ}C$ for 6 hours showed little difference of the grain size and narrow distribution with the content of $Fe_2O_3$. The electrical conductance of undoped $SnO_2$ is high at low firing temperature and at low partial pressure of oxygen. The electrical conductance of $Fe_2O_3-$-doped $SnO_2$ is increased with measurement temperature, but decreased with the content of $Fe_2O_3$. The dependence of oxygen partial pressure is decreased with dopant addition. The highest sensitivity and the good properties of response speed and repeatability for CO gas were observed on the specimen with 0.1 mol% $Fe_2O_3$ at $350^{\circ}C$.

• Membrane Journal
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• v.22 no.2
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• pp.113-119
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• 2012

$YBaCo_2O_{5+{\delta}}$ oxide was synthesized by solid state reaction and a typical dense membrane has been prepared using as-prepared powder by unilateral pressing and sintering at $1,180^{\circ}C$. The $YBaCo_2O_{5+{\delta}}$ membraneswas analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM). XRD analysis showed the double layered perovskite structure was observed over $1,150^{\circ}C$ without impurities. Oxygen permeation was measured in the temperature range from 750 to $950^{\circ}C$ according to oxygen partial pressure difference between feed and permeation side. The oxygen permeation flux increased with increasing temperature and oxygen partial pressure and the maximum oxygen flux of $YBaCo_2O_{5+{\delta}}$ membrane with 1.0 mm thickness was about 0.15 mL/$cm^2{\cdot}min$ at $950^{\circ}C$ and $PO_2$ = 0.42 atm. The activation energy for oxygen permeation decreased with decreasing oxygen partial pressure to be 76.0 kJ/mol at the condition of $PO_2$ = 0.21 atm.

• KSBB Journal
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• v.17 no.3
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• pp.228-234
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• 2002

Acetobacter xylinum KJ1 efficiently producing bacterial cellulose(BC) In shaking culture was isolated from a rotten grape. The strain was used to investigate optimum operating conditions for increasing BC production and factorial design model was employed for the optimization. The results of experiments were statistically analyzed by SAS program. Reciprocal effects of each factors(carbon source concentration, shaking speeds(rpm), oxygen pressure, and CSL concentration) and culture condition of BC production were examined by getting regression equation of the dependent variable. Comparisons between experimental results and predicted results about BC concentration were done in total 24 experiments by combination of each factors using SAS program, and the correlation coefficients of BC concentration and BC yield were 0.91 and 0.81, respectively. The agitated cultures were peformed in various operation conditions of factors which affected considerably to BC production in jar fermentor. The results showed that BC concentration was 11.67 g/L in 80 hours cultivation under the condition of carbon source concentration : shaking speeds(rpm) : oxygen pressure : CSL concentration : 4% : 460 rpm : 0.28 : 6%. On the other hand BC yield was 0.42 g/g in 80 hours cultivation under the condition of carbon source concentration : shaking speeds(rpm) : oxygen pressure : CSL concentration : 4% : 564 rpm : 0.21 : 2%. The BC production could be enhanced up to more than 2.4 times by factorial design. The result of a verifying experiment under the optimal conditions determined by the factorial design to the BC production showed that the model was appropriate by obtaining BC concentration of 11.47 g/L in the optimum condition.

• Journal of the Mineralogical Society of Korea
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• v.16 no.1
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• pp.49-63
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• 2003

Rare and unusual occurrence of hydrothermal minerals were found in Geode mine area. They are developed in the late stage of hydrothermal alteration of earlier skarns and later by the open-space filling crystallization. The alteration of earlier skarns of clinopyroxene, garnet, and plagioclase formed mainly chlorite or sometimes uncommon hydrothermal minerals of prehnite, illite, and pumpellyite. Open-space filling crystallization characterized by hydrothermal minerals developedin open sapce or good are prehnite, pumpellyite, clinozoisite, illite, and Ca-zeolites of stilbite annstellerite. Mineral phases and paragenesis are examined in detail by microscopy, XRD, SEM, and EPMA. Using the Schreinemaker's method, equibrium reactions among these minerals are establishedand isothemal-isobaric phase diagrams of $\mu$$H_2O$-$\mu$$CO_2$cot are plotted. Hydrothermal minerals such asprehnite, pumpellyite, clinozoisite, illite, and some chlorite were ffrmed under high partial pressure of $CO_2$with relatively low $H_2$O fugacity. Later, stilbite and calcite in association with illite crystallized under relatively both high partial Pressure of $CO_2$and high $H_2$O fugacity.

• KSBB Journal
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• v.20 no.6
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• pp.408-412
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• 2005

In a previous research, it has been found that it could be possible to increase the partial pressure of hydrogen and hydrogen yield by scavenging the $CO_2$ from the heads pace of reactor. In this research, the positive and negative effects of the $CO_2$ scavenging especially on the fate of by-products were investigated by a batch experiment. Production and conversion of by-products had critical relationships with hydrogen evolution and consumption. The maximum hydrogen fraction in the headspace was increased from 66.4 to 91.2% by removing the $CO_2$ in the headspace and the degradation rate of glucose was also enhanced. The removal of $CO_2$ effectively hindered the homoacetogenesis but caused several negative phenomena. The degradation of ethanol, one of the main products, was inhibited by the high partial pressure of hydrogen and/or the absence of $CO_2$. Also it was observed that other by-products such as propionate, propanol, acetone, etc. could not be degraded further after produced from glucose. On the other hand, solventogenesis was not observed in spite of the high hydrogen partial pressure apart from previous researches and it might hinder the excess production of acetate, which could cause overall inhibition. From this research, it could be implicated that the $CO_2$ scavenging method could be recommended if the fermentation was purposed to produce hydrogen and ethanol.